Micro Electro Mechanical Systems
 Introduction
 Mems process
 Fabrication process
 Materials for mems
 Micro machining technology
 Application of mem...
 MEMS: micro-electro-mechanical systems
 Combination of mechanical functions
(sensing,moving,heating) and electrical
fun...
MEMS DESIGN
FABRICATION
TESTING
PACKING
MicroElectroMechanicalSystems
MicroElectroMechanicalSystems
 Chemical Vapor Deposition
Chemical vapor deposition
 Physical Vapor Deposition
Sputtering
MicroElectroMechanicalSystems
MicroElectroMechanicalSystems
 Application of photo resist
 Optical exposure to print an image of
the mask onto the resist
 Immersion in an aqueous d...
MicroElectroMechanicalSystems
• DRY ETCHING
• WET ETCHING
MicroElectroMechanicalSystems
 Materials are the basic things required to develop
micro sensors
 Metals
 Polymers
 Ceramic materials
 Semiconductor...
 Process of shaping silicon or other
materials to realise 3-D mechanical in
miniature form and the mechanical
devices tha...
 BULK micromachining:
 SURFACE micromachining:
 LIGA process
MicroElectroMechanicalSystems
 In Medical Field
• A MEMS device can be implanted in the human
body.
• MEMS surgical tools provide the flexibility and
a...
An example of a bio-MEMS device is this
automated FISH microchip.
MicroElectroMechanicalSystems
 In Automotives
•Air bag System
•Vehicle security system
• Inertial brake lights
•Rollover detection
•Automatic door lock...
 As gyroscope
MicroElectroMechanicalSystems
 In microphones
MicroElectroMechanicalSystems
 In accelerometers
MEMS accelerometers are widely used in
• cars for airbag deployment
• smart phones
• gaming devices fo...
 As sensors
MicroElectroMechanicalSystems
 In military
Apart from these applications mems are also used
in many fields in the present world , like
 They are used ...
 Minimize energy and materials.
 Improved reproducibility.
 Improved accuracy and reliability.
 Increased selectivity ...
DISADVANTAGES
 Farm establishment requires huge
investments.
 Micro-components are costly compared to
macro components.
...
 This enabling technology promises to create
entirely new categories of products.
 Mems will be the indispensible factor...
 R. Ghodssi, P. Lin (2011). MEMS Materials and Processes
Handbook. Berlin:Springer
 Waldner, Jean-Baptiste (2008). Nanoc...
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Mems

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Transcript of "Mems"

  1. 1. Micro Electro Mechanical Systems
  2. 2.  Introduction  Mems process  Fabrication process  Materials for mems  Micro machining technology  Application of mems  Advantages and disadvantages  Conclusion  Reference MicroElectroMechanicalSystems
  3. 3.  MEMS: micro-electro-mechanical systems  Combination of mechanical functions (sensing,moving,heating) and electrical functions (switching ,deciding) on the same chip using micro fabrication technology. MicroElectroMechanicalSystems
  4. 4. MEMS DESIGN FABRICATION TESTING PACKING MicroElectroMechanicalSystems
  5. 5. MicroElectroMechanicalSystems
  6. 6.  Chemical Vapor Deposition Chemical vapor deposition  Physical Vapor Deposition Sputtering MicroElectroMechanicalSystems
  7. 7. MicroElectroMechanicalSystems
  8. 8.  Application of photo resist  Optical exposure to print an image of the mask onto the resist  Immersion in an aqueous developer solution to dissolve the exposed resist MicroElectroMechanicalSystems
  9. 9. MicroElectroMechanicalSystems
  10. 10. • DRY ETCHING • WET ETCHING MicroElectroMechanicalSystems
  11. 11.  Materials are the basic things required to develop micro sensors  Metals  Polymers  Ceramic materials  Semiconductors  Composite materials MicroElectroMechanicalSystems
  12. 12.  Process of shaping silicon or other materials to realise 3-D mechanical in miniature form and the mechanical devices that are compatible with the micro electronic devices MicroElectroMechanicalSystems
  13. 13.  BULK micromachining:  SURFACE micromachining:  LIGA process MicroElectroMechanicalSystems
  14. 14.  In Medical Field • A MEMS device can be implanted in the human body. • MEMS surgical tools provide the flexibility and accuracy to perform surgery.’ • Bio-mems MicroElectroMechanicalSystems
  15. 15. An example of a bio-MEMS device is this automated FISH microchip. MicroElectroMechanicalSystems
  16. 16.  In Automotives •Air bag System •Vehicle security system • Inertial brake lights •Rollover detection •Automatic door locks. MicroElectroMechanicalSystems
  17. 17.  As gyroscope MicroElectroMechanicalSystems
  18. 18.  In microphones MicroElectroMechanicalSystems
  19. 19.  In accelerometers MEMS accelerometers are widely used in • cars for airbag deployment • smart phones • gaming devices for sensing motion. MicroElectroMechanicalSystems
  20. 20.  As sensors MicroElectroMechanicalSystems
  21. 21.  In military Apart from these applications mems are also used in many fields in the present world , like  They are used to detect earth quakes, in gas shut off, in shock and tilt sensing.  Inkjet printers and micro scanners also involve the use of mems. Micro-electro mechanical system (MEMS) technology help projectiles to reach their targets accurately. MicroElectroMechanicalSystems
  22. 22.  Minimize energy and materials.  Improved reproducibility.  Improved accuracy and reliability.  Increased selectivity and sensitivity. ADVANTAGES MicroElectroMechanicalSystems
  23. 23. DISADVANTAGES  Farm establishment requires huge investments.  Micro-components are costly compared to macro components.  Design includes very much complex procedures. MicroElectroMechanicalSystems
  24. 24.  This enabling technology promises to create entirely new categories of products.  Mems will be the indispensible factor in advancing technology.  As with all emerging technologies had been predicted to revolutionize technology and our lives. MicroElectroMechanicalSystems
  25. 25.  R. Ghodssi, P. Lin (2011). MEMS Materials and Processes Handbook. Berlin:Springer  Waldner, Jean-Baptiste (2008). Nanocomputers and Swarm Intelligence. London:ISTE John Wiley & Sons. p. 205.  McCord, M. A.; M. J. Rooks (2000). "2". SPIE Handbook of Microlithography, Micromachining and Microfabrication.  Chang, Floy I-Jung (1995). Xenon difluoride etching of silicon for MEMS (M.S.)  Williams, K.R.; Muller, R.S. (1996). "Etch rates for micromachining processing".Journal of Microelectromechanical Systems 5 (4): 256  en.wikipedia.org/wiki/Microelectromechanical_systems MicroElectroMechanicalSystems
  26. 26. m/ rockstaRZE
  27. 27. m/ rockstaRZE

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