Sustainability analysis of Clean Room laboratory

1. LabRATS Laboratory Research and Technical Staff Clean Rooms: A Great Opportunity for High Performance Conservation Braden Crowe, Josh Lee, Amorette Getty Institute for Energy Efficiency and LabRATS University of California, Santa Barbara

2. Outline Cleanroom Overview What makes a cleanroom? Cleanroom types UCSB Case Study: UCSB Nanofab Strategies for Conservation Behavioral, Equipment, and Building Systems Labs21 Benchmarking Tool Behavioral initiatives Equipment Building Design

3. What is a clean room? “…a room in which the concentration of airborne particles is controlled...” William Whyte, 2001 50x more energy per square foot than an office or residential building

4. Cleanrooms: Classes and Particles ISO 14644-1Cleanroom Standards

5. Contrasts: Biotech/pharmaceutical and Semiconductor Cleanrooms

7. 90,000 ft2

8. 60% lab space

9. 190 office occupants

10. Ventilation System

11. Offices: Ventilation,Heating Panels

12. 2nd and 3rd floor labs:

13. 100% Fresh Air, 68-73° F

14. Variable Air Volume, 6-10 ACH

15. VAV Fume Hoods, 100 ft/min face velocityElectricity and Lighting Efficient T8 fluoresent lighting Daylighting Occupancy Sensors Zone control

16. UCSB Nanofabrication Facility “ESB Cleanroom” Largest of 5 cleanrooms on the UCSB campus Nanofab, Semiconductor processing InP, GaAs, GaN, SiC, Si, and novel materials Equipment and Capabilities Lithography Thin film deposition Dry Etching Thin film characterization Wet Etch Anneal Wafer Bonding Gowning Room Chase 2 Chase 3 Chase 4 Chase 5 Chase 6 Chase 7 Chase 1 Class 1000 Class 100

18. 12,700 ft2cleanroom space

19. 16 Class 10 laminar flow wet benches

20. 100 individual processing setups

21. 50 vacuum pumps

22. HVAC System

23. Recirculate via HEPA Fan Filter Units (FFUs)

24. Exhaust – 2 Strobic fans

26. Auxiliary Cleanroom Systems Air Supply and Exhaust Compressed Dry Air Process Vacuum DI Water systems Toxic Gas Monitoring Process Chilled Water Specialty Gas Cabinets High purity process piping Solvent Collection system 2 55-gallon drums pH neutralization system NaOH & H2SO4

27. Improvement Plan 3 Target Areas Behavioral Building-Specific Sustainability guide Fume hood sash labeling and monitoring Lecture: “Intro to Lab Buildings, Cleanrooms, and Sustainable Research” DI Sample Rinse Procedures Equipment Inventory all equipment setups, all vacuum pumps Measure plug loads and identify more energy efficient models Identify under-utilized setups, arrange to shut down when not needed Building wide systems Optimize and Balance Air-handling Scrutinize exhaust requirements Sub-metering cleanroom electrical for better benchmarking

28. Labs21 Benchmarking Cleanroom Self-Benchmarking Guide Best Practice Summaries Case Studies Programming Guide for New Construction Laboratory Equipment Wiki

29. Improvement Plan 3 Target Areas Behavioral Building-Specific Sustainability guide Fume hood sash labeling and monitoring Lecture: “Intro to Lab Buildings, Cleanrooms, and Sustainable Research” DI Sample Rinse Procedures Equipment Inventory all equipment setups, all vacuum pumps Measure plug loads and identify more energy efficient models Identify under-utilized setups, arrange to shut down when not needed Building wide systems Optimize and Balance Air-handling Scrutinize exhaust requirements Sub-metering cleanroom electrical for better benchmarking

31. Improvement Plan 3 Target Areas Behavioral Building-Specific Sustainability guide Fume hood sash labeling and monitoring Lecture: “Intro to Lab Buildings, Cleanrooms, and Sustainable Research” DI Sample Rinse Procedures Equipment Inventory all equipment setups, all vacuum pumps Measure plug loads and identify more energy efficient models Identify under-utilized setups, arrange to shut down when not needed Building wide systems Optimize and Balance Air-handling Scrutinize exhaust requirements Sub-metering cleanroom electrical for better benchmarking

32. DI water supply: Eliminate Waste Continuous overflow for 4 minutes 3 rinse-dump cycles Courtesy of Ning Cao, PhD, UCSB Nanofab

33. Improvement Plan 3 Target Areas Behavioral Building-Specific Sustainability guide Fume hood sash labeling and monitoring Lecture to researchers: “Intro to Lab Buildings, Cleanrooms, and Sustainable Research” DI Sample Rinse Procedures Equipment Inventory all equipment setups, all vacuum pumps Measure plug loads and identify more energy efficient models Identify under-utilized setups, arrange to shut down when not needed Building wide systems Optimize and Balance Air-handling Scrutinize exhaust requirements Sub-metering cleanroom electrical for better benchmarking

34. Power Down Unused Equipment Identify rarely-used setups with high idle power Examine electronic signups and log books Potential roadblocks: Stability issues (i.e. furnace temperatures) Time/inconvenience to power up Political Resistance

35. Efficient Alternatives for Equipment Existing equipment: Repair when necessary, or… Replace with more efficient models New equipment Always cost effective to purchase efficient models Payback times <2 years At UCSB, rebates available Check the Labs21 Lab Equipment Wiki

36. Case Study: Vacuum pumps Cost: $3-20k ($50k max) Rebuilds every 1-10 years, at 30% of initial cost Power consumption 900-14,000 kWh/year Feasible to replace rather than rebuild/repair? For a $3k pump replaced with a 70% more efficient model Payback ~5 years At UCSB Savings go to Facilities Cost would be to lab For all new purchases at UCSB Efficient models cost effective Rebate: $2.10/W saved compared to standard model.

37. Improvement Plan 3 Target Areas Behavioral Building-Specific Sustainability guide Fume hood sash labeling and monitoring Lecture to researchers: “Intro to Lab Buildings, Cleanrooms, and Sustainable Research” DI Sample Rinse Procedures Equipment Inventory all equipment setups, all vacuum pumps Measure plug loads and identify more energy efficient models Identify under-utilized setups, arrange to shut down when not needed Building wide systems Optimize and Balance Air-handling Scrutinize exhaust requirements Sub-metering cleanroom electrical for better benchmarking

38. Real-time monitoring in ESB Cleanroom Currently monitored: Temperature, Humidity in each bay DI Water: flow rate, resistivity, supply pressure LN2 tank level Room ambient pressure, general and toxic exhaust pressures Boiler temperature and pressure Chilled water supply temperatures and pressures House vacuum pressure Air supply volume NOT monitored: Particle counts Power usage “You can’t manage what you don’t monitor.”

39. Building systems – Air Supply Make-up Air Humidity, Temperature control 1st-tier HEPA filtration Benchmark Average of 0.75 W/cfm Recirculation Fan Filter Units, Ductwork, or Pressurized Plenum 2nd-tier HEPA filtration Laminar Flow Benchmark Average of 0.43-0.63 W/cfm 20-150 fpm at filter face 10% decrease in fan speed is a 27% decrease in power ESB Cleanroom: No monitoring or control of FFUs

40. Demand-Based Filtration Particle-based or occupancy-based feedback into fan filter units. 1-2 shift labs: Dial back air supply when the lab is empty. No accumulation of particulates has been observed. 24 hour operation: Real-time feedback required

41. Building systems - Exhaust Laboratory exhaust required for: Heat for air-cooled equipment Removal of effluent solvent/acid fumes ozone from UV lamps process gasses Sufficient air changes/hour (ACH) for occupant comfort 30% of cleanroom equipment requires exhaust Scrutinizing equipment exhaust rates can lead to significant energy savings Must address safety trade-off in many cases

42. ESB Case Study: Specialty Gas Cabinet Room Exhaust 2 Gas Cabinet Rooms 6500 cfm continuous flow ~20 cfm/sqft Cleanroom exhaust system at capacity Upcoming addition of 3rd exhaust stack Opportunity: incorporate efficiency features Decrease spec’d exhaust rate, install smaller fan Occupancy and Gas sensors Less exhaust when room is empty and no leaks are detected

43. Next Step/Directions Continue User Outreach Efforts Measure equipment plug loads Advise on choices for new equipment Get in the loop when new purchases are being made Add data to Labs21 Lab Equipment Wiki Real-time particle or occupancy-based filtration Measure and Control FFU Speeds Gas Cabinet Room Retrofit

44. Roadblocks and Solutions Priorities of Lab Staff and Researchers #1: Research Success #2: Safety #3: Sustainability/Energy Efficiency Consider instead the “Laboratory Triple Bottom Line” Success, Safety, and Sustainability Leverage synergies: Particle counters detect contaminants andfeedback to air handling Better fumehood sash behavior is safer and more energy efficient. Proper DI rinse procedures more effective anduse less water.

45. Conclusions Behavioral changes easiest, but least impactful Most feasible for low budget projects Building-wide changes high-impact, high expense Take an initially broad approach, then refined to high-potential target projects In a University setting, efficiency savings alone are insufficient motivation for retrofits and equipment replacement. For new equipment purchases and planned retrofits, investments for efficiency pay off quickly. Different for corporate labs: Genentech: $1.7 million project, 1.7 year payback time Applied Materials: $200,000 project, 2.7 year payback time Case studies from www.hightech.lbl.gov

46. Questions?

47. Gas Cabinets – Supplemental Material Rooms containing Room A: Cl2, BCl3, NH3, Room B: H2, SiH4, CH4, Forming gas 10% H2/ 90% N2 Current throughput: Separate air handler supplies unconditioned air ~20 cfm per square foot Do we have something to compare 20 cfm to? Served by