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A.D.A.M. (Automated Data Archiving and Mining) for ASML PAS5500

Design and implementation of an automated data retrieval, analysis and monitoring software for photolithography tools.

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A.D.A.M. (Automated Data Archiving and Mining) for ASML PAS5500

  1. 1. A.D.A.M. (Automated Data Archiving and Mining) for ASML PAS5500 Design and implementation of an automated data retrieval, analysis and monitoring software for photolithography tools Advisor: Prof. Serafino Cicerone Candidate: Riccardo Macioce Tutor: Armando Rossi
  2. 2. Page  2  Among the worldwide top 10 semiconductor sales leaders  Micron's Avezzano facility produces CMOS image sensors Micron Technology  Products used in mobile phones, digital and reflex cameras, etc.
  3. 3. Page  3 A. D. A. M. A.D.A.M. Automatic alerts Data visualization Charts generation Data retrieval Archiving
  4. 4. Page  4 IC production process 1. Coating 2. Photolithography 3. Etching 4. Removing photoresist
  5. 5. Page  5 A. D. A. M.  The original release of A.D.A.M. was developed for an U.S.A. facility (for 300 mm photolithography tools)
  6. 6. Page  6 Thesis tasks  U.S.A. fab uses 300 mm photolithography tools, while Avezzano fab uses 200 mm tools (AMSL PAS5500) – Different performance and calibration tests – Different report structures and parameters Goal 1: make the original A.D.A.M. version usable for PAS systems Goal 2: design and build new features
  7. 7. Page  7 Goal 1 Code Design
  8. 8. Page  8 A.D.A.M. Architecture
  9. 9. Page  9 Parsing subsystem  Crontab: scanning tools every 10 minutes  Multithread system
  10. 10. Page  10 Goal 2
  11. 11. Page  11 A new module: Air Mounts  System of shock absorbers for vibration isolation between the projection system (“silent world”) and the external world
  12. 12. Page  12 Reports structure 0.002800000 ... 0.348432056 0.000202538 0.000019308... 0.005600000 ... 0.522648084 0.000133590 0.000017341... 0.008400000 ... 0.696864111 0.000077143 0.000023498... [...] 1.598800000 ... 99.651567944 0.000037273 0.000000088... 1.601600000 ... 99.825783972 0.000028764 0.000000072... 1.604400000 ... 100.00000000 0.000033625 0.000000075... 1.607200000 ... 1.607200000 0.000000000 0.000000000... 1.610000000 ... 1.610000000 0.000000000 0.000000000... [...]
  13. 13. Page  13 Data identification  Context awareness and knowledge: – Pink noise as input signal (low-pass filter until 100 Hz) – Resonance frequency ≈ 2 Hz
  14. 14. Page  14 A.D.A.M.
  15. 15. Page  15 Project Management  Extreme Programming (XP) [Beck, Cunningham] – Whole team: Customer & Developer – Tests definition before implementation – Story Cards – Story Board & time management  Risk analysis and mitigation strategies  Change management
  16. 16. Page  16 Numbers  Original ADAM: – 14 modules  New ADAM: – 9 modules fixed – 27 new modules  About 13000 new lines of Perl code  About 65000 new lines of PHP/Javascript/jQuery/HTML code
  17. 17. Page  17 Beyond numbers  Communication & interaction: – Collaboration with people from different fields – Trainings  Problem solving: – Signals theory – Optics – Linear regression – …

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