Basic Preventive maintenance on Sputtering Systems Written by:  Dorin Jean  November 10, 2008
General purpose for sputtering system <ul><li>Hello everyone, my name is Dorin Jean, as a wafer fab technician I have foun...
Maintaining a sputtering system <ul><li>To fully understand the proper procedures for maintaining a sputtering system, thi...
Maintenance for sputtering system continued <ul><li>Identify best practices for performing successful and quick turnaround...
What is sputtering? <ul><li>Sputtering is a process that can deposit any material on any substrate. Sputtering like evapor...
Knowing the proper procedures <ul><li>Before you begin to perform any PMs, you must ensure all operators know the proper p...
Proper procedures <ul><li>Once the tool is properly set up for the PM, you then performed the required steps as listed in ...
Procedures continued <ul><li>While performing the procedures for a kit and or target  change , you must also check for oth...
Procedures continued <ul><li>This includes </li></ul><ul><li>Running paste (conditioning) </li></ul><ul><li>Particle check...
Conclusion <ul><li>This manual that I have developed should explained and allowed operators to become certified in perform...
Hybrid Systems UHV Sputtering And Evaporation  <ul><li>One example  </li></ul>
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Basic Preventive Maintenance On Sputtering Systems

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Basic Preventive Maintenance On Sputtering Systems

  1. 1. Basic Preventive maintenance on Sputtering Systems Written by: Dorin Jean November 10, 2008
  2. 2. General purpose for sputtering system <ul><li>Hello everyone, my name is Dorin Jean, as a wafer fab technician I have found it necessary to have a written manual for proper and consistent training on various tools. </li></ul><ul><li>With all tools, there exist a standard procedure of performing proper maintenance in order to decrease down time of that equipment. </li></ul>
  3. 3. Maintaining a sputtering system <ul><li>To fully understand the proper procedures for maintaining a sputtering system, this report will: </li></ul><ul><li>Provide instruction combined with certified supervision on how to perform a physical vapor deposition (PVD) kit change as well as a PVD target change. </li></ul>
  4. 4. Maintenance for sputtering system continued <ul><li>Identify best practices for performing successful and quick turnaround PVD kit change and target preventive maintenance (PM) </li></ul><ul><li>Provide instruction on performing all procedures associated to process kit change PM. </li></ul><ul><li>Certified an operator/technician candidate as capable of performing a PVD process kit PM for sputtering systems. </li></ul>
  5. 5. What is sputtering? <ul><li>Sputtering is a process that can deposit any material on any substrate. Sputtering like evaporation, takes place in a vacuum. </li></ul><ul><li>However it is a physical not a chemical process, and is referred to as physical vapor deposition (PVD). </li></ul><ul><li>It is a metallization process </li></ul>
  6. 6. Knowing the proper procedures <ul><li>Before you begin to perform any PMs, you must ensure all operators know the proper procedures for placing a tool down. </li></ul><ul><li>Proper procedures include: </li></ul><ul><li>Familiarization of functions within the operating system </li></ul><ul><li>And prior to any actual maintenance , you must make sure that all required tools and parts are present. </li></ul>
  7. 7. Proper procedures <ul><li>Once the tool is properly set up for the PM, you then performed the required steps as listed in the report to cool and vent the chamber. </li></ul><ul><li>Once conditions have been met prior to opening chamber, you can follow the step-by-step procedure to perform a kit and or target change. </li></ul>
  8. 8. Procedures continued <ul><li>While performing the procedures for a kit and or target change , you must also check for others conditions that may require maintenance activities, for instance, regeneration of cryopumps. </li></ul><ul><li>Once kit and or target changes have been performed, then you can proceed to allow the tool to complete the remaining steps for a proper PM. </li></ul><ul><li>Once the PM is complete, you must condition and qualify the tool before releasing it to full production </li></ul>
  9. 9. Procedures continued <ul><li>This includes </li></ul><ul><li>Running paste (conditioning) </li></ul><ul><li>Particle checks </li></ul><ul><li>And checking thickness of film </li></ul>
  10. 10. Conclusion <ul><li>This manual that I have developed should explained and allowed operators to become certified in performing PMs on sputtering system </li></ul><ul><li>As the need for integrated circuits continues to increase, semiconductor manufacturing companies will stress the need to enforce efficient use of time and personnel. </li></ul>
  11. 11. Hybrid Systems UHV Sputtering And Evaporation <ul><li>One example </li></ul>

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