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Design mems presure sensor

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This paper aim in design and analysis of MEMS Pressure Sensor by using ANSYS software. A diaphragm based MEMS sensor in the range of 25MPa by measured center deflection of the circular pressure-sensitive and using the strain gauge for measurement. First this paper created the mathematical calculation and then models the finite element analysis of the diaphragm using ANSYS and determined the pressure sensor in the range of 25MPa with circular diaphragm is designed, which also reflects the choice of correct design after analyzing the effect of diaphragm thickness, location and shapes of piezoresistor.

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Design mems presure sensor

  1. 1. ‫ﻣﻴﻜﺮوﻣﺎﺷﻨﻴﻜﺎري‬ ‫و‬ ‫رﻳﺰﻓﻨﺎوري‬ ‫اﻟﻤﻠﻠﻲ‬ ‫ﺑﻴﻦ‬ ‫ﻛﻨﻔﺮاﻧﺲ‬ ‫اوﻟﻴﻦ‬ICMEMS2014 ‫ﻓﻨﺎوري‬ ‫ﭘﮋوﻫﺸﻜﺪه‬،‫اﻣﻴﺮﻛﺒﻴﺮ‬ ‫ﺻﻨﻌﺘﻲ‬ ‫داﻧﺸﮕﺎه‬ ‫ﻧﻮ‬ ‫ﻫﺎي‬29‫و‬30‫ﺑﻬﻤﻦ‬1392 ICMEMS2014 ‫دﻳﺎﻓﺮاﮔﻤﻲ‬ ‫ﻧﻮع‬ ‫ﻓﺸﺎر‬ ‫ﺳﻨﺴﻮر‬ ‫ﮔﻴﺮي‬ ‫اﻧﺪازه‬ ‫روش‬ ‫در‬ ‫دﻗﺖ‬ ‫ﺳﺎزي‬ ‫ﺑﻬﻴﻨﻪ‬ 1 ‫ﻓﺘﺤﻲ‬ ‫ﺧﻠﻴﻞ‬،2 ‫داﻳﻲ‬ ‫ﺣﺴﻴﻦ‬ ‫اﻣﻴﺮ‬‫ﺳﺮﺧﺎﺑﻲ‬ 1 ‫ﻧﺎر‬ ‫ﭘﻠﻲ‬ ‫ﺷﺮﻛﺖ‬ ، ‫ارﺷﺪ‬ ‫ﻛﺎرﺷﻨﺎﺳﻲ‬ ‫داﻧﺸﺠﻮي‬،kfathi55@gmail.com 2 ‫داﻧﺸﮕﺎه‬ ،‫ﻳﺎر‬ ‫اﺳﺘﺎد‬‫ﺗﺒﺮﻳﺰ‬ ‫واﺣﺪ‬ ‫اﺳﻼﻣﻲ‬ ‫آزاد‬،amirsorkhabi@iaut.ac.ir ‫ﭼﻜﻴﺪه‬ ‫اﺑﻌﺎد‬ ‫در‬ ‫ﻓﺸﺎر‬ ‫ﺳﻨﺴﻮر‬ ‫ﮔﻴﺮي‬ ‫اﻧﺪازه‬ ‫در‬ ‫ﺳﺎزي‬ ‫ﺑﻬﻴﻨﻪ‬ ،‫ﻣﻘﺎﻟﻪ‬ ‫اﻳﻦ‬ ‫از‬ ‫ﻫﺪف‬MEMS‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫دﻳﺎﻓﺮاﮔﻤﻲ‬ ‫ﺷﻜﻞ‬ ‫ﺑﻪ‬ ‫و‬.‫اﻓﺰار‬ ‫ﻧﺮم‬ ‫از‬ ‫ﺳﻨﺴﻮر‬ ‫اﻳﻦ‬ ‫ﺳﺎزي‬ ‫ﺷﺒﻴﻪ‬ ‫ﺑﺮاي‬ ANSYS‫اﺳﺖ‬ ‫ﺷﺪه‬ ‫اﺳﺘﻔﺎده‬.‫ﭘﺲ‬ ‫ﻣﺨﺘﻠﻒ‬ ‫ﻣﻮاد‬ ‫ﺑﺮاي‬ ‫ﺳﻨﺴﻮر‬ ‫اﻳﻦ‬ ‫رﻓﺘﺎر‬‫ﺷﺒﻴﻪ‬ ‫ﻫﻢ‬ ‫و‬ ‫ﺗﺌﻮري‬ ‫ﺣﺎﻟﺖ‬ ‫در‬ ‫ﻫﻢ‬ ،‫آن‬ ‫ﻓﺮم‬ ‫ﺗﻐﻴﻴﺮ‬ ‫و‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﻣﺮﻛﺰ‬ ‫ﺑﺮ‬ ‫ﻓﺸﺎر‬ ‫اﻋﻤﺎل‬ ‫ﺑﺎ‬ ‫و‬ ‫ﻃﺮاﺣﻲ‬ ‫از‬ ‫اﺳﺖ‬ ‫آﻣﺪه‬ ‫ﺑﺪﺳﺖ‬ ‫ﻗﺒﻠﻲ‬ ‫روﺷﻬﺎي‬ ‫ﺑﻪ‬ ‫ﻧﺴﺒﺖ‬ ‫ﺑﻬﻴﻨﻪ‬ ‫اﺑﻌﺎد‬ ‫و‬ ‫ﮔﺮدﻳﺪه‬ ‫ﻣﻘﺎﻳﺴﻪ‬ ‫آﻣﺪه‬ ‫ﺑﻮﺟﻮد‬ ‫ﺗﻨﺸﻬﺎي‬ ‫ﺑﺮاي‬ ‫ﺳﺎزي‬.‫ﻓﺮم‬ ‫ﺗﻐﻴﻴﺮ‬ ‫ﺗﺌﻮري‬ ‫اﺳﺎس‬ ‫ﺑﺮ‬ ‫ﻧﻴﺰ‬ ‫آن‬ ‫ﺳﺎزي‬ ‫آﺷﻜﺎر‬ ‫ﺑﺮاي‬ ‫ﻛﻮﭼﻚ‬1 ‫ﻧﺸﺎﻧﻲ‬ ‫ﻻﻳﻪ‬ ‫روش‬ ‫از‬2 ‫ﻣﻘﺎوﻣ‬ ،‫ﭘﻴﺰو‬ ‫ﺘﻬﺎي‬3 ‫اﺳﺖ‬ ‫ﺷﺪه‬ ‫ﭘﻴﺸﻨﻬﺎد‬ ‫ﻣﻴﻜﺮوﻣﺎﺷﻴﻨﺮي‬ ‫ﻓﺮآﻳﻨﺪ‬ ‫ﺑﺎ‬.،‫دﻳﺎﻓﺮاﮔﻢ‬ ‫اﻧﺤﺮاف‬ ‫آﺷﻜﺎرﺳﺎزي‬ ‫ﺳﻴﺴﺘﻢ‬ ‫دﻗﺖ‬ ‫و‬ ‫رﻳﺎﺿﻲ‬ ‫ﻣﺪل‬ ‫اﺑﺘﺪا‬ ‫در‬ ‫اﺳﺖ‬ ‫ﮔﺮﻓﺘﻪ‬ ‫ﻗﺮار‬ ‫دﻳﻨﺎﻣﻴﻜﻲ‬ ‫ﺗﺤﻠﻴﻞ‬ ‫ﺗﺠﺰﻳﻪ‬ ‫ﻣﻮرد‬ ،‫ﻣﺤﺪود‬ ‫اﻟﻤﺎن‬ ‫دﻳﺪ‬ ‫از‬ ‫ﺳﭙﺲ‬ ‫و‬ ‫ﺷﺪه‬ ‫ﻣﺤﺎﺳﺒﻪ‬.‫ﺳﻨﺴﻮر‬ ‫ﺑﺮاي‬ ‫ﺷﺪه‬ ‫ﻃﺮاﺣﻲ‬ ‫ﻓﺸﺎر‬ ‫ﻣﺎﻛﺰﻳﻤﻢ‬MPa25‫ﻣﺤﺪوده‬ ‫از‬ ‫ﻛﻪ‬ ‫ﺑﻮده‬ ‫ﻓﺸﺎر‬0‫ﺗ‬‫ﺎ‬MPa209/11‫اﻧﺤﺮاف‬ ‫ﺣﺪاﻛﺜﺮ‬ ‫رﻧﺞ‬ ‫اﻳﻦ‬ ‫از‬ ‫ﺑﺎﻻﺗﺮ‬ ‫ﻓﺸﺎرﻫﺎي‬ ‫ﺑﺮاي‬ ‫و‬ ‫ﺧﻄﻲ‬ ً‫ﻼ‬‫ﻛﺎﻣ‬25/1%‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫ﻗﺒﻮل‬ ‫ﻗﺎﺑﻞ‬ ‫ﻣﻬﻨﺪﺳﻲ‬ ‫ﻧﻈﺮ‬ ‫از‬ ‫ﻛﻪ‬ ‫دارد‬ ‫ﺧﻄﺎ‬. ‫ﻫﺎي‬ ‫واژه‬‫ﻛﻠﻴﺪي‬:MEMS‫ﻣﺤﺪود‬ ‫اﻟﻤﺎن‬ ‫آﻧﺎﻟﻴﺰ‬ ،‫ﻛﻮﭼﻚ‬ ‫ﻓﺮم‬ ‫ﺗﻐﻴﻴﺮ‬ ،‫ﻓﺸﺎر‬ ‫ﻣﻮﻟﻔﻪ‬ ،،ANSYS،‫ﻣﺎﺷﻴﻨﺮي‬ ‫ﻣﻴﻜﺮو‬ ،‫ﭘﻴﺰو‬ ‫ﻣﻘﺎوﻣﺖ‬ 1-‫ﻣﻘﺪﻣﻪ‬ ‫ﻳـﻚ‬ ‫ﻃﺮاﺣـﻲ‬ ‫ﻓﺮآﻳﻨﺪ‬ ‫در‬ ‫ﻫﺎ‬ ‫ﭘﺮوﺳﻪ‬ ‫ارزﺷﻤﻨﺪﺗﺮﻳﻦ‬ ‫از‬ ‫ﻳﻜﻲ‬ ‫ﺳﺎزي‬ ‫ﺷﺒﻴﻪ‬ ‫ﺳﻨﺴﻮر‬‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬.‫ﺑـﺮ‬ ‫ﮔﻮﻧﺎﮔﻮن‬ ‫ﺷﻜﻠﻬﺎي‬ ‫ﺑﺎ‬ ‫ﻣﺨﺘﻠﻒ‬ ‫ﺳﻨﺴﻮرﻫﺎي‬ ‫ﺳﺎﺧﺖ‬ ‫در‬ ‫دﻗﻴـﻖ‬ ‫آﻧﺎﻟﻴﺰﻫـﺎي‬ ‫و‬ ‫ﻣﺤﺎﺳـﺒﺎت‬ ‫ﺑـﻪ‬ ‫ﻧﻴـﺎز‬ ‫آﻧﻬﺎ‬ ‫ﻛﺎر‬ ‫ﻧﻮع‬ ‫و‬ ‫ﺣﺴﺎﺳﻴﺖ‬ ‫اﺳﺎس‬ ‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬.‫ﺗﺤﻠﻴـﻞ‬ ‫روش‬ ‫از‬ ‫اﺳﺘﻔﺎده‬ ‫ﻣﺘﺪاول‬ ‫روﺷﻬﺎي‬ ‫از‬ ‫ﻳﻜﻲ‬ ‫ﻛﺎر‬ ‫اﻳﻦ‬ ‫ﺑﺮاي‬ ‫ﻣﺤﺪود‬ ‫اﻟﻤﺎن‬‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬.‫ﻗﺎﺑﻞ‬ ‫ﺗﻨﺶ‬ ‫ﭘﺬﻳﺮش‬ ‫ﻣﺤﺪوده‬ ‫ﺗﻮان‬ ‫ﻣﻲ‬ ‫روش‬ ‫اﻳﻦ‬ ‫ﺑﺎ‬ ‫آﻧﺎﻟﻴﺰﻫ‬ ‫و‬ ‫ﺗﺤﻤﻞ‬‫آورد‬ ‫ﺑﺪﺳـﺖ‬ ‫را‬ ‫ﻫﺎ‬ ‫ﭘﺎﺳﺦ‬ ‫از‬ ‫ﻣﺨﺘﻠﻔﻲ‬ ‫ﺎي‬.‫ﺣﺎﺿـﺮ‬ ‫ﺣـﺎل‬ ‫در‬ ‫ﻗﻄﻌﺎت‬MEMS‫ﻣﺤﺮﻛﻬـﺎي‬ ‫و‬ ‫ﺳﻨﺴـﻮرﻫﺎ‬ ‫ﺑـﺮاي‬ ‫ﻣﻨﺎﺳﺒﻲ‬ ‫ﺑﺴﻴﺎر‬ ‫ﺟﺎﻳﮕﺰﻳﻦ‬ ‫ﺳـﺎﻳﺮ‬ ‫و‬ ‫ﻧﻈـﺎﻣﻲ‬ ،‫ﭘﺰﺷﻜﻲ‬ ، ‫دﻗﻴﻖ‬ ‫اﺑﺰار‬ ‫و‬ ‫ﻛﻨﺘﺮل‬ ‫زﻣﻴﻨﻪ‬ ‫در‬ ‫ﺑﺰرگ‬ ‫و‬ ‫ﺣﺠﻴﻢ‬ ‫اﻧﺪ‬ ‫ﺷﺪه‬ ‫ﻣﺼﺎرف‬.‫ﺗﻮﻟﻴﺪ‬ ‫روﻧﺪ‬ ‫روز‬ ‫ﻫﺮ‬ ‫و‬‫ﺧﺎﻃﺮ‬ ‫ﺑﻪ‬ ‫آﻧﻬﺎ‬،‫ﺑﺎﻻ‬ ‫اﻃﻤﻴﻨﺎن‬ ‫ﺿﺮﻳﺐ‬ ‫اﻣﻜﺎن‬ ،‫ﻛﻮﭼﻚ‬ ‫اﺑﻌﺎد‬‫ا‬ ‫ﺗﻮﻟﻴﺪ‬‫ﻧﺒﻮه‬‫و‬‫در‬ ‫ﺧﻄﺮﻧـﺎك‬ ‫ﻫـﺎي‬ ‫ﻣﺤﻴﻂ‬ ‫در‬ ‫اﺳﺘﻔﺎده‬ ‫ﺑﺎﺷ‬ ‫ﻣﻲ‬ ‫ﮔﺴﺘﺮش‬ ‫ﺣﺎل‬‫ﻨ‬‫ﺪ‬.‫ادوات‬‫ﺷﺪه‬ ‫ﺳﺎﺧﺘﻪ‬MEMS‫ﻗﻄﻌـﺎت‬ ‫ﻫﻤﺎﻧﻨـﺪ‬ ،‫ـﻮرﻫﺎ‬‫ـ‬‫ﺳﻨﺴ‬ ،‫ـﺎ‬‫ـ‬‫وﻟﻮﻫ‬ ،‫ـﺎ‬‫ـ‬‫ﻣﺤﺮﻛﻬ‬ ‫ـﻪ‬‫ـ‬‫ﺟﻤﻠ‬ ‫از‬ ‫ـﺎﻧﻴﻜﻲ‬‫ـ‬‫ﻣﻜ‬ ‫ـﺎ‬‫ـ‬‫ﻳ‬ ‫ـﻲ‬‫ـ‬‫اﻟﻜﺘﺮﻳﻜ‬ ‫ـﻨﺘﻲ‬‫ـ‬‫ﺳ‬ ‫ﺑﺎﺷـﻨﺪ‬ ‫ﻣـﻲ‬ ‫ﻣﻴﻜـﺮو‬ ‫اﺑﻌـﺎد‬ ‫در‬ ‫اﻣـﺎ‬ ‫ﻫﺎ‬ ‫دﻧﺪه‬ ‫ﭼﺮخ‬ ‫و‬ ‫اﻧﻌﻜﺎﺳﻲ‬ ‫ﻫﺎي‬ ‫آﻳﻨﻪ‬.‫در‬ ‫اﺧﻴـﺮ‬ ‫ﻫﺎي‬ ‫ﺳﺎل‬‫ﻫـﺎي‬ ‫اﻟﻤـﺎن‬،‫ﻫـﺎ‬ ‫ﺳـﻮﺋﻴﭻ‬ ،‫ﻧﻮﺳـﺎﻧﮕﺮﻫﺎ‬ ‫ﺟﻤﻠـﻪ‬ ‫از‬ ‫زﻳـﺎدي‬ ‫ﻫـﺎ‬ ‫ﻣﻘﺎوﻣـﺖ‬ ‫و‬ ‫ﻫـﺎ‬ ‫ﺳـﻠﻒ‬ ،‫ﻣﺘﻐﻴـﺮ‬ ‫ﻫـﺎي‬ ‫ﺧﺎزن‬‫آوري‬ ‫ﻓـﻦ‬ ‫از‬ ‫اﺳـﺘﻔﺎده‬ ‫ﺑـﺎ‬ MEMS‫ﺗﻮﻟﻴﺪ‬‫اﻧﺪ‬ ‫ﺷﺪه‬.‫ﻣﺤﺮﻛﻬﺎ‬ ‫اﻧﻮاع‬ ‫ﺳﺎﺧﺖ‬ ‫در‬ ‫و‬،‫ﻋﻨـﻮان‬ ‫ﺑﻪ‬ ‫ﺳﻨﺴﻮرﻫﺎ‬ ‫ﻣـﻮرد‬ ‫اﻟﻜﺘﺮﻳﻜـﻲ‬ ‫ﭘﻴﺰو‬ ‫ﻳﺎ‬ ‫و‬ ‫ﻣﻐﻨﺎﻃﻴﺴﻲ‬ ،‫ﺣﺮارﺗﻲ‬ ،‫اﻟﻜﺘﺮواﺳﺘﺎﺗﻴﻜﻲ‬ ‫ﻣﺤﺮك‬ ‫اﻧﺪ‬ ‫ﮔﺮﻓﺘﻪ‬ ‫ﻗﺮار‬ ‫اﺳﺘﻔﺎده‬.‫ادو‬ ‫ﺳﺎزي‬ ‫ﻛﻮﭼﻚ‬‫اﻳﺠـﺎد‬ ‫ﺑﺎﻋﺚ‬ ‫اﻟﻜﺘﺮوﻣﻜﺎﻧﻴﻜﻲ‬ ‫ات‬ ‫ﻛـﻪ‬ ‫اﺳـﺖ‬ ‫ﺷـﺪه‬ ‫آﻧﻬـﺎ‬ ‫ﻛﻮﭼـﻚ‬ ‫اﺑﻌـﺎد‬ ‫ﺧـﺎﻃﺮ‬ ‫ﺑـﻪ‬ ‫اﻧـﺮژي‬ ‫در‬ ‫ﺟﻮﻳﻲ‬ ‫ﺻﺮﻓﻪ‬ ‫رﺷ‬ ‫در‬ ‫ﻣﺰﻳﺖ‬ ‫ﺑﺰرﮔﺘﺮﻳﻦ‬‫ﺑﺎﺷﻨﺪ‬ ‫ﻣﻲ‬ ‫ﻗﻄﻌﺎت‬ ‫اﻳﻦ‬ ‫روزاﻓﺰون‬ ‫ﺪ‬]4,1[. 2-‫ﺳﺎﺧﺘﺎر‬‫اوﻟﻴﻪ‬ ‫اﺻﻮل‬ ‫و‬ ‫ﺳﺎﺧﺘﺎر‬‫ﻣﻌﻤﻮل‬‫ﺳﻨﺴﻮر‬‫را‬ ‫دﻳـﺎﻓﺮاﮔﻤﻲ‬ ‫ﻓﺸـﺎر‬‫ﺷـﻜﻞ‬ ‫در‬)1(‫ﻣﻼﺣﻈـﻪ‬ ‫ﻛﻨﻴﺪ‬ ‫ﻣﻲ‬]5[.‫ﺻـﻮرت‬ ‫ﺑﻪ‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﻧﻮع‬ ‫ﺑﻴﻨﻴﺪ‬ ‫ﻣﻲ‬ ‫ﺷﻜﻞ‬ ‫در‬ ‫ﻛﻪ‬ ‫ﻫﻤﺎﻧﮕﻮﻧﻪ‬ ‫ﺑـﻪ‬ ‫وارده‬ ‫ﺗـﻨﺶ‬ ‫ﭘﻴـﺰو‬ ‫ﻣﻘﺎوﻣـﺖ‬ ‫ﻋـﺪد‬ ‫ﭼﻬـﺎر‬ ‫از‬ ‫اﺳـﺘﻔﺎده‬ ‫ﺑﺎ‬ ‫و‬ ‫ﺑﻮده‬ ‫ﻣﺮﺑﻌﻲ‬ ‫ﮔﺮدد‬ ‫ﻣﻲ‬ ‫ﺳﻨﺠﺶ‬ ‫ﻓﺸﺎر‬ ‫از‬ ‫ﻧﺎﺷﻲ‬ ‫دﻳﺎﻓﺮاﮔﻢ‬.‫ﺷـﻜﻞ‬)2(‫ﺗﻮزﻳـﻊ‬ ‫ﻧﺤـﻮه‬ ‫ﻧﻴـﺰ‬ ‫ﺗﺎﻳﭗ‬ ‫ﻣﺮﺑﻌﻲ‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫روي‬ ‫ﺑﺮ‬ ‫را‬ ‫ﺗﻨﺶ‬C‫دﻫﺪ‬ ‫ﻣﻲ‬ ‫ﻧﺸﺎن‬ ‫را‬.‫ﻛـﻪ‬ ‫ﻫﻤﺎﻧﮕﻮﻧﻪ‬ ‫ﺗﻮزﻳﻊ‬ ‫ﻛﻨﻴﺪ‬ ‫ﻣﻲ‬ ‫ﻣﻼﺣﻈﻪ‬‫ﺑﺼـﻮرت‬ ‫و‬ ‫ﻫﺎ‬ ‫ﻟﺒﻪ‬ ‫در‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﻧﻮع‬ ‫اﻳﻦ‬ ‫در‬ ‫ﺗﻨﺶ‬ ‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫ﻋﺮﻳﺾ‬ ‫و‬ ‫ﻧﺎزك‬.‫در‬ ‫ﻓﺸـﺎر‬ ‫ﻣﻨﺎﺳـﺐ‬ ‫ﺗﻮزﻳﻊ‬ ‫ﻋﺪم‬ ‫ﺧﺎﻃﺮ‬ ‫ﺑﻪ‬ ‫ﺑﻨﺎﺑﺮاﻳﻦ‬ ‫ﺧﻄـﻲ‬ ‫ﻛـﺎرﻛﺮد‬ ‫در‬ ‫ﻛـﺎر‬ ‫اﻳـﻦ‬ ‫ﻛﻪ‬ ‫ﻧﺪارﻳﻢ‬ ‫را‬ ‫ﺗﻨﺶ‬ ‫از‬ ‫ﻗﺴﻤﺘﻲ‬ ‫ﺳﻨﺴﻮر‬ ‫ﺳﻄﺢ‬ ‫ﻛﻨـﺪ‬ ‫ﻣـﻲ‬ ‫وارد‬ ‫ﺧﻠﻞ‬ ‫ﺳﻨﺴﻮر‬.‫ﺗﻮزﻳـﻊ‬ ‫ﻫﻤـﻴﻦ‬ ‫ﺧـﺎﻃﺮ‬ ‫ﺑـﻪ‬ ‫ﻧﻴـﺰ‬ ‫ﻃﺮﻓـﻲ‬ ‫از‬ ‫و‬ ‫ﻣﻲ‬ ‫ﻛﺎﻫﺶ‬ ‫ﻧﻴﺰ‬ ‫را‬ ‫ﺳﻨﺴﻮر‬ ‫ﻣﻔﻴﺪ‬ ‫ﻋﻤﺮ‬ ‫ﻧﺎﻣﻨﺎﺳﺐ‬‫ﻳﺎﺑﺪ‬.‫ﻣﻘﺎﻳﺴـﻪ‬ ‫از‬ ‫ﻧﺘﻴﺠـﻪ‬ ‫در‬ ‫ﻧـﻮع‬ ‫ﻛـﻪ‬ ‫اﺳـﺖ‬ ‫اﻳـﻦ‬ ‫ﺗﻮﺟﻪ‬ ‫ﻗﺎﺑﻞ‬ ‫ﻧﻜﺘﻪ‬ ‫اي‬ ‫داﻳﺮه‬ ‫ﺑﺎ‬ ‫ﻣﺮﺑﻌﻲ‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﻧﻮع‬ ‫دو‬ ‫و‬ ‫دارد‬ ‫ﺧـﻮﺑﻲ‬ ‫ﭘﺎﺳﺦ‬ ‫ﻃﺒﻴﻌﻲ‬ ‫ﻓﺮﻛﺎﻧﺲ‬ ‫ﻟﺤﺎظ‬ ‫از‬ ‫ﻫﻢ‬ ‫ﻃﺮاﺣﻲ‬ ‫ﻣﻮرد‬ ‫اي‬ ‫داﻳﺮه‬ ‫ﺑﺎﺷـﺪ‬ ‫ﻣـﻲ‬ ‫ﻣﺮﺑﻌـﻲ‬ ‫ﻧـﻮع‬ ‫از‬ ‫ﻣﻔﻴـﺪﺗﺮ‬ ‫دﻳﻨـﺎﻣﻴﻜﻲ‬ ‫ﻛﺎرﺑﺮدﻫﺎي‬ ‫ﻟﺤﺎظ‬ ‫ﺑﻪ‬ ‫ﻫﻢ‬. ‫ﺷﻜﻞ‬ ‫در‬ ‫اي‬ ‫داﻳﺮه‬ ‫ﻧﻮع‬ ‫دﻳﺎﻓﺮاﮔﻢ‬)3(‫ﺷﺪه‬ ‫داده‬ ‫ﻧﺸﺎن‬‫اﺳﺖ‬.‫ﻛـﻪ‬ ‫ﻫﻤـﺎﻧﻄﻮر‬ ‫ﻗﺴــﻤﺖ‬ ‫دو‬ ‫از‬ ‫ﺳﻨﺴــﻮر‬ ‫اﻳــﻦ‬ ‫ﺑﻴﻨﻴــﺪ‬ ‫ﻣــﻲ‬ ‫ـﻜﻞ‬‫ـ‬‫ﺷ‬ ‫در‬:‫اي‬ ‫ﺷﻴﺸــﻪ‬ ‫ﺣﻠﻘــﻪ‬ ‫ﺳﻴﻠﻴﻜﺎت‬ ‫ﺑﺮوﻧﻮ‬6 ‫ﻣﺤـﺎﻓﻆ‬ ‫و‬ ‫ﻋـﺎﻳﻖ‬ ‫ﻋﻨﻮان‬ ‫ﺑﻪ‬ ‫ﺑﺎﻻ‬ ‫ﻣﻘﺎوﻣﺘﻲ‬ ‫ﺧﻮاص‬ ‫دﻟﻴﻞ‬ ‫ﺑﻪ‬ ‫ﺑـﺎ‬ ‫ﻫﻤـﺮاه‬ ‫ﺳـﻴﻠﻴﻜﻮن‬ ‫ﭘﻠـﻲ‬ ‫ﺗﺮﻛﻴـﺐ‬ ‫از‬ ‫ﻛﻪ‬ ‫ﺳﻨﺴﻮر‬ ‫اﺻﻠﻲ‬ ‫ﺻﻔﺤﻪ‬ ‫و‬ ‫ﺳﻨﺴﻮر‬ ‫ﺷﻮد‬ ‫ﻣﻲ‬ ‫ﺳﺎﺧﺘﻪ‬ ‫ﭘﻴﺰو‬ ‫ﻣﻘﺎوﻣﺖ‬ ‫اﻟﻤﺎن‬.‫و‬ ‫ﺗﻮﺧـﺎﻟﻲ‬ ‫ﺣﻠﻘـﻪ‬ ‫از‬ ‫اﺳـﺘﻔﺎده‬ ‫دﻟﻴﻞ‬ ‫ﻧـﻮع‬ ‫ﺳﻨﺴـﻮر‬ ‫ﺑﺮاي‬ ‫ﺷﺪه‬ ‫ﮔﻔﺘﻪ‬ ‫ﻫﺎي‬ ‫اﻳﺮاد‬ ‫رﻓﻊ‬ ‫ﻣﻨﻈﻮر‬ ‫ﺑﻪ‬ ‫اي‬ ‫داﻳﺮه‬ ‫ﺳﻨﺴﻮر‬ ‫ﻛـﺮده‬ ‫ﻫﺪاﻳﺖ‬ ‫ﺳﻨﺴﻮر‬ ‫اﺻﻠﻲ‬ ‫ﺻﻔﺤﻪ‬ ‫ﻣﻴﺎﻧﻪ‬ ‫ﺑﻪ‬ ‫را‬ ‫ﺗﻨﺶ‬ ‫ﻣﺎ‬ ‫ﻛﺎر‬ ‫اﻳﻦ‬ ‫ﺑﺎ‬ ‫ﻣﺮﺑﻌﻲ‬ ‫اﻳﻢ‬.‫اﺳﺖ‬ ‫ﻣﺸﺨﺺ‬ ً‫ﻼ‬‫ﻛﺎﻣ‬ ‫ﻓﻮق‬ ‫ﺷﻜﻞ‬ ‫در‬ ‫اﻣﺮ‬ ‫اﻳﻦ‬]6[.
  2. 2. ‫ﻣﻴﻜﺮوﻣﺎﺷﻨﻴﻜﺎري‬ ‫و‬ ‫رﻳﺰﻓﻨﺎوري‬ ‫اﻟﻤﻠﻠﻲ‬ ‫ﺑﻴﻦ‬ ‫ﻛﻨﻔﺮاﻧﺲ‬ ‫اوﻟﻴﻦ‬ICMEMS2014 ‫ﻓﻨﺎوري‬ ‫ﭘﮋوﻫﺸﻜﺪه‬،‫اﻣﻴﺮﻛﺒﻴﺮ‬ ‫ﺻﻨﻌﺘﻲ‬ ‫داﻧﺸﮕﺎه‬ ‫ﻧﻮ‬ ‫ﻫﺎي‬29‫و‬30‫ﺑﻬﻤﻦ‬1392 ‫ﺷﻜﻞ‬1:‫ﺳﻨﺴﻮر‬‫د‬‫ﻳﺎ‬‫ﻓﺮاﮔﻤ‬‫ﻲ‬‫ﻧﻮع‬‫ﻣﻌﻤﻮل‬‫ﻣﺮﺑﻌ‬‫ﻲ‬ ‫ﺷﻜﻞ‬2:‫ﺷﻤﺎﺗﻴﻚ‬‫ﺳﻨﺴﻮر‬‫دﻳﺎﻓﺮاﮔﻤ‬‫ﻲ‬‫ﻧﻮع‬c 3-‫ﺳﺎزي‬ ‫ﻣﺪل‬ 3-1‫ﻣﻜﺎﻧﻴﻜﻲ‬ ‫ﺳﺎزي‬ ‫ﻣﺪل‬ ‫ﺷﻜﻞ‬ ‫ﺑﻪ‬ ‫ﺗﻮﺟﻪ‬ ‫ﺑﺎ‬)3(‫ﺑـﻪ‬ ‫ﺗﻮﺟـﻪ‬ ‫ﺑﺎ‬ ‫را‬ ‫ﺳﻨﺴﻮر‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﺑﺮاي‬ ‫ﻣﻮﺛﺮ‬ ‫ﻗﻄﺮ‬ ‫ﺑﺎ‬ ‫ﺑﺮاﺑﺮ‬ ‫ﺳﺎزي‬ ‫ﺷﺒﻴﻪ‬ ‫ﻧﺘﺎﻳﺞ‬d=2R‫ﮔﻴﺮﻳﻢ‬ ‫ﻣﻲ‬ ‫ﻧﻈﺮ‬ ‫در‬.‫ﺻﻔﺤﻪ‬ ‫اﻳﻦ‬ ‫ﺿﺨﺎﻣﺖ‬ ‫ﺑﺎ‬ ‫ﻧﻴﺰ‬ ‫را‬hp‫اﻳﻢ‬ ‫داده‬ ‫ﻧﺸﺎن‬.‫ﺷﻜﻞ‬)4(‫ﺳـﻄﺢ‬ ‫ﺗﺌـﻮري‬ ‫ﻣﺪل‬ ‫دﻫﻨﺪه‬ ‫ﻧﺸﺎن‬ ‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫ﻓﺸﺎر‬ ‫ﻣﻮﺛﺮ‬.‫را‬ ‫ﻣﺮﻛـﺰ‬ ‫از‬ ‫اﻧﺤـﺮاف‬ ‫ﻣﻴـﺰان‬ ‫دﻫﻨـﺪه‬ ‫ﻧﺸﺎن‬ ‫ﻣﺪل‬ ‫اﻳﻦ‬ ‫ﺷـﻮد‬ ‫اﻧﺠـﺎم‬ ‫ﻻزم‬ ‫رﻳﺎﺿـﻲ‬ ‫ﻣﺤﺎﺳـﺒﺎت‬ ‫آن‬ ‫ﻃﺒـﻖ‬ ‫ﺗﺎ‬ ‫دﻫﺪ‬ ‫ﻣﻲ‬ ‫ﻧﺸﺎن‬.‫ﻓﺸـﺎر‬ ‫ﻳﻜﻨﻮاﺧﺖ‬P‫اداﻣـﻪ‬ ‫در‬ ‫ﻛﻪ‬ ‫ﺷﺪه‬ ‫اﻋﻤﺎل‬ ‫ﻣﻮﺛﺮ‬ ‫ﺳﻄﺢ‬ ‫روي‬ ‫ﺑﺮ‬ ‫ﻣﺴﺎوي‬ ‫ﻃﻮر‬ ‫ﺑﻪ‬ ‫ﻣﺠﺎ‬ ‫ﻓﺸﺎر‬ ‫ﺣﺪاﻛﺜﺮ‬ ‫و‬ ‫ﺣﺪاﻗﻞ‬ ‫ﺑﺮاي‬‫اﺳـﺖ‬ ‫ﮔﺮﻓﺘـﻪ‬ ‫ﺻـﻮرت‬ ‫ﻻزم‬ ‫ﻣﺤﺎﺳﺒﺎت‬ ‫ز‬. ‫و‬ ‫ﻟﺒـﻪ‬ ‫ﻣﺤـﻞ‬ ‫ﻣـﺮزي‬ ‫ﺷـﺮاﻳﻂ‬ ‫ﺟﻤﻠـﻪ‬ ‫از‬ ‫ﻓﺎﻛﺘﻮر‬ ‫ﺗﻌﺪادي‬ ‫ﺑﻪ‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫رﻓﺘﺎر‬ ‫دارد‬ ‫ﺑﺴﺘﮕﻲ‬ ‫ﺻﻔﺤﻪ‬ ‫ﺿﺨﺎﻣﺖ‬ ‫ﺑﻪ‬ ‫ﻣﺮﻛﺰ‬ ‫از‬ ‫اﻧﺤﺮاف‬ ‫ﻧﺴﺒﺖ‬.‫ﻳﻌﻨﻲ‬ ‫اول‬ ‫ﻗﺴﻤﺖ‬ ‫ﺳـﺎﺧﺖ‬ ‫ﻣﺮﺣﻠـﻪ‬ ‫در‬ ‫ﻫﻨﺪﺳـﻲ‬ ‫ﺳـﺎﺧﺘﺎر‬ ‫ﻧﻮع‬ ‫ﺑﻪ‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﻟﺒﻪ‬ ‫ﻣﺮزي‬ ‫ﺷﺮاﻳﻂ‬ ‫ﺑـﻪ‬ ‫دﻳـﺎﻓﺮاﮔﻢ‬ ‫ﻟﺒـﻪ‬ ‫ﻗﻔﻞ‬ ‫ﺳﺨﺘﻲ‬ ‫ﻣﻴﺰان‬ ‫ﻳﻌﻨﻲ‬ ‫دارد‬ ‫ﺑﺴﺘﮕﻲ‬‫ﺑﺮوﻧﻮﺳـﻴﻠﻴﻜﺎت‬ ‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫ﭼﻘﺪر‬.‫ﺑـﻪ‬ ‫ﺑﺴـﺘﮕﻲ‬ ‫اﻧﺤـﺮاف‬ ‫ﺑـﻪ‬ ‫ﻧﺴﺒﺖ‬ ‫ﻓﺸﺎر‬ ‫ﻫﺎ‬ ‫ﻳﺎﻓﺘﻪ‬ ‫اﺳﺎس‬ ‫ﺑﺮ‬ ‫ﻣﻘـﺪار‬ ‫اﻳـﻦ‬ ‫اﮔﺮ‬ ‫ﻛﻪ‬ ‫دارد‬ ‫ﺻﻔﺤﻪ‬ ‫ﺿﺨﺎﻣﺖ‬ ‫ﺑﻪ‬ ‫ﻧﺴﺒﺖ‬ ‫ﻛﻮﭼﻚ‬ ‫اﻧﺤﺮاف‬ ‫ﻣﻴﺰان‬ ‫از‬ ‫ﻛﻤﺘﺮ‬10%‫ﻛﺮد‬ ‫ﺧﻮاﻫﺪ‬ ‫ﻛﺎر‬ ‫ﺧﻄﻲ‬ ‫ﻧﺎﺣﻴﻪ‬ ‫در‬ ‫ﺳﻨﺴﻮر‬ ‫ﺑﺎﺷﺪ‬.‫ﺑـﺎ‬ ‫ﻃﺮﻓـﻲ‬ ‫از‬ ‫ﻓﺸﺎر‬ ‫اﻧﺪازه‬ ‫از‬ ‫ﺑﻴﺶ‬ ‫اﻓﺰاﻳﺶ‬P‫ﺧﻮاﻫﺪ‬ ‫ﻛﻤﺘﺮ‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫اﻧﺤﺮاف‬ ‫ﻣﻘﺪار‬‫ﺷـﺪ‬ ‫آورد‬ ‫ﺧﻮاﻫﺪ‬ ‫ﺑﻮﺟﻮد‬ ‫را‬ ‫ﺧﻄﻲ‬ ‫ﻏﻴﺮ‬ ‫راﺑﻄﻪ‬ ‫ﻳﻚ‬ ‫ﻧﻴﺰ‬ ‫اﻳﻦ‬ ‫و‬]4,1[. ‫ﺷﻜﻞ‬3:‫ﺳﻨﺴﻮر‬‫د‬‫ﻳ‬‫ﺎﻓﺮاﮔﻤ‬‫ﻲ‬‫ﻣﻮﺛﺮ‬ ‫ﺳﻄﺢ‬ ‫ﺑﺎ‬ ‫ﺷﻜﻞ‬4:‫د‬ ‫اﻧﺤﺮاف‬‫ﻳ‬‫ﻓﺸﺎر‬ ‫اﻋﻤﺎل‬ ‫اﺛﺮ‬ ‫ﺑﺮ‬ ‫ﺎﻓﺮاﮔﻢ‬‫ﻳ‬‫ﻜﻨﻮاﺧﺖ‬ ‫ﺷﻜﻞ‬ ‫ﺑﻪ‬ ‫ﺗﻮﺟﻪ‬ ‫ﺑﺎ‬w(r)‫اﺛـﺮ‬ ‫ﺑـﺮ‬ ‫دﻳـﺎﻓﺮاﮔﻢ‬ ‫ﻣﺮﻛـﺰ‬ ‫از‬ ‫اﻧﺤـﺮاف‬ ‫دﻫﻨﺪه‬ ‫ﻧﺸﺎن‬ ‫ﺷﻌﺎﻋﻲ‬ ‫ﻣﺤﻮر‬ ‫ﺑﻪ‬ ‫ﻧﺴﺒﺖ‬ ‫ﻓﺸﺎر‬ ‫اﻋﻤﺎل‬r‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬.‫ﺑـﺮ‬ ‫اﻧﺤـﺮاف‬ ‫اﻳـﻦ‬ ‫ﻣﻘـﺪار‬ ‫ﻣﻮﺟﻮد‬ ‫ﻛﺮﻧﺸﻬﺎي‬ ‫و‬ ‫ﺗﻨﺸﻬﺎ‬ ‫ﺑﺮرﺳﻲ‬ ‫و‬ ‫ﻛﻮﭼﻚ‬ ‫اﻧﺤﺮاف‬ ‫ﺗﺌﻮري‬ ‫ﺗﺤﻠﻴﻞ‬ ‫اﺳﺎس‬ ‫اﺛﺒﺎت‬ ‫آن‬ ‫ﮔﺸﺘﺎورﻫﺎي‬ ‫از‬ ‫اﺳﺘﻔﺎده‬ ‫ﺑﺎ‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﺗﻌﺎدل‬ ‫ﻣﻌﺎدﻻت‬ ‫ﻛﺮدن‬ ‫ﭘﻴﺪا‬ ‫و‬ ‫زﻳﺮ‬ ‫راﺑﻄﻪ‬ ‫ﻣﺨﺘﻠﻒ‬ ‫ﻧﻘﺎط‬ ‫در‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫اﻧﺤﺮاف‬ ‫ﻣﻴﺰان‬ ‫ﺑﺮاي‬ ‫ﻧﻬﺎﻳﺖ‬ ‫در‬ ‫و‬ ‫ﺷﺪه‬ ‫آﻳﺪ‬ ‫ﻣﻲ‬ ‫ﺑﺪﺳﺖ‬: )1( 2 2 2 23(1 ) ( ) ( ) 16 p P w r R r h µ− = − Ε ‫راﺑﻄﻪ‬ ‫اﻳﻦ‬ ‫در‬Е‫و‬ ‫ﻳﺎﻧﮓ‬ ‫ﻣﺪول‬ ‫ﻣﻌﺮف‬µ‫ﻛـﻪ‬ ‫ﺑﺎﺷـﺪ‬ ‫ﻣـﻲ‬ ‫ﭘﻮاﺳـﻮن‬ ‫ﺿـﺮﻳﺐ‬ ‫ﺑﺎﺷﻨﺪ‬ ‫ﻣﻲ‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﻣﻮاد‬ ‫ﻣﻜﺎﻧﻴﻜﻲ‬ ‫ﺧﻮاص‬ ‫دﻫﻨﺪه‬ ‫ﻧﺸﺎن‬.‫ﻛﺮدن‬ ‫ﭘﻴﺪا‬ ‫ﺟﻬﺖ‬ ‫ازاي‬ ‫ﺑﻪ‬ ‫اﺳﺖ‬ ‫ﻛﺎﻓﻲ‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫اﻧﺤﺮاف‬ ‫ﻣﺎﻛﺰﻳﻤﻢ‬r=0‫ﭼـﻮن‬ ‫ﺷـﻮد‬ ‫داده‬ ‫ﻗﺮار‬ ‫ﺷﻮد‬ ‫ﻣﻲ‬ ‫ﺣﺎدث‬ ‫ﺻﻔﺤﻪ‬ ‫ﻣﺮﻛﺰ‬ ‫در‬ ‫اﻧﺤﺮاف‬ ‫اﻳﻦ‬. )2( ( ) 3 2 4 16 3 1 h P w Rµ Ε ≤ − Wr 1 2 ((1 )(3 ))R µ µ+ + ‫اي‬ ‫ﺷﻴﺸﻪ‬ ‫ﺣﻠﻘﻪ‬ ‫ﺑﺮوﻧﻮﺳﻴﻠﻜﺎت‬ ‫اﻟﻤﺎن‬ ‫ﭘﻴﺰو‬ ‫ﻣﻘﺎوﻣﺖ‬ ‫ﻓﺸﺎر‬ ‫ﻣﻮﺛﺮ‬ ‫ﺳﻄﺢ‬ d R r hp P ‫ر‬
  3. 3. ‫ﻣﻴﻜﺮوﻣﺎﺷﻨﻴﻜﺎري‬ ‫و‬ ‫رﻳﺰﻓﻨﺎوري‬ ‫اﻟﻤﻠﻠﻲ‬ ‫ﺑﻴﻦ‬ ‫ﻛﻨﻔﺮاﻧﺲ‬ ‫اوﻟﻴﻦ‬ICMEMS2014 ‫ﻓﻨﺎوري‬ ‫ﭘﮋوﻫﺸﻜﺪه‬،‫اﻣﻴﺮﻛﺒﻴﺮ‬ ‫ﺻﻨﻌﺘﻲ‬ ‫داﻧﺸﮕﺎه‬ ‫ﻧﻮ‬ ‫ﻫﺎي‬29‫و‬30‫ﺑﻬﻤﻦ‬1392 3-2‫ﻓﺸﺎر‬ ‫آﺷﻜﺎرﺳﺎزي‬ ‫در‬ ‫ﮔﺮﻓﺘـﻪ‬ ‫ﺻـﻮرت‬ ‫ﺳـﺎزي‬ ‫ﺷـﺒﻴﻪ‬ ‫و‬ ‫ﻣﺤﺎﺳـﺒﺎت‬ ‫ﺑﻪ‬ ‫ﺗﻮﺟﻪ‬ ‫ﺑﺎ‬ANSYS ‫ﺷـﻌﺎﻋﻲ‬ ‫ﺗـﻨﺶ‬ ‫ﺑـﻪ‬ ‫ﻣﺮﺑـﻮط‬ ،‫ﺗﻨﺸﻬﺎ‬ ‫ﺑﻴﺸﺘﺮﻳﻦ‬rσ‫ﻣﻤﺎﺳـﻲ‬ ‫ﺗـﻨﺶ‬ ‫و‬tσ ‫ﺑﺎﺷﻨﺪ‬ ‫ﻣﻲ‬.‫اﺗﺼـﺎل‬ ‫ﻣﺤﻞ‬ ‫ﻣﺮزي‬ ‫ﻧﺎﺣﻴﻪ‬ ‫در‬ ‫ﻣﺎﻛﺰﻳﻤﻢ‬ ‫ﺗﻨﺸﻬﺎي‬ ‫اﻳﻦ‬ ‫و‬‫ﺻـﻔﺤﻪ‬ ‫دارﻧـﺪ‬ ‫وﺟـﻮد‬ ‫ﺑﺮوﻧﻮﺳـﻴﻠﻴﻜﺎت‬ ‫ﻣﺤﺎﻓﻆ‬ ‫ﺻﻔﺤﻪ‬ ‫ﺑﺎ‬ ‫ﺳﻨﺴﻮر‬.‫ﺟﻬـﺖ‬ ‫ﺑﻨـﺎﺑﺮاﻳﻦ‬ ‫ﺻـﻔﺤﻪ‬ ‫ﻗﻄـﺮي‬ ‫ﻧﻘﻄـﻪ‬ ‫ﭼﻬـﺎر‬ ‫در‬ ‫را‬ ‫ﭘﻴـﺰو‬ ‫ﻣﻘﺎوﻣﺘﻬـﺎي‬ ‫ﻓﺸﺎر‬ ‫ﺳﺎزي‬ ‫آﺷﻜﺎر‬ ‫آراﻳـﺶ‬ ‫ﺻـﻮرت‬ ‫ﺑﻪ‬ ‫را‬ ‫آﻧﻬﺎ‬ ‫ﺑﻴﺮون‬ ‫در‬ ‫و‬ ‫داده‬ ‫ﻗﺮار‬ ‫ﻣﺬﻛﻮر‬ ‫ﻣﺤﻞ‬ ‫در‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫وﺗﺴﺘﻮن‬ ‫ﭘﻞ‬7 ‫ﺷﻜﻞ‬ ‫در‬ ‫ﻛﻪ‬)5(‫ﺑﻨـﺪﻳﻢ‬ ‫ﻣـﻲ‬ ‫ﺷـﺪه‬ ‫داده‬ ‫ﻧﻤـﺎﻳﺶ‬.‫ﺑﻨـﺎﺑﺮاﻳﻦ‬ ‫ﺑﻴﻦ‬ ‫راﺑﻄﻪ‬‫ﺗﻐﻴﻴـﺮات‬ ‫ﻣﻴﺰان‬ ‫و‬ ‫ﻗﻄﺒﻲ‬ ‫ﻣﺨﺘﺼﺎت‬ ‫در‬ ‫ﺷﺪه‬ ‫ﻣﺤﺎﺳﺒﻪ‬ ‫ﺗﻨﺸﻬﺎي‬ ‫آورﻳﻢ‬ ‫ﻣﻲ‬ ‫ﺑﺪﺳﺖ‬ ‫را‬ ‫وﺗﺴﺘﻮن‬ ‫ﭘﻞ‬ ‫ﺧﺮوﺟﻲ‬ ‫و‬ ‫ﻣﺤﺎﺳﺒﻪ‬ ‫ﻣﻘﺎوﻣﺖ‬.‫اﻳـﻦ‬ ‫ﺟﻬﺖ‬ ‫در‬ ‫ﭘـﻞ‬ ‫ﻛـﻪ‬ ‫داﻧـﻴﻢ‬ ‫ﻣﻲ‬ ‫ﻓﺸﺎر‬ ‫اﻋﻤﺎل‬ ‫از‬ ‫ﻗﺒﻞ‬ ‫ﭘﻞ‬ ‫ﻧﻤﻮدن‬ ‫ﻛﺎﻟﻴﺒﺮه‬ ‫ﺑﺮاي‬ ‫و‬ ‫اﻣﺮ‬ ‫وﺗﺴـﺘﻮن‬ ‫ﭘـﻞ‬ ‫از‬ ‫ﺣﺎﺻـﻞ‬ ‫اﻫﻤـﻲ‬ ‫ﺗﻐﻴﻴﺮات‬ ‫ﺑﺮآﻳﻨﺪ‬ ‫و‬ ‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫ﺗﻌﺎدل‬ ‫ﺣﺎﻟﺖ‬ ‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫ﺻﻔﺮ‬ ‫ﺑﺮاﺑﺮ‬.‫ﻣﻘـ‬ ‫ﺳﭙﺲ‬‫ﺗﻐﻴﻴـﺮات‬ ‫ﺑﺮﺣﺴـﺐ‬ ‫را‬ ‫اﻋﻤـﺎﻟﻲ‬ ‫ﻓﺸـﺎر‬ ‫ﺎدﻳﺮ‬ ‫دﻫﻴﻢ‬ ‫ﻣﻲ‬ ‫ﻧﺴﺒﺖ‬ ‫ﻓﻮق‬ ‫ﻓﺸﺎر‬ ‫ﺑﻪ‬ ‫را‬ ‫ﺗﻌﺎدل‬ ‫ﺣﺎﻟﺖ‬ ‫از‬ ‫ﭘﻞ‬ ‫اﻧﺤﺮاف‬.‫ﺗﺮﺗﻴﺐ‬ ‫ﺑﺪﻳﻦ‬ ‫اﻟﻜﺘﺮﻳﻜﻲ‬ ‫ﺻﻮرت‬ ‫ﺑﻪ‬ ‫را‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﺑﻪ‬ ‫وارده‬ ‫ﻣﻜﺎﻧﻴﻜﻲ‬ ‫ﻓﺸﺎر‬ ‫ﺑﻮد‬ ‫ﺧﻮاﻫﻴﻢ‬ ‫ﻗﺎدر‬ ‫ﻛﻨﻴﻢ‬ ‫ﻣﻲ‬ ‫آﺷﻜﺎر‬.‫ﺷﻌﺎﻋﻲ‬ ‫ﺗﻨﺶ‬ ‫ﺑﺮاي‬rσ‫ﺗﻐﻴﻴـﺮات‬ ‫از‬ ‫ﻧﺎﺷـﻲ‬r‫اﻧﺤـﺮاف‬ ‫ﺑﻪ‬ ‫ﻧﺴﺒﺖ‬‫دارﻳﻢ‬ ‫را‬ ‫زﻳﺮ‬ ‫راﺑﻄﻪ‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﻣﺮﻛﺰ‬: )2(( ) ( ) 2 2 2 2 3 3 1 8 r Pa r h a σ ν ν   = ± + − −     ‫در‬ ‫ﺗﻨﺶ‬ ‫ﻣﺎﻛﺰﻳﻤﻢ‬ ‫ﺑﺮاي‬r=0‫دارﻳﻢ‬: )3(( )max 2 2 3 1 4 r Pa h σ ν= ± + ‫ﺷﻜﻞ‬ ‫ﺑﻪ‬ ‫ﺗﻮﺟﻪ‬ ‫ﺑﺎ‬ ‫ﻫﻤﭽﻨﻴﻦ‬ ‫و‬)4(‫ﻛـﻪ‬ ‫ﺷـﻮد‬ ‫ﻣﻲ‬ ‫ﺻﻔﺮ‬ ‫ﺷﻌﺎﻋﻲ‬ ‫ﺗﻨﺶ‬ ‫زﻣﺎﻧﻲ‬ ‫ﺑﺮاي‬r‫ﺑﺎﺷﻴﻢ‬ ‫داﺷﺘﻪ‬: )4(1 2((1 )(3 ))r R µ µ= + + ‫ﻣﻤﺎﺳﻲ‬ ‫ﺗﻨﺸﻬﺎي‬ ‫ﺑﺮاي‬ ‫ﺗﺮﺗﻴﺐ‬ ‫ﻫﻤﻴﻦ‬ ‫ﺑﻪ‬tσ‫داﺷﺖ‬ ‫ﺧﻮاﻫﻴﻢ‬ ‫ﻧﻴﺰ‬: )5(( ) ( ) 2 2 2 2 3 3 1 1 8 t Pa r h a σ ν ν   = ± + − +     ‫در‬ ‫ﺗﻨﺶ‬ ‫اﻳﻦ‬ ‫ﻣﺎﻛﺰﻳﻤﻢ‬ ‫ﺑﺮاي‬ ‫و‬r=0‫دارﻳﻢ‬: )6(( )max 2 2 3 1 4 t Pa h σ ν= ± + ‫ﺷﻜﻞ‬5:‫ﻓﺸﺎر‬ ‫ﺳﺎزي‬ ‫آﺷﻜﺎر‬ ‫ﺟﻬﺖ‬ ‫وﺗﺴﺘﻮن‬ ‫ﭘﻞ‬ ‫ﻓﺸﺎر‬ ‫ﺳﻨﺴﻮر‬ ‫داﺧﻞ‬ ‫در‬ ‫ﭘﻴﺰو‬ ‫ﻣﻘﺎوﻣﺘﻬﺎي‬ ‫ﮔﺬاري‬ ‫ﻻﻳﻪ‬ ‫ﺑﺎ‬ ‫دﻳﺎﻓﺮاﮔﻤﻲ‬ ‫ﺳﻨﺴﻮر‬ MEMS‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫ﺳﺎﺧﺖ‬ ‫ﻗﺎﺑﻞ‬ ‫ﺳﻴﻠﻴﻜﻮﻧﻲ‬ ‫ﻣﺎﺷﻴﻨﺮي‬ ‫ﻣﻴﻜﺮو‬ ‫روش‬ ‫ﺑﺎ‬.‫اﻳﻦ‬ ‫ﻛـﻪ‬ ‫ﻣﺤﻠـﻲ‬ ‫در‬ ‫و‬ ‫ﺳـﻴﻠﻴﻜﻮﻧﻲ‬ ‫دﻳـﺎﻓﺮاﮔﻢ‬ ‫روي‬ ‫داﭘﻴﻨـﮓ‬ ‫ﻋﻤـﻞ‬ ‫ﺗﻮﺳـﻂ‬ ‫ﻛﺎر‬ ‫ﺑﻴﺸﺘﺮ‬‫ﺷﻮد‬ ‫ﻣﻲ‬ ‫اﻳﺠﺎد‬ ‫اﻳﻢ‬ ‫آورده‬ ‫ﺑﺪﺳﺖ‬ ‫را‬ ‫ﺗﻨﺶ‬ ‫ﻳﻦ‬.‫ﻗـﺮار‬ ‫ﭘﻴﺰو‬ ‫ﻣﻘﺎوﻣﺘﻬﺎي‬ ‫ﺷﻜﻞ‬ ‫ﺑﻪ‬ ‫ﺗﻮﺟﻪ‬ ‫ﺑﺎ‬ ‫ﺳﻨﺴﻮر‬ ‫در‬ ‫ﺷﺪه‬ ‫داده‬)5(‫ﺷـﻮد‬ ‫ﻣـﻲ‬ ‫ﺑﺴﺘﻪ‬ ‫ﭘﻞ‬ ‫ﺣﺎﻟﺖ‬ ‫ﺑﻪ‬. ‫ﺗـﺎ‬ ‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫ﺛﺎﺑﺖ‬ ‫ﺟﺮﻳﺎن‬ ‫ﻣﻨﺒﻊ‬ ‫ﻳﻚ‬ ‫ﭘﻞ‬ ‫اﻳﻦ‬ ‫ﺗﻐﺬﻳﻪ‬ ‫ﻣﻨﺒﻊ‬ ‫ﺷﻜﻞ‬ ‫ﺑﻪ‬ ‫ﺗﻮﺟﻪ‬ ‫ﺑﺎ‬ ‫ﺑﺎﺷـﺪ‬ ‫داﺷـﺘﻪ‬ ‫ﻛﻤﺘـﺮي‬ ‫ﺗـﺎﺛﻴﺮ‬ ‫ﺳﻨﺴﻮر‬ ‫ﻛﺎرﻛﺮد‬ ‫روي‬ ‫ﻣﺤﻴﻄﻲ‬ ‫ﺗﻐﻴﻴﺮات‬.‫ﺑـﻪ‬ ‫ﺟﻬﺖ‬ ‫ﺗﺮﺗﻴﺐ‬ ‫ﻫﻤﻴﻦ‬‫ﺗﻐﻴﻴـﺮات‬ ‫ﺑـﻪ‬ ‫ﺗﻮﺟـﻪ‬ ‫ﺑـﺎ‬ ‫ﺳﻨﺴـﻮر‬ ‫ﺣﺴﺎﺳﻴﺖ‬ ‫ﻣﺤﺎﺳﺒﻪ‬ ‫ﭘﻴـﺰو‬ ‫ﻣﻘﺎوت‬ ‫ﺑﻪ‬ ‫ﻧﺴﺒﺖ‬ ‫ﭘﻞ‬ ‫ﻣﻘﺎوﻣﺖ‬( )R R ∆‫ﻣﻘـﺎوﻣﺘﻲ‬ ‫ﺗﻐﻴﻴـﺮات‬ ‫ﻧـﻮع‬ ‫دو‬ ‫از‬ ‫اﻧﺪ‬ ‫ﻋﺒﺎرت‬ ‫ﻛﻪ‬ ‫داﺷﺖ‬ ‫ﺧﻮاﻫﻴﻢ‬: ‫ﻣﻤﺎﺳﻲ‬ ‫ﻫﺎي‬ ‫ﻣﻘﺎوﻣﺖ‬ ‫ﺗﻐﻴﻴﺮات‬ )7(t t r r t R R π σ π σ ∆  = +    ‫ﺷﻌﺎﻋﻲ‬ ‫ﻫﺎي‬ ‫ﻣﻘﺎوﻣﺖ‬ ‫ﺗﻐﻴﻴﺮات‬ )8(t r r t r R R π σ π σ ∆  = +    ‫اﻳﻨﺠﺎ‬ ‫در‬tπ‫و‬rπ‫ﺑﺎﺷﻨﺪ‬ ‫ﻣﻲ‬ ‫ﮔﺬار‬ ‫ﺗﺎﺛﻴﺮ‬ ‫ﻋﺮﺿﻲ‬ ‫و‬ ‫ﻃﻮﻟﻲ‬ ‫ﺿﺮاﻳﺐ‬ ‫ﺗﺮﺗﻴﺐ‬ ‫ﺑﻪ‬. ‫اﺳـﺖ‬ ‫ﻣﺤﺎﺳـﺒﻪ‬ ‫ﻗﺎﺑـﻞ‬ ‫و‬ ‫داﺷﺘﻪ‬ ‫ﺑﺴﺘﮕﻲ‬ ‫وﺗﺴﺘﻮن‬ ‫ﭘﻞ‬ ‫ﺧﻮاص‬ ‫ﺑﻪ‬ ‫ﻛﻪ‬.‫ﺟﻬـﺖ‬ ‫دارﻳﻢ‬ ‫ﭘﻞ‬ ‫ﻣﻘﺎوﻣﺖ‬ ‫ﺗﻐﻴﻴﺮات‬ ‫ﺑﺎ‬ ‫ﭘﻞ‬ ‫از‬ ‫ﺧﺮوﺟﻲ‬ ‫وﻟﺘﺎژ‬ ‫راﺑﻄﻪ‬ ‫آوردن‬ ‫ﺑﺪﺳﺖ‬: )8(1 3 2 4 1 2 3 4 o in R R R R V I R R R R − = ⋅ + + + ‫ﻣﻌﺎدﻟﻪ‬ ‫اﻳﻦ‬ ‫در‬Iin‫و‬ ‫ﭘﻞ‬ ‫ﺑﻪ‬ ‫ورودي‬ ‫ﺛﺎﺑﺖ‬ ‫ﺟﺮﻳﺎن‬Vo‫ﺧﺮوﺟﻲ‬ ‫ﺗﻔﺎﺿﻠﻲ‬ ‫وﻟﺘﺎژ‬ ‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫ﭘﻞ‬.‫ﺷـﻮد‬ ‫ﻣـﻲ‬ ‫اﻋﻤـﺎل‬ ‫ﺳﻨﺴـﻮر‬ ‫ﺑـﺮ‬ ‫ﻓﺸـﺎر‬ ‫ﻛـﻪ‬ ‫وﻗﺘﻲ‬R1‫و‬R3 ‫ﺧﺮوﺟــﻲ‬ ‫در‬ ‫وﻟﺘــﺎژ‬ ‫اﻓــﺰاﻳﺶ‬ ‫ﺑﺎﻋــﺚ‬ ‫و‬ ‫ﺷــﺪ‬ ‫ﺧﻮاﻫــﺪ‬ ‫ﻣﺜﺒــﺖ‬ ‫ﻣﻘﺪارﺷــﺎن‬ ‫ﺷﻮﻧﺪ‬ ‫ﻣﻲ‬.‫ﭘﻞ‬ ‫دﻳﮕﺮ‬ ‫ﻃﺮف‬ ‫در‬R2‫و‬R4‫و‬ ‫ﺷـﺪ‬ ‫ﺧﻮاﻫـﺪ‬ ‫ﻣﻨﻔـﻲ‬ ‫ﻣﻘﺪارﺷـﺎن‬ ‫ﺷﻮﻧﺪ‬ ‫ﻣﻲ‬ ‫ﺧﺮوﺟﻲ‬ ‫در‬ ‫وﻟﺘﺎژ‬ ‫ﻛﺎﻫﺶ‬ ‫ﺑﺎﻋﺚ‬]9,4[. 4-‫ﻣﻮدال‬ ‫آﻧﺎﻟﻴﺰ‬ ‫و‬ ‫ﻣﻜﺎﻧﻴﻜﻲ‬ ‫ﺳﺎزي‬ ‫ﻣﺪل‬ ‫ﺑـﺎ‬ ‫ﻣﺤﺎﺳـﺒﻪ‬ ‫ﻣـﻮرد‬ ‫ﻓﺸﺎر‬ ‫رﻧﺞ‬ ‫ﺑﺮاي‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﺻﻔﺤﻪ‬ ‫ﺳﺎزي‬ ‫ﻣﺪل‬ ‫ﺟﻬﺖ‬ ‫اﻓﺰار‬ ‫ﻧﺮم‬ ‫از‬ ‫اﺳﺘﻔﺎده‬ANSYS‫ﺳﻨﺴـﻮر‬ ‫اﻳﻦ‬ ‫ﺑﺮاي‬ ‫را‬ ‫ﻣﺤﺪود‬ ‫اﻟﻤﺎن‬ ‫آﻧﺎﻟﻴﺰ‬ ، ‫دادﻳﻢ‬ ‫اﻧﺠﺎم‬.‫اﻟﻤﺎن‬ ‫از‬ ‫ﻛﺎر‬ ‫اﻳﻦ‬ ‫ﺑﺮاي‬SOLID95‫دﻗـﺖ‬ ‫ﺑـﺎ‬ ‫اﻟﻤـﺎن‬ ‫ﻳـﻚ‬ ‫ﻛﻪ‬ ‫داراي‬ ‫و‬ ‫اﺳـﺖ‬ ‫ﺑﻌـﺪي‬ ‫ﺳـﻪ‬ ‫ﺑﺎﻻي‬20NODE‫ﺑـﺎ‬3‫ﻫـﺮ‬ ‫در‬ ‫آزادي‬ ‫درﺟـﻪ‬ NODE‫اﻳــﻢ‬ ‫ﻧﻤــﻮده‬ ‫اﺳــﺘﻔﺎده‬ ‫ﺑﺎﺷــﺪ‬ ‫ﻣــﻲ‬.‫ﺧــﻮاص‬ ‫داراي‬ ‫اﻟﻤــﺎن‬ ‫اﻳــﻦ‬ ‫ﭘﻼﺳﺘﻴﺴﻴﺘﻪ‬8 ‫ﺧﺰش‬ ،9 ‫ﺻﻠﺐ‬ ‫ﺗﻨﺶ‬ ،10 ‫زﻳـﺎد‬ ‫ﺧﻤـﺶ‬ ‫ﺗﺤﻤـﻞ‬ ،11 ‫ﺗﺤﻤـﻞ‬ ‫و‬ ‫ﺑﺎﻻ‬ ‫ﻛﺮﻧﺸﻬﺎي‬12 ‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫دارا‬ ‫را‬.‫اوﻟﻴﻪ‬ ‫ﺷﻜﻞ‬ ‫ﺗﻐﻴﻴﺮ‬ ‫ﻋﺪم‬ ‫ﻗﺎﺑﻠﻴﺖ‬ ‫ﻫﻤﭽﻨﻴﻦ‬ ‫دارد‬ ‫را‬ ‫ﻧﺎﻣﻨﻈﻢ‬ ‫ﻓﺮﻣﻬﺎي‬ ‫ﺗﻐﻴﻴﺮ‬ ‫ﻧﺘﻴﺠﻪ‬ ‫در‬ ‫دﻗﺖ‬ ‫ﻛﺎﻫﺶ‬ ‫و‬.‫ﻧﺘ‬ ‫در‬‫ﺑـﺮاي‬ ‫ﻴﺠـﻪ‬ ‫اﻋﻤـﺎل‬ ‫اﺛـﺮ‬ ‫در‬ ‫ﺳﺎزي‬ ‫ﻣﺪل‬ ‫ﺑﺮاي‬ ‫ﻣﻨﺎﺳﺐ‬ ‫و‬ ‫ﺑﻮده‬ ‫ﺳﺎزﮔﺎر‬ ً‫ﻼ‬‫ﻛﺎﻣ‬ ‫ﺷﻜﻞ‬ ‫ﺗﻐﻴﻴﺮ‬ ‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫دارا‬ ‫را‬ ‫ﻣﺮزي‬ ‫اﻧﺤﻨﺎﻫﺎي‬.‫ﻫﻤﭽﻨـﻴﻦ‬ ‫و‬ ‫دﻳـﺎﻓﺮاﮔﻢ‬ ‫ﺿـﺨﺎﻣﺖ‬ ‫و‬ ‫ﻗﻄﺮ‬ ‫ﭘﺎﺳﺦ‬ ،‫ﻛﺎرﻛﺮد‬ ،‫رﻧﺞ‬ ‫در‬ ‫ﻣﺴﺘﻘﻴﻤﻲ‬ ‫ﺗﺎﺛﻴﺮ‬ ‫ﭘﻴﺰو‬ ‫ﻫﺎي‬ ‫ﻣﻘﺎوﻣﺖ‬ ‫ﺟﺎﮔﺬاري‬ ‫ﻧﺤﻮه‬ ‫دارد‬ ‫را‬ ‫ـﻮر‬‫ـ‬‫ﺳﻨﺴ‬ ‫ـﻲ‬‫ـ‬‫ﺧﻄ‬ ‫ـﻪ‬‫ـ‬‫ﻧﺎﺣﻴ‬ ‫و‬ ‫ـﻴﺖ‬‫ـ‬‫ﺣﺴﺎﺳ‬ ،‫ـﻲ‬‫ـ‬‫ﻓﺮﻛﺎﻧﺴ‬.‫ـﺎزي‬‫ـ‬‫ﺳ‬ ‫ـﺒﻴﻪ‬‫ـ‬‫ﺷ‬ 1R R− ∆ 4R R−∆ 3R R−∆ 2R R− ∆ outV ‫ﺛﺎﺑﺖ‬ ‫ﺟﺮﻳﺎن‬ ‫ﻣﻨﺒﻊ‬
  4. 4. ‫ﻣﻴﻜﺮوﻣﺎﺷﻨﻴﻜﺎري‬ ‫و‬ ‫رﻳﺰﻓﻨﺎوري‬ ‫اﻟﻤﻠﻠﻲ‬ ‫ﺑﻴﻦ‬ ‫ﻛﻨﻔﺮاﻧﺲ‬ ‫اوﻟﻴﻦ‬ICMEMS2014 ‫ﻓﻨﺎوري‬ ‫ﭘﮋوﻫﺸﻜﺪه‬،‫اﻣﻴﺮﻛﺒﻴﺮ‬ ‫ﺻﻨﻌﺘﻲ‬ ‫داﻧﺸﮕﺎه‬ ‫ﻧﻮ‬ ‫ﻫﺎي‬29‫و‬30‫ﺑﻬﻤﻦ‬1392 ‫دﻳﺎﻓﺮ‬‫ﺑﺮوﻧـﻮ‬ ‫ﻣﺤـﺎﻓﻆ‬ ‫ﻫﺎي‬ ‫ﻻﻳﻪ‬ ‫ﺑﺮاي‬ ‫ﻃﺮاﺣﻲ‬ ‫ﻣﺨﺘﻠﻒ‬ ‫ﻫﺎي‬ ‫ﺷﻜﻞ‬ ‫ﺑﺮاي‬ ‫اﮔﻢ‬ ‫در‬ ‫ﺳﻴﻠﻴﻜﻮن‬ ‫ﭘﻠﻲ‬ ‫ﻫﺎي‬ ‫ﻻﻳﻪ‬ ‫و‬ ‫ﺳﻴﻠﻴﻜﺎت‬ANSYS‫اﺳـﺖ‬ ‫ﮔﺮﻓﺘﻪ‬ ‫اﻧﺠﺎم‬.‫در‬ ‫اﻟﻤـﺎن‬ ‫ﺳـﺎزي‬ ‫ﻣﺪل‬ ‫ﻣﺨﺘﻠﻒ‬ ‫ﻫﺎي‬ ‫ﺿﺨﺎﻣﺖ‬ ‫و‬ ‫ﻗﻄﺮﻫﺎ‬ ‫ﺑﺮاي‬ ‫ﺳﺎزي‬ ‫ﺷﺒﻴﻪ‬ ‫اﻳﻦ‬ ‫ﺧﻄـﻲ‬ ‫ﻛـﺎرﻛﺮد‬ ‫ﻟﺤـﺎظ‬ ‫از‬ ‫ﺣﺎﻟـﺖ‬ ‫ﺗـﺮﻳﻦ‬ ‫ﺑﻬﻴﻨـﻪ‬ ‫ﺗـﺎ‬ ‫اﻳﻢ‬ ‫داده‬ ‫اﻧﺠﺎم‬ ‫ﻣﺤﺪود‬ ‫آورﻳﻢ‬ ‫ﺑﺪﺳﺖ‬ ‫را‬ ‫ﺳﻨﺴﻮر‬.‫و‬ ‫ﺗﺌـﻮري‬ ‫ﻣﺤﺎﺳـﺒﺎت‬ ‫ﺑـﻪ‬ ‫ﺗﻮﺟـﻪ‬ ‫ﺑﺎ‬ ‫ﻣﻨﻈﻮر‬ ‫ﺑﺪﻳﻦ‬ ‫ﺷﻜﻞ‬ ‫در‬ ‫ﻛﻪ‬ ‫ﺳﺎزي‬ ‫ﺷﺒﻴﻪ‬ ‫از‬ ‫اﺳﺘﺨﺮاﺟﻲ‬ ‫ﻣﻨﺤﻨﻲ‬)14(،‫ﻛﻨﻴﺪ‬ ‫ﻣﻲ‬ ‫ﻣﻼﺣﻈﻪ‬ ‫ﺗـﺎ‬ ‫ﮔﺮﻓﺘﻪ‬ ‫ﻧﻈﺮ‬ ‫در‬ ‫ﻫﺎي‬ ‫ﺗﻘﺮﻳﺐ‬ ‫ﺑﻪ‬ ‫ﺗﻮﺟﻪ‬ ‫ﺑﺎ‬ ‫ﻣﺤﺎﺳﺒﺎت‬ ‫اﻳﻦ‬ ‫ﻛﻪ‬ ‫ﮔﻔﺖ‬ ‫ﺑﺎﻳﺴﺘﻲ‬ ‫ﻓﺸﺎر‬MPa209/11‫ﻓﺸـﺎرﻫﺎي‬ ‫ﺑـﺮاي‬ ‫و‬ ‫ﻛـﺮده‬ ‫ﻋﻤـﻞ‬ ‫ﺧﻄـﻲ‬ ‫ﺻـﻮرت‬ ‫ﺑﻪ‬ ‫ﺗﻘﺮﻳﺐ‬ ‫ﺑﺎ‬ ‫آن‬ ‫از‬ ‫ﺑﺰرﮔﺘﺮ‬25/1%‫ﺣﺎﻟﺖ‬ ‫از‬ ‫اﻧﺤﺮاف‬‫ﻛـﻪ‬ ‫آﻣـﺪه‬ ‫ﺑﺪﺳﺖ‬ ‫ﺧﻄﻲ‬ ‫ﻓﺸﺎر‬ ‫ﺗﺎ‬MPa25‫ﺑﺎﺷـﺪ‬ ‫ﻣـﻲ‬ ‫ﻗﺒﻮل‬ ‫ﻗﺎﺑﻞ‬ ‫ﻛﺎﻟﻴﺒﺮاﺳﻴﻮن‬ ‫و‬ ‫ﻣﻬﻨﺪﺳﻲ‬ ‫ﻧﻈﺮ‬ ‫از‬. ‫ﻛـﻪ‬ ‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫ﻣﺘﻐﻴﺮ‬ ‫ﻣﺨﺘﻠﻒ‬ ‫ﻫﺎي‬ ‫ﺿﺨﺎﻣﺖ‬ ‫و‬ ‫ﻗﻄﺮﻫﺎ‬ ‫ﺑﺮاي‬ ‫ﻣﻘﺪار‬ ‫اﻳﻦ‬ ‫اﻟﺒﺘﻪ‬ ‫ﻗﻄـﺮ‬ ‫ﺑﺮاي‬ ‫ﺣﺎﻟﺖ‬ ‫ﺑﻬﺘﺮﻳﻦ‬2R=4mm‫ﺿـﺨﺎﻣﺖ‬ ‫و‬h=0.4mm‫ﺑﺪﺳـﺖ‬ ‫ـﺖ‬‫ـ‬‫اﺳ‬ ‫ـﺪه‬‫ـ‬‫آﻣ‬.‫ـﻜﻞ‬‫ـ‬‫ﺷ‬)6(‫ـﺎﻓﺮاﮔﻢ‬‫ـ‬‫دﻳ‬ ‫ـﺪود‬‫ـ‬‫ﻣﺤ‬ ‫ـﺎن‬‫ـ‬‫اﻟﻤ‬ ‫ـﺪل‬‫ـ‬‫ﻣ‬ ‫ـﺪه‬‫ـ‬‫دﻫﻨ‬ ‫ـﺎن‬‫ـ‬‫ﻧﺸ‬ ‫ﻣﻲ‬‫ﺑﺎﺷﺪ‬.‫ﻣﺤﻮر‬ ‫راﺳﺘﺎي‬ ‫در‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﻣﺮﻛﺰ‬ ‫از‬ ‫اﻧﺤﺮاف‬Z‫ﻇﺎﻫﺮ‬ ‫زﻣﺎﻧﻲ‬ ‫ﻓﻘﻂ‬ ‫ﻓﺸﺎر‬ ‫ﺑﻪ‬ ‫ﻛﻪ‬ ‫ﺷﻮد‬ ‫ﻣﻲ‬P=25MPa‫ﺷـﻜﻞ‬ ‫در‬ ‫ﻣﻮﺿـﻮع‬ ‫اﻳـﻦ‬ ‫ﻛﻪ‬ ‫ﺑﺮﺳﻴﻢ‬)7( ‫اﺳﺖ‬ ‫ﻣﺸﺨﺺ‬.‫در‬ ‫ﻧﻴﺰ‬ ‫را‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﻃﻮل‬ ‫ﺑﻪ‬ ‫ﻧﺴﺒﺖ‬ ‫ﻣﺮﻛﺰ‬ ‫از‬ ‫اﻧﺤﺮاف‬ ‫ﻣﻨﺤﻨﻲ‬ ‫ﺷﻜﻞ‬ ‫ﻣﻨﺤﻨﻲ‬)10(‫اﺳـﺖ‬ ‫ﺷـﺪه‬ ‫داده‬ ‫ﻧﺸﺎن‬.‫ﺷـﻜﻞ‬ ‫از‬)7(‫ﺷـﻜﻞ‬ ‫و‬)11( ‫اﻧﺤﺮاف‬ ‫ﻣﻴﺰان‬ ‫اﻧﺪازه‬‫ﺑﺮاﺑﺮ‬ ‫ﻣﺮﻛﺰ‬ ‫از‬w=7.82µm‫اﺳﺖ‬ ‫آﻣﺪه‬ ‫ﺑﺪﺳﺖ‬.‫ﺷﻜﻞ‬ ‫ﻫﺎي‬)8(‫اﻧﺘﺨـﺎﺑﻲ‬ ‫ﺣﺮﻛﺖ‬ ‫ﻣﺴﻴﺮ‬ ‫ﺑﻪ‬ ‫ﻧﺴﺒﺖ‬ ‫ﺷﻌﺎﻋﻲ‬ ‫ﺗﻨﺶ‬ ‫دﻫﻨﺪه‬ ‫ﻧﺸﺎن‬ ‫ﻧﻴﺰ‬ ‫ﻣﺤﻮر‬ ‫راﺳﺘﺎي‬ ‫در‬X‫دﻫﺪ‬ ‫ﻣﻲ‬ ‫ﻧﺸﺎن‬ ‫را‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﻗﻄﺮ‬ ‫روي‬ ‫ﺑﺮ‬.‫ﺑـﻪ‬ ‫ﺗﻮﺟـﻪ‬ ‫ﺑﺎ‬ ‫ﻻﻳﻪ‬ ‫اﺗﺼﺎل‬ ‫ﺑﺎ‬ ‫ﻣﺮزي‬ ‫ﻣﺤﻞ‬ ‫در‬ ‫ﻣﺎﻛﺰﻳﻤﻢ‬ ‫ﻛﺮﻧﺶ‬ ‫و‬ ‫ﺗﻨﺶ‬ ‫ﻣﻴﺰان‬ ‫ﺳﺎزي‬ ‫ﺷﺒﻴﻪ‬ ‫ﺑﺮوﻧﻮﺳﻴﻠﻴ‬ ‫ﻋﺎﻳﻖ‬ ‫ﺑﺎ‬ ‫ﺳﻴﻠﻴﻜﻮن‬ ‫ﭘﻠﻲ‬‫ﺑﺎﺷـﺪ‬ ‫ﻣـﻲ‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﻜﺎت‬.‫ﺗـﻨﺶ‬ ‫ﻣﻘـﺪار‬ ‫از‬ ‫ﻧﻴـﺰ‬ ‫ﺧـﻮد‬ ‫ﻣﻘـﺪار‬ ‫ﺣـﺪاﻛﺜﺮﻳﻦ‬ ‫ﺗﺎ‬ ‫ﻣﺮﻛﺰ‬ ‫از‬ ‫آﻣﺪه‬ ‫ﺑﺪﺳﺖ‬MPa316-‫ﺗـﺎ‬ MPa485‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬.‫از‬ ‫ﻛﺮﻧﺶ‬ ‫ﺑﺮاي‬ ‫ﻣﻘﺪار‬ ‫اﻳﻦ‬001554/0‫ﺗﺎ‬00189/0 ‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫ﻣﺘﻐﻴﺮ‬.‫ﺷﻜﻞ‬ ‫ﻣﻨﺤﻨﻲ‬)10(‫ﺗـﻨﺶ‬ ‫اﺧـﺘﻼف‬ ‫دﻫﻨـﺪه‬ ‫ﻧﺸﺎن‬X-Y ‫دﻫﺪ‬ ‫ﻣﻲ‬ ‫ﻧﺸﺎن‬.‫ﺗـ‬ ‫اﻳـﻦ‬ ‫ﻣـﺎﻛﺰﻳﻤﻢ‬ ‫ﻛﻨﻴـﺪ‬ ‫ﻣـﻲ‬ ‫ﻣﻼﺣﻈـﻪ‬ ‫ﭼﻨﺎﻧﭽﻪ‬ ‫و‬‫در‬ ‫ﻨﺶ‬ ‫ﻓﺸﺎر‬ ‫در‬ ‫ﺷﻮد‬ ‫ﻣﻲ‬ ‫داده‬ ‫ﻗﺮار‬ ‫ﭘﻴﺰو‬ ‫ﻫﺎي‬ ‫ﻣﻘﺎوﻣﺖ‬ ‫ﻛﻪ‬ ‫ﻣﺤﻠﻲ‬MPa25‫ﺑﺮاﺑﺮ‬ MPa284‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬.‫ﻣـﺎﻛﺰﻳﻤﻢ‬ ،‫اﺳـﺖ‬ ‫ﻣﺸـﺨﺺ‬ ‫ﺷﻜﻠﻬﺎ‬ ‫اﻳﻦ‬ ‫از‬ ‫ﻛﻪ‬ ‫آﻧﭽﻪ‬ ‫ﻳﻌﻨـﻲ‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﺑﻴﺮوﻧﻲ‬ ‫ﻗﺴﻤﺖ‬ ‫در‬ ‫ﻣﺤﻮري‬ ‫ﺗﻨﺶ‬MPa284-‫ﻛـﻪ‬ ‫ﺑـﻮده‬ ‫ﻣﺴـﻄﺢ‬ ‫ﺻـﻮرت‬ ‫ﺑـﻪ‬ ‫و‬ ‫ﻛﻮﭼـﻚ‬ ‫ﺧﻴﻠـﻲ‬ ‫ﺗﻨﺶ‬ ‫اﻳﻦ‬ ‫ﻛﻪ‬ ‫اﺳﺖ‬ ‫اﻳﻦ‬ ‫از‬ ‫ﻧﺸﺎن‬13 ‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬.‫ﺷـﻜﻞ‬)14(‫ﻓﺸـﺎر‬ ‫ﻣﻨﺤﻨـﻲ‬ ‫ﻧﻴـﺰ‬P=(0-25)MPa‫در‬ ‫ﻫـﻢ‬ ‫را‬ ‫را‬ ‫ﻣﺮﻛـﺰ‬ ‫از‬ ‫اﻧﺤـﺮاف‬ ‫ﺣﺴـﺐ‬ ‫ﺑﺮ‬ ‫ﺳﺎزي‬ ‫ﺷﺒﻴﻪ‬ ‫ﺣﺎﻟﺖ‬ ‫در‬ ‫ﻫﻢ‬ ‫و‬ ‫ﺗﺌﻮري‬ ‫ﺣﺎﻟﺖ‬ ‫ﻧﺸﺎن‬‫دﻫﺪ‬ ‫ﻣﻲ‬.‫ﻣﻘـﺪار‬ ‫دﻫﻨﺪه‬ ‫ﻧﺸﺎن‬ ‫رﻧﮓ‬ ‫آﺑﻲ‬ ‫ﺑﺮﻳﺪه‬ ‫ﺧﻂ‬ ‫ﻣﻨﺤﻨﻲ‬ ‫اﻳﻦ‬ ‫در‬ ‫دﻫـﺪ‬ ‫ﻣـﻲ‬ ‫ﻧﺸـﺎن‬ ‫را‬ ‫ﻛﻮﭼﻚ‬ ‫اﻧﺤﺮاف‬ ‫ﺗﺌﻮري‬ ‫ﺗﻮﺳﻂ‬ ‫ﺷﺪه‬ ‫ﻣﺤﺎﺳﺒﻪ‬.‫ﺧـﻂ‬ ‫و‬ ‫ﺗﻮﺳﻂ‬ ‫رﻧﮓ‬ ‫ﻗﺮﻣﺰ‬ ‫ﺑﺮﻳﺪه‬ANSYS‫ﺑ‬‫اﺳـﺖ‬ ‫آﻣﺪه‬ ‫ﺪﺳﺖ‬.‫ﺑـﺎ‬ ‫ﺷـﻜﻞ‬ ‫اﻳـﻦ‬ ‫در‬ ‫اﻧﺤـﺮاف‬ ‫ﺑـﺎ‬ ‫ﻓﺸـﺎر‬ ‫راﺑﻄﻪ‬ ‫ﻛﻪ‬ ‫ﮔﺮﻓﺖ‬ ‫ﻧﺘﻴﺠﻪ‬ ‫ﺗﻮان‬ ‫ﻣﻲ‬ ‫ﻓﻮق‬ ‫ﺣﺎﻟﺖ‬ ‫دو‬ ‫ﻣﻘﺎﻳﺴﻪ‬ ‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫ﺧﻄﻲ‬ ‫راﺑﻄﻪ‬ ‫ﻳﻚ‬ ً‫ﺎ‬‫ﺗﻘﺮﻳﺒ‬. 5-‫ﺷﺪه‬ ‫ﺳﺎزي‬ ‫ﺷﺒﻴﻪ‬ ‫ﻫﺎي‬ ‫ﺷﻜﻞ‬ ‫و‬ ‫ﺟﺪول‬ ‫ﺣﺎﻟﺖ‬ ‫ﺑﺮاي‬ ‫ﻫﻢ‬ ‫ﺷﺪه‬ ‫ﻃﺮاﺣﻲ‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﻧﻮع‬ ‫ﭼﻬﺎر‬ ‫ﺑﺮاي‬ ‫آﻣﺪه‬ ‫ﺑﺪﺳﺖ‬ ‫ﻧﺘﺎﻳﺞ‬ ‫از‬ ‫ﺷﺪه‬ ‫اﺳﺘﺨﺮاج‬ ‫ﻫﺎي‬ ‫ﺗﺤﻠﻴﻞ‬ ‫ﻫﻢ‬ ‫و‬ ‫ﺗﺌﻮري‬ANSYS‫ﻣﻼﺣﻈﻪ‬ ‫زﻳﺮ‬ ‫ﺟﺪول‬ ‫در‬ ‫را‬ ‫ﻛﻨﻴﺪ‬ ‫ﻣﻲ‬. ‫ﺟﺪول‬1:‫ﻣﻘﺎ‬‫ﻳ‬‫ﺷﺒ‬ ‫ﺴﻪ‬‫ﻴ‬‫ﺗﺌﻮري‬ ‫ﺣﺎﻟﺖ‬ ‫ﺑﺎ‬ ‫ﺳﺎزي‬ ‫ﻪ‬ 2RP=4mm2RP=4mm2RP=2mm2RP=2mm ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫اﺑﻌﺎد‬ hP=0.4mmhP=0.2mmhP=0.4mmhP=0.2mm ٧٨/٢٣٤/٠٣٧/٧١٩٢/٨ ‫اﻧﺤﺮاف‬ ‫ﻣﺎﻛﺰﻳﻤﻢ‬ ‫ﺗﺌﻮري‬ ‫ﺣﺎﻟﺖ‬ )mµ( ٩٣/٣٣٩/٠٥٢٨٢/٧ ‫اﻧﺤﺮاف‬ ‫ﻣﺎﻛﺰﻳﻤﻢ‬ ANSYS )mµ( ٤٠٦١٠٦١١٥١٣٠٤ ‫ﺗﻨﺶ‬ ‫ﻣﺎﻛﺰﻳﻤﻢ‬ ANSYS )MPa( ‫اﻳﻦ‬ ‫از‬ ‫ﺷﺪه‬ ‫اﺳﺘﺨﺮاج‬ ‫ﻫﺎي‬ ‫ﻧﻤﻮدار‬ ‫و‬ ‫ﺳﺎزي‬ ‫ﻣﺪل‬ ‫ﺑﻪ‬ ‫ﻣﺮﺑﻮط‬ ‫ﻫﺎي‬ ‫ﺷﻜﻞ‬ ‫اداﻣﻪ‬ ‫در‬ ‫ﻛﻨﻴﺪ‬ ‫ﻣﻲ‬ ‫ﻣﻼﺣﻈﻪ‬ ‫را‬ ‫ﻫﺎ‬ ‫ﺳﺎزي‬ ‫ﺷﺒﻴﻪ‬. ‫ﺷﻜﻞ‬6:‫ﻣﺤﺪود‬ ‫اﻟﻤﺎن‬ ‫ﺑﺮاي‬ ‫دﻳﺎﻓﺮاﮔﻢ‬ ‫ﻣﺪل‬2R=4mm, h=0.4mm ‫ﺷﻜﻞ‬7:‫ﺟﺎﺑﺠﺎﻳﻲ‬W‫ﻓﺸﺎر‬ ‫در‬ ‫دﻳﺎﻓﺮاﮔﻢ‬P=25MPa 1 X Y Z MAR 17 2013 05:11:05 ELEMENTS 1 MN MX X Y Z 0 .869E-06 .174E-05 .261E-05 .348E-05 .435E-05 .521E-05 .608E-05 .695E-05 .782E-05 MAR 13 2013 10:31:24 NODAL SOLUTION STEP=1 SUB =1 TIME=1 USUM (AVG) RSYS=0 DMX =.782E-05 SMX =.782E-05
  5. 5. ‫ﻣﻴﻜﺮوﻣﺎﺷﻨﻴﻜﺎري‬ ‫و‬ ‫رﻳﺰﻓﻨﺎوري‬ ‫اﻟﻤﻠﻠﻲ‬ ‫ﺑﻴﻦ‬ ‫ﻛﻨﻔﺮاﻧﺲ‬ ‫اوﻟﻴﻦ‬ICMEMS2014 ‫ﻓﻨﺎوري‬ ‫ﭘﮋوﻫﺸﻜﺪه‬،‫اﻣﻴﺮﻛﺒﻴﺮ‬ ‫ﺻﻨﻌﺘﻲ‬ ‫داﻧﺸﮕﺎه‬ ‫ﻧﻮ‬ ‫ﻫﺎي‬29‫و‬30‫ﺑﻬﻤﻦ‬1392 ‫ﺷﻜﻞ‬8:‫راﺳﺘﺎي‬ ‫در‬ ‫ﺷﻌﺎﻋﻲ‬ ‫ﺗﻨﺶ‬X‫ﻓﺸﺎر‬ ‫در‬P=25MPa ‫ﺷﻜﻞ‬9:‫ﻣﺎ‬ ‫وون‬ ‫ﺗﻨﺶ‬‫ﻳ‬‫ﻓﺸﺎر‬ ‫در‬ ‫ﺰز‬P=25MPa ‫ﺷﻜﻞ‬10:‫ﺗﻮز‬‫ﻳ‬‫ﺗﻨﺶ‬ ‫ﻊ‬X-Y‫ﻣﺴ‬ ‫راﺳﺘﺎي‬ ‫در‬‫ﻴ‬‫ﺮ‬X ‫ﺷﻜﻞ‬11:‫ﻣ‬‫ﻴ‬‫ﺟﺎﺑﺠﺎ‬ ‫ﺰان‬‫ﻳ‬‫د‬ ‫ﻲ‬‫ﻳ‬‫راﺳﺘﺎي‬ ‫در‬ ‫ﺎﻓﺮاﮔﻢ‬Z ‫ﺷﻜﻞ‬12:‫ﺗﻮز‬‫ﻳ‬‫ﻣﺎ‬ ‫وون‬ ‫ﺗﻨﺶ‬ ‫ﻊ‬‫ﻳ‬‫ﺰز‬‫ﻣﺴ‬ ‫راﺳﺘﺎي‬ ‫در‬‫ﻴ‬‫ﺮ‬X ‫ﺷﻜﻞ‬13:‫ﺗﻮز‬‫ﻳ‬‫ﺗﻨﺶ‬ ‫ﻊ‬X , Y‫ﻣﺴ‬ ‫راﺳﺘﺎي‬ ‫در‬‫ﻴ‬‫ﺮ‬X 1 MNMX X Y Z -.316E+09 -.230E+09 -.144E+09 -.584E+08 .276E+08 .114E+09 .200E+09 .286E+09 .372E+09 .458E+09 MAR 13 2013 10:31:53 NODAL SOLUTION STEP=1 SUB =1 TIME=1 SX (AVG) RSYS=0 DMX =.782E-05 SMN =-.316E+09 SMX =.458E+09 1 MN MX X Y Z 52.284 .489E+08 .977E+08 .147E+09 .195E+09 .244E+09 .293E+09 .342E+09 .391E+09 .440E+09 MAR 13 2013 10:33:41 NODAL SOLUTION STEP=1 SUB =1 TIME=1 SEQV (AVG) DMX =.782E-05 SMN =52.284 SMX =.440E+09
  6. 6. ‫ﻣﻴﻜﺮوﻣﺎﺷﻨﻴﻜﺎري‬ ‫و‬ ‫رﻳﺰﻓﻨﺎوري‬ ‫اﻟﻤﻠﻠﻲ‬ ‫ﺑﻴﻦ‬ ‫ﻛﻨﻔﺮاﻧﺲ‬ ‫اوﻟﻴﻦ‬ICMEMS2014 ‫ﻓﻨﺎوري‬ ‫ﭘﮋوﻫﺸﻜﺪه‬،‫اﻣﻴﺮﻛﺒﻴﺮ‬ ‫ﺻﻨﻌﺘﻲ‬ ‫داﻧﺸﮕﺎه‬ ‫ﻧﻮ‬ ‫ﻫﺎي‬29‫و‬30‫ﺑﻬﻤﻦ‬1392 ‫ﺷﻜﻞ‬14:‫ﻏ‬ ‫اﻧﺤﺮاف‬ ‫ﻣﻨﺤﻨﻲ‬‫ﻴ‬‫از‬ ‫ﻓﺸﺎر‬ ‫ﺧﻄﻲ‬ ‫ﺮ‬0‫ﺗﺎ‬MPa25 6-‫ﻧﺘ‬‫ﻴ‬‫ﮔ‬ ‫ﺠﻪ‬‫ﻴ‬‫ﺮ‬‫ي‬ ‫راﺑﻄﻪ‬ ‫ﻳﻚ‬ ‫ﺷﺪ‬ ‫اﺛﺒﺎت‬ ‫ﻛﻪ‬ ‫ﻣﺮﻛﺰ‬ ‫از‬ ‫اﻧﺤﺮاف‬ ‫و‬ ‫ﻓﺸﺎر‬ ‫ﺑﻴﻦ‬ ‫راﺑﻄﻪ‬ ‫ﺑﻪ‬ ‫ﺗﻮﺟﻪ‬ ‫ﺑﺎ‬ ‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫ﺧﻈﻲ‬.‫ﺳﻨﺴـﻮر‬ ‫ﺳـﺎﺧﺖ‬ ‫ﺟﻬـﺖ‬ ‫ﺷﺪه‬ ‫اﺷﺎره‬ ‫ﻣﺮاﺣﻞ‬ ‫ﺑﻪ‬ ‫ﺗﻮﺟﻪ‬ ‫ﺑﺎ‬ ‫و‬ ‫ﺳـﺎﺧﺖ‬ ‫در‬ ‫ﻣﺮﺳـﻮم‬ ‫روش‬ ‫ﻳـﻚ‬ ‫ﻛـﻪ‬ ‫ﻣﻴﻜﺮوﻣﺎﺷـﻴﻨﺮي‬ ‫روش‬ ‫ﺑـﺎ‬ ‫ﻓﻮق‬ ‫ﻓﺸﺎر‬ ‫ﺳﻨﺴﻮرﻫﺎي‬MEMS‫آن‬ ‫ﻛﻮﭼـﻚ‬ ‫اﺑﻌﺎد‬ ‫ﺑﻪ‬ ‫ﺗﻮﺟﻪ‬ ‫ﺑﺎ‬ ‫ﺳﻨﺴﻮر‬ ‫اﻳﻦ‬ ،‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫ﻣﻨﺎﺳ‬ ‫ﺟﺎﻳﮕﺰﻳﻦ‬ ‫ﻳﻚ‬ ‫ﺗﻮاﻧﺪ‬ ‫ﻣﻲ‬‫ﺑﺎﺷﺪ‬ ‫آن‬ ‫ﺑﺎﻻي‬ ‫رﻧﺞ‬ ‫ﺑﻪ‬ ‫ﺗﻮﺟﻪ‬ ‫ﺑﺎ‬ ‫ﺻﻨﺎﻳﻊ‬ ‫در‬ ‫ﺐ‬. ‫ﻧﻔـﺖ‬ ‫ﺻﻨﻌﺖ‬ ‫ﻫﻤﭽﻮن‬ ‫ﺻﻨﺎﻳﻌﻲ‬ ‫در‬ ‫ﻛﻪ‬ ‫روش‬ ‫اﻳﻦ‬ ‫از‬ ‫اﺳﺘﻔﺎده‬ ‫ﺑﺎ‬ ‫اﺳﺖ‬ ‫اﻣﻴﺪ‬ ‫و‬ ‫ﺟﺎﻫﺎﻳﻲ‬ ‫در‬ ‫ﺧﺼﻮص‬ ‫ﺑﻪ‬ ‫ﻓﺸﺎر‬ ‫ﻛﻨﺘﺮل‬ ‫ﻣﺴﺎﻟﻪ‬ ‫اﻫﻤﻴﺖ‬ ‫دﻟﻴﻞ‬ ‫ﺑﻪ‬ ‫ﭘﺘﺮوﺷﻴﻤﻲ‬ ‫و‬ ‫ﺑـﺰرگ‬ ‫اﺑﻌـﺎد‬ ‫ﺑـﺎ‬ ‫ﻓﺸـﺎر‬ ‫ﺳﻨﺴـﻮرﻫﺎي‬ ‫ﻧﺼـﺐ‬ ‫و‬ ‫ﺑﻮده‬ ‫ﻻزم‬ ‫دﻗﻴﻖ‬ ‫ﻛﻨﺘﺮل‬ ‫ﻛﻪ‬ ‫ﻣﻨ‬ ‫ﺟﺎﻳﮕﺰﻳﻦ‬ ‫ﻳﻚ‬ ‫ﺗﻮاﻧﺪ‬ ‫ﻣﻲ‬ ،‫ﺑﺎﺷﺪ‬ ‫ﻣﻲ‬ ‫ﻣﺸﻜﻞ‬‫ﺑﺎﺷـﺪ‬ ‫ﺎﺳـﺐ‬.‫اﻳـﻦ‬ ‫ﻃﺮﻓـﻲ‬ ‫از‬ ‫رﺑﺎﺗﻴـﻚ‬ ‫ﻛﻨﺘﺮل‬ ‫ﺟﻤﻠﻪ‬ ‫از‬ ‫ﻣﺴﺎﺋﻠﻲ‬ ‫در‬ ‫آن‬ ‫اﺑﻌﺎد‬ ‫ﺑﻪ‬ ‫ﺗﻮﺟﻪ‬ ‫ﺑﺎ‬ ‫ﺗﻮاﻧﺪ‬ ‫ﻣﻲ‬ ‫ﺳﻨﺴﻮر‬ ‫ﻧﻤﺎﻳﺪ‬ ‫اﻳﻔﺎ‬ ‫را‬ ‫ﺑﺴﺰاﻳﻲ‬ ‫ﻧﻘﺶ‬. 7-‫ﻣﺮاﺟﻊ‬ [1] J. von Berg, C. Sonderegger, S. Bollhalder, C. Cavalloni, "Piezoresistive SOI-Pressure Sensor for High Pressure and High Temperature Applications, Sensor" 2005, Volume (I), pp. 33-38. [2] Andrzej M. Pawlak. "Sensors and actuators in mechatronics : design and applications", © 2007 by Taylor & Francis Group, LLC/ CRC Press is an imprint of Taylor & Francis Group, an Informal business [3] Stephen Beeby, Graham Ensell, Michael Kraft, Neil White "MEMS Mechanical Sensors", © 2004 ARTECH HOUSE, INC. 685 Canton Street Norwood, MA 02062 [4] Zhong Z et al, "Calibration of a piezoresistive stress sensor in (1 00) silicon test chips" in Proc. Elect. Packag. Tech Conf. 2002 pp 323-326. [5] Yan-Hong Zhang, Chen Yang, "A Novel Pressure Microsensor With 30-um-Thick Diaphragm and Meander- Shaped Piezoresistors Partially Distributed on High- Stress Bulk Silicon Region", IEEE Sensors J., vol.7, no.12, Dec.2007, pp.1742-1748. [6] V. Stankevič, Č. Šimkevičius. "Use of a shock tube in investigations of silicon micromachined peizoresistive pressure sensors", Sensors and Actuators A, 2000, 86: 58- 56. [7] Xudong Fang, Libo Zhao, Yulong Zhao, Zhuangde Jiang, "A high pressure sensor with circular diaphragm based on MEMS technology" , The 2st International Conference of CSMNT, State Key Laboratory for Mechanical Manufacturing System Engineering, Xi’an, China [8] Stephen Beeby, Graham Ensell, Michael Kraft, Neil White,"MEMS Mechanical Sensors", Chapter 6, Pressure Sensors, 2004 British Library Cataloguing in Publication Data [9] edited by Mohamed Gad-el-Hak.,"MEMS, Design and Fabrication", Chapter 7, Fabrication, Characterization, and Reliability design and fabrication, © 2006 by Taylor & Francis Group, LLC CRC Press is an imprint of Taylor & Francis Group [10] Naibing Ma, Fei Luo, and Deyin Zhang, "A novel microbend pressure sensor with optical fiber", Chinese Journal of Scientific Instrument, vol. 21, no. 5, pp. 543– 545, 2000. [11] Pandey N.K., and Yadav B.C., "Embedded fibre optic microbend sensor for measurement of high pressure and crack detection", Sensors and Actuators, a: Physical, vol. 128, no. 1, pp. 33-36, March 2006. [12] Sakata Hajime, and Iwazaki Tetsuya, "Sensitivity-variable fiber optic pressure sensors using microbend fiber gratings", Optics Communications, vol. 282, no. 23, pp. 4532-4536, December, 2009. [13] Bin Ma, and Xinguo Zou, "Study of vehicle weight- inmotion system based on fiber-optic microbend sensor" Proc. 2010 International Conference on Intelligent Computation Technology and Automation (ICICTA 2010), 2010, vol. 3, pp. 458-461. [14] Junnan He, Zhenxiang Cai, and Xuejin Li, "Mono-fiber optic pressure sensor", Chinese Journal of Sensors and Actuators, vol. 20, no. 6, pp. 1290-1293, 2007. [15] S.Timoshenko, S.Woinowsky-Krieger. "Theory of plates and shells", McGraw-Hill, New York, 1959, pp: 55-59 [16] Yang Guitong, "Introduction to Elasticity", Beijing: Tsinghua University Press, 2006, pp. 191-194. (in Chinese) [17] Xu Zhilun, "A Concise Course in Elasticity", Beijing: Higher Education Press, 2010, pp. 178-202.(in Chinese) 8-‫زﻳﺮ‬‫ﻧﻮﻳﺲ‬‫ﻫﺎ‬ 1 FEM (Finite Element Analysis) 2 Small Deflections 3 Doping 4 Piezoresistive 5 Actuators 6 Borosilicate 7 Wheatstone bridge 8 Plasticity 9 Creeps 10 Stress Stiffening 11 Large Deflection 12 Large Strain Capabilities 13 Flat

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