Successfully reported this slideshow.
We use your LinkedIn profile and activity data to personalize ads and to show you more relevant ads. You can change your ad preferences anytime.

Tk Robotik 2009 E Lowres

530 views

Published on

Published in: Business
  • Be the first to comment

  • Be the first to like this

Tk Robotik 2009 E Lowres

  1. 1. ® Handling and more Automation Components for the Semiconductor Industry 2009/2010
  2. 2. About Us General 2 The product offerings contained in this catalog are a subset of robotic products offered by the isel group. Our products are specifically designed and engineered to address the unique needs and requirements of the semiconductor, flat panel display, nano-technology, and related industries. Should you have a special application or product requirement not fully addressed by the offerings in this catalog, please contact us we will be delighted to work with you to find a solution that meets your needs. Our company's Mission: isel Germany AG isel Germany AG isel Germany AG isel Germany AG was founded in 1972 and is the core company of the global isel Group. The company develops, manufactures, markets, sells and ser- vices systems and components used for automation, automa- tion control systems, robots and related handling systems. The company supports the global market needs of the Semi- conductor Equipment and related industries, its activities are centered on the company's expertise in automation and interrelated technologies and include a broad array of customer applications using the isel product line as the foundation to address those needs. is located in Eichenzell (Hesse) and Dermbach (Thuringia), Germany. The mission of is to design, engineer and manufacture, sell and service products that provide our customers with reliable, high quality technical solutions, at a favorable price-performance ratio. The foundation of all isel components and systems is focused adherence to “design for modularity”, benefiting the customer in design flexibility, cost, and functional upgradability. This methodology assures seamless integration of mechanical, electronic and software functions from initial design, on throughout all aspects of the total product life cycle. isel's open interfaces for software and control systems provide the flexibility that is required to meet the integration needs and demands of a customers existing applications and ensures compatibility with implementations provided by other suppliers. maintains a permanent demonstration and application facility at its Eichenzell facility in central Germany and at a facility in Fremont, California. Ask for an appointment with one of our applications engineers. We look forward to your visit and an opportunity to serve your automation, robotic and handling needs. Handling and more Eichenzell facility Dermbach facility
  3. 3. General Best Service 3 Se rvice Handling and more 3 We're there for you... ...because you'll get it all from one source Because we control all aspects of our products life cycle, from design, production, sales and service, we ensure you will receive competent contacts for all questions concerning our products. We're there for you... We're there for you... ...with more than 30 years of market presence iselRobotikSupporting department is the renowned and internationally-active . Benefit from our market presence of many years in a variety of industry lines. isel Germany AG ...in the heart of Europe From our location in Eichenzell (Hessen), in central Germany there is a maximum distace of 400 km to Europe's semiconductor key locations. Des ign Produ ction Sal es Handling and more
  4. 4. isel IWH F-1 Wafer Handling Robots with two-link arm WaferHandling 4 Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Excellent structural rigidity Maximum reliability and precision Top mounted (TA) or bottom mounted (BA) versions available Customized designs Optional internal or external controller Absolute (digital) or incremental encoder Seamless integration with prealigner, linear track and other periphal components Optional high-end controller for controlling complex systems Including Robot Control Center (RCC) Class 1 clean-room environment compatible Made in Germany Handling and more Specifications Repeatability Working range Payload T R Z Z radial theta Maximum speed Main interface Power supply T R Z 360°/s 1,000 mm/s 450 mm/s 110 / 230 V AC ±0.02° ±0.03 mm ±0.03 mm 10”, 13”, 17” 10", 14" 450° 0.75 kg RS-232 [DB9] Option:Ethernet [RJ-45] Peripheral interface RS-485 [RJ-45], RJ-11 Figure: IWH TA10S10 F-1
  5. 5. isel IWH F-1 Wafer Handling Robots with two-link arm WaferHandling 5 Handling and more Dimensions IWH TA S F-1__ __ IWH TA S F-110 10 IWH TA S F-113 10 IWH TA S F-117 10 IWH TA S F-110 14 IWH TA S F-113 14 IWH TA S F-117 14 Possible Configurations IWH BA S F-1__ __ IWH BA S F-110 10 IWH BA S F-113 10 IWH BA S F-117 10 IWH BA S F-110 14 IWH BA S F-113 14 IWH BA S F-117 14 Possible Configurations 92 57 65 77 57 65 513.5(TA)10 588.5(TA)13 690(TA)17431.8(TA)17 330.2(TA)13 254(TA)10 365.8 (S )14 266.7 (S )10 365.8 (S )14 266.7 (S )10 620.8(TA)10 695.8(TA)13 797.3(TA)17 254(TA)10 330.2(TA)13 431.8(TA)17
  6. 6. isel IWH F-1 Wafer Handling Robots with two-link heavy duty arm WaferHandling 6 Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Excellent structural rigidity Maximum reliability and precision Top mounted (TA) or bottom mounted (BA) versions available Customized designs Optional internal or external controller Absolute (digital) or incremental encoder Seamless integration with prealigner, linear track and other periphal components Optional high-end controller for controlling complex systems Including Robot Control Center (RCC) Class 1 clean-room environment compatible Made in Germany Handling and more Specifications Repeatability Working range Payload T R Z Z radial theta Maximum speed Main interface Power supply T R Z 360°/s 1,000 mm/s 450 mm/s 110 / 230 V AC ±0.02° ±0.03 mm ±0.03 mm 10”, 13”, 17” 10", 12", 14", 16", 20" 450° 2.75 kg RS-232 [DB9] Option:Ethernet [RJ-45] Peripheral interface RS-485 [RJ-45], RJ-11 Figure: IWH TA10S10HD F-1
  7. 7. isel IWH F-1 Wafer Handling Robots with two-link heavy duty arm WaferHandling 7 Handling and more Dimensions IWH TA S F-1__ __ HD IWH TA S HD F-110 10 IWH TA S HD F-110 12 IWH TA S HD F-110 14 IWH TA S HD F-110 16 IWH TA S HD F-110 20 IWH TA S HD F-113 10 IWH TA S HD F-113 12 IWH TA S HD F-113 14 IWH TA S HD F-113 16 IWH TA S HD F-113 20 IWH TA S HD F-117 10 IWH TA S HD F-117 12 IWH TA S HD F-117 14 IWH TA S HD F-117 16 IWH TA S HD F-117 20 Possible Configurations IWH BA S F-1__ __ HD IWH BA S HD F-110 10 IWH BA S HD F-110 12 IWH BA S HD F-110 14 IWH BA S HD F-110 16 IWH BA S HD F-110 20 IWH BA S HD F-113 10 IWH BA S HD F-113 12 IWH BA S HD F-113 14 IWH BA S HD F-113 16 IWH BA S HD F-113 20 IWH BA S HD F-117 10 IWH BA S HD F-117 12 IWH BA S HD F-117 14 IWH BA S HD F-117 16 IWH BA S HD F-117 20 Possible Configurations 513.5(TA)10 588.5(TA)13 690(TA)17431.8(TA)17 329.9(TA)13 254(TA)10 266.7 (S )10 304.8 (S )12 365.8 (S )14 426.7 (S )16 508 (S )20 266.7 (S )10 304.8 (S )12 365.8 (S )14 426.7 (S )16 508 (S )20 633.5(TA)10 708.5(TA)13 810(TA)17 254(TA)10 330.2(TA)13 431.5(TA)17 105 Ø 235 Ø 277 Ø 330 75 90 Ø 235 185 225 175 195 75
  8. 8. isel IWH F-1 Wafer Handling Robots with three-link heavy duty arm WaferHandling 8 Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Excellent structural rigidity Maximum reliability and precision Top mounted (TA) or bottom mounted (BA) versions available Customized designs Optional internal or external controller Absolute (digital) or incremental encoder Seamless integration with prealigner, linear track and other periphal components Optional high-end controller for controlling complex systems Including Robot Control Center (RCC) Class 1 clean-room environment compatible Made in Germany Handling and more Specifications Repeatability Working range Payload T R Z Z radial theta Maximum speed Main interface Power supply T R Z 360°/s 1,000 mm/s 450 mm/s 110 / 230 V AC ±0.02° ±0.03 mm ±0.03 mm 10”, 13”, 17” 16", 21", 24" 450° 2.75 kg RS-232 [DB9] Option:Ethernet [RJ-45] Peripheral interface RS-485 [RJ-45], RJ-11 Figure: IWH TA10S16 F-1
  9. 9. isel IWH F-1 Wafer Handling Robots with three-link heavy duty arm WaferHandling 9 Handling and more Dimensions IWH TA S F-1__ __ IWH TA S F-110 16 IWH TA S F-110 21 IWH TA S F-110 24 IWH TA S F-113 16 IWH TA S F-113 21 IWH TA S F-113 24 IWH TA S F-117 16 IWH TA S F-117 21 IWH TA S F-117 24 Possible Configurations IWH BA S F-2__ __ IWH BA S F-110 16 IWH BA S F-110 21 IWH BA S F-110 24 IWH BA S F-113 16 IWH BA S F-113 21 IWH BA S F-113 24 IWH BA S F-117 16 IWH BA S F-117 21 IWH BA S F-117 24 Possible Configurations 75 185 225 175 195 406.4 (S )16 533.4 (S )21 609.6 (S )24 406.4 (S )16 533.4 (S )21 609.6 (S )24 Ø 235 Ø 277 142 Ø 330 690(TA)17 588.5(TA)13 513.5(TA)10 431.8(TA)17 329.9(TA)13 254(TA)10 127 670.5(TA)10 745.5(TA)13 847(TA)17 254(TA)10 330.2(TA)13 431.8(TA)17
  10. 10. isel IWH F-2 Wafer Handling Robots with two-link arm and heavy duty body WaferHandling 10 Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Excellent structural rigidity Maximum reliability and precision Top mounted (TA) or bottom mounted (BA) versions available Customized designs Optional internal or external controller Absolute (digital) or incremental encoder Seamless integration with prealigner, linear track and other periphal components Optional high-end controller for controlling complex systems Including Robot Control Center (RCC) Class 1 clean-room environment compatible Made in Germany Handling and more Specifications Repeatability Working range Payload T R Z Z radial theta Maximum speed Main interface Power supply T R Z 360°/s 1,000 mm/s 450 mm/s 110 / 230 V AC ±0.02° ±0.03 mm ±0.03 mm 13”, 17”, 21” 10", 14" 450° 0.75 kg RS-232 [DB9] Option:Ethernet [RJ-45] Peripheral interface RS-485 [RJ-45], RJ-11 Figure: IWH TA13S10 F-2
  11. 11. isel IWH F-2 Wafer Handling Robots with two-link arm and heavy duty body WaferHandling 11 Handling and more Dimensions IWH TA S F-2__ __ IWH TA S F-213 10 IWH TA S F-217 10 IWH TA S F-221 10 IWH TA S F-213 14 IWH TA S F-217 14 IWH TA S F-221 14 Possible Configurations IWH BA S F-2__ __ IWH BA S F-213 10 IWH BA S F-217 10 IWH BA S F-221 10 IWH BA S F-213 14 IWH BA S F-217 14 IWH BA S F-221 14 Possible Configurations 87 Ø 330.2 57 65 72 273 255 57 225 265 215 235 65 557(TA)13 659(TA)17 760(TA)21 330.2(TA)13 431.8(TA)17 523.4(TA)21 365.8 (S )14 266.7 (S )10 365.8 (S )14 266.7 (S )10 659.3(TA)13 761.3(TA)17 862.3(TA)21 330.2(TA)13 431.8(TA)17 523.4(TA)21
  12. 12. isel IWH HD F-2 Wafer Handling Robots with two-link heavy duty body/arm WaferHandling Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Excellent structural rigidity Maximum reliability and precision Top mounted (TA) or bottom mounted (BA) versions available Customized designs Optional internal or external controller Absolute (digital) or incremental encoder Seamless integration with prealigner, linear track and other periphal components Optional high-end controller for controlling complex systems Including Robot Control Center (RCC) Class 1 clean-room environment compatible Made in Germany Handling and more Specifications Repeatability Working range Payload T R Z Z radial theta Maximum speed Main interface Power supply T R Z 360°/s 1,000 mm/s 450 mm/s 110 / 230 V AC ±0.02° ±0.03 mm ±0.03 mm 13”, 17”, 21” 10", 12", 14", 16", 20" 450° 2.75 kg RS-232 [DB9] Option:Ethernet [RJ-45] Peripheral interface RS-485 [RJ-45], RJ-11 Figure: IWH TA13S10HD F-2 12
  13. 13. isel IWH HD F-2 Wafer Handling Robots with two-link heavy duty body/arm WaferHandling Handling and more Dimensions IWH TA S HD F-2__ __ 557(TA)13 659(TA)17 100 Ø 330.2 760(TA)21 253 533.1(TA)21 431.8(TA)17 330.2(TA)13 266.7 (S )10 365.8 (S )14 426.7 (S )16 508 (S )20 75 304.8 (S )12 672(BA)13 85 774(BA)17 533.4(BA)21 330.2(BA)13 255 273 875(BA)21 431.8(BA)17 225 265 215 235 266.7 (S )10 304.8 (S )12 365.8 (S )14 426.7 (S )16 508 (S )20 75 IWH TA S HD F-213 10 IWH TA S HD F-213 12 IWH TA S HD F-213 14 IWH TA S HD F-213 16 IWH TA S HD F-213 20 IWH TA S HD F-217 10 IWH TA S HD F-217 12 IWH TA S HD F-217 14 IWH TA S HD F-217 16 IWH TA S HD F-217 20 IWH TA S HD F-221 10 IWH TA S HD F-221 12 IWH TA S HD F-221 14 IWH TA S HD F-221 16 IWH TA S HD F-221 20 Possible Configurations IWH BA S HD F-213 10 IWH BA S HD F-213 12 IWH BA S HD F-213 14 IWH BA S HD F-213 16 IWH BA S HD F-213 20 IWH BA S HD F-217 10 IWH BA S HD F-217 12 IWH BA S HD F-217 14 IWH BA S HD F-217 16 IWH BA S HD F-217 20 IWH BA S HD F-221 10 IWH BA S HD F-221 12 IWH BA S HD F-221 14 IWH BA S HD F-221 16 IWH BA S HD F-221 20 Possible Configurations IWH BA S HD F-2__ __ 13
  14. 14. isel IWH F-2 Wafer Handling Robots with three-link heavy duty body/arm WaferHandling Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Excellent structural rigidity Maximum reliability and precision Top mounted (TA) or bottom mounted (BA) versions available Customized designs Optional internal or external controller Absolute (digital) or incremental encoder Seamless integration with prealigner, linear track and other periphal components Optional high-end controller for controlling complex systems Including Robot Control Center (RCC) Class 1 clean-room environment compatible Made in Germany Handling and more Specifications Repeatability Working range Payload T R Z Z radial theta Maximum speed Main interface Power supply T R Z 360°/s 1,000 mm/s 450 mm/s 110 / 230 V AC ±0.02° ±0.03 mm ±0.03 mm 13”, 17”, 21” 16", 21", 24" 450° 2.75 kg RS-232 [DB9] Option:Ethernet [RJ-45] Peripheral interface RS-485 [RJ-45], RJ-11 Figure: IWH TA13S16 F-2 14
  15. 15. isel IWH F-2 Wafer Handling Robots with three-link heavy duty body/arm WaferHandling Handling and more Dimensions IWH TA S F-2__ __ IWH TA S F-213 16 IWH TA S F-213 21 IWH TA S F-213 24 IWH TA S F-217 16 IWH TA S F-217 21 IWH TA S F-217 24 IWH TA S F-221 16 IWH TA S F-221 21 IWH TA S F-221 24 Possible Configurations IWH BA S F-2__ __ IWH BA S F-213 16 IWH BA S F-213 21 IWH BA S F-213 24 IWH BA S F-217 16 IWH BA S F-217 21 IWH BA S F-217 24 IWH BA S F-221 16 IWH BA S F-221 21 IWH BA S F-221 24 Possible Configurations 659(TA)17 557(TA)13 Ø 330.2 137533,4(TA)21 431,5(TA)17 330,2(TA)13 760(TA)21 406.4 (S )16 533.4 (S )21 609.6 (S )24 75 709(BA)13 811(BA)17 122 431,8(BA)17 330,2(BA)13 533,4(BA)21912(BA)21 273 255 225 265 215 235 75 406.4 (S )16 533.4 (S )21 609.6 (S )24 15
  16. 16. isel IWH F-3 Wafer Handling Robot with dual arm WaferHandling 16 Handling and more Specifications Repeatability Working range Payload T R Z Z radial theta Maximum speed Main interface Power supply T R Z 360°/s 1,100 mm/s 425 mm/s 110 / 230 V AC ±0.02° ±0.03 mm ±0.03 mm 13” (330.2 mm) 14.4" (365.8 mm) 450° max. 1.25 kg /arm RS-232 [DB9] Option:Ethernet [RJ-45] Peripheral interface RS-485 [RJ-45], RJ-11 Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Excellent structural rigidity Wafer handling of up to 300mm Maximum reliability and precision Easy connection of a linear track to the robot controller Real time motion control Very smooth running Brushless, maintenance free servo motors with low inertia Backlash free Harmonic Drive gears Absolute Encoder Various communication interfaces Class 1 clean room compatible MTBF:>50.000 operating hours Including Robot Control Center ®
  17. 17. WaferHandling 17 Handling and more Dimensions 10 708335 559 312 Ø 555 555 Ø 300 Wafer M84x 182.9 250 225
  18. 18. isel Wafer Handling Vacuum Robot WaferHandling 18 Handling and more Specifications Cleanliness Weight T R Z Z radial theta Maximum speed T R Z 360°/s 500 mm/s 100 mm/s 110 V AC ±0.02° ±0.05 mm ±0.05 mm 1.5” (38.4 mm) 14" (355.6 mm) 380° 1.0 to 2.2 kg <5x10 Torr -9 Class 1 21.8 kg (48 lbs) RS-232 [DB9] Option:Ethernet [RJ-45] 150° C (302° F) 80° C (176° F) Al 6061, Stainless steel, Ferrofluid, Viton Configuration Top or bottom of chamber base Modular, interchangeable arms Main interface Power supply Max. temperature Max. operating temperature Exposed materials Mounting style Repeatability Working range Payload Leak rate Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Industry standard footprint and mounting configurations Wafer handling of up to 300mm High precision user configurable 14", 16" and 18" arms Maximum reliability and precision Ferrofluidic vacuum seal Vacuum levels at <5x19 Torr Real time motion control Very smooth running Brushless, maintenance free servo motors with low inertia Absolute Encoder Various communication interfaces Class 1 cleanliness MTBF:>50.000 operating hours -9
  19. 19. isel Wafer Handling Vacuum Robot WaferHandling 19 Handling and more Dimensions Ø 11.00 B B A FULL Z STROKE 1.56 1.60 Ø 9.30 [236.2] 17.40 3.35 .49E C .75 (Hard Stop) D 1 1 2 2 RECOMMENDED WAFER TRANSFEREE PLANE RECOMMENDED CHAMBER HOLE Ø 9.5" [241.3] Arm 7 Arm 8 Arm 9 Arm 9 HD in [mm] 10-20-0046 10-20-0057 10-20-0045 10-20-0050 A 14.381 [365.28] 15.37 [390.3] 18.5 [471] 18.5 [471] B 7.48 [190] 7.99 [203] 9.6 [245] 9.6 [245] C 2.14 [54.35] 2.27 [57.8] 2.14 [54.35] 2.7 [68.5] D 0.87 [22.05] 1.04 [26.5] 0.868 [22.05] 1.2 [31] E 1.181 [30] 1.14 [29] 1.18 [30] 1.3 [32.5]
  20. 20. WaferHandling Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Class 1 Cleanliness Feedback: Absolute Encoder Repeatability: 0.001" Maximum vertical stroke: 406 mm [16"] Maximum Vacuum: 1.0x10 Torr Motors: AC Servo Elevator weight: 18.2 kg [ -10 40 lbs] Elevator payload: 5.5 kg [12 lbs] Surface: aluminium, stainless steel Sensors: Cassette present Z stroke: 304.8 mm [12"] Handling and more 20 isel Vacuum Elevator
  21. 21. isel Vertical Robot IVR Series WaferHandling Description The vertical robot series represents a high-quality compact design. By using robust-industry-proven components and by reducing the number of inter- connecting parts we were able to build a very rigid and dynamic robot system. trans- porting . respon- sive low-inertia This new handling solution is suitable for wafers and substrates Extremely brushless motors, coupled with directly driven Harmonic Drive transmissions guarantee precise and interference-proof arm movements. The robust-industry-proven external servo controller with it's 32-bit real-time kernel provides for a seamless integration of traversing axes and other peripheries. This controller ensures smooth axis traversing along multiple path segments. The controller supports RS-232, RS-485, Teach Pendant and Ethernet interfaces. ® Characteristics ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Excellent structural rigidity Maximum speed >1 m/s Z axis up to 1,200 mm Optimal acceleration - user programable Easy connection of a traversing axis to the robot controller Real-time movement control Very smooth operation - vibration free Brushless, maintenance-free servo motors with low moment of inertia Harmonic Drive transmission with zero backlash Various communication interfaces MTBF > 50,000 hours ® Example: Custom solution with 1,200 mm axis length and lateral axis module Handling and more 21
  22. 22. isel Linear Track ILT Series LinearTracks Description Due to their flexibility, the linear tracks of the ILT series can easily be integrated into your available installation. The tracks are controlled in combination with our IWH series robots. By this combination of the linear tracks with the robots, the system is very effective and provides high throughputs. Depending on the type of application, the linear tracks can be mounted underneath the robots or lateral. The use of brushless servo motors ensures our linear tracks are operationally dynamic, smooth and service-free. isel Characteristics ■ ■ ■ ■ ■ ■ ■ High speed and dynamics Overall lengths user definable, according to the application Configurable lateral or bottom mounting Excellent structural rigidity Robust-industry-proven reliability and precision Simple to connection to the robot controller Driven by linear motor or spindle isel isel Linear Track with lateral mounted Wafer Handling Robot seriesIWH-TA Handling and more 22
  23. 23. isel Linear Track ILT Series LinearTracks isel isel Linear Track with top-mounted Wafer Handling Robot seriesIWH-BA Handling and more 23
  24. 24. AccessoriesforWaferHandlers isel End Effectors IEE Series 2 05 40 x x x x Option 0000 = Standard 0002 = Flip module 0003 = Vacuum control with display 9xxx = Customized end effector 8 = Scanner Cyberoptics EX-43QS 9 = Scanner Cyberoptics EX-73QS 07 = 2x horse shoe 08 = Pocket end effector 09 = Exclusion zone grip 10 = Exclusion zone vacuum 5 = 2 - 5" 6 = 6 - 8" 7 = 4 - 8" 8 = 12” 9 = 8 - 12” Wafer mapping End effektor type Wafer size 0 = No wafer mapping sensor 2 = Scanner SUNIX M-DW1 4 = Thru beam sensor horseshoe 01 = Paddle 02 = Horse shoe 03 = Edge grip 04 = 2x paddle 05 = Paddle/horse shoe Automation components for the semiconductor industry, product group end effectors IEE Series 1 x x x x Handling and more 25 Product Key
  25. 25. Prealigners LPA Series Prealigners Characteristics(Three-axisprealigners) ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ ■ Innovative all-in-one design Alignment cycle time <3.5 Seconds Repeating accuracy linear. ±0.025 mm, circular ± 0.05° Contactless measuring via LED and CCD sensor Integrated scan electronics Stand-alone capable Chuck- or pinload as well as wafer size changing without mechanical changes Transparent, semi-transparent, punched and opaque wafers alignable SEMI, flat and notch wafer specifications For wafer sizes from 2" up to 12" Bottom-entry and side-entry cable configurations Description The prealigners are innovative, high precision, class 1 compatible prealigner solutions with integrated scan electronics. LPA series Characteristics(SingleaxisPrealigners) ■ ■ ■ ■ ■ ■ ■ ■ ■ Alignment cycle time <2.5 Seconds Contactless measuring via LED and CCD sensor Integrated scan electronics Chuck load Wafer size changing without mechanical changes Transparent, semi-transparent, punched and opaque wafers alignable SEMI, flat and notch wafer specifications For wafer sizes from 3" up to 12" Side-entry and back-entry cable configurations Single axis prealigner with back-entry cable configuration LPA Series Three-axis prealigner with lateral connectors and PEEK pin/chuck LPA Series Handling and more 26
  26. 26. Prealigners LPA Prealigners LPA Series Handling and more 27 312 3 V 40 P 1 S 23 S V 500 P N **** Interface N Contact material P V K S C Pin length in inch*10 Pin Type V E C = Ethernet interface = Peek = Viton = Kalrez = Stainless Steel = Custom = Vacuum = Edge handling = Custom -3 500 Cable entry S B Height in mm 23 CCD Sensitivity S H = Standard = Side cable entry = Bottom cable entry = Standard = Standard = High Wafer sizes 25 Number of axes 1 3 Chuck type Chuck diameter in mm 23 = 2" to 5" = Single axis = Three axes = 2" to 5" 26 38 58 312 812 6EH 8EH 12EH V E C 23 40 40 40 76 Contact material P V K A T C Chuck encoder 1 2 = 2" to 6" = 3" to 8" = 5" to 8" = 3" to 12" = 8" to 12" = 6" only = 8" only = 12" only = Vacuum = Edge handling = Custom = 2" to 6" = 3" to 8" = 5" to 8" = 3" to 12" = 8" to 12" = Peek = Viton = Kalrez = Aluminum = Teflon = Custom = 10K PPR = 24K PPR ( for edge handling)EH Standard sizes: (Standard) (Standard) Series Customization code Not applicable for single axis models Chuck Lighthouse Pins Product Key Optional Example:
  27. 27. AccessoriesforWaferHandling Controllers InternalController ■ ■ ■ ■ ■ ■ ■ IWH series 1, IWH-HD series 2, IVR series, prealigners Control of incremental encoders 3+1 axes 4 inputs, 3 outputs RS232 and Ethernet communication RCC software - I/O extension Optional: ExternalController ■ ■ ■ ■ ■ ■ ■ ■ Vacuum Robots, Dual Arm Robots, IWH Series 4 Compact, pre-integrated networkable & I/O control 6+2 axes 32 digital inputs, 14 digital outputs Autotuning, autocalibration, DWC, adaptive control Total Graphics GUI Semiconductor Toolkit Software Dimensions: 285 x 219 x 81 mm Internal controller External controller RCC software screenshot Semiconductor Toolkit software screenshot Handling and more 28
  28. 28. AccessoriesforWaferHandling Controllers / Wafer Mapping Sensors Handling and more Internal Controller External Controller ■ ■ ■ ■ ■ ■ ■ ■ IRC 331 IRC 331 ex Suitable for IWH Series 1, IWH HD Series 2, IVR Series, Dual Arm series Control of incremental and absolute encoders 3 + 1 axes, upgradable 14 inputs, 13 outputs RS-232 and Ethernet communication interfaces Robot Control Center (RCC) software Dimensions: 480 x 180 x 150 mm Options: - I/O extensions - Hand terminal RCC software screenshot Figure: IRC 331ex 29 Wafer Mapping Sensors IMS-EX43(73)QS ■ ■ ■ IMS-MDW1 ■ ■ ■ IMS Laser class 1 light source Measuring distance 38 / 56 mm (1,5" / 2,2”) Sensor flexibly configurable LED light source Measuring distance 45 mm (1.75") PNP / NPN switchable
  29. 29. AccessoriesforWaferHandling Other Accessories FlipModule ■ ■ ■ ■ ■ ■ IFM-300-2 Accurate flipping of wafers with most precise positioning by means of positive stops Universal end effector adapter Mapping sensor DC Motor with transmission unit Electrical end-of-travel damping Continuously variable speeds HandTerminal ■ ■ ■ ■ ■ ■ IHT Optimal support when teaching an wafer handler Keyboard layout optimized for wafer handlers RS-485 isel isel Terminal function Teach function Diagnosis function Handling and more 30
  30. 30. Custom Solutions - Why isel? Someimportantreasonstochooseus: ■ ■ ■ ■ ■ We develop, design and manufacture almost all necessary components on our own premises. Thus we achieve highest planning flexibility and extremely short implementation phases We maintain an extensive portion of production in-house and possess a vast amount of high volumn production experience We offer you excellent service and support throughout the product life cycle, from initial design through final acceptance and production use The emulation and integration of third party software is virtually seamless. Your engineering time and cost expenditure is therefore minimal Due to our location in Central Europe and a favorable infrastructure we are on the spot in a short time ProjectDevelopment ■ ■ ■ ■ ■ ■ ■ ■ In order to ensure optimal results, well-trained and experienced project engineers oversee the projects at iselRobotik. The project procedure typically proceeds as follows: Define the boundary conditions on-site Cooperative creation of the customer requirements specification Creation of a conceptional with 3D CAD systems Issue of a project-specific quotation and statement of work including the product requirements specification with all project-specific parameters Release of the product requirements specifications and the provisional conceptional design Creation of the detailed conceptional design specification of the project Upon your release of the detailed conceptional design specification we start with the manufacturing of your customized robotic system System acceptance is completed upon the successful product installation and the meeting all of your specifications design CustomSolutions Handling and more 31
  31. 31. NotesandDrafts Notes and Drafts Handling and more 32
  32. 32. Notes and Drafts NotesandDrafts Handling and more 33
  33. 33. NotesandDrafts Notes and Drafts Handling and more 34
  34. 34. References References I O S . I N S T R U M E N T S HSEB INNOLAS Innovative Lasertechnologie Subsequently you'll find a selection of companies that participated in a successful co-operation with us and that successfully use our products: Handling and more 35 mechatronic systemtechnik gmbh
  35. 35. 970250 TE005 // 40_2009 i s e l G e r m a n y A G Ro b o t i c s D e p a r t m e n t Buergermeister-Ebert-Str. 40 D - 3 6 1 2 4 E i c h e n z e l l Tel.: +49 (0) 66 59 981 - 0 Fax: - 776 E-Mail: robotik@isel.com w w w. i s e l r o b o t i k . c o m +49 (0) 66 59 981 Handling and more

×