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  • 1. Micro-Electro-Mechanical Systems -The Future Technology, but Today’s choice Presented by… Vinayak Hegde Guide: Mrs. Priti Mishra
  • 2. AIM OF THE PRESENTATION
    • To introduce about the MEMS TECHNOLOGY
    • To introduce the MEMS Design process.
    • Applications, Advantages and Disadvantages of the MEMS .
  • 3. Introduction
    • What is MEMS Technology ?
      • MEMS technology is based on a number of tools and methodologies, which are used to form small structures with dimensions in the micrometer scale
      • MEMS fabrication approach that conveys the advantages of miniaturization, multiple components, and microelectronics to the design and construction of integrated Electromechanical systems
  • 4. Introduction Conti…
    • What are MEMS ?
      • • Micro - Small size, microfabricated structures
      • • Electro - Electrical signal /control ( In / Out )
      • • Mechanical - Mechanical functionality (Out/ In )
      • • Systems - Structures, Devices, Systems controls
    • What is the size of MEMS?
      • They range in size from the sub micron level to the millimeter level, and there can be any number, from a few to millions, in a particular system.
  • 5. Building Blocks In MEMS
    • How MEMS are prepared?
      • There are three basic building blocks in MEMS technology.
        • Deposition : The ability to deposit thin films of material on a substrate.
        • Lithography : To apply a patterned mask on top of
        • the films by photolithograpic imaging.
        • Etching : To etch the films selectively to the mask.
  • 6. MEMS Deposition Technology
    • MEMS deposition technology can be classified in two groups:
    • Depositions that happen because of a chemical reaction:
        • Chemical Vapor Deposition (CVD)
        • Electrodeposition
        • Epitaxy
        • Thermal oxidation
    • Depositions that happen because of a physical reaction:
        • Physical Vapor Deposition (PVD)
        • Casting
  • 7. MEMS Lithography Technology
    • MEMS lithography technology can be classified in two groups:
    • Pattern Transfer
    • Lithographic Module
        • Dehydration bake and HMDS prime
        • Resist spin/spray and Soft bake
        • Alignment, Exposure
        • Post exposure bake and Hard bake
        • Descum
  • 8. MEMS Etching Technology
    • There are two classes of etching process:
    • Wet etching : The material is dissolved when immersed in a chemical solution.
    • Dry etching : The material is sputtered or dissolved using reactive ions or a vapor phase etchant.
  • 9. MEMS Applications
    • Micro-engines –Micro Reactors, Vibrating Wheel
    • Inertial Sensors –Virtual Reality Systems
    • Accelerometers –Airbag Accelerometer
    • Pressure Sensors –Air Pressure Sensors
    • Optical MEMS –Pill Camera
    • Fluidic MEMS - Cartridges for Printers
    • Bio MEMS - Blood Pressure Sensors
    • MEMS Memory Units - Flash Memory
  • 10. Advantages and Disadvantages
    • Minimize energy and materials use in manufacturing
    • Cost/performance advantages
    • Improved reproducibility
    • Improved accuracy and reliability
    • Increased selectivity and sensitivity
    • Farm establishment requires huge investments
    • Micro-components are Costly compare to macro-components
    • Design includes very much complex procedures
    • Prior knowledge is needed to integrate MEMS devices
  • 11. Conclusion
    • The medical, wireless technology, biotechnology, computer, automotive and aerospace industries are only a few that will benefit greatly from MEMS.
    • This enabling technology promises to create entirely new categories of products
    • MEMS will be the indispensable factor for advancing technology in the 21 st century
  • 12. My Next Presentation
    • Includes, details about..
      • Historical Background
            • (MEMS Evolution)
      • Preparation Peocess of MEMS
            • (Fabrication Process)
      • Interrelationship between MEMS and Nano
            • (Future Scope of MEMS)
      • Applications of MEMS
            • (Fields where MEMS Used )
  • 13. References for MEMS
    • IEEE Explore http://ieeexplore.ieee.org/Xplore/DynWel.jsp
    • PDF Files http://www.scribd.com/mems/
    • Introduction to Microengineering http://www.dbanks.demon.co.uk/ueng/
    • MEMS Clearinghouse
    • http://www.memsnet.org/
    • MEMS Exchange
    • http://www.mems-exchange.org/
  • 14. Thank You