Handlers
Semiconductor Wafer
Handling
HCL Technologies
Introduction
HCL Technologies
HCL Technologies
Purpose
HCL Technologies
Components
Front End
 Foup / Carrier / Cassette
 Load Port
 Interface
Back End
 Robots
 Sensors
- Power Cut Sensor
- ...
Wafer
HCL TechnologiesWafer
Foup / Carrier / Cassette
Carrier
HCL Technologies
Carrier
Overhead Transport System
Overhead Transport HCL Technologies
Robots
Frogleg Robot Leapfrog Robot Quadra Robot
Pre-Aligner Robot
HCL Technologies
Working
Recipe
HCL Technologies
HCL Technologies
Working Demo
Front End
EFEM
HCL Technologies
Carrier
Contains Contains
Wafer
Handler’s Input
Overhead
Transport
HCL Technologies
Back End
HCL Technologies
HCL Technologies
Backend Demo
Calibration & Testing
 Vibration Test
 Up Time of Handler System
 Robot’s Accuracy
 Sensors Test
 Auto Calibration
HC...
References
 www.Kensigtonlaboratories.com
 www.SEMI.org
 www.wafercare.com
 Owens Instruments
HCL Technologies
THANK YOU !!
HCL Technologies
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Handlers

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Wafer Handler Equipment

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  • -Factory Automation
  • -Vaccum Based-Edge Grip
  • Handlers

    1. 1. Handlers Semiconductor Wafer Handling HCL Technologies
    2. 2. Introduction HCL Technologies
    3. 3. HCL Technologies
    4. 4. Purpose HCL Technologies
    5. 5. Components Front End  Foup / Carrier / Cassette  Load Port  Interface Back End  Robots  Sensors - Power Cut Sensor - Slot Count Sensor - Load Port Sensor  Pre-Aligner  Stage HCL Technologies
    6. 6. Wafer HCL TechnologiesWafer
    7. 7. Foup / Carrier / Cassette Carrier HCL Technologies Carrier
    8. 8. Overhead Transport System Overhead Transport HCL Technologies
    9. 9. Robots Frogleg Robot Leapfrog Robot Quadra Robot Pre-Aligner Robot HCL Technologies
    10. 10. Working Recipe HCL Technologies
    11. 11. HCL Technologies Working Demo
    12. 12. Front End EFEM HCL Technologies
    13. 13. Carrier Contains Contains Wafer Handler’s Input Overhead Transport HCL Technologies
    14. 14. Back End HCL Technologies
    15. 15. HCL Technologies Backend Demo
    16. 16. Calibration & Testing  Vibration Test  Up Time of Handler System  Robot’s Accuracy  Sensors Test  Auto Calibration HCL Technologies
    17. 17. References  www.Kensigtonlaboratories.com  www.SEMI.org  www.wafercare.com  Owens Instruments HCL Technologies
    18. 18. THANK YOU !! HCL Technologies
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