Scrubber     Research of odor improvement actions in scrubber yard and central scrubber introduction                      ...
topic_9-4
topic_9-4
topic_9-4
topic_9-4
topic_9-4
topic_9-4
topic_9-4
topic_9-4
topic_9-4
topic_9-4
topic_9-4
Upcoming SlideShare
Loading in …5
×

topic_9-4

386 views

Published on

Published in: Business, Technology
0 Comments
0 Likes
Statistics
Notes
  • Be the first to comment

  • Be the first to like this

No Downloads
Views
Total views
386
On SlideShare
0
From Embeds
0
Number of Embeds
2
Actions
Shares
0
Downloads
3
Comments
0
Likes
0
Embeds 0
No embeds

No notes for slide

topic_9-4

  1. 1. Scrubber Research of odor improvement actions in scrubber yard and central scrubber introduction Abstract Wet scrubber is nowadays widely used in semiconductor industry for handling acid/ammonia exhaust waste.This article discusses some operational problems of the system vs. their ameliorative countermeasures. Asidefrom the commonly used series abatement design, it can improve odor smell and smoke in scrubber yard,which has proved to be virtually effective, is herewith introduced.

×