Hitachi High-Tech Science Corporation’s
FT-110A XRF for Coating Thickness QC
(Eastern Applied Research, Inc. is responsible for the contents of this presentation.
Certain material is used with the permission of Hitachi High-Tech Science Corporation.)

Seiko Connection
Hitachi High-Tech Science Corporation continues the Seiko Nano-
Technologies XRF tradition, and Eastern Applied Research, Inc. is
a distributor of Hitachi High-Tech Science Corporation products.
High Precision
Innovation Reliability
Longevity

Building on Tradition
Users of the Seiko SFT-3200 and SFT-9200 series will
recognize many of the same benefits (and more) in the Hitachi FT-110A
SFT-3200
SFT-9200
Hitachi FT-110A

FT110A Top Benefits
1. High Throughput, due to excellent autofocus option
2. Micro-Spot coating thickness measurements (electronics, etc)
3. Measure Up to 5 Layers with standards-less FP
4. Easy Positioning by unique wide view image option
5. Simplifies Testing of complex sample designs

Specifications
Full Specifications: http://www.easternapplied.com/hitachi-FT110A-xrf-analyzer
Measurement Direction Top-Down
Measurable Elements Ti (22) – Bi (83)
Atmosphere Air
X-ray System Small, air cooled tube, W Target
Tube Current Maximum 1000uA (variable)
Primary Filter Automatic switching, on/off
Detector Technology Proportional counter
Collimator Size (beam size) 0.1 and 0.2 mm (options available)
Maximum Sample Size 19.68” x 15.74” x 5.90” (W-D-H)
Withstand Load 22lbs (10kg)
Motorized XY Stage Drive 9.84x7.87” (optional movement)
Repeatability +/- 5um
Speed 1.57”/sec (40mm/sec)

Make It Your XRF
Motorized
XY Stage
Fixed
XY Stage
Enclosed
Chamber
Slotted
Chamber
OR
OR
Collimator B
0.05, 0.1, 0.2 &
0.025x0.4mm
X-ray Tube4 holes
Collimator A
0.1 & 0.2mm
X-ray Tube
2
holes
OR

Make It Your XRF
Narrow
View
Lens
Wide
View
Lens
Meas. Sample
Dual
Images
Meas. Sample
Narrow
View
LensSingle
Image
OR
With
Standard
Samples
Standard
Free Method No NeedOR
Auto
Focus
Laser
PointerOR

Highlighted Features
Auto-Focus
Wide View Optics (Dual Image)
Standard-less FP Method

X-ray
tube
CCD camera
When the height within the
measurement range differs, the
camera automatically focuses,
thus allowing rapid measuring.
Distance measurement is done at
the time of auto focus therefore
measurement results are
corrected in response to distance.
Automatic
Focus
before focus
after focus
Auto-Focus
Auto-Focus range is 3.14” (80mm)
Time is within 3 seconds
70% reduction in time from conventional XRF

Focusing
Click Click
Does not focus when a sample is set
Focusing
Auto-Focus
Automatic
vertical drive
of camera
after distance
measurement
Z Range
5.9”
X-ray
box Camera axis
range 3.14”
X-ray
Generator
Table
Plate
Mirror
X-rays
Sample 1
X-ray
box
X-ray
Generator
X-rays
Sample 2
Optic
Axis
Automatic downward drive of
camera head after distance
measurement
Autofocus Function Auto Approach Function

Focal length Au (mm) Ni (mm) Au Error Ni Error
Optimum 0.131 2.152 - -
+10mm 0.128 2.188 2.67% 1.65%
+20mm 0.126 2.199 3.82% 2.13%
+40mm 0.126 2.191 3.82% 1.76%
+60mm 0.132 2.127 0.76% 1.17%
+80mm 0.138 2.054 4.96% 4.50%
Effects of distance correction function on each focal point
(Average of 20 repetitions)
The error within 5% has been achieved for a standard distance within 80mm
Auto-Focus

Why Add Wide-View Observation?
Efficiency
Wide View
Save operator time and potential mistakes
Streamline the process of sample positioning when measuring smaller
points within a larger area (ie populated circuit board)
Performance:
Imaging Time: Max 20 seconds
Resolution: 200mm
Position Accuracy: ±2mm
Digital Zoom: 0.2～5.7X
Wide View Narrow View
Sample

7.87”
200mm
9.84”
250mm
0.20”
5.3mm
0.27”
7.1mm
Wide field observation image
Narrow field observation image
First, acquire a wide field image of the entire sample stage.
Then you select a narrow field image from the wide field image
Wide View

Step 1:
capture entire sample image
Wide field image
By capturing a maximum
9.84 x 7.87 ” sample image,
multiple point measurements
and positioning of large
sample is made easy.
Wide field image
Step 2:
expanded wide field image
Scrolling the mouse easily
expands the wide field
images, such as for
measurement locations
Narrow field image
Step 3:
verify micro areas
After moving the stage from
the wide field image to the
measurement location, set
detailed positioning of
microscopic area within the
narrow field image.
Wide View

As a result, a sensitivity coefficient must be obtained when creating
conditions and by periodically measuring standard samples
Proportional Counter detection systems are the most popular approach
to maximize throughput for coating measurements.
• Large peak overlap
(separation is essential)
• Effects of temperature change is large
due to use of a gas
However…
Disadvantage of Prop-Count could be
Combined spectrum of elements A and B
F(x) = αf (x)＋βg (x)
F(x)
αf (x)
βg (x)
Channel
Film Analysis FP

NOW, the Hitachi FT-110A includes a newly developed separation process that
combines with the characteristics of the proportional counter and enables
measuring by a sensitivity coefficient registered beforehand.
Improved performance by omitting prior operations
In order to acquire a sensitivity coefficient before
the Hitachi FT-110A…standards and time were required
Film Analysis FP

Accuracy and reproducibility of 20 repetitions measuring Sn thin film
Time 10 seconds 40 seconds
Standards Sn: 1.01mm
Average 1.08mm 1.09mm
SD 0.027 0.011
Coef of Var 2.11% 1.01%
Range 0.09mm 0.03mm
Accuracy 6.4% 7.5%
The newly improved Film Analysis FP method contributes to performance
but cannot be employed if accuracy is not maintained
Method Voltage Current Collimator Filter
Film FP 50kV 625mA 0.1mm OFF
Film Analysis FP

Application CV (%)
1st Layer Au (1.03um) 1.07
2nd Layer Ni (4.96um) 1.13
Base Cu
1st Layer Sn (4.83um） -3.7
Base Cu
Examples of Standardless FP Applications
Conditions:
• 0.1mm Collimator
• Primary Filter Off
• Readings : 30
The Hitachi FT-110A offers newly developed thin film FP software
that allows for standard-less analysis
of up to ten (10) elements in a maximum of five (5) layers
Standardless FP

Slotted Chamber enables measurement of large printed
circuit boards up to 23.6” (W), 23.6” (D), 0.59” (H)
Table Plate
27.5” (W) x 23.6” (D)
Chamber Door
Chassis Cover
Slot
1.37”
Slotted Chamber
Standard, Enclosed, Design enables measurement of
samples up to 19.6” (W), 15.7” (D), 5.9” (H).
0.66”
0.39”
0.31”

Example Configurations
of the Hitachi FT-110A
Configurations

Fixed
XY Stage
Laser Pointer Standard Free
No Need
+ +
X-ray Tube
Collimator A
0.1 & 0.2mm
Enclosed
Chamber
Meas. Sample
Narrow
View
Lens
Single Image
+ ++
Fastener Industry
Zn/Fe
Ni/Cu
Ni/Brass
Cu/Fe
NiP/Fe
NiP/Brass
Bolts
Nuts
Screws
Springs

ZnNi/Fe Zn/Fe
Fixed
XY Stage
Auto Focus Standard Free
No Need
Meas. Sample
Narrow
View
Lens
Single Image
++ +
Enclosed
Chamber
Collimator A
0.1 & 0.2mm
++
Automotive Parts

Al/Fe 10µm / Substrate
200µm / Substrate Cr/Fe 0.25µm / Substrate
25µm / Substrate
Au/Ni [Cu] 0.05µm / Substrate
8µm / Substrate Ni/Cu 0.5µm / Substrate
30µm / Substrate
Ag/Cu [Ni] 0.5µm / Substrate
70µm / Substrate Ni/CuZn 0.5µm / Substrate
30µm / Substrate
Ag/Al 2µm / Substrate
70µm / Substrate Ni/CuSn 0.5µm / Substrate
30µm / Substrate
Cd/Fe 1µm / Substrate
15µm / Substrate Ni/Fe 0.5µm / Substrate
40µm / Substrate
Cu/Fe 1µm / Substrate
30µm / Substrate NiP/Cu 0.5µm / Substrate
30µm / Substrate
Cu/CuZn 1µm / Substrate
30µm / Substrate NiP/CuZn 0.5µm / Substrate
30µm / Substrate
Cu/Epoxy 1µm / Substrate
30µm / Substrate NiP/CuSn 0.5µm / Substrate
30µm / Substrate
Single Layer Coating

Au/Ni/Cu
Au/Ni/CuSn
Au/Pd-Ni/Ni/CuSn
Sn-Pb/Ni/CuSn
Ag/Ni/CuSn
Ag/Cu
Meas. Sample
Narrow
View
Lens
Wide
View
Lens
Dual ImagesMotorized
XY Stage
Laser Pointer With Standard
Samples
+ + +
Enclosed
Chamber X-ray Tube
Collimator B
0.05, 0.1, 0.2 &
0.025x0.4mm
+ +
Electronics

Cr/Ni/Cu/Fe
Cr/Ni/Cu/PLASTIC
Ni/Cu/Fe
Cu/Plastic
Cu/Fe
Au/Ni/PLASTIC
Fixed
XY Stage
Auto Focus
Meas. Sample
Narrow
View
Lens
Single Image
+ +
X-ray Tube
Collimator A
0.1 & 0.2mm
Standard Free
No Need
Enclosed
Chamber
+ + +
Appliance Industry

SnPb/Ni/Cu
SnPb/Cu
Sn/Cu
Au/Ni/Cu
Slotted
Chamber
Auto FocusMotorized
XY Stage
With Standard
Samples
+ + +
Meas. Sample
Narrow
View
Lens
Wide
View
Lens
Dual Images
X-ray Tube
Collimator B
0.05, 0.1, 0.2 &
0.025x0.4mm
+ +
Printed Circuit Board

Au/Ni/Brass
SnPb/Cu
Ag/Cu
Cu/Fe
Ni/Cu/Fe
Motorized
XY Stage
Laser Pointer With Standard
Samples
Collimator A
0.1 & 0.2mm
Enclosed
Chamber
Meas. Sample
Narrow
View
Lens
Single Image
+ + +++
Small Electronics

Sn/Cu
Sn/Cu/Fe
Sn/Ni/Al
Ag/Ni/Brass
Ag/Ni/Al
Enclosed
Chamber
Fixed
XY Stage
Meas. Sample
Narrow
View
Lens
Single Image Laser Pointer With Standard
Samples
Collimator A
0.1 & 0.2mm
+ + + + +
Large Electronics

Au/Ni/Cu
Au/Ni/Fe
SnPb/CuSn
SnPb/Ni/CuSn
NiP/Fe
Ni/Fe
Enclosed
Chamber
Fixed
XY Stage
Meas. Sample
Narrow
View
Lens
Wide
View
Lens
Dual Images Laser Pointer With Standard
Samples
Collimator B
0.05, 0.1, 0.2 &
0.025x0.4mm
+ + + + +
Components

Au/Ni/Cu
0.05µm / 2µm / Substrate
3µm / 6µm / Substrate
Au/Pd/Ni
0.05µm / 2µm / Substrate
3µm / 6µm / Substrate
Ag/Ni/Cu
0.5µm / 2µm / Substrate
10µm / 6µm / Substrate
Ag/Ni/CuSn
0.5µm / 2µm / Substrate
10µm / 6µm / Substrate
Ni/Cu/Fe
0.5µm / 2µm / Substrate
20µm /20µm / Substrate
Ni/Cu/Plastic
0.5µm / 2µm / Substrate
20µm /20µm / Substrate
NiP/Cu/Fe
0.5µm / 2µm / Substrate
20µm /20µm / Substrate
NiP/Cu/Zn
0.5µm / 2µm / Substrate
20µm /20µm / Substrate
Multi-Layer Coatings

Cr/Ni/Cu/Plastic
Enclosed
Chamber
Fixed
XY Stage
Meas. Sample
Narrow
View
Lens
Single Image Laser Pointer Standard Free
No Need
X-ray Tube
Collimator A
0.1 & 0.2mm
+ + + + +
Automotive Design

Au/Ni/CuZn
Au/Pd/Ni/SnPb
Au/Pt/Ni/SnPb
Ag/Ni/Cu/SnPb
Pt/Ni/CuZn
Enclosed
Chamber
Fixed
XY Stage
Meas. Sample
Narrow
View
Lens
Single Image Laser Pointer With Standard
Samples X-ray Tube
Collimator A
0.1 & 0.2mm
+ + + + +
Jewelry

SnPb/Cu
0.5µm / Substrate
30µm / Substrate
SnPb/CuSn
0.5µm / Substrate
30µm / Substrate
SnPb/Ni/CuSn
0.5µm / 2µm / Substrate
15µm / 5µm / Substrate
ZnNi/Fe
5 µm / Substrate
15µm / Substrate
SnZn/Fe
2 µm / Substrate
15µm / Substrate
Alloy Coatings

Contact Info
FT-110A Info and Literature:
http://www.easternapplied.com/hitachi-FT110A-xrf-analyzer
Contact Eastern Applied Research Inc
for literature, demonstrations, discussions:
http://www.easternapplied.com/
716-201-1115 ~ sales@easternapplied.com