Successfully reported this slideshow.
We use your LinkedIn profile and activity data to personalize ads and to show you more relevant ads. You can change your ad preferences anytime.

Recipe 3D

1,844 views

Published on

RECIPE 3D is a tool for simulating RIE, DRIE and ICP etch processes

Published in: Business, Technology
  • Be the first to comment

  • Be the first to like this

Recipe 3D

  1. 1. RECIPE RIE, ICP ETCH SIMULATOR
  2. 2. Features RECIPE 3D MultiEtch simulation RIE, ICP and Bosch Etch simulator Simulate effect of multiple etches Validated database Sidewall etch lag simulation Experimental etch database Capability to predict important parameters Rigorous validation experiments such as etch lag and sidewall angles Real world usage Speed and accuracy Predict and fine tune etch lag, Faster than performing a real etch. Tapeout sidewall angle and footing with confidence
  3. 3. RSM derived etch database Response surface matrix Etch rate as a function of APC and Coil Power
  4. 4. Etch characterization experiments (1)
  5. 5. Etch characterization experiments (2)
  6. 6. ICP/BOSCH ETCHING

×