4th Production Equipment Conference Thin Film Schiller Reischl

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New integrated logistics and automation concept for mass production of thin film solar modules
Dr. Andreas Reischl
Product Manager Photovoltaics
SCHILLER AUTOMATION GmbH & Co. KG
Sonnenbühl
Automation a key technology focusing on the requirements of the process equipments
PTS Munich 5. March 20094thPV production equipment conference (tf)

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4th Production Equipment Conference Thin Film Schiller Reischl

  1. 1. PTS Munich 5. March 2009 4th PV production equipment conference (tf) New integrated logistics and automation concept for mass production of thin film solar modules Automation a key technology focusing on the requirements of the process equipments Dr. Andreas Reischl Product Manager Photovoltaics SCHILLER AUTOMATION GmbH & Co. KG Sonnenbühl 1 04/03/09 © SCHILLER AUTOMATION
  2. 2. Outline INTRODUCTION CONCEPT INLINE BATCH Thin Film Solar FAB Automation ■ Introduction • Our basic ideas for automation ■ Inline logistics concept for FAB automation • Inline logistics schematic • Logistics components • Comparison ■ Batch logistics concept • Batch Logistics schematic • Logistics components • Comparison ■ Summary & Outlook 2 04/03/09 © SCHILLER AUTOMATION
  3. 3. Company profile ■ Founded in 1978 by Sieghard Schiller INTRODUCTION CONCEPT INLINE BATCH ■ 100% family-owned ■ 280 employees & 52 M€ turnover ■ Certified quality management DIN ISO 9001 ■ Management board • Stefan Schiller • Karl-Heinz Bahnmüller Services • Martin Speidel 11,2% • Hans-Peter Hennig Photovoltaics Thin Film • Herbert Höhn Microelectronics 17,8% 39,7% 31,3% Photovoltaics Cristalline 3 04/03/09 © SCHILLER AUTOMATION
  4. 4. Introduction: our experience INTRODUCTION CONCEPT INLINE BATCH SCHILLER Automation – know how incorporated in our Thin Film PV solutions Semiconductor Flat Panel Display Microelectronics Handling of Glass Substrates Stocker Management Logistic Concepts TF Process Automation Cleanroom Data Tracking Inline Concepts TF Photovoltaics upon these experience we have based our concept 4 04/03/09 © SCHILLER AUTOMATION
  5. 5. Introduction: our concept INTRODUCTION CONCEPT INLINE BATCH Automation a process between processes serving their requirements ■ Focus on requirements of process equipments, can be • Batch or inline processing • Times: cycle time, maintenance time, MTBF, … • Buffering: before and / or after process, I/O • Environment: temperature, clean room, … • Orientation: front in/out, sunny side up, short side leading ■ Focus on production plans • Fast projecting, fast ramp-up to mass production • Flexibility of production: # products, engineering lots, … • Scalability: increase in production volume ■ Focus on cost of ownership • Maximal utilization of costly process equipments Automation the key technology in mass production 5 04/03/09 © SCHILLER AUTOMATION
  6. 6. Concepts INTRODUCTION CONCEPT INLINE BATCH Thin Film Solar FAB automation → Inline concept →Batch concept Process A Process B Euklid: Any two points can be joined by a straight line. 6 04/03/09 © SCHILLER AUTOMATION
  7. 7. Concept: inline overview BE INTRODUCTION CONCEPT INLINE BATCH Logistic Automation ■ Handling of substrates via Interface Automation • logistics automation and Process Equipment • Interface automation components • Data handling with common data base contacting Edge Foil lay-up isolation Edge marriage lamination trimming Junction box QC sorter setting Data Tracking / Line Controller 7 04/03/09 © SCHILLER AUTOMATION
  8. 8. Concept: inline BE INTRODUCTION CONCEPT INLINE BATCH possible layout details of automation Contact- Edge Foil ing Isolation Lay-up logistics Lamination Marriage Lamination I/O port Barcode Buffer Centering Edge Taping Trim- Junction ming Box QC Sorter 8 04/03/09 © SCHILLER AUTOMATION
  9. 9. Concept: inline logistics INTRODUCTION CONCEPT INLINE BATCH Logistic Automation Interface Automation Process Equipment automation components • Conveyor unit • Corner turn unit • Corner transfer unit 9 04/03/09 © SCHILLER AUTOMATION
  10. 10. Concept: inline logistics INTRODUCTION CONCEPT INLINE BATCH Logistic Automation Interface Automation Logistics automation: buffer Process Equipment ■ Buffer 100 substrates ■ Overhead logistics: possible to pass underneath ■ Optional cooling ■ Optional sensors ■ …. 10 04/03/09 © SCHILLER AUTOMATION
  11. 11. Concept: inline INTRODUCTION CONCEPT INLINE BATCH Advantages Disadvantages ■ Simple logistics ■ No flexibility due to fixed interconnections -> resulting in high uptime ■ Maintenance access difficult -> and cost advantages -> long ways ■ Work in process minimized ■ Difficult to add additional process tools -> expansion nearly impossible -> short substrate processing without interruption of production time (dwell time within production) ■ Buffer sizes and locations fixed ■ …. ■ Downtime of machines will immediately have impact on FAB throughput ■ … 11 04/03/09 © SCHILLER AUTOMATION
  12. 12. Concepts INTRODUCTION CONCEPT INLINE BATCH Thin Film Solar FAB automation → Inline concept → Batch concept 12 04/03/09 © SCHILLER AUTOMATION
  13. 13. Concept: batch overview FE ■ Equipments are connected by INTRODUCTION CONCEPT INLINE BATCH • Common logistics automation and interface automation components Equipment Processes Incoming Glass Metrology Area Clusters Front Contact Back Contact Patterning #2 Patterning #3 Patterning #1 Deposition Deposition Deposition Absorber Cleaning QC Automation Interface 6-Axes Pro Load GEU+Pro 6-Axes GEU+Pro Pro Load GEU+Pro 6-Axes Man. Robot TF Load TF Robot Load TF TF Load TF Robot Interface Automation Logistic Logistic System Single Substrates / Batch Transfer Concept Base Data Data Tracking / Line Controller 13 04/03/09 © SCHILLER AUTOMATION
  14. 14. Concept: batch schematic INTRODUCTION CONCEPT INLINE BATCH I/O port CCH Central Cassette Handler buffer ProLoad 6-axis robot GEU cassette Additional Processes L L L C A A A L B B S S S Deposition NEW E C C E E E PIN Process A Metrology R R R N CCH CCH L L Deposition QC NEW F F F F A A B B C C PIN S S Process C C C C E E R R 14 04/03/09 © SCHILLER AUTOMATION BE
  15. 15. Concepts: logistics INTRODUCTION CONCEPT INLINE BATCH Logistics automation →between clusters of process equipment 15 04/03/09 © SCHILLER AUTOMATION
  16. 16. Concept: cluster / batch INTRODUCTION CONCEPT INLINE BATCH Logistic Automation ■ Transport of cassettes with 20 substrates Interface Automation ■ Maximal length of 240 meter Process Equipment ■ Serve left/right side on two levels (buffer) ■ Line Controller together with the cluster control ensures that the individual equipments are optimally utilized Flexible Cluster- Line production concept based on batch cassette logistic 16 4 March 2009 © SCHILLER AUTOMATION
  17. 17. Concept: interface automation INTRODUCTION CONCEPT INLINE BATCH Interface automation →between process equipment and logistics 17 04/03/09 © SCHILLER AUTOMATION
  18. 18. Concept: interface automation INTRODUCTION CONCEPT INLINE BATCH Situation automation suppliers facing ■ Technology is defining substrate size ■ Technology is defining process equipment ■ Process equipment is defining requirements for interface automation: • Single substrate / batch-type processing • horizontal / vertical glass transfer • Inline same loading / un- position • Chemical processes / high temp processes • High throughput machines ■ Depending on requirements different solutions for interface automation will be 6-axis robots used for specific necessary loading applications for 18 process equipment 04/03/09 © SCHILLER AUTOMATION
  19. 19. Concept: interface automation INTRODUCTION CONCEPT INLINE BATCH Logistic Automation • ProLoad handles one (or more) substrates Interface Automation Process Equipment • Serves up to 4 processes from 6 cassettes over max. 12.5 meters distance Application Samples • GEU can exchange substrates in < 8 seconds ■ Loading of several Process Machines Logistic Interface Process ■ Buffer Concepts ■ Logistic interface Linear handling system for standard Process Equipment 19 04/03/09 © SCHILLER AUTOMATION
  20. 20. Concept: interface automation INTRODUCTION CONCEPT INLINE BATCH Logistic Automation Interface Automation Process Equipment Glass exchange unit (GEU) ■ Substrate exchange ■ Substrate centering ■ Substrate rotation ■ Option: • Quality control • ID tracking ■ … 20 04/03/09 © SCHILLER AUTOMATION
  21. 21. Concept: batch INTRODUCTION CONCEPT INLINE BATCH Advantages ■ Expansion of production by Disadvantages additional or modified process tools possible ■ More complex => higher costs compared to inline ■ Easy service access to concept process tools ■ WIP high => dwell time of ■ Flexibility of substrate routing substrates within production high ■ Buffer sizes and buffer locations flexible ■ High sophisticated logistic system ■ Short downtimes have minimal impact on yield ■ … ■ Handling of Dummy Substrates possible 21 04/03/09 © SCHILLER AUTOMATION
  22. 22. Summary and outlook INTRODUCTION CONCEPT INLINE BATCH Summary ■ Shown the Schiller FAB automation concept ■ Best concept consist of • Maximal utilization of process equipment • Most reliable during projecting phase, ramp-up and production • Flexibility in production and engineering • Scalability and maintainability ■ Best solution considering all costs Outlook ■ ProLoad Multi interface logistics handles several substrates ■ Big FAB concepts scalability and synergy effects ■ Fully automated back-ends with minimal # operators ■ New logistics and automation concepts also for crystalline PV ■ ... 22 04/03/09 © SCHILLER AUTOMATION
  23. 23. INTRODUCTION CONCEPT INLINE BATCH Thank you for your attention Andreas Reischl SCHILLER AUTOMATION GmbH & Co. KG Pfullinger Strasse 58 72820 Sonnenbuehl-Genkingen Germany Tel +49 / 7128 / 386-5755 Fax +49 / 7128 / 386-299 info@schiller-automation.com www.schiller-automation.com 23 04/03/09 © SCHILLER AUTOMATION
  24. 24. Company INTRODUCTION CONCEPT INLINE BATCH Our profile ■ In almost 30 years, SCHILLER evolved into one of the most competent automation companies in the microelectronics business. ■ Our strength:  Holistic consideration of all sorts of conceptual formulations ■ All from one source:  Development  Engineering  Manufacturing  Assembly  Installation and start-up  After sales support ■ SCHILLER is a 100% family-owned company. 24 04/03/09 © SCHILLER AUTOMATION
  25. 25. Company INTRODUCTION CONCEPT INLINE BATCH Our company structure Company Management Quality Management Customer Center Engineering Production Internal Services · Sales / Marketing · Mech./Electr. Engineering · Materials Administration · Controlling / PPS · Project Management · Software Engineering / Document. · Manufacturing · Admin · Customer Support · Research & Development · Assembly · Information Technology 25 04/03/09 © SCHILLER AUTOMATION
  26. 26. Company: facts & numbers INTRODUCTION CONCEPT INLINE BATCH Numbers & Facts ■ Foundation: 1978 ■ Management:  Stefan Schiller Managing Director  Karl-Heinz Bahnmüller Customer Center  Martin Speidel Engineering  Hans-Peter Hennig Production/Internal Services  Herbert Höhn Key Account Manager ■ Certification : DIN ISO 9001:2000 26 04/03/09 © SCHILLER AUTOMATION
  27. 27. Company INTRODUCTION CONCEPT INLINE BATCH Our products SCHILLER is a leading supplier of production systems for manufacturing and handling of: ■ Microelectronics components, including power modules and controls & sensors for automotive applications ■ Photovoltaic products, including solar cell manufacturing and fab automation for thin- film solar cell manufacturing Moreover SCHILLER has know-how and experience in following fields: ■ Semiconductor products in all clean room classes ■ Flat panel displays ■ Data storage products ■ Smart card modules 27 04/03/09 © SCHILLER AUTOMATION
  28. 28. Company INTRODUCTION CONCEPT INLINE BATCH Our references 28 04/03/09 © SCHILLER AUTOMATION
  29. 29. Company INTRODUCTION CONCEPT INLINE BATCH Our strengths – the people at SCHILLER ■ ... with more than 2,500 man-years experience. ■ ... with analytical abilities/competency. ■ ... in interdisciplinary project teams. ■ ... with responsibility for costs, operations and target dates. ■ ... with passion for the common task. ■ ... create success! 29 04/03/09 © SCHILLER AUTOMATION
  30. 30. Core Competences INTRODUCTION CONCEPT INLINE BATCH Our core competences 30 04/03/09 © SCHILLER AUTOMATION
  31. 31. Core Competences INTRODUCTION CONCEPT INLINE BATCH Your benefit ■ Individual solutions ■ Proven modules ■ Automation solutions from one source ■ Lowest TCO ■ After Sales Service ■ Short start-up periode ■ Innovation 31 04/03/09 © SCHILLER AUTOMATION
  32. 32. Solutions INTRODUCTION CONCEPT INLINE BATCH Our solutions –success story of our customers ■ Microelectronics, Automotive, Power Module ■ Photovoltaics And ■ Semiconductor ■ Flat Panel Display ■ Data Storage ■ Smart Cards 32 04/03/09 © SCHILLER AUTOMATION
  33. 33. Photovoltaics INTRODUCTION CONCEPT INLINE BATCH ■ Customer specific automation systems for crystalline solar cell production  Interlinking of process equipment  Loading/Unloading of process equipment  Customer specific QC lines  Fully automatic stocker systems 33 04/03/09 © SCHILLER AUTOMATION
  34. 34. Photovoltaics INTRODUCTION CONCEPT INLINE BATCH ■ Customer specific automation systems for thin film solar cell production  Loading/Unloading of process equipment  Modular Schiller 5 axes handling system for glass substrates  Cassette station  Cassettes for substrates  Stocker systems for cassettes and single substrates 34 04/03/09 © SCHILLER AUTOMATION

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