Successfully reported this slideshow.
We use your LinkedIn profile and activity data to personalize ads and to show you more relevant ads. You can change your ad preferences anytime.

IntelliEtch

2,088 views

Published on

MEMS, Etching, Ab Initio and Monte Carlo based simulation

Published in: Technology
  • Do This Simple 2-Minute Ritual To Loss 1 Pound Of Belly Fat Every 72 Hours ♥♥♥ https://tinyurl.com/bkfitness4u
       Reply 
    Are you sure you want to  Yes  No
    Your message goes here
  • Download The Complete Lean Belly Breakthrough Program with Special Discount. ♥♥♥ http://ishbv.com/bkfitness3/pdf
       Reply 
    Are you sure you want to  Yes  No
    Your message goes here
  • Be the first to like this

IntelliEtch

  1. 1. IntelliEtch Atomistic Etch Simulator
  2. 2. IntelliEtch Validated simulator Speed Detailed experimental backing Fast simulation speed. Results in 5-30 minutes depending upon resolution Ab initio effects First principle based etcher, includes Export to FEA effects of steric interaction, backbond Direct export to IntelliSuite tools weakening, impurity micromasking Validated database Composite processing Database for etching based upon pioneering Effects of multi-masking, multiple work of Dr Sato at U Nagoya process steps
  3. 3. Experimental validation Etched Silicon Sphere Etch Results Simulation Results Dr. Sato et al, U Nagoya Japan

×