Successfully reported this slideshow.
We use your LinkedIn profile and activity data to personalize ads and to show you more relevant ads. You can change your ad preferences anytime.
A
SEMINAR ON
SPUTTERING PROCESS
Presented
By

K. GANAPATHI RAO
(13031D6003)
Presence of
Mr. Sumair sir
Outline
•
•
•
•
•
•
•

Introduction.
Sputtering Process.
Sputtering Yield.
Sputtering Deposition Film Growth.
Application ...
Solids

2D

Zero Dimension
1D

3D
Thin films
• Thin films are thin material layers
ranging from fractions of a
nanometer (monolayer) to several
micrometers ...
Synthesis of thin films
Sputtering – General
• Sputtering is a term used to describe the mechanism in which
atoms are ejected from the surface of ...
Reasons for sputtering
• Use large-area-targets which gives uniform thickness
over the wafer.
• Control the thickness by D...
Basic Model
Requirements
•
•
•
•

Vacuum.
Inert gas.
Power supply.
Sputtering gas.
Sputtering steps





Ions are generated and directed at a target.
The ions sputter targets atoms.
The ejected atoms a...
Sputtering yield
 Defined as the number of atoms ejected per
incident ion.
 Determines the deposition rate.
 Depends on...
Mass & size of atoms

Molecule size – need to be about the same size as the sputtered material

– too big cause layer defo...
Energy Of The Bombarding Ions
Ion energy Vs. sputter yield:
Direction

• There is a probability that atom C will be ejected from the
surface as a result of the surface being stuck by...
Direction Of Incidence Of Ions
• Sputter yield peaks at <90º.
• Atoms leave the surface with cosine distribution.
Pressure

Pressure reduction – allow better deposited atoms/molecules flux
flow towards the substrate. Expressed by “Mean ...
Sputtering deposition film growth
• Sputtered atoms have
velocities of 3-6 E5 cm/sec
and energy of 10-40 eV.
• Many of the...
Sputtering deposition film growth


The sputter atoms have:
 Arrive at surface with reduce energy (1-2 eV).
 Be backsca...
Sputtering deposition film growth
Application of Sputtering
• Thin film deposition:
– Microelectronics
– Decorative coating
– Protective coating

• Etching ...
Sputtering – additional methods
•
•
•
•
•

Reactive & Non reactive sputtering
RF & DC sputtering
Magnetron sputtering
Coll...
Applications Of Thin Film Technology
Microelectronics
CPU processors,
cell phones,
ipod,
watches,
batteries,
Solar Panels
Applications Of Thin Film Technology
AR (anti-reflective coatings)
On cars,
jewelry,
mirrors,
night vision goggles
Oxidati...
VIDEOS

1
2
3
References
• Hand book of thin film deposition process and techniques- By
Krishna Seshan
• Thin Film Phenomena - Kasturi L...
Sputtering process
Sputtering process
Upcoming SlideShare
Loading in …5
×

46

Share

Download to read offline

Sputtering process

Download to read offline

Related Books

Free with a 30 day trial from Scribd

See all

Sputtering process

  1. 1. A SEMINAR ON SPUTTERING PROCESS Presented By K. GANAPATHI RAO (13031D6003) Presence of Mr. Sumair sir
  2. 2. Outline • • • • • • • Introduction. Sputtering Process. Sputtering Yield. Sputtering Deposition Film Growth. Application Of Sputtering. Additional Methods. Applications Of Thin Film.
  3. 3. Solids 2D Zero Dimension 1D 3D
  4. 4. Thin films • Thin films are thin material layers ranging from fractions of a nanometer (monolayer) to several micrometers in thickness.
  5. 5. Synthesis of thin films
  6. 6. Sputtering – General • Sputtering is a term used to describe the mechanism in which atoms are ejected from the surface of a material when that surface is stuck by sufficiency energetic particles. • First discovered in 1852, and developed as a thin film deposition technique by Langmuir in 1920. • Metallic films: Al-alloys, Ti, Tantalum, Nickel, Cobalt, Gold, etc.
  7. 7. Reasons for sputtering • Use large-area-targets which gives uniform thickness over the wafer. • Control the thickness by Deposition time and other parameters. • Even materials with very high melting points are easily sputtered. • Sputtered films typically have a better adhesion on the substrate. • Sputtering can be performed top-down.
  8. 8. Basic Model
  9. 9. Requirements • • • • Vacuum. Inert gas. Power supply. Sputtering gas.
  10. 10. Sputtering steps     Ions are generated and directed at a target. The ions sputter targets atoms. The ejected atoms are transported to the substrate. Atoms condense and form a thin film.
  11. 11. Sputtering yield  Defined as the number of atoms ejected per incident ion.  Determines the deposition rate.  Depends on:  Mass of bombarding ions.  Energy of the bombarding ions.  Direction of incidence of ions (angle).  Pressure.
  12. 12. Mass & size of atoms Molecule size – need to be about the same size as the sputtered material – too big cause layer deformation and yield a lot of material on walls. – too small cause layer deformation w.r.t not proper ejecting atoms. Target deformation = Less uniform deposition.
  13. 13. Energy Of The Bombarding Ions Ion energy Vs. sputter yield:
  14. 14. Direction • There is a probability that atom C will be ejected from the surface as a result of the surface being stuck by atom A. • In oblique angle (45º-90º) there is higher probability for sputtering, which occur closer to the surface.
  15. 15. Direction Of Incidence Of Ions • Sputter yield peaks at <90º. • Atoms leave the surface with cosine distribution.
  16. 16. Pressure Pressure reduction – allow better deposited atoms/molecules flux flow towards the substrate. Expressed by “Mean free path” which is the average distance an atom can move, in one direction without colliding at another atom.
  17. 17. Sputtering deposition film growth • Sputtered atoms have velocities of 3-6 E5 cm/sec and energy of 10-40 eV. • Many of these atoms deposited upon the substrate. • Thus, sputtered atoms will suffer one or more collision with the sputter gas.
  18. 18. Sputtering deposition film growth  The sputter atoms have:  Arrive at surface with reduce energy (1-2 eV).  Be backscattered to target/chamber.  The sputtering gas pressure can impact on film deposition parameters, such as Deposition rate and composition of the film.
  19. 19. Sputtering deposition film growth
  20. 20. Application of Sputtering • Thin film deposition: – Microelectronics – Decorative coating – Protective coating • Etching of targets: – Microelectronics patterning – CMOS, NMOS, PMOS fabrication • Surface treatment: – Hardening
  21. 21. Sputtering – additional methods • • • • • Reactive & Non reactive sputtering RF & DC sputtering Magnetron sputtering Collimated sputtering Ion-Beam sputtering
  22. 22. Applications Of Thin Film Technology Microelectronics CPU processors, cell phones, ipod, watches, batteries, Solar Panels
  23. 23. Applications Of Thin Film Technology AR (anti-reflective coatings) On cars, jewelry, mirrors, night vision goggles Oxidation resistance on cutting tools, chemical factories. Medical drug delivery
  24. 24. VIDEOS 1 2 3
  25. 25. References • Hand book of thin film deposition process and techniques- By Krishna Seshan • Thin Film Phenomena - Kasturi L. Chopra • http://en.wikipedia.org/wiki/Thin-film_memory • http://www.uccs.edu/~tchriste/courses/PHYS549/549lectures/ • http://nptel.iitm.ac.in/syllabus/syllabus.php?subjectId=11510201 9 • http://www.azom.com/article.aspx?ArticleID=8796
  • SahlaFaz

    Aug. 3, 2021
  • SandeepMeena45

    Apr. 24, 2021
  • zahrafarokhpoor

    Jan. 22, 2021
  • luiznocera

    Jun. 23, 2020
  • ssuser2e00c5

    Jun. 17, 2020
  • fizzukhan2

    Feb. 3, 2020
  • KutluhanUtkuTMEN

    Dec. 25, 2019
  • GauravHamber

    Dec. 12, 2019
  • HasnaHarees

    Sep. 14, 2019
  • 071gayesh

    Jul. 29, 2019
  • SaranyaSS2

    Jun. 30, 2019
  • ShivamAggarwal86

    May. 2, 2019
  • yashogniranjan

    Mar. 18, 2019
  • DhanyaAnanth1

    Mar. 5, 2019
  • GiridharanCoffee

    Feb. 8, 2019
  • Harisankardas1

    Feb. 5, 2019
  • satyabrata1024

    Dec. 4, 2018
  • LogeshWaran71

    Nov. 21, 2018
  • GranaSamueljosh

    Oct. 4, 2018
  • RobinPheiroijam

    Aug. 16, 2018

Views

Total views

33,850

On Slideshare

0

From embeds

0

Number of embeds

30

Actions

Downloads

2,007

Shares

0

Comments

0

Likes

46

×