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Parylene is a widely used conformal coating.It's optical properties depend on composition/deposition condition. To accurately measure layer thickness one needs to know n&k values of the material. MProbe Vis system (http://www.semiconsoft.com/wp/mprobe20desktop/) is used to measure thickness and n&k of the parylene coating quickly and accurately.
MProbe Vis brochure: http://www.semiconsoft.com/html/download/brochure/MProbeVis_brochure2012.pdf