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µ-Contact Printing System µCP2.1

short overview of the current status
GeSiM mbH, February 2008
µ-Contact Printing System µCP2.1
                    stamps with PDMS-membrane, scaled in the nm to µm range



          ...
µ-Contact Printing System µCP2.1
                              stamp in touch with glass slide



                        ...
µ-Contact Printing System µCP2.1
                          accessories top view




                                      ...
µ-Contact Printing System µCP2.1
                           µm- scaled stamps made in PDMS




Fig.1: 10µmx10µm PDMS-mesa ...
µ-Contact Printing System µCP2.1
                                                foot print of µCP2.1



 M 1: drive inkin...
µ-Contact Printing System µCP2.1
           system housing
µ-Contact Printing System µCP2.1
                         photographs of the real device



                              ...
µ-Contact Printing System µCP2.1
                                a video-microscope is implemented from below




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µ-Contact Printing System µCP2.1
   nano- and micro imprint on the same platform




                                µCP2....
µ-Imprinting with the System µCP2.1
                                     imprinting of thin polymer films




            ...
µ-Imprinting with the System µCP2.1
                           imprinting of spin coated photo restist films




Fig.3: Im...
µ-Contact Printing System µCP2.1
                                     µm- scaled stamps made in PDMS




Fig.5: µ-Contact-...
µ-Contact Printing System µCP2.1
                         µ-Contact-Printing and parallel shifts of the substrate


      ...
µ-Contact Printing System µCP2.1
    µ-Contact-Printing to transfer nano-particles




                                   ...
µ-Contact Printing System µCP2.1
                                    µm- scaled stamps made in PDMS




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µ-Contact Printing System µCP2.1
                                                 a first result




Fig.: The glass slide...
µ-Contact Printing System µCP2.1
  example of a possible nano-structure Silicon-master




                               ...
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µCp Description Eng

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microcontact printing technology overview and applications for small scale patterning using PDMS (polydimethylsiloxane)

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µCp Description Eng

  1. 1. µ-Contact Printing System µCP2.1 short overview of the current status GeSiM mbH, February 2008
  2. 2. µ-Contact Printing System µCP2.1 stamps with PDMS-membrane, scaled in the nm to µm range compressed air Stamp Chamber Stampholder Stamp Chamber Stampframe PDMS-Membran nm/µm Patterns a) Basic Mode: PDMS-membran planar b) Print-Mode: PDMS-membran deflected SEM picture Si-Master Master in Casting Staion Casting of PDMS-Stamp PDMS-Stamp µCP-Stamping Unit
  3. 3. µ-Contact Printing System µCP2.1 stamp in touch with glass slide PDMS-Stamp PDMS-Stamp frame not patterned 10µm lines, 20µm pitch PDMS - Stamp 1mm Slide Microscope a) scheme quot;PDMS-Stamp on Slidequot; b) photograph shows PDMS-Stamp and slide perfectly in touch, stamp area (1x1) cm² Remarks: The system µCP2.1 guarantees reproducible and perfect contact between the PDMS- stamp and the substrate. The USER of µCP2.1 has to develope the surface chemistry to transfere samples, nano- particles, molecules, bacteria, viruses or cells onto the biochip.
  4. 4. µ-Contact Printing System µCP2.1 accessories top view Stamp - Washing Station µCP-2.1 Accessories Stamp - Casting Station
  5. 5. µ-Contact Printing System µCP2.1 µm- scaled stamps made in PDMS Fig.1: 10µmx10µm PDMS-mesa structures, Fig.2: Donut structures, Ø 50µm, a view onto a view onto a real stamp surface a real stamp surface
  6. 6. µ-Contact Printing System µCP2.1 foot print of µCP2.1 M 1: drive inking M2: drive stamping M2 M1 N2-blow-dry Stamping- Unit Inking-Station Stamp1 Stamp2 Stamp3 Stamp4 Dry-Station Sample Pad Slide-Tray vernier drive in y-axis vernier drive in x-axis Top View µ-ContactPrinting System µCP2.1 Dimensions in total LxWxH= (42x40x35)cm³
  7. 7. µ-Contact Printing System µCP2.1 system housing
  8. 8. µ-Contact Printing System µCP2.1 photographs of the real device c b General View on µCP2.1 a • (a) inking station with 4 ink pads • (b) drying nozzles, two per stamp • (c) stamping unit
  9. 9. µ-Contact Printing System µCP2.1 a video-microscope is implemented from below Stamping Unit Slide Tray Microscope µCP2.1 mit Videomikroskop X-Y-Slide Tray and Stamp Head (currently the chassis is under develeopment, the visible one is a test approach only!)
  10. 10. µ-Contact Printing System µCP2.1 nano- and micro imprint on the same platform µCP2.1 with an UV-light source The commercial µCP2.1 will be equipped with a manually driven slider, which holds video-microscope and UV-source. As UV-light source we recommend a system from DELO GmbH Germany, for example the system DELOLUX 80.
  11. 11. µ-Imprinting with the System µCP2.1 imprinting of thin polymer films 40µm 50µm Fig.1: 1,0µm thick polymer film of an UV-active ink, Fig.2: 1,0µm thick polymer film of an UV-active ink, coated on a standard glass slide, structure was coated on a standard glass slide like fig.1, made by µ-imprinting using a PDMS-stamp, film lines width 20µm, pitch 40 µm thickness 2µm, lateral dimensions of the squares 25x25µm², the connecting lines are 2µm wide (Ink composition: 4-(2-[4-[2-[2-Cyanophenyl)-vinyl]- phenyl]-vinyl)-benzonitril, diluted with Tetrahydrofuran)
  12. 12. µ-Imprinting with the System µCP2.1 imprinting of spin coated photo restist films Fig.3: Imprinted photo resist AZ-4562, 8µm thick, on Fig.4: Imprinted photo resist AZ-1514, 0.5µm glass slide PDMS-Stamp: height of structures10µm, lateral thick on glass slide dimensions of the squares 25x25µm², the connecting PDMS-Stamp: like fig.3 lines are 2µm wide Method: like fig.3 Method: spin coating of a high viscous photo resist on a Remark: in picture 4 a status is shown, where glass slide, imprinting the PDMS-stamp into the wet the imprinted resist is not back etched by RIE resist, drying at RT without UV-radiation on air for 5min Remark: in pictures 3 a status is shown, where the imprinted resist is not back etched by RIE scale bare: 50µm
  13. 13. µ-Contact Printing System µCP2.1 µm- scaled stamps made in PDMS Fig.5: µ-Contact-Print on hydrophilic Fig.6: second contact print with the Fig. 7: third contact print with the same glass slide using an PDMS-stamp inked same stamp and method of fig.5 stamp and method of fig.5 without with a water based CY3-labeled buffer without nearly inking step nearly inking step solution, stamp area 1x1cm², the stamp pattern consists of thousands of squares and connecting lines (see the detail on the right), the stamp gets in contact with the slide approx. 1 min after the inking procedure 25x25µm² Quadrate Method: a) inking of PDMS-stamp for 1min, b) drying with compressed air 2 bar/30sec, c) stamp contact at 0,25bar stamp-pressure/ 60sec. contact time 2µm Stege
  14. 14. µ-Contact Printing System µCP2.1 µ-Contact-Printing and parallel shifts of the substrate Pattern: A=100 Ø A A Ø 2xA A A 2xA Fig. 8: µ-Contact-Print on hydrophilic glass slide Fig.9: µ-Contact-Print on hydrophilic glass slide using an using an PDMS-stamp inked with a water based PDMS-stamp inked with a water based CY3-labeled buffer CY3-labeled buffer solution, stamp area 1x1cm² Method: 2-STEP µ-Contact-Print with parallel shift of solution, stamp area 1x1cm² 600µm in the y-axis, Method: 2-STEP µ-Contact-Print with parallel shift of PDMS-stamp: squares and circles are 100µm for 1200µm in the y-axis parameter A (see detail drawing above) PDMS-stamp: squares and circles are 200µm for parameter Remark: µCP2.1 allows a manually x-y-shift in A (see detail drawing above) single steps of 500nm
  15. 15. µ-Contact Printing System µCP2.1 µ-Contact-Printing to transfer nano-particles Fig.11: µ-Contact-Printing of spherical gold nano- particles (Ø=37nm, diluted in water) on a hydrophilic glass slide, PDMS-Stamp: no O2- 3µm 8µm plasma treatment stamp-design consists of thousands of 8x8µm² mesa structures, which are 10µm high (see the detail in fig.11), the photograph was created by dark-field upright microscopy, nano-particle clusters appears in red Method: a) inking of the PDMS-stamp, for 60sec using 40µl of the nano-particle solution, b) drying of the PDMS-stamp with compressed air 2,0 bar/30sec, c) contact printing, stamp pressure 1,2 bar /contact time 60 sec
  16. 16. µ-Contact Printing System µCP2.1 µm- scaled stamps made in PDMS 25x25µm² Quadrate 2µm Stege Fig.12: µ-Contact-Printing of spherical gold nano-particles (Ø=37nm, diluted in water) on a hydrophilic silicon chip, PDMS- stamp is not O2-plasma treated, stamp-design consists of thousands 25x25µm² mesa structures connected with 2µm wide footbridges, the stamp pattern are 10µm high (see the detail in fig.12), the photograph was created by dark-field upright microscopy, nano-particle clusters appears in a light green Method: a) inking of the PDMS-stamp, for 60sec using 40µl of the nano-particle solution, b) drying of the PDMS-stamp with compressed air 2,0 bar/30sec, c) contact printing, stamp pressure 1,2 bar /contact time 60 sec
  17. 17. µ-Contact Printing System µCP2.1 a first result Fig.: The glass slide with poly-L-Lysin imprints made Fig.: The slide after a 19 hours cultivation of L929 cells. with a PDMS-stamp. The stamp carries donut-mesa Each donut reacts as an adhesion point for the cells. patterns wetted before with alginat. Ref.: M. Gepp, H. Zimmermann - IBMT-St.Ingbert and S. Howitz - GeSiM, Großerkmannsdorf, June 2007
  18. 18. µ-Contact Printing System µCP2.1 example of a possible nano-structure Silicon-master Approximated Master Price 4“- Silicon wafer with 10 master chips containing indically patterns 6.500,- k€

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