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1
ANGEL ANNA LAL
1st YEAR
MSc Biotechnology
2
Scanning Electron Microscope
3
 Invented by Max Knoll in 1935.
 Uses a focused beam of high-energy electrons to
generate images of a sample.
 3-Dimentional images are obtained.
 Magnification ranging from 20X to approximately
30,000X.
 Provides 250 times larger image than light microscope.
 Used in high or low vacuum in wet conditions and
even at wide range elevated temperatures.
4
 The basic principle is that a beam of electron
is generated by a suitable source, typically a
tungsten filament or a field emission gun.
 The electron beam is accelerated through a
high voltage[20 kV] and pass through a
system of aperture and electromagnetic
lenses to produce thin beam of electrons.
 Then beam scans the surface of specimen.
 Electrons are emitted from specimen by
action of scanning beam and collected by
suitably positioned detector.
5
6
7
 Appropriate size & should be dry.
 Specimens should be electrically
conductive.
 Coated with ultrathin layer of electrically
conducting method.
 Eg: Gold, GoldPalladium
alloy,Platinum,Osmium,Tungsten,Graphite
etc.
8
9
Electron gun fitted with tungsten
filament
Electron beam focused by one or two
condenser, Passes through scanning
coilsdeflector plates
Primary electron beam interacts with
sample-repeated random scattering.
Beam current absorbed by specimen
is detected & electronic amplifier
amplifies signal & image is displayed.
10
 Signals:
 Secondary electrons (SE): mainly topography
 Low energy electrons, high resolution
 Surface signal dependent on curvature
 Backscattered electrons (BSE): mainly
chemistry
 High energy electrons
 “Bulk” signal dependent on atomic number.
11
Sample
Secondary electrons
Backscattered
electrons
Incoming electrons
X-rays
12
Backscattered electron
detector:
Secondary electron
detector
13
 Most SEM's are comparatively easy to operate,
with user-friendly interfaces.
 Many applications require minimal sample
preparation.
 For many applications, data acquisition is rapid
[less than 5 minutes/image for SEI, BSE.]
 Modern SEMs generate data in digital formats,
which are highly portable.
14
 Samples must be solid and they must fit into
the microscope chamber.
 Maximum size in horizontal dimensions is
usually on the order of 10 cm; vertical
dimensions are generally much more limited
and rarely exceed 40 mm.
 For most instruments samples must be stable
in a vacuum on the order of 10-5 - 10-6 torr.
15
16

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Scanning Electron Microscope: A Powerful Tool for Nanoscale Imaging

  • 1. 1 ANGEL ANNA LAL 1st YEAR MSc Biotechnology
  • 2. 2
  • 4.  Invented by Max Knoll in 1935.  Uses a focused beam of high-energy electrons to generate images of a sample.  3-Dimentional images are obtained.  Magnification ranging from 20X to approximately 30,000X.  Provides 250 times larger image than light microscope.  Used in high or low vacuum in wet conditions and even at wide range elevated temperatures. 4
  • 5.  The basic principle is that a beam of electron is generated by a suitable source, typically a tungsten filament or a field emission gun.  The electron beam is accelerated through a high voltage[20 kV] and pass through a system of aperture and electromagnetic lenses to produce thin beam of electrons.  Then beam scans the surface of specimen.  Electrons are emitted from specimen by action of scanning beam and collected by suitably positioned detector. 5
  • 6. 6
  • 7. 7
  • 8.  Appropriate size & should be dry.  Specimens should be electrically conductive.  Coated with ultrathin layer of electrically conducting method.  Eg: Gold, GoldPalladium alloy,Platinum,Osmium,Tungsten,Graphite etc. 8
  • 9. 9
  • 10. Electron gun fitted with tungsten filament Electron beam focused by one or two condenser, Passes through scanning coilsdeflector plates Primary electron beam interacts with sample-repeated random scattering. Beam current absorbed by specimen is detected & electronic amplifier amplifies signal & image is displayed. 10
  • 11.  Signals:  Secondary electrons (SE): mainly topography  Low energy electrons, high resolution  Surface signal dependent on curvature  Backscattered electrons (BSE): mainly chemistry  High energy electrons  “Bulk” signal dependent on atomic number. 11 Sample Secondary electrons Backscattered electrons Incoming electrons X-rays
  • 13. 13
  • 14.  Most SEM's are comparatively easy to operate, with user-friendly interfaces.  Many applications require minimal sample preparation.  For many applications, data acquisition is rapid [less than 5 minutes/image for SEI, BSE.]  Modern SEMs generate data in digital formats, which are highly portable. 14
  • 15.  Samples must be solid and they must fit into the microscope chamber.  Maximum size in horizontal dimensions is usually on the order of 10 cm; vertical dimensions are generally much more limited and rarely exceed 40 mm.  For most instruments samples must be stable in a vacuum on the order of 10-5 - 10-6 torr. 15
  • 16. 16