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Recipe For Copper Decapsulation

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This is the latest Cu wire recipe that includes the recipe for 1 mil Cu wires.

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Recipe For Copper Decapsulation

  1. 1. Recipe for Copper Decapsulation Using RKD Elite Etch Acid Type: Temperature Volume Heat-up Etch time Rinse time (Celsius): (ml/min): time (sec): (sec): (sec): Mixed 3:1 Varies with 35° 5 120 0 Pulse Mode package size 90% Fuming Nitric See Cookbook 20% Fuming SulfuricPost Etch Rinse: Spray with Acetone. Post Cleaning varies with device. UltraSonic with Acetone. or D.I. or IPA. NMP seems to attack the wires. ( Again this is device specific. ) Dry with N2Note: This works excellent for Cu wire of 2 mil or larger on the Elite Etch. Acid Type: Temperature Volume Heat-up Etch time Rinse time (Celsius): (ml/min): time (sec): (sec): (sec): Mixed 3:1 Varies with 25° 5 120 0 Pulse Mode package size 90% Fuming Nitric See Cookbook 20% Fuming SulfuricNote: This recipe works with wires ≥ 1 mil. ( These recipes only work with the RKD Elite Etch.( The Nisene systems are unable to achieve the desired results due to pump technologies, mixture control, andtemperature characteristics. )Ambient room temperature is also a factor.The ambient room temperature must be at least 3 degrees colder than the etch temperature for this process towork.Post Etch Rinse: Spray with Acetone. Post Cleaning varies with device. UltraSonic with Acetone. or D.I. or IPA. NMP seems to attack the wires. ( Again this is device specific. )

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