Mems ppt

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MICRO-ELECTRO-
MECHANICAL SYSTEMS
-THE FUTURE TECHNOLOGY, BUT TODAY’S
CHOICE
SUBMITTED BY:
Mukti

TABLE OF CONTENTS
1. INTRODUCTION
2. APPLICATIONS
3. ADVANTAGES AND DISADVANTAGES
4. CAD TOOLS USED FOR DESIGNING OF MEMS
...

1.INTRODUCTION
MEMS or Micro-Electro Mechanical System is a technique of
combining Electrical and Mechanical components t...

 Made up of components between 1 to 100 micrometers in
size
 Devices generally range in size from 20 micrometers to a
mi...

MEMS
Micro
actuators
Micro
sensors
Micro
electronics
Micro
structures

COMPARISON: IC’S VS. MEMS
MEMS
 3D complex structures
 Doesn’t have any basic building
block
 May have moving parts
 M...

WHAT IS A SENSOR?
 A device used to measure a physical
quantity(such as temperature) and
convert it into an electronic si...

BUT WHY MEMS FOR SENSORS?
smaller in size
have lower power consumption
more sensitive to input variations
cheaper due ...

2. APPLICATIONS
• A MEMS is a device that can be
implanted in the human body.
• MEMS surgical tools provide the
flexibilit...

• In automotives :
• As gyroscope:
Heavy use of mems is found in air
bag systems, vehicle security
system, inertial brake ...

• In microphones:
Micro-electro mechanical system (MEMS)
technology help projectiles to reach their
targets accurately.
• ...

3. ADVANTAGES AND
DISADVANTAGES
 Minimize energy and
materials.
Improved
reproducibility.
 Improved accuracy
and reliab...

4 DESIGN TOOLS :CAD
In MEMS technology, CAD is defined as a
tightly organized set of cooperating computer
programs that e...

COMMERCIALLY AVAILABLE
SOFTWARE
Coventorware from Coventor
http://www.memcad.com
IntelliSuite from Intellisense Inc. (Co...

EXAMPLE: INTELLISUITE
ADVANTAGES
• Design for manufacturability
– Fabrication database
– Thin-film materials engineering
–...

5. FABRICATION PROCESS
Deposition Patterning Etching
Physical Chemical Lithography Wet Dry
Photolithography
Electron beam ...

DEPOSITION
MEMS deposition technology can be classified in two
groups:
1. Depositions that happen because of a chemical re...

PATTERNING
 Patterning of MEMS is the transfer of a pattern into a
material.
 Lithography is a widely used process
 Exa...

L
i
t
h
o
g
r
a
p
h
y

ETCHING
 Etching is the process of using strong acid to cut the
unprotected parts of a metal surface to create a design i...

6. MANUFACTURING
TECHNOLOGIES
Bulk Micromachining
Surface Micromachining
High Aspect Ratio (HAR) Silicon
Micromachining

BULK MICROMACHINING
This technique involves the
selective removal of the
substrate material in order to
realize miniaturi...

SURFACE MICROMACHINING

LIGA PROCESS
 LIGA is a German acronym standing for lithography,
galvanoformung (plating) and abformung (molding).
Polym...

7. CHALLENGES
Design and
Packaging
Testing
Sensing Latching
Controllability Reliability

8. CONCLUSION
MEMS promises to be an effective technique of producing
sensors of high quality, at lower costs.
Thus we c...

9. REFERENCES
Christian A. Zorman, Mehran Mehregany, MEMS Design and
Fabrication, 2nd Ed. 2,16.
Ms. Santoshi Gupta, MEMS...

University of Stanford,
http://www.stanford.edu/group/SML/ee321/ho/MEMS-01-
intro.pdf
Trimmer, W.S., Micromechanics and ...

THANK YOU

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