IntelliSuite V8.6


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IntelliSuite V8.6

  1. 1. Design Flow in IntelliSuite v8.6
  2. 2. Design flow
  3. 3. MEMS design is highly interdisciplinary
  4. 4. Mechanics Contact Anchor Couette Electrostatics Physics Losses damping (TED, Acoustic) Squeeze film damping Electrostatic Levitation VIBROMOTOR DRIVE
  5. 5. Colliding domains Mechanics Electronics Piezoelectrics Biology Electrostatics Ferromagnetics Control theory Magnetostatics Piezoresistive Fluidics Systems Magnetorestrictive Optics Proteomics Process design Electromagnetics Genomics Process simulation Acoustics Packaging Materials Biochemistry Yield optimization Electrokinetics DfM Physics Manufacturing
  6. 6. Hierarchy of MEMS modeling Behavioral System Structural Algorithmic Device level Component level Ab Initio Physical Process
  7. 7. Behavioral Structural 1 Schematic Component 4 capture Library Synthesis System Model & Extraction Optimization 3D Multiphysics engine Behavioral Multiphysics engine Layout engine Verification engine DRC engine Ab Initio Physical & Extraction Process modeling Process Layout Modeling 2 3 Physical Process level Seamless integration of design flow…
  8. 8. Top down flow: schematic based… Process iterative calculations Database Design of experiments Process Synthesized Mask Layout Flow Sensitivity Analysis Netlist Material Database Monte Carlo Methods Design for Manufacture Structural Description Synthesis techniques Element Database Meshed model for 3D Verification Fast but less accurate…
  9. 9. Bottom up design flow: 3D based Process Description Mask Set Process 3D Multiphysics Database Process Flow 3D Model Simulation Material Results Database Multiphysics “Black box” System Model Accurate but slower…
  10. 10. IntelliSuite: Best of both worlds Mask & Mesh Extraction Synthesis Physical Verification Schematic vs 3D Macromodel Analysis/Optimization Multiphysics Schematic based Analysis Microsystem Schematic Requirements Process flow Capture Mask Set Top Down Bottom Up Accurate + Fast
  11. 11. IntelliSuite Tool Chain Synple Blueprint Clean Room Fast Field EDA Linker Schematic capture Physical design Process flow design Multiphysics solvers Link to EDA tools Component based Layout/DRC Process debug Coupled field analysis Cadence, Mentor, Design exploration Tape Out Process visualization System model extraction Synopsys, Ansoft, Mask and 3D synthesis Mathworks etc…
  12. 12. Behavioral modeling
  13. 13. Synple capabilities (Behavioral) Schematic capture Multiphysics computation Synthesis Yield Engineering Link to other tools Design Exploration Mechanics Schematic to mask DfM Automatic meshing Optimization Electrostatics Schematic to 3D Process Corner studies Derive process flow Design for manufacture Damping/Dissipation Schematic to mesh Yield prediction Piezo Mixed Signal Control Systems 1000X faster than FEA
  14. 14. Hierarchical multi-domain design Atomic elements Transistor RLC Plate Anchor Beam Gap - Compound + elements Op-Amp Shuttle mass Folded flexure spring Comb drive - + Device elements Interface circuit Resonator
  15. 15. Electrical Digital Electronics Controls Structural Thermal MEMS Macro- Mechanics model Wide Range of Building Blocks
  16. 16. Schematic based design exploration Compute time: 4 hr (Full 3D) vs 30s (compact) Band pass filter Monte Carlo based process variation analysis
  17. 17. Visualize schematic results in 3D Mode 1: In Phase Mode 2: Anti Phase
  18. 18. Schematic to mask Automated layout synthesis Stress relief curves Dimples Comb bumpers Etch compensation features Attention to detail
  19. 19. Schematic to process flow Process flow for fabricating the device is automatically derived from the schematic and technology file information
  20. 20. Schematic to 3D model Attention to detail Automatic placement of dimples, anchors and other secondary features
  21. 21. Schematic to mesh Automated Hexahedral Meshing of the Structure
  22. 22. Benefits Schematic driven design Entry point for parametric design and design exploration Hierarchical modeling Model your device at system or circuit level Save time 100-1000X faster than FEA models. Design exploration and optimization Quickly prototype and explore multiple designs 3D System modeling View your results in 3D
  23. 23. Physical design & verification
  24. 24. Blueprint capabilities (Physical) Design capture Design Rule Check Layout visualization Hexpresso Layout optimized for MEMS Tape Out DRC Editor Cross section drawing Automated HEX mesher AutoCAD™ like interface Powerful hierarchical DRC 3D Visualization of layout 1 click Mask to Mesh Large design library All angle support Hierarchy support Easy Error Navigator Smart Layers Pathfinders Scripting
  25. 25. Blueprint mems design editor
  26. 26. hex meshing in a jiffy
  27. 27. CS Viewer Step by step process visualization
  28. 28. Cleanroom integration
  29. 29. Easy error navigation all angle support intuitive error markings Tape Out Physical verification
  30. 30. Tightly integrated with layout Step by step process visualization Process debug Output cross sections to Powerpoint
  31. 31. One click meshing Mask to mesh Process based meshing Adaptive meshing hex meshing in a jiffy Quick and robust mesher
  32. 32. Process validation
  33. 33. What is Clean Room? Process simulation and MEMaterial visualization Material databases & process State of the art 3D process modeling optimization RECIPE IntelliFAB RIE/ICP/Bosch etch simulation Process traveller creation and STS etch database visualization. IntelliEtch Hexpresso Ab initio based etch modeling Automated hexahedral meshing engine wet and dry etch modeling for FEA/BEA model creation
  34. 34. Clean Room capabilities (Process) Process capture Material databases Process simulation Hexpresso Develop process traveller Process correlated databases FABViewer: Flow visualization Automated HEX mesher Debug traveller Material properties AnisE - Anisotropic etching 1 click Mask to Mesh Create process databases IntelliEtch - ab initio etching RECIPE - RIE/ICP etch simulator
  35. 35. Setup complex process flows… Process Editor for MEMS 3 1 IntelliFAB makes editing and organizing a process Process Pane table quick and easy. Setup Enter process parameters, your virtual process traveller tolerances and exactly as you would for a visualization settings in a real foundry. single consolidated pane 2 Group, section, organize Grouping common sets of processes into process subsets makes the organizing a complex traveler easy. You can group your process flow in any 4 which way you please: by material, by process type or Filter with ease by process option. Filtering tools allow you to quickly focus on the processes that you want to explore
  36. 36. Visualize Complex process flows Courtesy, Prof Tim Dallas, Texas Tech
  37. 37. Visualize Complex process flows Courtesy, Prof Tim Dallas, Texas Tech
  38. 38. Visualize Complex process flows Courtesy, Prof Tim Dallas, Texas Tech
  39. 39. Simulate composite MEMS processes Combination of multi-step mask transfers, oxide and nitride layers, sacrificial layer deposition and wet etching and DRIE processes. Composite processes, Shikida Mitsuhiro, J. Micromech. Microeng. 14
  40. 40. Validate processes in design 56 um 50 min 56.89 um 51.27 min 110 um 100 min 110.93 um 95.27 min 166 um © 2001 Gesselschaft fur Mikroelektronikan-wendung Chemnitz mbH. 150 min 166.40 um 139.62 min 225 um 200 min 226.13 um 190.44 min Measured vs Modeled
  41. 41. Higher order plane etching D. Saya, Sensors & Actuators A95 (2002) Simulation results
  42. 42. Surface morphology prediction Pyramid like morphology on 100 Si Simulation results predict pyramid formation subject to wet anisotropic etching Arbitrary Cut Planes <533> to understand the physics
  43. 43. Surface morphology prediction 1 Micromasking of apex 2 Floor moves down fast 3 Edges are stable 4 Facets are very stable Hillock formation prediction
  44. 44. DRIE Etch characterization experiments (1)
  45. 45. DRIE Etch characterization experiments (2)
  46. 46. Output to FEA Interface with analysis tools: Direct export to IntelliSuite and other industry formats
  47. 47. process to model
  48. 48. Fastfield solvers
  49. 49. Fastfield capabilities (Structural) Fastfield Multiphysics Fully coupled Specialized engines Extraction Unique FEM-BEM formulation Thermal BioMEMS Multiphysics capture 64 bit multi-processor enabled Electrostatics High frequency EMag Efficient for verification 5-10X than pure FEM based Mechanical Lagrangian models Fluidics 1000X more efficient that FEA Contact physics Piezo Magnetostatics
  50. 50. What is Fastfield Multiphysics? Coupled solver formulation ANSYS, Algor, Comsol, etc are all pure Finite Element tools Best solver for each physics domain Boundary Element Method (BEM): Electrostatics, Electromagnetics Finite Element Method (FEM): Thermal, Mechanical and Electromagnetics Volume of Flow (VoF) and Finite Volume (FV): Fluidics, Electrokinetics, Chemical Reactions Advanced pre-correction and solver techniques Pre-corrected FFT (pFFT++), GMRES, Arnoldi, OpenMP based multi-processor solvers
  51. 51. Why Fastfield Multiphysics? Speed and efficiency 2-10X Faster than pure FEA formulation (Algor, Ansys, Comsol, etc) Handle large real world problems Surface meshing vs volume meshes Internal volumes, air gaps, etc do not need to be meshed Ease of meshing, no costly re-meshing during deformation Ease of convergence Quickly run your analysis without convergence issues Deal with large deformations, contact and post-contact without convergence issues
  52. 52. Rotary ring gyro Draper vibratory gyro Raytheon/TI RF switch Lockheed inertial device Rate/Coriolis analysis Electrostatic drive Non-linear contact analysis Squeeze film analysis Hitachi NASA Corning NASA RF Tunable Filter Adaptive optics 3D Optical cross connect Radiation detectors 52
  53. 53. Membrane Inlet Micro-mixing in a valve Flow mixing Fluid Structure Interaction Flow separation device Concentration gradient evolution Y combiner Inlet flow - membrane interaction Microfluidics• Electrokinetics • Transport stochiometry • Heat transfer • Electro-Wetting on Dielectric (EWOD) • Digital droplet microfluidics • Free Surface Flow • Fluid Structure Interaction • Electrochemistry • Micro-mixing • Electrophoresis • Dielectrophoresis • Capillary flow and electro- separation • Electro-osmosis • Electro-hydrodynamics • Micro-pumps Electrokinetics Electro-osmotic driven flow Electrophoresis/Dielectrophoresis Free surface flow Multiplex focusing Electrohydrodynamics for cooling High Frequency Waste separation Slide coater
  54. 54. PZT actuated membrane Outlet Inlet Flow chamber Example: Valveless piezoelectrically actuated micropump Flow evolution in a piezoelectric membrane micro pump
  55. 55. Fast Impedance Extraction Phase ripple in a BAW device Multi-processor enabled BAW/SAW simulation 1 2 Piezo-acoustic Fast impedance and phase ripple calculations wave generation
  56. 56. Concentration skewing Minimized concentration skewing Two reactants meeting at the junction and reacting to form a new analyte. Support for multivalent reactions is new in v 8.5 Enhanced ion drag calculations allows you to optimize elbow turns to minimize concentration skews Enhanced Chemical Reaction Enhanced transport behavior 1 Microfluidics with enhanced transport kinetics 2 Multivalent Ion drag calculations in electrokinetic transport
  57. 57. Droplet moving around a pre-set track (top view) Droplet fission (top view) Electrowetting on dielectric (EWOD) 3 3D Electrowetting calculations
  58. 58. ElectroMagnetics IntelliSuite is the only tool on the market that allows you to perform coupled Thermo-Electro-Mechanical & Full Wave ElectroMagnetic analyses— this is particularly useful in designing deformable RF-MEMS such as switches, tunable capacitors and varactors.
  59. 59. Extraction & verification
  60. 60. What is extraction? Simplifying a full 3D model into behavioral model Convert FEA/BEA model (large DOFs) into computationally efficient model Develop pre-computed energy based model that captures multiphysics What is extracted ? Mechanical Strain Energy of Modes of Interest (Including stress and stress gradient effects) Capacitive energy Thermal effects (deformation due to temperature change) Fluidic Structure Interaction (due to compressive or non-compressive media) Other dissipation sources (thermoelastic damping (v8.6.1) and anchor acoustic losses (v8.6.2))
  61. 61. System Model Extraction (SME) Capture strain energy Capture electrostatic energy Capture fluid damping associated with each mode associated with each mode characteristics Arnoldi/Krylov First mode sub-space Compact reduction Representation HDL HDL formulation Second mode Hardware N-DOF behavioral model Description based on Lagrangian formulation d # "L & "L % () =0 dt % "q j ( "q j $ ' Third mode ! ❶ Capture total energy of relevant mode ❷ Krylov/Arnoldi methods to ❸ Create Compact model for (Mechanical, Electrostatic, Dissipation) generate Lagrangian formulation system modeling
  62. 62. System model extraction (SME) flow chart / SPICE OR OTHER EDA TOOL Summary: Convert problem from Newtonian (inertia based) to more efficient Lagrangian domain (energy based)
  63. 63. SME advantages • Automated full • 3D MEMS system multi-physics simulation capture • Device and package • 1000 X faster than level extraction pure FEA • Automated VHDL/ • Matches FEA to Verilog/ SPICE within 1% accuracy generation • Fully capture harmonic responses
  64. 64. EDA Linker capabilities (compatibility) Create accurate N-DOF dynamic system model from MEMS FEA/BEA model Output system model into SPICE, HDL, and Simulink formats Compatible with EDA tools from Cadence, Mathworks, Mentor, Synopsys and Tanner Integrated CMOS-MEMS (SoC/SiP) compatibility
  65. 65. Integrated design flow for MEMS + IC Device/System Design Exploration 1 Design of Experiments (SYNPLE/IntelliSuite) Final MEMS Device design 2 (Multiphysics) MEMS-CMOS integration N-DOF Lagrangian design flow can be based on : 3 System Model Extraction (IntelliSuite) √ VHDL-AMS √ Verilog-A Transistor level design √ SPICE netlist 4 (SPICE/SYNPLE or other EDA tools) √ Matlab/Simulink .MEX Gate level 5 Place and route, DRC, LVS (Cadence/Synopsys/Mentor/ViewLogic/Tanner etc) 6 Final Layout (IntelliMask Pro/ L-Edit/ Virtuoso/other)
  66. 66. What is verification? Model verification (Schematic vs 3D) Verify schematic model and 3D model match Ensure MEMS model used in circuit development is accurate Physical verification (‘Tape Out’) Verify physical layout is consistent with Design Rules Ensure design meets manufacturability criteria
  67. 67. Static model verification 0.200 Extracted 3D -0.200 -0.600 -1.000 -1.400 -1.800 0 2 4 6 8 10 12 Pull-in: Schematic results vs Full 3D results
  68. 68. Damping model verification Perforated condenser membrane Full 3D (TEM) vs Macromodel comparison Full capture of fluidic damping and spring force
  69. 69. Dynamic model verification Transient response of device: Schematic vs FEA (3D)
  70. 70. Summary • End to end design tools for MEMS • Simulate MEMS at any level: Ab-initio, Component, Device, Algorithm and System • Flexible design flow to achieve accurate and fast results • Used by major customers in 30+ countries
  71. 71. Dziękuję • Спасибо • Ευχαριστώ • Asante Sana • Dankie
  72. 72.