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2D, 3D AOI      量          理                           (2008)AOI Lecture                    Precision Metrology Lab.
AOI                     ( )                                      (2D)                    輪廓 理 參數                          ...
AOI           (3D) :            红     X-ray OCT     量AOI Lecture                     Precision Metrology Lab.
Micro Drill Inspection                             pAOI Lecture                      Precision Metrology Lab.
Projection                         jDefine the range of               gthread length.Position invariantPosition-invariant ...
Edge detection with subpixel accuracy) Interpolation methodAOI Lecture                      Precision Metrology Lab.
Experimental equipments and softwareAOI Lecture                    Precision Metrology Lab.
例 BGA              例-BGAAOI Lecture    Precision Metrology Lab.
例-BGAAOI Lecture    Precision Metrology Lab.
例-BGAAOI Lecture    Precision Metrology Lab.
例-BGAAOI Lecture    Precision Metrology Lab.
量‧行    AOI Lecture       Precision Metrology Lab.
AOI Lecture   Precision Metrology Lab.
例-AOI Lecture    Precision Metrology Lab.
Ferrule    量   Guide Holes     Pitch    度    量   Ferrule Holes    Pitch   度   Positions( Ferrule Holes          Guide Hole...
Edge Detection            gAOI Lecture                Precision Metrology Lab.
Sub PixelAOI Lecture               Precision Metrology Lab.
Edge Detection                gAOI Lecture                    Precision Metrology Lab.
FerruleAOI Lecture             Precision Metrology Lab.
料             料                      狀    了 便 理         料              利                  來AOI Lecture                   P...
n 令                                     E = ∑ ( yi − Axi − B) 2                                          i=0           (  ...
Minimum Distance Method                        念                                 料                   料                    ...
Least Squares Circle        度                                                           輪廓 狀                              ...
輪   量   量         例  •           輪量                       量AOI Lecture                    Precision Metrology Lab.
AOI Lecture   Precision Metrology Lab.
AOI Lecture   Precision Metrology Lab.
- Position accuracy of reference pin              - Position accuracy for reference frame              - Each parts pitch ...
3D 量         (cm   ):        (Triangulation)                         (Shadow Moire)         (mm    ):       (Confocal)    ...
理              雷   雷   雷雷     CCDAOI Lecture           Precision Metrology Lab.
Point Laser Triangulation                               Principle of measurement:                               A semicond...
雷              Panasonic              P      i                               RVSIAOI Lecture                   Precision M...
雷      理AOI Lecture       Precision Metrology Lab.
雷            滑        雷         雷AOI Lecture         Precision Metrology Lab.
雷AOI Lecture       Precision Metrology Lab.
150W                      :                                           0.6  1.                                      1/30   ...
π              π       π                  πAOI Lecture                   Precision Metrology Lab.
雷AOI Lecture       Precision Metrology Lab.
Stereo MicroscopeAOI Lecture               Precision Metrology Lab.
(Moire)                  兩   兩                  兩              不AOI Lecture                   Precision Metrology Lab.
AOI Lecture   Precision Metrology Lab.
AOI Lecture   Precision Metrology Lab.
利           參        參                          來量              利   數                 CCDAOI Lecture           Precision M...
Phase Shifti Principle              Ph    Shifting P i i l                          Phase-shifting gratingsAOI Lecture    ...
量   例        28    度       200           度AOI Lecture           Precision Metrology Lab.
量      例AOI Lecture   Precision Metrology Lab.
量 例AOI Lecture    Precision Metrology Lab.
Technologies vs. Scales                              (Prof. Steven Liang, ICPT 2004)AOI Lecture                     Precis...
AOI Lecture   Precision Metrology Lab.
AOI Lecture   Precision Metrology Lab.
Autofocusing Probe                                 Photodiode IC                                Cylindrical Lens          ...
Principle Of Autofocus Sensor                          High precision measurement                          with 1 µm laser...
Astigmatic Method              Y                                   Plane1                                                 ...
Analog S-curve Signal                        S curve        Plane1             +                                          ...
Auto focus                   Auto-focus Theory                                                 Servo-FES                  ...
Servo focus error signal                       500                mV)         o-FES (m                         0          ...
S-curves for various materials                              S-Curve vs. Material           3000           2000            ...
Auto focusing characteristics for                       various materials                     1200                        ...
Applications                                              CD Profile                    0.4                    0.3        ...
Application on SMT         Screen printing process control for             PCB fine pitch solder p                      p ...
Applications on MEMS              Silicon mechanics dimension controlAOI Lecture                           Precision Metro...
Experiment Coin                              Shading                                    g              3D D t             ...
Experiment                   p                Etching Profile                                          g                  ...
Multi-wavelength Focus                         Principle of measurement:                         White light is directed b...
Confocal Microscope Principle                        雷                                       不                            ...
Confocal MicroscopeAOI Lecture               Precision Metrology Lab.
Multiple Confocal BeamsAOI Lecture                 Precision Metrology Lab.
Multiple Confocal Beam PropertyAOI Lecture                      Precision Metrology Lab.
Principle of White Light Confocal                            SensorAOI Lecture                       Precision Metrology L...
Application on Semiconductors              Quality control on coplanarity, warpage,                     laser marking dept...
Laser Confocal Displacement                   Keyence LT-9000                            LT 9000                          ...
Stereo Microscope ( )                             p (1)                        Interferometer                        I t f...
Stereo Microscope ( )                             p (2)                Structure LightAOI Lecture                       Pr...
Stereo Microscope (3)                DLP ProjectionAOI Lecture                      Precision Metrology Lab.
Stereo Microscope (4)AOI Lecture                  Precision Metrology Lab.
Stereo Microscope (5)AOI Lecture                  Precision Metrology Lab.
立AOI Lecture   Precision Metrology Lab.
Stereo Microscope (6)              Liang-Chia Chen and Chung-Chih Huang, Meas. Sci. Technol. 16 (2005) 1061–1068AOI Lectur...
Profile Interferometry                                   y         • Non-Destructive Measurement         • 3D Surface Meas...
Michaelson        理AOI Lecture                Precision Metrology Lab.
Michaelson   Mirau          Linnik                                  數                                   量                 ...
Examples              MEMS                 Ferrule                                   Ferr le              LCD      Light G...
量AOI Lecture       Precision Metrology Lab.
AOI Lecture   Precision Metrology Lab.
Holographic Interferometry                 Measurement principle                 Digital Holographic Microscopy (DHM)     ...
Principle of HDM                   Hologram            Intensity  PhaseAOI Lecture                   Precision Metrology L...
Applications              Material Science          Life Science:               • MEMS / MOEMS           • Cellular biolog...
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2 d 3d aoi尺寸量測原理

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2 d 3d aoi尺寸量測原理

  1. 1. 2D, 3D AOI 量 理 (2008)AOI Lecture Precision Metrology Lab.
  2. 2. AOI ( ) (2D) 輪廓 理 參數 識 輪廓 濾 理 料 異邏 狀 類 理AOI Lecture Precision Metrology Lab.
  3. 3. AOI (3D) : 红 X-ray OCT 量AOI Lecture Precision Metrology Lab.
  4. 4. Micro Drill Inspection pAOI Lecture Precision Metrology Lab.
  5. 5. Projection jDefine the range of gthread length.Position invariantPosition-invariant AOI Lecture Precision Metrology Lab.
  6. 6. Edge detection with subpixel accuracy) Interpolation methodAOI Lecture Precision Metrology Lab.
  7. 7. Experimental equipments and softwareAOI Lecture Precision Metrology Lab.
  8. 8. 例 BGA 例-BGAAOI Lecture Precision Metrology Lab.
  9. 9. 例-BGAAOI Lecture Precision Metrology Lab.
  10. 10. 例-BGAAOI Lecture Precision Metrology Lab.
  11. 11. 例-BGAAOI Lecture Precision Metrology Lab.
  12. 12. 量‧行 AOI Lecture Precision Metrology Lab.
  13. 13. AOI Lecture Precision Metrology Lab.
  14. 14. 例-AOI Lecture Precision Metrology Lab.
  15. 15. Ferrule 量 Guide Holes Pitch 度 量 Ferrule Holes Pitch 度 Positions( Ferrule Holes Guide Holes 連 )AOI Lecture Precision Metrology Lab.
  16. 16. Edge Detection gAOI Lecture Precision Metrology Lab.
  17. 17. Sub PixelAOI Lecture Precision Metrology Lab.
  18. 18. Edge Detection gAOI Lecture Precision Metrology Lab.
  19. 19. FerruleAOI Lecture Precision Metrology Lab.
  20. 20. 料 料 狀 了 便 理 料 利 來AOI Lecture Precision Metrology Lab.
  21. 21. n 令 E = ∑ ( yi − Axi − B) 2 i=0 ( ) ( ) ∂E n n = 2 ∑ y − Ax − B (− x ) = 0 ∂E = 2 ∑ y − Ax − B (− 1) = 0 ∂A i i ∂B i i i=0 i=0 聯立 易 數 率 理 來AOI Lecture Precision Metrology Lab.
  22. 22. Minimum Distance Method 念 料 料 度 令 ( y − y0 ) cosθ − ( x − xm ) sin θ = 0 θ 參數 xm 料 令 列 2 S= ∑ d i n ∑ i 0 ( 2 = n ( y − y ) cosθ − ( x − x ) sin θ i m ) i =1 i =1 ∂S =0 ∂S =0 ∂y 0 ∂θ 1 n y = ∑ yi = y m 料 0 n i=1 1 ⎛ 2I ⎞ θ = tan −1⎜ xy ⎟ ⎜ Ix − Iy ⎟ 2 ⎝ ⎠ n n I xy = ∑ ( xi − x m )( y i − y m ) I x = ∑ ( xi − x m ) n 2 I y = ∑ ( yi − y m ) 2 i =1 i =1 i =1AOI Lecture Precision Metrology Lab.
  23. 23. Least Squares Circle 度 輪廓 狀 離 料 x2 + y2 + Ax+ By+C = 0 S : S = ∑δi2 =∑(xi2 + yi2 + Axi + Byi + C)2 A B C S ∂S ∂S = ∑2(xi2 + yi2 + Axi + Byi + C)(xi ) = 0 = ∑ 2( xi2 + yi2 + Axi + Byi + C)( yi ) = 0 ∂A ∂B ∂S = ∑2( xi2 + yi2 + Axi + Byi + C)(1) = 0 ∂C ⎡ ∑ xi2 ∑ x y ∑ x ⎤ ⎡ A⎤ ⎡− ∑ x ( x + y )⎤ i i i i 2 i 2 i ⎢ ⎥ ⎢ ⎥ 聯立 ⎢∑ xi yi ∑ y ∑ y ⎥ ⎢ B ⎥ = ⎢− ∑ y ( x + y ) ⎥ 2 ⎢ ⎥ i i i i 2 i 2 ⎢ ∑ xi ∑ y ∑ ⎦⎣ ⎦ ⎣ 1 ⎥ ⎢C ⎥ ⎢ − ∑ ( x + y ) ⎥ 2 2 ⎣ i ⎦ i i ( X 0 , Y0 ) = ⎛ − A ,− B ⎞ ⎜ R= (A 2 + B 2 − 4C ) ⎝ 2 2⎠ 2AOI Lecture Precision Metrology Lab.
  24. 24. 輪 量 量 例 • 輪量 量AOI Lecture Precision Metrology Lab.
  25. 25. AOI Lecture Precision Metrology Lab.
  26. 26. AOI Lecture Precision Metrology Lab.
  27. 27. - Position accuracy of reference pin - Position accuracy for reference frame - Each parts pitch - Shape accuracy p y - Radius of curvature - Slot width and tolerance etcAOI Lecture Precision Metrology Lab.
  28. 28. 3D 量 (cm ): (Triangulation) (Shadow Moire) (mm ): (Confocal) (Autofocusing) 立 (Stereo Microscopy) (White Light Interferometry) (Holography Interferometry)AOI Lecture Precision Metrology Lab.
  29. 29. 理 雷 雷 雷雷 CCDAOI Lecture Precision Metrology Lab.
  30. 30. Point Laser Triangulation Principle of measurement: A semiconductor laser beam is reflected off the target surface and passes through a custom designed receiver lens system. The beam is focused on a CCD sensing array. f d i The CCD detects the peak value of the light quantity distribution of the beam spot. The CCD pixels spot (individual CCD sensing elements) within the area of the beam spot are used to determine the precise target position. Range R l ti R Resolution S d Speed 10mm 1µm 30mm/sec 30mm 3µm 30mm/secAOI Lecture Precision Metrology Lab.
  31. 31. 雷 Panasonic P i RVSIAOI Lecture Precision Metrology Lab.
  32. 32. 雷 理AOI Lecture Precision Metrology Lab.
  33. 33. 雷 滑 雷 雷AOI Lecture Precision Metrology Lab.
  34. 34. 雷AOI Lecture Precision Metrology Lab.
  35. 35. 150W : 0.6 1. 1/30 3 2. laser diode 3. DLP 來AOI Lecture Precision Metrology Lab.
  36. 36. π π π πAOI Lecture Precision Metrology Lab.
  37. 37. 雷AOI Lecture Precision Metrology Lab.
  38. 38. Stereo MicroscopeAOI Lecture Precision Metrology Lab.
  39. 39. (Moire) 兩 兩 兩 不AOI Lecture Precision Metrology Lab.
  40. 40. AOI Lecture Precision Metrology Lab.
  41. 41. AOI Lecture Precision Metrology Lab.
  42. 42. 利 參 參 來量 利 數 CCDAOI Lecture Precision Metrology Lab.
  43. 43. Phase Shifti Principle Ph Shifting P i i l Phase-shifting gratingsAOI Lecture Precision Metrology Lab.
  44. 44. 量 例 28 度 200 度AOI Lecture Precision Metrology Lab.
  45. 45. 量 例AOI Lecture Precision Metrology Lab.
  46. 46. 量 例AOI Lecture Precision Metrology Lab.
  47. 47. Technologies vs. Scales (Prof. Steven Liang, ICPT 2004)AOI Lecture Precision Metrology Lab.
  48. 48. AOI Lecture Precision Metrology Lab.
  49. 49. AOI Lecture Precision Metrology Lab.
  50. 50. Autofocusing Probe Photodiode IC Cylindrical Lens y Laser Diode Grating Polarization Beam Splitter 1/4 λ Plate Arm Spring Objective Lens Voice Coil Motor DiscAOI Lecture Precision Metrology Lab.
  51. 51. Principle Of Autofocus Sensor High precision measurement with 1 µm laser spot by means of a focus detector with nanometer resolution and a glass scale with an absolute accuracy of 0.025 µmAOI Lecture Precision Metrology Lab.
  52. 52. Astigmatic Method Y Plane1 Plane3 Plane2 Z X Schematic of the Astigmatic methodAOI Lecture Precision Metrology Lab.
  53. 53. Analog S-curve Signal S curve Plane1 + V + Plane2 0 µm 0 - 30 µm Plane3 -AOI Lecture Precision Metrology Lab.
  54. 54. Auto focus Auto-focus Theory Servo-FES FES Astigmatic g Autofocus Method Method Disp. Disp. Disp 30 um 1500 umAOI Lecture Precision Metrology Lab.
  55. 55. Servo focus error signal 500 mV) o-FES (m 0 0 250 500 750 1000 1250 1500 Servo -500 -1000 1000 Displacement (µm)AOI Lecture Precision Metrology Lab.
  56. 56. S-curves for various materials S-Curve vs. Material 3000 2000 Mirror (Al) FES (m V) 1000 Mirror (Hg) 0 CD S -1000 Si -2000 -3000 20 30 40 50 0 60 70 0 80 Position (µm)AOI Lecture Precision Metrology Lab.
  57. 57. Auto focusing characteristics for various materials 1200 AutoFocus vs. Material 800 Mirror Servo-FE (mV) 400 (Al) Mirror ES (Hg) 0 CD -400 Si S -800 -1200 0 200 400 600 800 1000 1200 1400 Position (µm)AOI Lecture Precision Metrology Lab.
  58. 58. Applications CD Profile 0.4 0.3 0.2 Height (µm) 0.1 01 0 -0.1 0 01 1 2 3 4 5 6 7 8 9 10 11 12 -0.2 -0.3 -0 3 Position (µm)AOI Lecture Precision Metrology Lab.
  59. 59. Application on SMT Screen printing process control for PCB fine pitch solder p p pasteAOI Lecture Precision Metrology Lab.
  60. 60. Applications on MEMS Silicon mechanics dimension controlAOI Lecture Precision Metrology Lab.
  61. 61. Experiment Coin Shading g 3D D t DataAOI Lecture Precision Metrology Lab.
  62. 62. Experiment p Etching Profile g Profile Height (um) Position ( ) P iti (um)AOI Lecture Precision Metrology Lab.
  63. 63. Multi-wavelength Focus Principle of measurement: White light is directed by a beam splitter through a spectral aberration lens onto the surface. The lens splits the light into different wavelengths and at any point on the surface only a certain wavelength will be in focus. Light is reflected from the surface to a p hole g pin which permits only the wavelength in focus to pass through. A spectrometer deflects the light onto a CCD sensor to interpolate spatial position of the data point. p Range Resolution Speed 3mm 100nm 30mm/sec 1mm 30nm 30mm/sec 300µm 10nm 30mm/secAOI Lecture Precision Metrology Lab.
  64. 64. Confocal Microscope Principle 雷 不 來 雷 雷 不論 來 雷AOI Lecture Precision Metrology Lab.
  65. 65. Confocal MicroscopeAOI Lecture Precision Metrology Lab.
  66. 66. Multiple Confocal BeamsAOI Lecture Precision Metrology Lab.
  67. 67. Multiple Confocal Beam PropertyAOI Lecture Precision Metrology Lab.
  68. 68. Principle of White Light Confocal SensorAOI Lecture Precision Metrology Lab.
  69. 69. Application on Semiconductors Quality control on coplanarity, warpage, laser marking depth, etc. g p , 00 2.00 µm] 10^4 0.000AOI Lecture Precision Metrology Lab.
  70. 70. Laser Confocal Displacement Keyence LT-9000 LT 9000 How It Works : Z-axis: A tuning fork is combined with the confocal principle to obtain high accuracy measurement. X-axis: An oscillating unit i ill i i creates a wide scan area. This allows increased measurement stabilityAOI Lecture Precision Metrology Lab.
  71. 71. Stereo Microscope ( ) p (1) Interferometer I t f tAOI Lecture Precision Metrology Lab.
  72. 72. Stereo Microscope ( ) p (2) Structure LightAOI Lecture Precision Metrology Lab.
  73. 73. Stereo Microscope (3) DLP ProjectionAOI Lecture Precision Metrology Lab.
  74. 74. Stereo Microscope (4)AOI Lecture Precision Metrology Lab.
  75. 75. Stereo Microscope (5)AOI Lecture Precision Metrology Lab.
  76. 76. 立AOI Lecture Precision Metrology Lab.
  77. 77. Stereo Microscope (6) Liang-Chia Chen and Chung-Chih Huang, Meas. Sci. Technol. 16 (2005) 1061–1068AOI Lecture Precision Metrology Lab.
  78. 78. Profile Interferometry y • Non-Destructive Measurement • 3D Surface Measurement • Multiple Field of View Lens • N Nanometer Level Resolution and Large t L l R l ti dL Measuring range • Fast Measurement • E Ease of Use fU • Convenient Loading and Setup g pAOI Lecture Precision Metrology Lab.
  79. 79. Michaelson 理AOI Lecture Precision Metrology Lab.
  80. 80. Michaelson Mirau Linnik 數 量 行AOI Lecture Precision Metrology Lab.
  81. 81. Examples MEMS Ferrule Ferr le LCD Light Guide PlateAOI Lecture Precision Metrology Lab.
  82. 82. 量AOI Lecture Precision Metrology Lab.
  83. 83. AOI Lecture Precision Metrology Lab.
  84. 84. Holographic Interferometry Measurement principle Digital Holographic Microscopy (DHM) is the generation of computer images of a sample using holographic techniques. A hologram results from the interference between the object wave diffracted by a sample and magnified by a microscope objective, and a reference wave. Using laser illumination, the small angle between the waves exhibits fringes that carry the phase and amplitude information in a single image - the hologram - which is captured on a digital camera. The appropriate processing of a single hologram retrieves the complete wavefront and the numerical propagation permits the focusing in different planes. Digital holography is capable of resolving differences corresponding to height differences under the nanometer.AOI Lecture Precision Metrology Lab.
  85. 85. Principle of HDM Hologram Intensity PhaseAOI Lecture Precision Metrology Lab.
  86. 86. Applications Material Science Life Science: • MEMS / MOEMS • Cellular biology • Mi Micro-optics i • Bi hi Biochips • Microtechnic • Bio-sensors • Semiconductor • NanotechnologyAOI Lecture Precision Metrology Lab.

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