Materials for mems
Micro machining technology
Application of mems
Advantages and disadvantages
MEMS: micro-electro-mechanical systems
Combination of mechanical functions
(sensing,moving,heating) and electrical
functions (switching ,deciding) on the
same chip using micro fabrication
Application of photo resist
Optical exposure to print an image of
the mask onto the resist
Immersion in an aqueous developer
solution to dissolve the exposed resist
Materials are the basic things required to develop
Process of shaping silicon or other
materials to realise 3-D mechanical in
miniature form and the mechanical
devices that are compatible with the
micro electronic devices
In Medical Field
• A MEMS device can be implanted in the human
• MEMS surgical tools provide the flexibility and
accuracy to perform surgery.’
An example of a bio-MEMS device is this
automated FISH microchip.
•Air bag System
•Vehicle security system
• Inertial brake lights
•Automatic door locks.
Apart from these applications mems are also used
in many fields in the present world , like
They are used to detect earth quakes, in gas shut
off, in shock and tilt sensing.
Inkjet printers and micro scanners also involve
the use of mems.
Micro-electro mechanical system (MEMS) technology
help projectiles to reach their targets accurately.
Minimize energy and materials.
Improved accuracy and reliability.
Increased selectivity and sensitivity.
Farm establishment requires huge
Micro-components are costly compared to
Design includes very much complex procedures.
This enabling technology promises to create
entirely new categories of products.
Mems will be the indispensible factor in
As with all emerging technologies had been
predicted to revolutionize technology and our
R. Ghodssi, P. Lin (2011). MEMS Materials and Processes
Waldner, Jean-Baptiste (2008). Nanocomputers and Swarm
Intelligence. London:ISTE John Wiley & Sons. p. 205.
McCord, M. A.; M. J. Rooks (2000). "2". SPIE Handbook of
Microlithography, Micromachining and Microfabrication.
Chang, Floy I-Jung (1995). Xenon difluoride etching of
silicon for MEMS (M.S.)
Williams, K.R.; Muller, R.S. (1996). "Etch rates for
micromachining processing".Journal of
Microelectromechanical Systems 5 (4): 256