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Page 1
Large Substrate Inspection         MicroscopesImproving Inspection and Review      Station Performance                    ...
Living up to Livewww.leica-microsystems.com             Page 3
Living up to Live• Agenda  – Design and Development Criteria     • Target Markets  – The DM8000 & DM12000     • Hardware C...
Living up to Live• Design and Development Criteria  – Research Level Compound Microscope      • World Class “Leica” Optics...
Living up to Live• Validated Market Segments   – Semiconductor - R&D and     Manufacturing       • Process Development, Pr...
Living up to Live• Agenda  – Design and Development Criteria     • Target Markets  – The DM8000 & DM12000     • Hardware C...
Living up to Live                The DM8000 & DM12000www.leica-microsystems.com                       Page 8
Living up to LiveHardware Configuration Highlights• DM8000 up to 8” / 200mm substrate• DM12000 up to 12” / 300mm substrate...
Living up to LiveConfiguration Highlights• Key Features  – Macro to Micro Function      • 0.7x to 150x  – New Contrasting ...
Living up to Live• Macro to Micro Inspection  – Larger substrates require longer inspection times     • A larger field of ...
Living up to Live• Macro to Micro Inspection• Get a fast overview using the  Macro function to scan the  entire substrate ...
Living up to Live                                       Macro to Micro InspectionMacro                   5x               ...
Living up to Live                                      Macro to Micro InspectionMacro                   5x                ...
Living up to Live• Macro to Micro Inspection                                   0.7x BF                                    ...
Living up to Live                       The Macro Summary         • Quickly scan the entire surface for           macro de...
Living up to LiveConfiguration Highlights• Key Features  – Macro to Micro Function      • 0.7x to 150x  – New Contrasting ...
Living up to Live                     Oblique Illumination              High resolution from every angle   Fully Integrate...
Living up to Live  Bright Field               Oblique Illumination          20x BF                     20x OBLwww.leica-mi...
Living up to Live                                       UV Inspection• Five contrast mode 150x /0.90 objective for Zero pi...
Living up to Live                                       UV Inspection • Switching from VIS to UV automatically changes ill...
Living up to Live                           Oblique Ultra Violet Illumination                         OUV for maximum cont...
Living up to Live                                              Oblique UV for increased contrast and resolution  Bumps wit...
Living up to Live                                   Advanced Optics                        Microelectronic Inspection Solu...
Living up to Live                                 Oblique Illumination                                       Solar Cells  ...
Living up to Live                   TFT and LCD Inspection                    Switch between or combine Transmitted and Re...
Living up to LiveConfiguration Highlights• Key Features  – Macro to Micro Function      • 0.7x to 150x  – New Contrasting ...
Living up to LiveErgonomicsThe Basics                                                   Change contrast modes or   LED Dis...
Living up to LiveErgonomicsStage Control• Joystick    – Includes 4 variable function keys•   Leica Smart Move    – X-Y Sta...
Living up to LiveErgonomicsIntegrated Functions  •   Contrast Manager      – If a contrast mode is selected by the operato...
Living up to LiveConfiguration Highlights• Key Features  – Macro to Micro Function      • 0.7x to 150x  – New Contrasting ...
Living up to LiveOptimum Airflow                   Fully                                  Integrated for    Low Power    c...
Living up to Live• Agenda  – Design and Development Criteria     • Target Markets  – The DM8000 & DM12000     • Hardware C...
Page 34
Living up to Live             The Leica Applications Suite  Highly sophisticated image processing and  analysis combined w...
Living up to Livewww.leica-microsystems.com             Page 36
Living up to Livewww.leica-microsystems.com             Page 37
Living up to Livewww.leica-microsystems.com             Page 38
Living up to LiveLeica Application Suite = Remote Control      www.leica-microsystems.com                     Page 39
Living up to LiveImaging Post Processing                                     Measurement                                3D...
ReportingAs simple as selecting animage and clicking an exportlocation• Exports to Excel   –Data   –Histograms   –Pre Prog...
Living up to Live                   Reporting Datawww.leica-microsystems.com                    Page 42
Living up to Live• Available Accessories  – Cameras      • From 2 to 12 Meg  – Stage Inserts      • For Wafers, Photomask,...
Living up to LiveSummary  – Reduce Inspection time      • Macro View  – Increase Resolution      • Oblique Illumination   ...
Thank You!Questions?             Page 45
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Large substrate inspection microscopes

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Transcript of "Large substrate inspection microscopes"

  1. 1. Page 1
  2. 2. Large Substrate Inspection MicroscopesImproving Inspection and Review Station Performance Page 2
  3. 3. Living up to Livewww.leica-microsystems.com Page 3
  4. 4. Living up to Live• Agenda – Design and Development Criteria • Target Markets – The DM8000 & DM12000 • Hardware Configurations • Key Features and Solutions – Leica Applications Suite • Integrated Image Capture and Post Processing • Microscope Remote Control www.leica-microsystems.com Page 4
  5. 5. Living up to Live• Design and Development Criteria – Research Level Compound Microscope • World Class “Leica” Optics and Image quality – Unparalleled Contrast and the highest resolution • Capable of Handling Substrates up to 12 X 12 inches • Macro Imaging to “See more faster” • Utilize solid state technology for operational efficiency • Fully Integrated with the Leica Application Suite – Completely coded for automatic reproducibility of archived images • Easy to Use and Ergonomically correct for all users • LED Illumination for long life and low power consumption www.leica-microsystems.com Page 5
  6. 6. Living up to Live• Validated Market Segments – Semiconductor - R&D and Manufacturing • Process Development, Process Control, Test and Assembly, MEMS, NanoTech, Etc – TFT LCD’s - R&D and Manufacturing • Process Development, Process Control, Test and Assembly – Solar - R&D and Manufacturing • Process Development, Process Control, Test and Assembly – Metallographic – Research and Quality Control • Process Development, Process Control www.leica-microsystems.com Page 6
  7. 7. Living up to Live• Agenda – Design and Development Criteria • Target Markets – The DM8000 & DM12000 • Hardware Configurations • Key Features and Solutions – Leica Applications Suite • Integrated Image Capture and Post Processing • Microscope Remote Control www.leica-microsystems.com Page 7
  8. 8. Living up to Live The DM8000 & DM12000www.leica-microsystems.com Page 8
  9. 9. Living up to LiveHardware Configuration Highlights• DM8000 up to 8” / 200mm substrate• DM12000 up to 12” / 300mm substrate – Motorized 6 fold Objective Nosepiece, 4 fold Turret and 17 position Aperture Diaphragm Microelectronics • Includes Light Manager (Motorized aperture/intensity). – Manual X-Y-Z Motion • Optional Motorized Z motion and X-Y Stages add tional – Required for motor focus and joystick X and Y 42mm i movement – Recommended when Image Stacking or Stitching – Motorized version Includes Contrast Manager www.leica-microsystems.com Materials 9 Page
  10. 10. Living up to LiveConfiguration Highlights• Key Features – Macro to Micro Function • 0.7x to 150x – New Contrasting Techniques • Oblique Illumination – Including Oblique UV (365nm) for extreme contrast • Advanced Optics – Increased Brightness and double the working distance – Ergonomic design for comfort and flexibility – Clean LED Illumination • Reflected Light or Reflected and Transmitted Light bases • Environmentally friendly and maintenance free for years www.leica-microsystems.com Page 10
  11. 11. Living up to Live• Macro to Micro Inspection – Larger substrates require longer inspection times • A larger field of view will reduce inspection times – With our 0.7x Macro objective you get a remarkable FOV of ~40mm in a Inspection Microscope – Reduce inspection times by ~ 30% www.leica-microsystems.com Page 11
  12. 12. Living up to Live• Macro to Micro Inspection• Get a fast overview using the Macro function to scan the entire substrate surface• See ca. 40mm onto the sample surface with a single glanceSwitch to Micro and continue inspectionBF10x DF10x DIC10x www.leica-microsystems.com Page 12
  13. 13. Living up to Live Macro to Micro InspectionMacro 5x 20x 50x www.leica-microsystems.com Page 13
  14. 14. Living up to Live Macro to Micro InspectionMacro 5x 50x www.leica-microsystems.com Page 14
  15. 15. Living up to Live• Macro to Micro Inspection 0.7x BF 5x BF 10x BF 20x BF www.leica-microsystems.com Page 15
  16. 16. Living up to Live The Macro Summary • Quickly scan the entire surface for macro defects and immediately switch to high magnification to review and classify • The perfect solution to “bridge the gap” between Bright Light inspection and Microscopic inspection • Increases performance and efficiency of inspection and review stationwww.leica-microsystems.com Page 16
  17. 17. Living up to LiveConfiguration Highlights• Key Features – Macro to Micro Function • 0.7x to 150x – New Contrasting Techniques • Oblique Illumination – Including Oblique UV (365nm) for extreme contrast • Advanced Optics – Increased Brightness and double the working distance – Ergonomic design for comfort and flexibility – Clean LED Illumination • Reflected Light or Reflected and Transmitted Light bases • Environmentally friendly and maintenance free for years www.leica-microsystems.com Page 17
  18. 18. Living up to Live Oblique Illumination High resolution from every angle Fully Integrated in every DM8000 M or DM12000 M stand 150x BF 150X OBLwww.leica-microsystems.com Page 18
  19. 19. Living up to Live Bright Field Oblique Illumination 20x BF 20x OBLwww.leica-microsystems.com Page 19
  20. 20. Living up to Live UV Inspection• Five contrast mode 150x /0.90 objective for Zero pixel shift contrast change during inspection. (BF, DF, DIC, UV, OUV)150x BF 150x UV www.leica-microsystems.com Page 20
  21. 21. Living up to Live UV Inspection • Switching from VIS to UV automatically changes illuminator and camera port – Switch in less than 1 second from VIS to UV • Single objective increases efficiency and reduces overall costBF 150x UV 150x www.leica-microsystems.com Page 21
  22. 22. Living up to Live Oblique Ultra Violet Illumination OUV for maximum contrast and resolution 150x BF 150x UV 150x OUVMulti-functional 150xobjective: BF, DF, Dual Camera port toDIC, UV and OUV support VIS, UV and OUV automatically www.leica-microsystems.com Page 22
  23. 23. Living up to Live Oblique UV for increased contrast and resolution Bumps with 150x BF Bumps with 150x UVMulti-functional PL APO 150xobjective: BF, DF, DIC, UV and OUV Bumps with 150x OUV www.leica-microsystems.com Page 23
  24. 24. Living up to Live Advanced Optics Microelectronic Inspection Solutions In-Depth Darkfield• Increased intensity and higher resolution over standard Darkfield objectives – Increases image contrasting and feature resolving power• Long Working Distance – Nearly double the working distance of conventional DF objectives – Increased working distance improves safety for substrate handling• Works in conjunction with newly developed Dark Field cube• Focus Finder for reflective surfaces www.leica-microsystems.com Page 24
  25. 25. Living up to Live Oblique Illumination Solar Cells Surface morphology Dimensions of metal contacts Dimensions and continuity of insulation trenches150x BF 150x OBL www.leica-microsystems.com Page 25
  26. 26. Living up to Live TFT and LCD Inspection Switch between or combine Transmitted and Reflected Light10x TL Only 10x RL Only 10x BF BF50x TL Only 50x RL Only 50x BF BF www.leica-microsystems.com Page 26
  27. 27. Living up to LiveConfiguration Highlights• Key Features – Macro to Micro Function • 0.7x to 150x – New Contrasting Techniques • Oblique Illumination – Including Oblique UV (193nm) for extreme contrast • Advanced Optics – Increased Brightness and double the working distance – Ergonomic design for comfort and flexibility – Clean LED Illumination • Reflected Light or Reflected and Transmitted Light bases • Environmentally friendly and maintenance free for years www.leica-microsystems.com Page 27
  28. 28. Living up to LiveErgonomicsThe Basics Change contrast modes or LED Display for Contrast objectives with a single XYZ movement coarse/fineErgo-tube with button click focus settingsupright image Height adjustable focus knobs www.leica-microsystems.com Page 28
  29. 29. Living up to LiveErgonomicsStage Control• Joystick – Includes 4 variable function keys• Leica Smart Move – X-Y Stage and Z Focus control • Includes 4 variable function keys• Leica STP6000 – X-Y Stage and Z Focus control • Includes 10 variable function keys www.leica-microsystems.com Page 29
  30. 30. Living up to LiveErgonomicsIntegrated Functions • Contrast Manager – If a contrast mode is selected by the operator the intensity adjustment, the aperture position or the objective selection are performed by the Microscope. • Illumination Manager – If the objective is changed the previous settings of light intensity and aperture for that specific objective are restored • No need to readjust aperture or illumination intensity • Memory functions – 9 separately programmable “hot” keys to customize operation and efficiency at every inspection station – Single Keys can programmed for Multi Function operation www.leica-microsystems.com Page 30
  31. 31. Living up to LiveConfiguration Highlights• Key Features – Macro to Micro Function • 0.7x to 150x – New Contrasting Techniques • Oblique Illumination – Including Oblique UV (193nm) for extreme contrast • Advanced Optics – Increased Brightness and double the working distance – Ergonomic design for comfort and flexibility – Clean LED Illumination • Reflected Light or Reflected and Transmitted Light bases • Environmentally friendly and maintenance free for years www.leica-microsystems.com Page 31
  32. 32. Living up to LiveOptimum Airflow Fully Integrated for Low Power consumption VIS and UV LightLED Illumination Long Life LED www.leica-microsystems.com Page 32
  33. 33. Living up to Live• Agenda – Design and Development Criteria • Target Markets – The DM8000 & DM12000 • Hardware Configurations • Key Features and Solutions – Leica Applications Suite • Integrated Image Capture and Post Processing • Microscope Remote Control www.leica-microsystems.com Page 33
  34. 34. Page 34
  35. 35. Living up to Live The Leica Applications Suite Highly sophisticated image processing and analysis combined with Microscope control.Unites the scope, camera, image processing and analysis into an easy to use fully integrated Inspection, Measurement and Reporting system. www.leica-microsystems.com Page 35
  36. 36. Living up to Livewww.leica-microsystems.com Page 36
  37. 37. Living up to Livewww.leica-microsystems.com Page 37
  38. 38. Living up to Livewww.leica-microsystems.com Page 38
  39. 39. Living up to LiveLeica Application Suite = Remote Control www.leica-microsystems.com Page 39
  40. 40. Living up to LiveImaging Post Processing Measurement 3D Stitching Stacking www.leica-microsystems.com Page 40
  41. 41. ReportingAs simple as selecting animage and clicking an exportlocation• Exports to Excel –Data –Histograms –Pre Programmed –Completely CustomizablePrint, Send, Display, Archive Page 41
  42. 42. Living up to Live Reporting Datawww.leica-microsystems.com Page 42
  43. 43. Living up to Live• Available Accessories – Cameras • From 2 to 12 Meg – Stage Inserts • For Wafers, Photomask, TFT Display, Glass or Metal, with or without Vacuum – Motorized Stages • 8 inch and 12 inch models – Wafer Loaders • Several completely integrated 3rd party solutions for wafer sizes of 3 to 8 inch www.leica-microsystems.com Page 43
  44. 44. Living up to LiveSummary – Reduce Inspection time • Macro View – Increase Resolution • Oblique Illumination • Oblique UV – Comfort and ease of use • Ergonomic Design – Clean and maintenance free Illumination • LED Light Sources – Image analysis and post processing • Leica Applications Suite www.leica-microsystems.com Page 44
  45. 45. Thank You!Questions? Page 45
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