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Hitachi High-Tech Science Corporation’s
FT-110A XRF for Coating Thickness QC
(Eastern Applied Research, Inc. is responsibl...
Seiko Connection
Hitachi High-Tech Science Corporation continues the Seiko Nano-
Technologies XRF tradition, and Eastern A...
Building on Tradition
Users of the Seiko SFT-3200 and SFT-9200 series will
recognize many of the same benefits (and more) ...
FT110A Top Benefits
1. High Throughput, due to excellent autofocus option
2. Micro-Spot coating thickness measurements (el...
Specifications
Full Specifications: http://www.easternapplied.com/hitachi-FT110A-xrf-analyzer
Measurement Direction Top-Do...
Make It Your XRF
Motorized
XY Stage
Fixed
XY Stage
Enclosed
Chamber
Slotted
Chamber
OR
OR
Collimator B
0.05, 0.1, 0.2 &
0....
Make It Your XRF
Narrow
View
Lens
Wide
View
Lens
Meas. Sample
Dual
Images
Meas. Sample
Narrow
View
LensSingle
Image
OR
Wit...
Highlighted Features
Auto-Focus
Wide View Optics (Dual Image)
Standard-less FP Method
X-ray
tube
CCD camera
When the height within the
measurement range differs, the
camera automatically focuses,
thus allowin...
Focusing
Click Click
Does not focus when a sample is set
Focusing
Auto-Focus
Automatic
vertical drive
of camera
after dist...
Focal length Au (mm) Ni (mm) Au Error Ni Error
Optimum 0.131 2.152 - -
+10mm 0.128 2.188 2.67% 1.65%
+20mm 0.126 2.199 3.8...
Why Add Wide-View Observation?
Efficiency
Wide View
Save operator time and potential mistakes
Streamline the process of sa...
7.87”
200mm
9.84”
250mm
0.20”
5.3mm
0.27”
7.1mm
Wide field observation image
Narrow field observation image
First, acquire...
Step 1:
capture entire sample image
Wide field image
By capturing a maximum
9.84 x 7.87 ” sample image,
multiple point mea...
As a result, a sensitivity coefficient must be obtained when creating
conditions and by periodically measuring standard sa...
NOW, the Hitachi FT-110A includes a newly developed separation process that
combines with the characteristics of the propo...
Accuracy and reproducibility of 20 repetitions measuring Sn thin film
Time 10 seconds 40 seconds
Standards Sn: 1.01mm
Aver...
Application CV (%)
1st Layer Au (1.03um) 1.07
2nd Layer Ni (4.96um) 1.13
Base Cu
1st Layer Sn (4.83um) -3.7
Base Cu
Exampl...
Slotted Chamber enables measurement of large printed
circuit boards up to 23.6” (W), 23.6” (D), 0.59” (H)
Table Plate
27.5...
Example Configurations
of the Hitachi FT-110A
Configurations
Fixed
XY Stage
Laser Pointer Standard Free
No Need
+ +
X-ray Tube
Collimator A
0.1 & 0.2mm
Enclosed
Chamber
Meas. Sample
N...
ZnNi/Fe Zn/Fe
Fixed
XY Stage
Auto Focus Standard Free
No Need
Meas. Sample
Narrow
View
Lens
Single Image
++ +
Enclosed
Cha...
Al/Fe 10µm / Substrate
200µm / Substrate Cr/Fe 0.25µm / Substrate
25µm / Substrate
Au/Ni [Cu] 0.05µm / Substrate
8µm / Sub...
Au/Ni/Cu
Au/Ni/CuSn
Au/Pd-Ni/Ni/CuSn
Sn-Pb/Ni/CuSn
Ag/Ni/CuSn
Ag/Cu
Meas. Sample
Narrow
View
Lens
Wide
View
Lens
Dual Imag...
Cr/Ni/Cu/Fe
Cr/Ni/Cu/PLASTIC
Ni/Cu/Fe
Cu/Plastic
Cu/Fe
Au/Ni/PLASTIC
Fixed
XY Stage
Auto Focus
Meas. Sample
Narrow
View
Le...
SnPb/Ni/Cu
SnPb/Cu
Sn/Cu
Au/Ni/Cu
Slotted
Chamber
Auto FocusMotorized
XY Stage
With Standard
Samples
+ + +
Meas. Sample
Na...
Au/Ni/Brass
SnPb/Cu
Ag/Cu
Cu/Fe
Ni/Cu/Fe
Motorized
XY Stage
Laser Pointer With Standard
Samples
Collimator A
0.1 & 0.2mm
E...
Sn/Cu
Sn/Cu/Fe
Sn/Ni/Al
Ag/Ni/Brass
Ag/Ni/Al
Enclosed
Chamber
Fixed
XY Stage
Meas. Sample
Narrow
View
Lens
Single Image La...
Au/Ni/Cu
Au/Ni/Fe
SnPb/CuSn
SnPb/Ni/CuSn
NiP/Fe
Ni/Fe
Enclosed
Chamber
Fixed
XY Stage
Meas. Sample
Narrow
View
Lens
Wide
V...
Au/Ni/Cu
0.05µm / 2µm / Substrate
3µm / 6µm / Substrate
Au/Pd/Ni
0.05µm / 2µm / Substrate
3µm / 6µm / Substrate
Ag/Ni/Cu
0...
Cr/Ni/Cu/Plastic
Enclosed
Chamber
Fixed
XY Stage
Meas. Sample
Narrow
View
Lens
Single Image Laser Pointer Standard Free
No...
Au/Ni/CuZn
Au/Pd/Ni/SnPb
Au/Pt/Ni/SnPb
Ag/Ni/Cu/SnPb
Pt/Ni/CuZn
Enclosed
Chamber
Fixed
XY Stage
Meas. Sample
Narrow
View
L...
SnPb/Cu
0.5µm / Substrate
30µm / Substrate
SnPb/CuSn
0.5µm / Substrate
30µm / Substrate
SnPb/Ni/CuSn
0.5µm / 2µm / Substra...
Contact Info
FT-110A Info and Literature:
http://www.easternapplied.com/hitachi-FT110A-xrf-analyzer
Contact Eastern Applie...
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XRF Analyzer for Coating Thickness Quality Control Hitachi FT-110A XRF

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X-ray Fluorescence (XRF) technology is a critical tool in the quality control of coating thickness applications. This presentation offers an overview of the Hitachi FT-110A XRF analyzer and the features/benefits that make it an industry leader with highly accurate precision and user efficiency. Developed by XRF Distributor, Eastern Applied Research Inc. Learn more: http://www.easternapplied.com/hitachi-FT110A-xrf-analyzer

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XRF Analyzer for Coating Thickness Quality Control Hitachi FT-110A XRF

  1. 1. Hitachi High-Tech Science Corporation’s FT-110A XRF for Coating Thickness QC (Eastern Applied Research, Inc. is responsible for the contents of this presentation. Certain material is used with the permission of Hitachi High-Tech Science Corporation.)
  2. 2. Seiko Connection Hitachi High-Tech Science Corporation continues the Seiko Nano- Technologies XRF tradition, and Eastern Applied Research, Inc. is a distributor of Hitachi High-Tech Science Corporation products. High Precision Innovation Reliability Longevity
  3. 3. Building on Tradition Users of the Seiko SFT-3200 and SFT-9200 series will recognize many of the same benefits (and more) in the Hitachi FT-110A SFT-3200 SFT-9200 Hitachi FT-110A
  4. 4. FT110A Top Benefits 1. High Throughput, due to excellent autofocus option 2. Micro-Spot coating thickness measurements (electronics, etc) 3. Measure Up to 5 Layers with standards-less FP 4. Easy Positioning by unique wide view image option 5. Simplifies Testing of complex sample designs
  5. 5. Specifications Full Specifications: http://www.easternapplied.com/hitachi-FT110A-xrf-analyzer Measurement Direction Top-Down Measurable Elements Ti (22) – Bi (83) Atmosphere Air X-ray System Small, air cooled tube, W Target Tube Current Maximum 1000uA (variable) Primary Filter Automatic switching, on/off Detector Technology Proportional counter Collimator Size (beam size) 0.1 and 0.2 mm (options available) Maximum Sample Size 19.68” x 15.74” x 5.90” (W-D-H) Withstand Load 22lbs (10kg) Motorized XY Stage Drive 9.84x7.87” (optional movement) Repeatability +/- 5um Speed 1.57”/sec (40mm/sec)
  6. 6. Make It Your XRF Motorized XY Stage Fixed XY Stage Enclosed Chamber Slotted Chamber OR OR Collimator B 0.05, 0.1, 0.2 & 0.025x0.4mm X-ray Tube4 holes Collimator A 0.1 & 0.2mm X-ray Tube 2 holes OR
  7. 7. Make It Your XRF Narrow View Lens Wide View Lens Meas. Sample Dual Images Meas. Sample Narrow View LensSingle Image OR With Standard Samples Standard Free Method No NeedOR Auto Focus Laser PointerOR
  8. 8. Highlighted Features Auto-Focus Wide View Optics (Dual Image) Standard-less FP Method
  9. 9. X-ray tube CCD camera When the height within the measurement range differs, the camera automatically focuses, thus allowing rapid measuring. Distance measurement is done at the time of auto focus therefore measurement results are corrected in response to distance. Automatic Focus before focus after focus Auto-Focus Auto-Focus range is 3.14” (80mm) Time is within 3 seconds 70% reduction in time from conventional XRF
  10. 10. Focusing Click Click Does not focus when a sample is set Focusing Auto-Focus Automatic vertical drive of camera after distance measurement Z Range 5.9” X-ray box Camera axis range 3.14” X-ray Generator Table Plate Mirror X-rays Sample 1 X-ray box X-ray Generator X-rays Sample 2 Optic Axis Automatic downward drive of camera head after distance measurement Autofocus Function Auto Approach Function
  11. 11. Focal length Au (mm) Ni (mm) Au Error Ni Error Optimum 0.131 2.152 - - +10mm 0.128 2.188 2.67% 1.65% +20mm 0.126 2.199 3.82% 2.13% +40mm 0.126 2.191 3.82% 1.76% +60mm 0.132 2.127 0.76% 1.17% +80mm 0.138 2.054 4.96% 4.50% Effects of distance correction function on each focal point (Average of 20 repetitions) The error within 5% has been achieved for a standard distance within 80mm Auto-Focus
  12. 12. Why Add Wide-View Observation? Efficiency Wide View Save operator time and potential mistakes Streamline the process of sample positioning when measuring smaller points within a larger area (ie populated circuit board) Performance: Imaging Time: Max 20 seconds Resolution: 200mm Position Accuracy: ±2mm Digital Zoom: 0.2~5.7X Wide View Narrow View Sample
  13. 13. 7.87” 200mm 9.84” 250mm 0.20” 5.3mm 0.27” 7.1mm Wide field observation image Narrow field observation image First, acquire a wide field image of the entire sample stage. Then you select a narrow field image from the wide field image Wide View
  14. 14. Step 1: capture entire sample image Wide field image By capturing a maximum 9.84 x 7.87 ” sample image, multiple point measurements and positioning of large sample is made easy. Wide field image Step 2: expanded wide field image Scrolling the mouse easily expands the wide field images, such as for measurement locations Narrow field image Step 3: verify micro areas After moving the stage from the wide field image to the measurement location, set detailed positioning of microscopic area within the narrow field image. Wide View
  15. 15. As a result, a sensitivity coefficient must be obtained when creating conditions and by periodically measuring standard samples Proportional Counter detection systems are the most popular approach to maximize throughput for coating measurements. • Large peak overlap (separation is essential) • Effects of temperature change is large due to use of a gas However… Disadvantage of Prop-Count could be Combined spectrum of elements A and B F(x) = αf (x)+βg (x) F(x) αf (x) βg (x) Channel Film Analysis FP
  16. 16. NOW, the Hitachi FT-110A includes a newly developed separation process that combines with the characteristics of the proportional counter and enables measuring by a sensitivity coefficient registered beforehand. Improved performance by omitting prior operations In order to acquire a sensitivity coefficient before the Hitachi FT-110A…standards and time were required Film Analysis FP
  17. 17. Accuracy and reproducibility of 20 repetitions measuring Sn thin film Time 10 seconds 40 seconds Standards Sn: 1.01mm Average 1.08mm 1.09mm SD 0.027 0.011 Coef of Var 2.11% 1.01% Range 0.09mm 0.03mm Accuracy 6.4% 7.5% The newly improved Film Analysis FP method contributes to performance but cannot be employed if accuracy is not maintained Method Voltage Current Collimator Filter Film FP 50kV 625mA 0.1mm OFF Film Analysis FP
  18. 18. Application CV (%) 1st Layer Au (1.03um) 1.07 2nd Layer Ni (4.96um) 1.13 Base Cu 1st Layer Sn (4.83um) -3.7 Base Cu Examples of Standardless FP Applications Conditions: • 0.1mm Collimator • Primary Filter Off • Readings : 30 The Hitachi FT-110A offers newly developed thin film FP software that allows for standard-less analysis of up to ten (10) elements in a maximum of five (5) layers Standardless FP
  19. 19. Slotted Chamber enables measurement of large printed circuit boards up to 23.6” (W), 23.6” (D), 0.59” (H) Table Plate 27.5” (W) x 23.6” (D) Chamber Door Chassis Cover Slot 1.37” Slotted Chamber Standard, Enclosed, Design enables measurement of samples up to 19.6” (W), 15.7” (D), 5.9” (H). 0.66” 0.39” 0.31”
  20. 20. Example Configurations of the Hitachi FT-110A Configurations
  21. 21. Fixed XY Stage Laser Pointer Standard Free No Need + + X-ray Tube Collimator A 0.1 & 0.2mm Enclosed Chamber Meas. Sample Narrow View Lens Single Image + ++ Fastener Industry Zn/Fe Ni/Cu Ni/Brass Cu/Fe NiP/Fe NiP/Brass Bolts Nuts Screws Springs
  22. 22. ZnNi/Fe Zn/Fe Fixed XY Stage Auto Focus Standard Free No Need Meas. Sample Narrow View Lens Single Image ++ + Enclosed Chamber Collimator A 0.1 & 0.2mm ++ Automotive Parts
  23. 23. Al/Fe 10µm / Substrate 200µm / Substrate Cr/Fe 0.25µm / Substrate 25µm / Substrate Au/Ni [Cu] 0.05µm / Substrate 8µm / Substrate Ni/Cu 0.5µm / Substrate 30µm / Substrate Ag/Cu [Ni] 0.5µm / Substrate 70µm / Substrate Ni/CuZn 0.5µm / Substrate 30µm / Substrate Ag/Al 2µm / Substrate 70µm / Substrate Ni/CuSn 0.5µm / Substrate 30µm / Substrate Cd/Fe 1µm / Substrate 15µm / Substrate Ni/Fe 0.5µm / Substrate 40µm / Substrate Cu/Fe 1µm / Substrate 30µm / Substrate NiP/Cu 0.5µm / Substrate 30µm / Substrate Cu/CuZn 1µm / Substrate 30µm / Substrate NiP/CuZn 0.5µm / Substrate 30µm / Substrate Cu/Epoxy 1µm / Substrate 30µm / Substrate NiP/CuSn 0.5µm / Substrate 30µm / Substrate Single Layer Coating
  24. 24. Au/Ni/Cu Au/Ni/CuSn Au/Pd-Ni/Ni/CuSn Sn-Pb/Ni/CuSn Ag/Ni/CuSn Ag/Cu Meas. Sample Narrow View Lens Wide View Lens Dual ImagesMotorized XY Stage Laser Pointer With Standard Samples + + + Enclosed Chamber X-ray Tube Collimator B 0.05, 0.1, 0.2 & 0.025x0.4mm + + Electronics
  25. 25. Cr/Ni/Cu/Fe Cr/Ni/Cu/PLASTIC Ni/Cu/Fe Cu/Plastic Cu/Fe Au/Ni/PLASTIC Fixed XY Stage Auto Focus Meas. Sample Narrow View Lens Single Image + + X-ray Tube Collimator A 0.1 & 0.2mm Standard Free No Need Enclosed Chamber + + + Appliance Industry
  26. 26. SnPb/Ni/Cu SnPb/Cu Sn/Cu Au/Ni/Cu Slotted Chamber Auto FocusMotorized XY Stage With Standard Samples + + + Meas. Sample Narrow View Lens Wide View Lens Dual Images X-ray Tube Collimator B 0.05, 0.1, 0.2 & 0.025x0.4mm + + Printed Circuit Board
  27. 27. Au/Ni/Brass SnPb/Cu Ag/Cu Cu/Fe Ni/Cu/Fe Motorized XY Stage Laser Pointer With Standard Samples Collimator A 0.1 & 0.2mm Enclosed Chamber Meas. Sample Narrow View Lens Single Image + + +++ Small Electronics
  28. 28. Sn/Cu Sn/Cu/Fe Sn/Ni/Al Ag/Ni/Brass Ag/Ni/Al Enclosed Chamber Fixed XY Stage Meas. Sample Narrow View Lens Single Image Laser Pointer With Standard Samples Collimator A 0.1 & 0.2mm + + + + + Large Electronics
  29. 29. Au/Ni/Cu Au/Ni/Fe SnPb/CuSn SnPb/Ni/CuSn NiP/Fe Ni/Fe Enclosed Chamber Fixed XY Stage Meas. Sample Narrow View Lens Wide View Lens Dual Images Laser Pointer With Standard Samples Collimator B 0.05, 0.1, 0.2 & 0.025x0.4mm + + + + + Components
  30. 30. Au/Ni/Cu 0.05µm / 2µm / Substrate 3µm / 6µm / Substrate Au/Pd/Ni 0.05µm / 2µm / Substrate 3µm / 6µm / Substrate Ag/Ni/Cu 0.5µm / 2µm / Substrate 10µm / 6µm / Substrate Ag/Ni/CuSn 0.5µm / 2µm / Substrate 10µm / 6µm / Substrate Ni/Cu/Fe 0.5µm / 2µm / Substrate 20µm /20µm / Substrate Ni/Cu/Plastic 0.5µm / 2µm / Substrate 20µm /20µm / Substrate NiP/Cu/Fe 0.5µm / 2µm / Substrate 20µm /20µm / Substrate NiP/Cu/Zn 0.5µm / 2µm / Substrate 20µm /20µm / Substrate Multi-Layer Coatings
  31. 31. Cr/Ni/Cu/Plastic Enclosed Chamber Fixed XY Stage Meas. Sample Narrow View Lens Single Image Laser Pointer Standard Free No Need X-ray Tube Collimator A 0.1 & 0.2mm + + + + + Automotive Design
  32. 32. Au/Ni/CuZn Au/Pd/Ni/SnPb Au/Pt/Ni/SnPb Ag/Ni/Cu/SnPb Pt/Ni/CuZn Enclosed Chamber Fixed XY Stage Meas. Sample Narrow View Lens Single Image Laser Pointer With Standard Samples X-ray Tube Collimator A 0.1 & 0.2mm + + + + + Jewelry
  33. 33. SnPb/Cu 0.5µm / Substrate 30µm / Substrate SnPb/CuSn 0.5µm / Substrate 30µm / Substrate SnPb/Ni/CuSn 0.5µm / 2µm / Substrate 15µm / 5µm / Substrate ZnNi/Fe 5 µm / Substrate 15µm / Substrate SnZn/Fe 2 µm / Substrate 15µm / Substrate Alloy Coatings
  34. 34. Contact Info FT-110A Info and Literature: http://www.easternapplied.com/hitachi-FT110A-xrf-analyzer Contact Eastern Applied Research Inc for literature, demonstrations, discussions: http://www.easternapplied.com/ 716-201-1115 ~ sales@easternapplied.com

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