Fabrication of Nanostructures

1. Fabrication of Nanostructures

3. Removing material from a larger structure of make smaller ones.

4. Etching

5. This is the one we will be talking about.

6. Bottom Up

7. Adding material to already small structures to create larger ones.

9. Scanning Tunneling Microscopy.

11. Typical features 20-50nm. As a result of back scattering of electrons.

13. The electron beam creates bonds in negative photoresist.

17. The tip is scanned across the sample.

18. The STM controller maintains a constant current and adjust the vertical position to do so.

20. Fabrication of Quantum-Dots using STM

22. Stresses occur as a result of the mismatch of crystal lattices between two different materials.