Flexible Electronics at ITRI

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Flexible Electronics at ITRI

  1. 1. Flexible Electronic Sensor Program at ITRI Johnson Hou Dec 20, 2007
  2. 2. Progresses in Sensor R&D Consumers Specialized Application Large Scale / Distributed Compact High End Market: More Scalability, Flexibility Mass Market: More Simplicity, Disposability Scientific/Engineering Market: More Precision, Miniaturization Military Market: More Robustness, Adaptability Sensor Technology Development Trends Flexible Electronics are perfectly suited to push progress in these areas
  3. 3. Printed Sensor Technologies Readiness Commercial Research <ul><li>Temperature </li></ul><ul><li>Thermochromic Ink </li></ul><ul><li>RTD </li></ul><ul><li>Biopotential </li></ul><ul><li>Glucose Electrode </li></ul><ul><li>Ion-selective Electrode </li></ul><ul><li>Reference Potential </li></ul><ul><li>Tactile </li></ul><ul><li>Pressure </li></ul><ul><li>Shear </li></ul><ul><li>Texture </li></ul><ul><li>Ultrasound </li></ul><ul><li>Source </li></ul><ul><li>Receiver </li></ul><ul><li>Microphone </li></ul><ul><li>Disposable </li></ul><ul><li>Array </li></ul><ul><li>Photodiode </li></ul><ul><li>Visible Light </li></ul><ul><li>Multiple Spectra </li></ul><ul><li>Infrared </li></ul><ul><li>PVDF </li></ul><ul><li>Thermal Imaging </li></ul><ul><li>Field-Effect </li></ul><ul><li>Light </li></ul><ul><li>pH/Ions </li></ul><ul><li>Gas/Biomolecule </li></ul><ul><li>R&D mature </li></ul><ul><li>Fabricated by printing </li></ul><ul><li>Sensor architecture mature </li></ul><ul><li>Find more robust and cheaper sensor materials </li></ul><ul><li>Lower fabrication cost </li></ul><ul><li>Fabrication process and structure key to differentiation </li></ul><ul><li>Materials selection guides structure design </li></ul><ul><li>Mechanical and electrical response can be modeled </li></ul><ul><li>New Materials R&D underway </li></ul><ul><li>Circuit Integration needed for better performance increasing complexity </li></ul><ul><li>Lifetime a key concern </li></ul><ul><li>Requires a stable FET architecture </li></ul><ul><li>Signal Transduction Interface heavily researched </li></ul><ul><li>Needs simplified fabrication </li></ul>
  4. 4. Current Pressure Sensor Array Products N/A
  5. 5. Flexible Pressure Sensor Array R&D at ITRI – A Dual Approach Large Area High Density South ITRI High Resolution Digital Pressure Sensor Flexible Electronics Department Large Area Piezoresistive Sensor Reliability Noise Immunity Linearity Robustness Yield Cost Biomedical Home Appliances Games Sports Industrial Biometrics
  6. 6. A Total Solution for Customers <ul><li>Lower Cost </li></ul><ul><ul><li>Develop cheaper material and simpler sensor structure </li></ul></ul><ul><ul><li>Develop high-throughput R2R manufacturing techniques </li></ul></ul><ul><li>Larger Area and Higher Density </li></ul><ul><ul><li>Improve material and process uniformity for increased yield compatibility with large-area printing </li></ul></ul><ul><ul><li>Improve sensor layout and circuit design for reduced sensor cross-talk </li></ul></ul><ul><li>Integrated Functions </li></ul><ul><ul><li>Integrate additional sensing functions such as temperature and shear sensors </li></ul></ul><ul><ul><li>Integrate passive and active components for on-chip signal processing </li></ul></ul>Short Term Long Term
  7. 7. What We Can Offer to Universities <ul><li>Foundry Service </li></ul><ul><ul><li>Materials Preparation </li></ul></ul><ul><ul><li>‘ Volume’ Prototyping </li></ul></ul><ul><ul><li>Hardware and Software Support </li></ul></ul><ul><li>Sensor Optimization </li></ul><ul><ul><li>Sensor materials properties finetuning </li></ul></ul><ul><ul><li>Sensing circuit/system optimization </li></ul></ul><ul><ul><li>Functional Integration </li></ul></ul><ul><li>Preparation for Mass Production </li></ul><ul><ul><li>Fabrication Process Innovation and Optimization </li></ul></ul><ul><ul><li>Cost Down and Yield Increase </li></ul></ul><ul><ul><li>Machine Configuration for Pilot Run </li></ul></ul>
  8. 8. Equipped to Make A Difference <ul><li>R2R Photolithography (15um) </li></ul>2. Inkjet Printing 4. R2R Screen Printing (100um) 3. R2R Sputtering Exposure Lamination Develop Baking Etching Strip Lamination Dry film Feed input roll output Feed input Roll output Substrate / dry film / Cell film laminator Collimated exposure Patterning / polymerization Sheet type input / output module Delaminator Laminator Feed input Roll output Continuous develop / etch / strip (DES) process line

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