Choosing the Right Sensor
for Measuring High
Pressure
Before We Start
This webinar will be available afterwards at
designworldonline.com & email
Q&A at the end of the present...
Presenters

Moderator

Randy Frank

Karmjit Sidhu

Ian Abbott

Design World

American Sensor Technologies

TERPS, GE Energ...
Choosing the right sensor
for measuring high
pressure
Karmjit S. Sidhu
American Sensor Technologies Inc
Www.astsensor.com
Design considerations for high pressure sensors
•
•
•
•
•
•
•
•
•

Hermetic seal against media
Rugged and durable
Wide med...
Typical high pressure applications
•
•
•
•
•
•
•
•
•
•
•

Hydraulics - 500PSI to 15000PSI
Oil & Gas - 500PSI to 20000PSI
D...
Krystal Bond Technology for high pressure
• One piece design - no welds, no O-rings, no fluid filling
• High temperature i...
Cross section of Krystal Bond Sensor
Silicon sensing elements glass bonded to
stainless steel diaphragm
Fiber-Optic

Pressure Sensors
for
Environments
Schematic Diagram of Optrand
Fiber Optic-Based Pressure Sensor

18
High-Pressure High-Temperature
Pressure Sensor Key Specifications
Pressure Range:
Burst Pressure: > 4 range
Tip temp.:
Con...
Pressure Sensors Targeting Internal
Combustion Engines

• Dynamic sensors for use in (1) engine R&D and (2)
production gas...
Sensors Targeting Harsh Environment
Industrial and Turbine Applications
o

• 480 C-rated static-dynamic sensor for turbine...
Current Sensor Packages
F1.8mm
M8x1

M4x0.6

M3x0.5

M4x0.6

M12x1.25
22
Wendell McCulley
President
High Pressure Presents some very
Special Considerations

Traditional packaging

•At first glance High Pressure Sensor pack...
Provides Media Isolation, Must be strong enough to withstand High Hydrostatic
pressure, but must be flexible enough to tak...
Creative High Pressure packaging

Creative Electronics, Compensation
and Calibration

•Do you choose to use less tradition...
Backside Pressure Failure Mode

•Silicon is a mode 1 Fracture Material
•Silicon and glass are Pulled from the central regi...
Two Different Design Realizations
for a 1000 PSI Pressure Sensor
(A Case Study)
The ideal location “Sweet Spot” for
the Pi...
Why do we Care?

In the World of High Pressure
Things are often Counter-Intuitive.

•The Larger Diaphragm is also thicker,...
Summary

High Pressure Sensor Design

InterMEMS Inc. Capability

•Often Counter-Intuitive
•Highly Interdisciplinary requir...
Questions?
American Sensor Technologies
Karmjit S. Sidhu
kssidhu@astsensors.com

TERPS, GE Energy
Ian Abbott
ian.abbott@ge...
Thank You
 This webinar will be available at designworldonline.com & email
 Tweet with hashtag #DWwebinar
 Connect with...
Choosing the Right Sensor for Measuring High Pressure
Choosing the Right Sensor for Measuring High Pressure
Choosing the Right Sensor for Measuring High Pressure
Choosing the Right Sensor for Measuring High Pressure
Choosing the Right Sensor for Measuring High Pressure
Choosing the Right Sensor for Measuring High Pressure
Choosing the Right Sensor for Measuring High Pressure
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Choosing the Right Sensor for Measuring High Pressure

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High pressure sensing applications require a variety of design considerations to address the technical challenges that pressure of 500 psi and more can impose on the sensor. One of the main differentiating choices that a supplier has to consider is the technology used to detect pressure variations. However, this is just the start.
By attending this special, free 1-hour webinar, you will gain a better understanding of the key factors necessary to make the best choice for your high pressure sensing application, including:
1.) The detailed packaging requirements for these potentially dangerous applications
2.) The design details that experts have taken into account to simplify applying high pressure sensors
3.) Key specifications that impact the successful application of high pressure sensors

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Choosing the Right Sensor for Measuring High Pressure

  1. 1. Choosing the Right Sensor for Measuring High Pressure
  2. 2. Before We Start This webinar will be available afterwards at designworldonline.com & email Q&A at the end of the presentation Hashtag for this webinar: #DWwebinar
  3. 3. Presenters Moderator Randy Frank Karmjit Sidhu Ian Abbott Design World American Sensor Technologies TERPS, GE Energy Marek Wlodarczyk Wendell McCulley Optrand InterMEMS
  4. 4. Choosing the right sensor for measuring high pressure Karmjit S. Sidhu American Sensor Technologies Inc Www.astsensor.com
  5. 5. Design considerations for high pressure sensors • • • • • • • • • Hermetic seal against media Rugged and durable Wide media compatibility Wide operating temperature range High cyclic life High proof and burst pressure ratings Long term stability Low non repeatable errors - hysteresis and no repeatability High degree of compensation
  6. 6. Typical high pressure applications • • • • • • • • • • • Hydraulics - 500PSI to 15000PSI Oil & Gas - 500PSI to 20000PSI Diesel injection - up to 45000PSI Compressed Hydrogen - 2500PSI to 15000PSI High pressure oxygen - up to 6000PSI Water jet cutting - up to 72000PSI Gas chromatography - 500PSI to 20000PSI CNG systems - up to 4000PSI Fire suppression systems - 500PSI to 3000PSI Refrigeration - 500PSI to 1000PSI Filtration
  7. 7. Krystal Bond Technology for high pressure • One piece design - no welds, no O-rings, no fluid filling • High temperature inorganic bonding of silicon to metals • Wetted materials - 17-4PH and 316L stainless steels, Inconel 718, Hastelloy C276, Titanium CP4 • Low operating strain • Thick membrane • High output of 40mV/V • No p-n junctions - stable over wide temperature • Very low EMI interference
  8. 8. Cross section of Krystal Bond Sensor
  9. 9. Silicon sensing elements glass bonded to stainless steel diaphragm
  10. 10. Fiber-Optic Pressure Sensors for Environments
  11. 11. Schematic Diagram of Optrand Fiber Optic-Based Pressure Sensor 18
  12. 12. High-Pressure High-Temperature Pressure Sensor Key Specifications Pressure Range: Burst Pressure: > 4 range Tip temp.: Conditioner temp.: Accuracy: Frequency range Dynamic Sensor: Static-Dynamic: Service life: 0-150, 0-250, 0-350, 0-3000 bar -40oC to 380oC (480oC) -40oC to 125oC (140oC) 1-2% FSO 0.1(1) Hz to 20 (60) kHz 0 Hz to 20 kHz 0.5B -5B pressure cycles, 10k30k hours 19
  13. 13. Pressure Sensors Targeting Internal Combustion Engines • Dynamic sensors for use in (1) engine R&D and (2) production gasoline, diesel, natural gas, jet fuel engines used in passenger car, light- and heavy-duty truck, offhighway, marine, gen-set, ship, locomotive, or light aircraft applications • Two versions offered: o Signal conditioner connected to sensor head by ruggedized ~few meter-long fiber optic cable; targeting engine R&D and large engines o Signal conditioner located on top of sensor head; targeting automotive OE applications 20
  14. 14. Sensors Targeting Harsh Environment Industrial and Turbine Applications o • 480 C-rated static-dynamic sensor for turbines • 420oC-rated static pressure sensors for Plastic Melts with flush mounted diaphragms as small as 1mm in diameter with M4x0.6 thread • 380oC-rated all fiber optic static-dynamic pressure sensor with fiber optic cable up to hundreds meters-long for monitoring of industrial circuit breakers and transformers • 280oC-rated all fiber optic static-dynamic pressure AND temperature sensor in one package with fiber optic cable up to ~1 Km for oil-gas exploration, geothermal well & volcano monitoring 21
  15. 15. Current Sensor Packages F1.8mm M8x1 M4x0.6 M3x0.5 M4x0.6 M12x1.25 22
  16. 16. Wendell McCulley President
  17. 17. High Pressure Presents some very Special Considerations Traditional packaging •At first glance High Pressure Sensor packaging seems to be more forgiving than Low Pressure. •Die attach can be done with “Harder” materials with less effect on TCOffset. •Overpressure however is a Big Issue. •Do you choose to use less traditional packaging methods (e.g. NASA SSME) •Topside Applied Pressure with RTV Die attach. •Oil Filled with Stainless Steel Isolation Diaphragm •May require a Ceramic or other material as an Interposer •Common Mode Pressure Considerations
  18. 18. Provides Media Isolation, Must be strong enough to withstand High Hydrostatic pressure, but must be flexible enough to take up Oil expansion over Temperature Extremely hard to accurately Model the Performance of Corrugated Diaphragms since they are inherently Non-linear, and in the Large Deflection Regime
  19. 19. Creative High Pressure packaging Creative Electronics, Compensation and Calibration •Do you choose to use less traditional packaging methods (e.g. NASA SSME) •Hard Eutectic Die Attach •Metal or Nitride V-Ring Seals •Must withstand cryogenic temperatures -425⁰F to 250⁰F •Use of Materials with closely matched Temperature Coefficient of Expansion •Electron Beam Welded •Use of Integrated Strain Gauge to measure flexure of the overall Chip •Correction of Pressure Sensor Measurand for Chip flexure. •On Chip Thin film Laser Trimmable Resistors.
  20. 20. Backside Pressure Failure Mode •Silicon is a mode 1 Fracture Material •Silicon and glass are Pulled from the central region of the chip •Looks similar to the hole a BB makes in glass •Diameter is directly related to the Radius of transition from Tension to Compression and can be controlled by judicious design. •Design Choices depend on many considerations •Slab Vs. Diaphragm Design •Aspect Ratio
  21. 21. Two Different Design Realizations for a 1000 PSI Pressure Sensor (A Case Study) The ideal location “Sweet Spot” for the Piezoresistors is Very Different •Both have the same Die Size and Thickness •Both have the Same Diaphragm Edge Length to Thickness Aspect Ratio •Both have Approximately the same Pressure Sensitivity. •In the case of the Larger Diaphragm it is Completely off the Diaphragm. •In the case of the Smaller Diaphragm it is just on the Diaphragm near the Edge.
  22. 22. Why do we Care? In the World of High Pressure Things are often Counter-Intuitive. •The Larger Diaphragm is also thicker, and therefore must be more Robust, Right? •By choosing the smaller Diaphragm we can make the overall Die Size much smaller, Right? •For Backside Applied Pressure, the Large Diaphragm will Fail at much lower Pressures. •The Smaller Diaphragm needs to be part of a Large Die to support higher Burst Pressure.
  23. 23. Summary High Pressure Sensor Design InterMEMS Inc. Capability •Often Counter-Intuitive •Highly Interdisciplinary requiring a Deep Knowledge of: •Materials •Fracture Mechanics •Piezoresistivity •Packaging •Media Compatibility •Still a bit of a Black Art •Specific knowledge of High Pressure Sensor Design & Manufacturing •Has the Tools necessary to develop high performance devices. •Non-linear Large Deflection Finite Element Analysis (FEA) •Process Modeling (SUPREM) •Wafer Processing •Packaging •Excels in Design for Manufacturability
  24. 24. Questions? American Sensor Technologies Karmjit S. Sidhu kssidhu@astsensors.com TERPS, GE Energy Ian Abbott ian.abbott@ge.com Design World Optrand Marek Wlodarczyk president@optrand.com Randy Frank r.frank@ieee.org InterMEMS Wendell E. McCulley wmcculley@intermems.com
  25. 25. Thank You  This webinar will be available at designworldonline.com & email  Tweet with hashtag #DWwebinar  Connect with  Twitter: @DesignWorld  Facebook: facebook.com/engineeringexchange  LinkedIn: Design World Group  YouTube: youtube.com/designworldvideo  Discuss this on EngineeringExchange.com

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