ISPMM’2008, Aug. 25~29, 2008, Anhui, China              National Taiwan University




A Wireless Flexible Temperature and...
ISPMM’2008, Aug. 25~29, 2008, Anhui, China                  National Taiwan University



 The schematic of the proposed a...
ISPMM’2008, Aug. 25~29, 2008, Anhui, China                    National Taiwan University

                  Specifications...
ISPMM’2008, Aug. 25~29, 2008, Anhui, China                                          National Taiwan University



        ...
ISPMM’2008, Aug. 25~29, 2008, Anhui, China            National Taiwan University




                   40mm              ...
ISPMM’2008, Aug. 25~29, 2008, Anhui, China              National Taiwan University




                                   ...
ISPMM’2008, Aug. 25~29, 2008, Anhui, China   National Taiwan University




Department of Mechanical Engineering          ...
ISPMM’2008, Aug. 25~29, 2008, Anhui, China         National Taiwan University



   The heaters of different shapes

• The...
ISPMM’2008, Aug. 25~29, 2008, Anhui, China                                  National Taiwan University


 Measured Tempera...
ISPMM’2008, Aug. 25~29, 2008, Anhui, China                National Taiwan University



    The Stamps of Different Shapes...
ISPMM’2008, Aug. 25~29, 2008, Anhui, China                                            National Taiwan University


       ...
ISPMM’2008, Aug. 25~29, 2008, Anhui, China                   National Taiwan University

          The interdigital electr...
ISPMM’2008, Aug. 25~29, 2008, Anhui, China                    National Taiwan University


           Analog Temperature S...
ISPMM’2008, Aug. 25~29, 2008, Anhui, China               National Taiwan University




                                  ...
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10 17 2008 A Wireless Flexible Temperature And Tactile Sensing Array For Robot Applications

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10 17 2008 A Wireless Flexible Temperature And Tactile Sensing Array For Robot Applications

  1. 1. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University A Wireless Flexible Temperature and Tactile Sensing Array for Robot Applications Presenter: Dr. Yao-Joe Yang Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan Department of Mechanical Engineering MEMS Laboratory
  2. 2. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University The schematic of the proposed artificial skin • Flexible substrate • Copper-PI (polyimide) film skin receptor Pressure sensor • The outer side of the skin Tempe rature • Tactile sensor array sensor • The inner side of the skin S kin receptors Flex ible substra te • Temperature sensor array Inner Side • The sensing elements of the skin • Conductive polymer for tactile sensing • Discrete sensor chips for temperature sensing. Outer Side of the skin Department of Mechanical Engineering MEMS Laboratory
  3. 3. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University Specifications of the proposed artificial skin Artificial Skin Specifications Force range 50~500g Temperature range -20~80°C Sensor density > 4/cm2 Thickness < 3 mm Flexible substrate PI-film Department of Mechanical Engineering MEMS Laboratory
  4. 4. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University The fabricated artificial skin Temperature sensor 10 m m Te m p e r a tu re 1 0 mm s e ns o r Tem p eratu re Tac tile s ens in g Tactile s ens in g p ad E lem ent sensor (a) The outer side of the skin (b) The inner side of the skin 8x8 tactile sensing array 8x8 temperature sensing array Temperature sensor • In (a), the outer side of the artificial skin • Tactile sensor array Tactile sensor • In (b), the inner side of the artificial skin • Temperature sensor array (c) The flexibility of the artificial skin Department of Mechanical Engineering MEMS Laboratory
  5. 5. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University 40mm 40mm Temperature Tactilesensing sensing pad Department of Mechanical Engineering Temperature sensor MEMS Laboratory
  6. 6. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University Temperature sensor Tactile sensor Department of Mechanical Engineering MEMS Laboratory
  7. 7. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University Department of Mechanical Engineering MEMS Laboratory
  8. 8. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University The heaters of different shapes • The different shapes of heaters • (a) Bar shape • (b) Circular shape (a) (b) • (c) Triangular shape • (d) Square shape • The heaters • shaped using 1mm metal wire (c) (d) Department of Mechanical Engineering MEMS Laboratory
  9. 9. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University Measured Temperature Patterns Induced by the Heaters of Different Shapes Temperature Colorbar Temperature Colorbar 80℃ 80℃ Heat source 11℃ Heat source 11℃ (a) (c) Temperature Colorbar Temperature Colorbar 80℃ 80℃ Heat source Heat source 11℃ 11℃ (b) (d) Department of Mechanical Engineering MEMS Laboratory
  10. 10. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University The Stamps of Different Shapes • The different shapes of acrylic stamps • (a) T shape • (b) Circular shape • (c) Bar shape (a) (b) • (d) Triangular shape 4mm • The applied pressure 4mm • T-shape 1kg weight • The other shapes 500g weight (c) (d) Department of Mechanical Engineering MEMS Laboratory
  11. 11. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University Pressure distributions of different solid stamps 300 kPa 300 kPa 3 cm 3 cm 2 cm Applied pressure Applied pressure 0 kPa 0 kPa (a) (b) 300 kPa 300 kPa 3 cm Applied pressure 3 cm Applied pressure 0 kPa 0 kPa (c) (d) Department of Mechanical Engineering MEMS Laboratory
  12. 12. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University The interdigital electrode pairs and tactile sensing element • Two different types of interdigital electrodes for the tactile sensing elements are fabricated. (a) • In (a), two different pre-defined inter-digital copper electrodes Conductive polymer Conductive polymer • In (b), the sensing elements with dispensed conductive polymer (b) Department of Mechanical Engineering MEMS Laboratory
  13. 13. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University Analog Temperature Sensor Analog Temperature Sensor Maxim (www.maxim-ic.com) MAX6607 Sensitivity 10mv / °C T (°C ) = (VOUT − 500mV ) Transfer fnc. 10(mV / °C ) Supply voltage 1.8V~3.6V Temp. range -20~80℃ Package SC70 Size 2.4 x 2.0 x 1.0 (mm) Department of Mechanical Engineering MEMS Laboratory
  14. 14. ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University Temperature Scanning Circuit Tactile RS-232 Switch Circuit Scanning Circuit Department of Mechanical Engineering MEMS Laboratory
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