Automation A Reischl

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Short presentation of automation and logistic concept for PV thin and thick film solutions.

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Automation A Reischl

  1. 1. Innovation forum 11. Nov 2009 productronica 2009 Munich Future trends and challenges in PV production automation Hybrid cluster production concepts focusing on the requirements of the process equipments Dr. Andreas Reischl Product Manager Photovoltaics SCHILLER AUTOMATION GmbH & Co. KG Sonnenbühl 1 11 November 2009 © SCHILLER AUTOMATION 2009
  2. 2. Company profile ■ Founded in 1978 by Sieghard Schiller INTRODUCTION CONCEPT INLINE BATCH ■ 100% family-owned ■ 280 employees & 52 M€ turnover 2008 ■ Certified quality management DIN ISO 9001 ■ Management board • Stefan Schiller • Karl-Heinz Bahnmüller Services • Martin Speidel 11,2% • Hans-Peter Hennig Photovoltaics Thin Film • Herbert Höhn Microelectronics 17,8% 39,7% 31,3% Photovoltaics Cristalline 2 11 November 2009 © SCHILLER AUTOMATION 2009
  3. 3. Introduction: our experience INTRODUCTION CONCEPT INLINE BATCH SCHILLER Automation – know how incorporated in our Thin Film PV solutions Semiconductor Flat Panel Display Microelectronics Handling of Glass Substrates Stocker Management Logistic Concepts TF Process Automation Cleanroom Data Tracking Inline Concepts TF Photovoltaics upon these experience we have based our concept 3 15/12/09 11 November 2009 © SCHILLER AUTOMATION 2009
  4. 4. Outline INTRODUCTION CONCEPT INLINE BATCH Thin Film Solar FAB Automation ■ Introduction: Trends and challenges in PV production Our concept based on requirements ■ Inline logistics concept for FAB automation • Inline logistics schematic • Logistics components • Strength and weakness ■ Batch logistics concept • Batch Logistics schematic • Logistics components • Strength and weakness ■ Summary & Outlook 4 11 November 2009 © SCHILLER AUTOMATION 2009
  5. 5. Introduction: challenges INTRODUCTION CONCEPT INLINE BATCH Developments driven by costs to reach grid parity What can be done by the industry: ■ Standardization SEMI, VDMA, SECS/GEM ■ Process control like APC, MES ■ Scaling production Go Big – dilute fixed costs More concrete on the manufacturing side: ■ Higher yields Maximal utilization of the high CAPEX ■ Higher throughput higher productivity& utilization process equipments ■ Higher uptime Decrease cycle times and therefore cost effective This means on the automation side: ■ Integrated automation and logistic Advance logistics and ■ Flexibility for optimization means automation concepts ■ Fast ramping Collaboration between supplier and manufacturer ■ Integrated facilities Area space utilization: manufacturing & administrative Challenge: <1 $/Watt Supply materials: materials, power, gas & liquids 5 1115 December 2009 November 2009 © SCHILLER AUTOMATION 2009
  6. 6. Introduction: trends INTRODUCTION CONCEPT INLINE BATCH Output year concept example SCHILLER BackEnd 20 - 40 MW 2006 - 2007 inline Standard CR cell line inline junction / SCHILLER FrontEnd 60 - 75 MW 2007 - 2008 batch cluster Batch cluster cell production 120 - 150 MW 2008 - 2009 batch cluster SCHILLER FrontEnd ~ 500 MW > 2010 hybrid batch X-Lines SCHILLER Reduce cost by clever scaling: higher utilization Trend: Go Big! 6 11 November 2009 © SCHILLER AUTOMATION 2009
  7. 7. Introduction: our concept INTRODUCTION CONCEPT INLINE BATCH Automation a process between processes serving their requirements ■ Focus on requirements of process equipments, can be • Batch or inline processing • Times: cycle time, maintenance time, MTBF, … • Buffering: before and / or after process, I/O • Environment: temperature, clean room, … • Orientation: front in/out, sunny side up, short side leading ■ Focus on production plans • Fast projecting, fast ramp-up to mass production • Flexibility of production: # products, engineering lots, dummies … • Scalability: increase in production volume ■ Focus on cost of ownership • Maximal utilization of costly process equipments Automation the key technology in mass production 7 11 November 2009 © SCHILLER AUTOMATION 2009
  8. 8. Concepts INTRODUCTION CONCEPT INLINE BATCH Thin Film Solar FAB automation → Inline concept →Batch concept Process A Process B Euklid: Any two points can be joined by a straight line. 8 11 November 2009 © SCHILLER AUTOMATION 2009
  9. 9. Concept: inline overview BE INTRODUCTION CONCEPT INLINE BATCH Logistic Automation ■ Handling of substrates via Interface Automation • logistics automation and Process Equipment • Interface automation components • Data handling with common data base contacting Edge Foil lay-up isolation Edge marriage lamination trimming Junction box QC sorter setting Data Tracking / Line Controller 9 11 November 2009 © SCHILLER AUTOMATION 2009
  10. 10. Concept: inline BE INTRODUCTION CONCEPT INLINE BATCH possible layout details of automation Contact- Edge Foil ing Isolation Lay-up logistics Lamination Marriage Lamination I/O port Barcode Buffer Centering Edge Taping Trim- Junction ming Box QC Sorter 10 11 November 2009 © SCHILLER AUTOMATION 2009
  11. 11. Concept: inline logistics INTRODUCTION CONCEPT INLINE BATCH Logistic Automation Interface Automation Process Equipment automation components • Conveyor unit • Corner turn unit • Corner transfer unit 11 11 November 2009 © SCHILLER AUTOMATION 2009
  12. 12. Concept: inline logistics INTRODUCTION CONCEPT INLINE BATCH Logistic Automation Interface Automation Logistics automation: Process Equipment buffer ■ Buffer 100 substrates ■ Overhead logistics: possible to pass underneath ■ Optional cooling ■ Optional sensors ■ …. 12 11 November 2009 © SCHILLER AUTOMATION 2009
  13. 13. Metallization Line INTRODUCTION CONCEPT INLINE BATCH Typical inline example CR Tester & Sorter Laser for Edge Isolation Screen Printing Station 3 Screen Printing Station 2 Screen Option: Printing Accu / Buffer Station 1 Firing Furnace Single line with multiple lanes can reach up to 30 MW Dryer for Printing Six connected equipments: Stations Uptime limited 0.98^6 = < 89% 13 11 November 2009 © SCHILLER AUTOMATION 2009
  14. 14. SCHILLER Screen Printing INTRODUCTION CONCEPT INLINE BATCH Typical inline process: now with multiple (x3) printing to increase throughput and utilization by diluting fixed costs! 14 11 November 2009 © SCHILLER AUTOMATION 2009
  15. 15. Concept: inline INTRODUCTION CONCEPT INLINE BATCH Strength Weakness ■ Simple logistics ■ No flexibility due to fixed interconnections -> resulting in high uptime ■ Maintenance access difficult -> and cost advantages -> long ways ■ Work in process minimized ■ Difficult to add additional process tools -> expansion nearly impossible -> short substrate processing without interruption of production time (dwell time within production) ■ Buffer sizes and locations fixed ■ …. ■ Downtime of equipment will immediately have impact on FAB throughput ■ … 15 11 November 2009 © SCHILLER AUTOMATION 2009
  16. 16. Concepts INTRODUCTION CONCEPT INLINE BATCH Thin Film Solar FAB automation → Inline concept → Batch concept 16 11 November 2009 © SCHILLER AUTOMATION 2009
  17. 17. Concept: batch overview FE ■ Equipments are connected by INTRODUCTION CONCEPT INLINE BATCH • Common logistics automation and interface automation components Equipment Processes Incoming Glass Metrology Area Clusters Front Contact Back Contact Patterning #2 Patterning #3 Patterning #1 Deposition Deposition Deposition Absorber Cleaning QC Automation Interface 6-Axes Pro Load GEU+Pro 6-Axes GEU+Pro Pro Load GEU+Pro 6-Axes Man. Robot TF Load TF Robot Load TF TF Load TF Robot Interface Automation Logistic Logistic System Single Substrates / Batch Transfer Concept Base Data Data Tracking / Line Controller 17 11 November 2009 © SCHILLER AUTOMATION 2009
  18. 18. Concept: batch schematic INTRODUCTION CONCEPT INLINE BATCH I/O port CCH Central Cassette Handler buffer ProLoad 6-axis robot GEU cassette Additional Processes L L L C A A A L B B S S S Deposition NEW E C C E E E PIN Process A Metrology R R R N CCH CCH L L Deposition QC NEW F F F F A A B B C C PIN S S Process C C C C E E R R 18 11 November 2009 © SCHILLER AUTOMATION 2009 BE
  19. 19. Concepts: logistics INTRODUCTION CONCEPT INLINE BATCH Logistics automation →between clusters of process equipment 19 11 November 2009 © SCHILLER AUTOMATION 2009
  20. 20. Concept: cluster / batch INTRODUCTION CONCEPT INLINE BATCH Logistic Automation ■ Transport of cassettes with 20 substrates Interface Automation ■ Maximal length of 240 meter 120 MW Process Equipment ■ Serve left/right side on two levels (buffer) ■ Line Controller together with the cluster control ensures that the individual equipments are optimally utilized Flexible Cluster- Line production concept based on batch cassette logistic 20 11 November 2009 © SCHILLER AUTOMATION 2009
  21. 21. Concept: interface automation INTRODUCTION CONCEPT INLINE BATCH Interface automation →between process equipment and logistics 21 11 November 2009 © SCHILLER AUTOMATION 2009
  22. 22. Concept: interface automation INTRODUCTION CONCEPT INLINE BATCH Situation automation suppliers facing ■ Technology is defining substrate size ■ Technology is defining process equipment ■ Process equipment is defining requirements for interface automation: • Single substrate / batch-type processing • horizontal / vertical glass transfer • Inline same loading / un- position • Chemical processes / high temp processes • High throughput machines ■ Depending on requirements different solutions for interface automation will be 6-axis robots used for specific necessary loading applications for 22 process equipment 11 November 2009 © SCHILLER AUTOMATION 2009
  23. 23. Concept: interface automation INTRODUCTION CONCEPT INLINE BATCH Logistic Automation • ProLoad handles one (or more) substrates Interface Automation Process Equipment • Serves up to 4 processes from 6 cassettes over max. 12.5 meters distance Application Samples • GEU can exchange substrates in < 8 seconds ■ Loading of several Process Machines Logistic Interface Process ■ Buffer Concepts ■ Logistic interface Linear handling system for standard Process Equipment 23 11 November 2009 © SCHILLER AUTOMATION 2009
  24. 24. Concept: interface automation INTRODUCTION CONCEPT INLINE BATCH Logistic Automation Interface Automation Process Equipment Glass exchange unit (GEU) ■ Substrate exchange ■ Substrate centering ■ Substrate rotation ■ Option: • Quality control • ID tracking ■ … 24 11 November 2009 © SCHILLER AUTOMATION 2009
  25. 25. Concept: batch logistic INTRODUCTION CONCEPT INLINE BATCH Input cleaner Robots based handling Interface ports Robot to HQ cleaner ProLoad to GEU BackEnd Central cassette handling 25 11 November 2009 © SCHILLER AUTOMATION 2009
  26. 26. Source: Centrotherm: typical hybrid www.centrotherm.de INTRODUCTION CONCEPT INLINE BATCH ■ Sputter ■ Contacting ■ Flasher ■ CdS ■ Oven ■ Selene ■ Laser ■ Washer ■ Laminator 26 11 November 2009 © SCHILLER AUTOMATION 2009
  27. 27. Tester & Sorter for cluster concepts INTRODUCTION CONCEPT INLINE BATCH Features ■ I-V measuring ■ Throughput 3600 Wafer/h ■ IR testing during flasher operation to ■ Up-time > 95 % detect hot spots, shunts, non-isolating cells ■ Yield > 99,7 % ■ Color detection ■ Max. 2x 55 bins ■ Measuring of the print in detail ■ MTBF > 1000 h ■ Detection of all occurred defects as holes, stains, cracks, saw grooves and ■ MTTR < 4 h other outbreaks ■ State-of-the-art inspections ■ Measuring of dimensions, symmetry, angularity, etc. ■ Minimized contact forces ■ EL (Electro Luminescence) measuring while flashing prepared and as a special request available 27 11 November 2009 © SCHILLER AUTOMATION 2009
  28. 28. Layout TS 3600 INTRODUCTION CONCEPT INLINE BATCH Dual lane cluster with min. cycle time Tester Flexpicker Flexpicker HQE HQE HQE HQE Loader Sorter 28 11 November 2009 © SCHILLER AUTOMATION 2009
  29. 29. Concept: batch INTRODUCTION CONCEPT INLINE BATCH Strength Weakness ■ Expansion of production by ■ More complex => higher additional or modified process costs compared to inline tools possible concept ■ Easy service access to ■ WIP high => dwell time of process tools substrates within production high ■ Flexibility of substrate routing ■ sophisticated logistic system ■ Buffer sizes and buffer locations flexible ■ … ■ Short downtimes have minimal impact on yield With maximal equipment utilization ■ Handling of Dummy Substrates Now area and facility optimization possible Scaling multiples lines 29 11 November 2009 © SCHILLER AUTOMATION 2009
  30. 30. 480 MW integrated FAB INTRODUCTION CONCEPT INLINE BATCH Multiple lines in one FAB Scaling effects on Area utilization Facility utilization G. Rauter Photovoltaics International 5th Edition Lower CAPEX / Capacity Higher utilization Source: >20% improvements JPMorgan 2008 30 11 November 2009 © SCHILLER AUTOMATION 2009
  31. 31. Summary and outlook INTRODUCTION CONCEPT INLINE BATCH Summary ■ Shown the Schiller FAB automation concept ■ Best concept consist of • Maximal utilization of process equipment • Most reliable during projecting phase, ramp-up and production • Flexibility in production and engineering • Scalability and maintainability ■ Best solution considering all costs Outlook ■ Big FAB concepts scalability and synergy effects ■ Fully automated back-ends with minimal # operators ■ New logistics and automation concepts also for crystalline PV ■ ... 31 11 November 2009 © SCHILLER AUTOMATION 2009
  32. 32. INTRODUCTION CONCEPT INLINE BATCH Thank you for your attention Dr. Andreas Reischl SCHILLER AUTOMATION GmbH & Co. KG Pfullinger Strasse 58 72820 Sonnenbuehl-Genkingen Germany Tel +49 / 7128 / 386-5755 Fax +49 / 7128 / 386-299 info@schiller-automation.com www.schiller-automation.com 32 11 November 2009 © SCHILLER AUTOMATION 2009
  33. 33. Company INTRODUCTION CONCEPT INLINE BATCH Our profile ■ In almost 30 years, SCHILLER evolved into one of the most competent automation companies in the microelectronics business. ■ Our strength: Holistic consideration of all sorts of conceptual formulations ■ All from one source: Development Engineering Manufacturing Assembly Installation and start-up After sales support ■ SCHILLER is a 100% family-owned company. 33 11 November 2009 © SCHILLER AUTOMATION 2009
  34. 34. Company INTRODUCTION CONCEPT INLINE BATCH Our company structure Company Management Quality Management Customer Center Engineering Production Internal Services · Sales / Marketing · Mech./Electr. Engineering · Materials Administration · Controlling / PPS · Project Management · Software Engineering / Document. · Manufacturing · Admin · Customer Support · Research & Development · Assembly · Information Technology 34 11 November 2009 © SCHILLER AUTOMATION 2009
  35. 35. Company: facts & numbers INTRODUCTION CONCEPT INLINE BATCH Numbers & Facts ■ Foundation: 1978 ■ Management: Stefan Schiller Managing Director Karl-Heinz Bahnmüller Customer Center Martin Speidel Engineering Hans-Peter Hennig Production/Internal Services Herbert Höhn Key Account Manager ■ Certification : DIN ISO 9001:2000 35 11 November 2009 © SCHILLER AUTOMATION 2009
  36. 36. Company INTRODUCTION CONCEPT INLINE BATCH Our products SCHILLER is a leading supplier of production systems for manufacturing and handling of: ■ Microelectronics components, including power modules and controls & sensors for automotive applications ■ Photovoltaic products, including solar cell manufacturing and fab automation for thin- film solar cell manufacturing Moreover SCHILLER has know-how and experience in following fields: ■ Semiconductor products in all clean room classes ■ Flat panel displays ■ Data storage products ■ Smart card modules 36 11 November 2009 © SCHILLER AUTOMATION 2009
  37. 37. Company INTRODUCTION CONCEPT INLINE BATCH Our references 37 11 November 2009 © SCHILLER AUTOMATION 2009
  38. 38. Company INTRODUCTION CONCEPT INLINE BATCH Our strengths – the people at SCHILLER ■ ... with more than 2,500 man-years experience. ■ ... with analytical abilities/competency. ■ ... in interdisciplinary project teams. ■ ... with responsibility for costs, operations and target dates. ■ ... with passion for the common task. ■ ... create success! 38 11 November 2009 © SCHILLER AUTOMATION 2009
  39. 39. Core Competences INTRODUCTION CONCEPT INLINE BATCH Our core competences 39 11 November 2009 © SCHILLER AUTOMATION 2009
  40. 40. Core Competences INTRODUCTION CONCEPT INLINE BATCH Your benefit ■ Individual solutions ■ Proven modules ■ Automation solutions from one source ■ Lowest TCO ■ After Sales Service ■ Short start-up periode ■ Innovation 40 11 November 2009 © SCHILLER AUTOMATION 2009
  41. 41. Solutions INTRODUCTION CONCEPT INLINE BATCH Our solutions –success story of our customers ■ Microelectronics, Automotive, Power Module ■ Photovoltaics And ■ Semiconductor ■ Flat Panel Display ■ Data Storage ■ Smart Cards 41 11 November 2009 © SCHILLER AUTOMATION 2009
  42. 42. Photovoltaics INTRODUCTION CONCEPT INLINE BATCH ■ Customer specific automation systems for crystalline solar cell production Interlinking of process equipment Loading/Unloading of process equipment Customer specific QC lines Fully automatic stocker systems 42 11 November 2009 © SCHILLER AUTOMATION 2009
  43. 43. Photovoltaics INTRODUCTION CONCEPT INLINE BATCH ■ Customer specific automation systems for thin film solar cell production Loading/Unloading of process equipment Modular Schiller 5 axes handling system for glass substrates Cassette station Cassettes for substrates Stocker systems for cassettes and single substrates 43 11 November 2009 © SCHILLER AUTOMATION 2009

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