3. NanoESCA – Working Partners Part of the work was funded by the BMBF, Germany AG Prof. Schönhense Dr. Ziethen Dipl. Phys. Bernhard AG Prof. Hüfner Dr. Reinert Dr. Schmidt Dr. Merkel Dipl. Phys. Escher Dr. Berghaus Dr. Funnemann Dipl. Phys. Krömker
4. NanoESCA – System Concept Lens Analyzer Detector Excitation source PEEM High lateral resolution High collection efficiency IDEA (Imaging Double Energy Analyzer) High energy resolution High transmission Low aberrations MCP/Screen, Slow Scan CCD High sensitivity Ease-of-use Synchrotron! (X-ray monochromator) High brightness High photon energy
9. NanoESCA – IDEA Analyzer 3 modes: 1. PEEM direct SE-Imaging without energy filter 2. Imaging XPS Imaging with energy filter 3. Spectroscopy with channeltron Channeltron
10. NanoESCA – IDEA Analyzer 2 nd EA 1 st EA Image detector for PEEM mode Image detector for XPS mode Projective exit optics PEEM lens Sample position
11. NanoESCA – Entrance Lens and Analyzer Complete mu-metal shielding Sample position (insertion hole) Piezo-driven sample stage Mounting flange (DN 150CF, 8” OD) Analyzer base flange Holes for excitation light
12. NanoESCA - Instrument View XM 1000 Monochromator (or synchrotron) HIS 13 VUV source Fast entry system ISE 10 sputter source
13. NanoESCA - Instrument View Sample stage with piezo motors Imaging detector for PEEM mode Imaging detector for XPS mode