NanoBot nanomanipulator installation and operation   110321
Upcoming SlideShare
Loading in...5
×
 

NanoBot nanomanipulator installation and operation 110321

on

  • 982 views

Xidex manufactures and sells the NanoBot® nanomanipulator, an easy-to-use, highly versatile, user-programmable nanomanipulator built for use inside scanning electron microscopes (SEMs) and focused ...

Xidex manufactures and sells the NanoBot® nanomanipulator, an easy-to-use, highly versatile, user-programmable nanomanipulator built for use inside scanning electron microscopes (SEMs) and focused ion beam (FIB) tools. The NanoBot system transforms a SEM or FIB into a workshop for nanodevice fabrication and testing. Visit www.xidex.com for details.

Statistics

Views

Total Views
982
Views on SlideShare
982
Embed Views
0

Actions

Likes
0
Downloads
28
Comments
0

0 Embeds 0

No embeds

Accessibility

Categories

Upload Details

Uploaded via as Adobe PDF

Usage Rights

© All Rights Reserved

Report content

Flagged as inappropriate Flag as inappropriate
Flag as inappropriate

Select your reason for flagging this presentation as inappropriate.

Cancel
  • Full Name Full Name Comment goes here.
    Are you sure you want to
    Your message goes here
    Processing…
Post Comment
Edit your comment

NanoBot nanomanipulator installation and operation   110321 NanoBot nanomanipulator installation and operation 110321 Presentation Transcript

  • NANODEVICES AT WORK TheNanoBot® System Installation and Operation Xidex Corporation 8906 Wall St., Suite 703 Austin, TX 78754110321 www.xidex.com
  • ContentsInstallation OperationTopic Slide Topic Slide Installation..….…………………………….… 3  Fast, Well-Controlled Manipulation of Gold Layout ………………………………………. 4 4 Nanoparticles Using the NanoBot® System …..15 15 Inertial Drive Principle ……………………. 5 5  AFM Cantilever Spring Constant Calibration Actuation Modes ....................................... 6 Using the NanoBot® Nanomanipulator with 6 a Force Sensor Attachment ……………….……..16 16 Joystick Control ……………………………. 7 7  Parallel Multi-Gas Precursor Delivery System XYZ Nanopositioners ……………………... 8 8 (Parallel-MGPD) Nozzle Assembly ………..…....17 17 NanoBot Specifications …………………… 9 9  Parallel-MPGD System Schematic …………..…18 18 NanoBot System Components …………….10 10  Gas Injection Nozzle Approaching a Sample Standard Holder for Sharp Metal Probes…11 11 Substrate while Delivering Water Vapor …….....19 19 Standard Holder for AFM Tips ……………...12 12  Carbon Nanotube Etching Using Parallel- Optional End Effector: Force Sensor ……...13 13 MPGD with Water Vapor …………………….…...20 20 Optional End Effector: Force Sensing  Fabrication of a High Resolution Pt Nanotip Gripper ………………………………………...14 14 using the Parallel-MPGD System …………….....21 21  Nanodevice Electrical Characterization …….…..22 22  Nanodevice Fabrication ……………………….….23 23  CONCLUSIONS ………………….………….…….25 25 NANODEVICES AT WORK
  • Installation The NanoBot Model NX-2000 shown here has two independent XYZ nanopositioners. Probe tips and other optional end effectors can be attached manually by the user.  Mounting on the door assembly leaves the SEM stage free for other tasks.  The NanoBot can also be stage mounted.  Up to four independent XYZ nanopositioners can be used.  The user can easily install and remove the NanoBot. Electrical feedthrough is via a KF-40 port.NANODEVICES AT WORK 3 View slide
  • The compact desk top Layout control module saves valuable lab space. A joystick controls nanomaniulator motion in all three axes.  A LabVIEW™ based applications library for basic mechanical and electrical probing is already installed on a laptop computer running Windows.  Other custom built user applications require separate purchase of LabVIEW from National Instruments.NANODEVICES AT WORK 4 View slide
  • Inertial Drive Principle Each NanoBot stage incorporates a Piezoelectric Driven piezoelectric actuator, a bearing Actuator (“Piezo”) Mass and a driven mass. Bearing The piezo expands, carrying the bearing along with it. The driven mass moves forward with the advancing bearing due to static friction. The piezo then contracts quickly, exceeding the static friction limit, thus allowing the bearing to slide with respect to the driven mass.NANODEVICES AT WORK 5
  • Actuation Modes  The piezo expands and contracts according to a sawtooth pattern.  The resulting net forward motion Driven Mass enables the NanoBot’s Multi Step Displacement Mode. The direction of Multi Step travel is changed by reversing the Piezo sawtooth pattern. Displacement  Using just one sawtooth moves the driven mass forward (or backward) one step, enabling the NanoBot’s Time Single Step Mode.  Slow expansion and contraction of the piezo causes the driven mass to move with it, remaining attached by static friction. This enables the NanoBot’s Fine Motion Mode.NANODEVICES AT WORK 6
  • Joystick Control Handle Forward, Backward : Move in YHat Switch Forward, Backward : Toggles X, Y speed in Multi-Step Mode Toggles X, Y amplitude in Single-Step Mode Handle Twist : Toggles X, Y step size in Fine Motion Mode Move in ZHat Switch Right, Left : Toggles Z speed in Multi-Step Mode Toggles Z amplitude in Single-Step Mode Handle Right, Left : Toggles Z step size in Fine Motion Mode Move in X Button 5: Selects Actions Button 6: Resets (LabVIEW™ applications) step countersTrigger : Starts andStops Actions Button 3 : Toggles mode of Button 4 : Toggles mode(LabVIEW™ X,Y between Multi-Step, of Z between Multi-Step,applications) Single-Step, Fine Motion Single-Step, Fine MotionButton 2 : Toggles between Lever : Actuates gripper (Onlynanopositioner #1 and #2 for NanoBots equipped with(Model NX-2000 only) gripper end effector option) NANODEVICES AT WORK 7
  • XYZ NanopositionersNANODEVICES AT WORK 8
  • NanoBot SpecificationsActuation Modes Mounting, Electrical Connections Multi Step Mode  SEM/FIB Mounting  Range ………….. 15 mm in XYZ  Mounts on door or stage assembly  Speed ……….. up to 1 mm/sec  Adjustable mounting bracket Singe Step Mode  Electrical Connections  Range ..... 100 nm to 2 µm in XYZ  KF40 port for electrical feedthrough Fine Motion Mode  100-240 VAC input at 50/60 Hz  Range ………. 3.5 µm in XYZ  Resolution ………………… <1 nmSize at Maximum Extension Mechanical and Electrical Stability(Excluding End Effectors and Booms)  Drift ……………........................ <1 nm/min NX-1000 ( One XYZ Nanopositioner )  Electrical Characteristics  Footprint ………………. 46 x 46 mm  Electrical Noise ………….…. <10 pA  Height …………………….…. 70 mm  Low Noise Option …………. <200 fA NX-2000 ( Two XYZ Nanopositioners)  Signal Conductor Resistance: < 1 Ω  Footprint ……………… 101 x 46 mm  Maximum Voltage: 500 V  Maximum Current: 5A  Height …………………….…. 70 mm 9
  • NanoBot System Components XYZ Nanopositioners (up to Four) Vacuum Feedthrough Mounting bracket and Coaxial / Triaxial Cables Joystick Control Module LabVIEW™ applications library Laptop computer Probe Holders running Windows OSNANODEVICES AT WORK 10
  • Standard Holder for Sharp Metal Probes Ceramic Collar End Effector Boom Probe Probe Spring Signal Cable Holder Loaded Tube SocketProbe holder tube ½ Inchaccommodates probeswith 75 - 250 µm Dia. 0.5 mm Outside Dia. 100 µm Dia. sharp tungsten probe Socket accommodates probe or probe holder tube with 0.3 – 0.6 mm Dia. NANODEVICES AT WORK 11
  • Standard Holder for AFM Tips Flat Mounting Surface Notch to Accommodate Tweezers Hand Adjustable Set Screw to Retain PinAFM Cantilever Attached toFlat Mounting Surface with End Effector BoomSEM Tape or Carbon DAG Removable Stainless Steel Pin 12
  • Optional End Effector: Force Sensor Output Display Selected to Show: Time Averaged Force vs. Time (left) Force Power Spectrum (right)NANODEVICES AT WORK 13
  • Optional End Effector: Force Sensing Gripper Output Display Selected to Show: Time Averaged Force vs. Time (left) Peak Force Amplitude (right)NANODEVICES AT WORK 14
  • Fast, Well-Controlled Manipulation of Gold Nanoparticles Using the NanoBot® System A series time-lapsed images show several adjacent gold nanoparticles herded together.NANODEVICES AT WORK 15
  • AFM Cantilever Spring Constant Calibration Using the NanoBot® Nanomanipulator with a Force Sensor AttachmentNANODEVICES AT WORK 16
  • Parallel Multi-Gas Precursor Delivery System (Parallel-MGPD) Nozzle Assembly Nozzle assembly for the Parallel-MPGD System NANODEVICES AT WORK 17
  • Parallel-MPGDSystem Schematic NANODEVICES AT WORK 18
  • Gas Injection Nozzle Approaching a Sample Substrate while Delivering Water Vapor NANODEVICES AT WORK 19
  • Carbon Nanotube Etching Using Parallel-MPGD with Water Vapor Pre-etch Post-etch CNT on Si surface cut using water vapor as a precursor Pre-clean Post-clean a) & b) CNTs cut using line scan c) CNTs cut using box scan d) Competitive contamination that 1.5 x 0.75 µm area cleaned without modifying neighboring CNTs can accompany the processNANODEVICES AT WORK 20
  • Fabrication of a High Resolution Pt Nanotip using the Parallel-MPGD System Setup Used to Fabricate a Pt E-beam deposited Pt nanotip Nanotip on the Apex of a W Probe NANODEVICES AT WORK 21
  • Nanodevice Electrical Characterization Example: Current Voltage (I-V) Curve for a CNT in Contact with another CNTNANODEVICES AT WORK 22
  • Nanodevice FabricationExample: Carbon Nanotube AFM Tip Fabrication Using the NanoBot in an SEM CNT CNT Source Source W Tip W Tip CNT CNT W Tip CNT SourceThe NanoBot’s Multi Step mode is Multi Step and Single Step mode are The NanoBot’s Fine Motion mode isused to rapidly maneuver a W tip in used to maneuver the W tip to within then used to touch the W probe to aXYZ toward a CNT source. a few µm of the source of CNTs. selected CNT and weld it with EBID. W Tip CNT AFM W Tip TipAn electrical current pulse separates The W tip carrying the CNT is rapidlythe CNT from the CNT source. translated in XYZ to within a few NANODEVICES AT WORK microns of an AFM tip apex. 23
  • Nanodevice Fabrication Using the dexterity of the AFM W Tip NanoBot™ it is fairly easy to Tip CNT Tip AFM Tip align a CNT with respect to an AFM tip in XYZ. A reasonably well aligned CNT AFM tip (e.g., CNT to 10º ) can be made this way W Tip Break with some amount of practice. The CNT is welded to the AFM tip using EBID of carbon.The NanoBot’s™ Fine Motion An electrical current pulse ismode, is then used to place the then used to cut the CNT awayCNT along the side of the silicon from the tungsten tip.AFM tip apex.A specialized software module A CNT attached to the end of aincluded in the Action Toolbox conventional Silicon AFM tipprovided with the NanoBot™ enables scanning with higherallows customers to cut CNTs spatial resolution and less tipin a controlled way wear than would otherwise be possible. 500 nm NANODEVICES AT WORK 24
  • CONCLUSIONS1. The NanoBot nanomanipulator is an easy-to-operate, highly versatile, user-programmable system for use in SEMs and FIB tools.2. The NanoBot System transforms a SEM or FIB tool into a true nanofabrication / nanomaterial testing environment.3. Specialized end effectors enable mechanical and electrical probing, TEM sample preparation, force sensing, gripping, nanomaterial testing, and multi-gas delivery for EBID/EBIE.4. Integration with LabVIEW™ enables exceptional ease of use and also allows the user to create custom software applications. NANODEVICES AT WORK 25