Vlsi Tcad Flow

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Vlsi Tcad Flow

  1. 1. VLSI TCAD FLOW Process and layout variation PROCESS SIMULATION DEVICE SIMULATION TEST STRUCTURE PREPRATION DEVICE CHARACTERIZATION COMPACT MODELING CIRCIT SIMULATION CIRCUIT PERFORMANCE
  2. 2. Interconnect Analysis <ul><li>Experimental Design </li></ul><ul><li>Optimization </li></ul><ul><li>Physical model development </li></ul>
  3. 3. PROCESS SIMULATION <ul><li>Simulation of silicon, GaAs, SiGe process </li></ul><ul><ul><li>Lithography </li></ul></ul><ul><ul><li>Deposition and Etch, Oxidation , Diffusion and </li></ul></ul><ul><ul><li>Ion implantation </li></ul></ul>
  4. 4. DEVICE SIMULATION <ul><li>DC, Small Signal and switching characteristics </li></ul><ul><ul><li>Si Devices </li></ul></ul><ul><ul><li>Power Devices </li></ul></ul><ul><ul><li>GaAs Devices </li></ul></ul><ul><li>Devices fabricated with advanced and novel materials (SiGe) </li></ul>
  5. 5. DEVICE CHARACTERIZATION <ul><li>Extraction of Model Parameters. </li></ul><ul><li>Circuit simulation of all advanced devices in Si, SiGe technologies etc </li></ul>

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