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Lectio praecursoria New

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Lectio praecursoria New

  1. 1. Embedding of bulk piezoelectric structures in Low Temperature Co-fired Ceramic 19.12.2014 Maciej Julian Sobocinski maciej@ee.oulu.fi Lectio praecursoria
  2. 2. Outline • Piezoelectric effect • Low Temperature Co-fired Ceramic • Objectives of the thesis • Key results • Conclusion
  3. 3. Piezoelectric effect Occurs in materials such as: – Rochelle's Salt, Quartz, Tourmaline – BaTiO3, PZT – KNN, KMNB – PVDF – Bone, wood, silk, DNA Areas of application: – Igniters, scales, ink-jet printers, microphones, speakers, watches – Frequency standard – Force, pressure, acceleration sensors – SAW chemical and biological sensors – Actuators with nm resolution Direct effect Inverse effect
  4. 4. PZT - Lead zirconium titanate ©APC International, Ltd. Most widely used piezoelectric material Developed in 1952 Wide span of properties due to ease of modification Benefits of PZT  Large piezoelectric coefficients  Durable and chemically stable  Easy to manufacture  Relatively inexpensive Applications areas • Sensors • Actuators • Transducers
  5. 5. Low Temperature Co-fired Ceramic Presented in the 80s of XX century Dielectric tapes and functional thick film pastes Multilayer designs with buried passive components Benefits of LTCC  Low temperature ~ 850 C  High speed conductors  Parallel processing  Durable, hermetic, resistant  Relatively inexpensive ©TDK-EPC ©IMST Areas of applications  Microelectronics  RF components  Novel areas
  6. 6. LTCC evolution Multilayer electrical circuits Buried Passives C, L, R Microsystems Sensors Actuators Smart Packages
  7. 7. Objective of the thesis The objective of the thesis was to integrate bulk piezoelectric elements in LTCC. Test structures from four areas of applications have been manufactured and characterized: • Sensor • Actuator • Energy harvester • Microfluidic valve Adhesive bondingCo-firing
  8. 8. Key results
  9. 9. Co-firing Benefits of co-firing  Buried components  Hermetic encapsulation  High quality bond  Existing LTCC process flow  Creating electrical connections  Bulk piezoelectric properties higher than in thick- and thin- film
  10. 10. Actuators – optical filter  15 mm x 1.8 mm compact size  680 nm displacement  0,06º tilt capability  Resonance frequency of 11 kHz  Operating voltage 100 V Individual arm signal connection PZT 20 layers LTCC Inner mirror Outer mirror
  11. 11. Energy harvesters – wide band three beam energy harvester  39 mm x 39 mm x 2,7 mm  85 µW output power  5,4 % bandwidth  Center frequency of 1147 Hz  Enough power for temperature sensor, accelerometer or Wi-Fi module working in burst mode
  12. 12. Sensors – bridge type accelerometer  High linearity  High resistance to in-plane accelerations  Sensitivity up to 6 mV/g  Resonance frequency up to 12 kHz
  13. 13. Microfluidic systems – unimorph valve assembled on LTCC substrate  0.65 mm x 0.25 mm channels  Embossed membrane  Fast operating time  Small leakage  125 V driving voltage Pressure Pressure Flow Time
  14. 14. Conclusions 1. Integration of bulk piezoelectric structures and LTCC is possible 2. Co-firing of bulk PZT structures proved to be efficient way of integration that complements adhesive bonding. 3. LTCC works excellent as packaging for various piezoelectric components providing housing and electric circuitry. 4. Integrated piezoelectric bulk components broaden the span of LTCC applications. 5. Embedded bulk components can have better performance than thin- or thick-film components on LTCC.
  15. 15. Acknowledgments Infotech Oulu Tekniikan Edistämissäätiö Nokia Scholarship Foundation Oulun yliopiston tukisäätiö
  16. 16. Thank You for Your attention

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