MEMS Design Flow

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MEMS Design Flow

  1. 1. Design = Analysis + Synthesis An architecture inspired by a pretzel
  2. 2. Top down flow: schematic based… Process iterative calculations Database Design of experiments Process Synthesized Mask Layout Flow Sensitivity Analysis Netlist Material Database Monte Carlo Methods Design for Manufacture Structural Description Synthesis techniques Element Database Meshed model for 3D Verification Fast but lower fidelity…
  3. 3. Bottom up design flow: 3D based Process Description Mask Set Process 3D Multiphysics Database Process Flow 3D Model Simulation Material Results Database Multiphysics “Black box” System Model High Fidelity but slower…
  4. 4. IntelliSuite: Best of both worlds Accurate + Fast
  5. 5. Behavioral Structural 1 Schematic Component 4 capture Library Synthesis System Model & Extraction Optimization 3D Multiphysics engine Behavioral Multiphysics engine Layout engine Verification engine DRC engine Ab Initio Physical & Extraction Process modeling Process Layout Modeling 2 3 Physical Process level Seamless integration of design flow…
  6. 6. Design flow… Blueprint 2 Physical Layout Floor planning MEMS Synth Tape Out Layout & 3D Synthesis Design Rule Check Synple Clean Room 1 Schematic capture Design Win Process Planning 3 Design Exploration Process Simulation System Model Extraction Compact modeling Hexpresso Automated Meshing Fast field multiphysics 4 3D FEA/BEA analysis Design Verification
  7. 7. IntelliSuite Tool Chain Synple Blueprint Clean Room Fast Field EDA Linker Schematic capture Physical design Process flow design Multiphysics solvers Link to EDA tools Component based Layout/DRC Process debug Coupled field analysis Cadence, Mentor, Design exploration Tape Out Process visualization System model extraction Synopsys, Ansoft, Mask and 3D synthesis Mathworks etc…
  8. 8. Open standards based exchange… Physical layout GDS, DXF, CIF, GERBER, RS-247, EMK, HOLES Structural and 3D IGES, SAT, VRML, GEOM, DXF, RAW (Voxel) Process Sequence PowerPoint (PPT), PNG, JPEG, RAW UNV, PAT, CDB, SAT (Ansoft, Ansys, ABAQUS, Patran, Nastran, Simulia), MATML Analysis and mesh structure (Material XML) VERILOG-A, VHDL-AMS, PSPICE, HSPICE, SIMETRIX, MATLAB/SIMULINK (MEX), System and circuit level TOUCHSTONE Result files ASCII, CSV (Excel), Touchstone, PLT (Tecplot), ODB (Simulia)
  9. 9. A living design environment…
  10. 10. Dziękuję • Спасибо • Ευχαριστώ • Asante Sana • Dankie www.intellisense.com

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