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Ibex nanotechnology symposium presentation oct. 2007

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Ibex nanotechnology symposium presentation oct. 2007

  1. 1. Nano SymposiumIbex EngineeringOctober 31, 2007 Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  2. 2. The Science Of Precision Motion Agenda• About Ibex• Mechanical Considerations in Nano Positioning applications• Examples of Nano Positioning In Industry Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  3. 3. The Science Of Precision Motion Introduction • Precision Stage Manufacturer • Forte – Micron and under – Cross roller stages • We make Nano technology easy Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  4. 4. Ibex History• Founded By Andre Perrin in 1999• Background – Metrology System• Formed the company to fill a gap by providing non-standard precision motion control platforms Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  5. 5. What We Look For When Designing A High Precision Stage Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  6. 6. The ProcessWhen Reviewing a Nano Application• Basic Engineering – Project scope – Specification review – Engineering challenges relative to the spec – Component sizing – Materials – Control • Who, what, where, and how Sold & Serviced By: • Feedback compatibility ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  7. 7. Basic EngineeringThe Decision Driver• Accuracy and Repeatability – Length of Travel • Straightness/Flatness • Roll, Pitch and Yaw – Envelope – Load and load position – Multi-axis Compounding – Environment • Materials • Finish Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  8. 8. Basic EngineeringConcept ReviewAccuracy• The closeness of agreement between the results of a measurement and the true value of the object being measured.Repeatability• Under Identical conditions how well a system can return to one commanded location – Unidirectional – Bi-Directional Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  9. 9. Mechanical ConceptsEncoder Resolution doesn’t define the Accuracy of a Complete System 1. Pitch 2. Roll 3. Yaw 4. Flatness 5. Straightness 6. ScaleThe combined interacting effects of all contributing factors must be analyzed before total system precision can be determined. Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  10. 10. Basic Engineering Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  11. 11. Basic Engineering Concept Review• If Straightness/Flatness is critical to application – Then what will the stage be mounted to…. 4 M wide, 1.5 M tall• This Very important!!! All Granite 1 mm Sold & Serviced By: shim ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  12. 12. Basic EngineeringConcept Review• Envelope Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Nothing is for free Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  13. 13. Basic EngineeringDetermine position and state of the load • Orientation of the Load – Bearings – Materials – Abbe Error • Vibration - Work • Speed & loading – Settling Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  14. 14. Basic EngineeringSpecifications Drive Bearing Choice • Bearing type – Crossed Roller • Anti-Creep considerations – Profile Rails • Precision/preload – Air bearing • Size • Orientation • Cost Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  15. 15. Basic EngineeringContact Area • Bearing Stiffness review Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  16. 16. Basic EngineeringCrossed Roller Review • Bearing – Anti-Creep Considerations – Materials Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  17. 17. Basic EngineeringAir Bearings Review • Air Bearings – High pressure = less deformation – No friction = no heat – Precision parts – Control Flatness and Straightness Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  18. 18. Basic EngineeringVelocity Control Considerations • Ball Screws • Lead Error • Ball entering and exiting the return tube • Profile Rails • Ball entering and exiting the return tube • Seal Drag • Best – Linear Servo (Piezo or Ironless) – Air Bearing or Crossed Rollers Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  19. 19. Basic Engineering Environment other Error Causing Factors • Thermal expansion errors • Feedback Position • Cosine errors • Abbé offsets Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  20. 20. Basic EngineeringEnvironment Temperature Thermal Expansion • Stainless Screw = 12ppm/deg C • Aluminum = 23 ppm/deg. C • 3 degree rise makes a 100mm screw grow 7 microns • Areas of concern – Type of motor and associated duty – Temperature swing of the environment Sold & Serviced By: – Adjacent equipment ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  21. 21. Basic EngineeringFeedback • Feedback type – Linear • Digital vs Analog – Scale Type – Typically 20um grating • Tape • Glass 1.8 µm/m/°C • Invar 0.6 µm/m/°C – Rotary Sold & Serviced By: ELECTROMATE – Interferometer Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  22. 22. Basic EngineeringFeedback – Cosine Error Cosine errors occur when a positioning feedback scale is not in perfect parallel alignment with the motion of the moving carriage. Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  23. 23. Basic EngineeringAbbé errors result from a positioning measuringdevice (typically a linear encoder) being offset fromthe point of work (end-effector) due to mechanical errors Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  24. 24. Basic EngineeringConcept Review Other Considerations • Structural Stiffness – What are we mounting too – Vibration dampening – The building and traffic • Wire Management • Controls – Features based relative to the end goal – Mapping, Notch filtering, Adaptive tuning for variable inertias, Sin-Cosine inputs…. Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  25. 25. A World Of ChoiceCustom and OEM Built Motion Platforms Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  26. 26. System Technologies and Configurations• Positioning stages – X,Y,Z, Theta – Z-Wedges – Goniometer – Gantries – Various compound stages – Granite Stages – Assemblies Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  27. 27. System Technologies and Configurations• Bearing Technologies – Air Bearings – Crossed Roller – Recirculating Ball • Round and Profile – Cam Rollers• Screw Technologies – Precision Ground – Precision Rolled / Standard Rolled Sold & Serviced By: ELECTROMATE – Lead/acme Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  28. 28. System Technologies and Configurations• Controls – ACS-Tech80 – Galil – Yaskawa – Trio – PLC…. Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  29. 29. System Technologies and Configurations–Motor Technologies– Nano Motion– Rotary • Stepper • Servo– Linear Servo • Nippon Pulse • Yaskawa • Technotion– Integrated Lead/acme motors Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  30. 30. The Markets We Serve• Biomedical/Pharmaceutical• Life Sciences – Cell Imaging…..• Medical Device• Semi Conductor Fab• Data Storage• National Lab/Research• Metrology• Photonics/Telecom• Aerospace and Defense…. Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  31. 31. National Labs / Research Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  32. 32. Kinematics Systems Multiple sizes and configurations. 5 and 6 Degrees of freedom Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  33. 33. High and Ultra High Vacuum Ibex has the Vacuum solutions with years of experience building stages in a range atmospheres from 10-3 to 10-10. We’ve built an array of precision stage configurations using multiple combinations of bearing and motors. Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  34. 34. Gantry and Granite Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  35. 35. The Sciences Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  36. 36. Multi Axis Nano Stages Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  37. 37. Metrology Platforms Metrology Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  38. 38. Metrology Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  39. 39. Exotic Platforms Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  40. 40. Life Sciences - OEM Builds Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  41. 41. Semiconductor Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  42. 42. Semiconductor Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  43. 43. Medical OEM’s Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  44. 44. Rotary – Nano and Direct DriveServo Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  45. 45. Custom Applications Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  46. 46. Design To MFGIBEX is a Fully Integrated Company –From 3D DesignAll mechanical designs are created in 3D Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  47. 47. Design To MFGFrom 3D Design – To MastercamFully Integrated Manufacturing From SolidWorks To Master Cam CAD/CAM Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  48. 48. Mastercam to Machine Centers Sold & Serviced By: Fully Integrated CNC Mills ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  49. 49. From Assembly to QA In House Measuring Systems • Laser Interferometer – 1nm res • Auto Collimator • Laser Rotary Calibrator Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  50. 50. Thank You!• For allowing our organization to present today• We look forward to the partnership Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com

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