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Micro electro-mechanical-systems-mems

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  • 1. MEMSMEMSMicro-Electo-MechanicalMicro-Electo-MechanicalSystemsSystems
  • 2. What is MEMS?What is MEMS? Micro-Electro-Mechanical SystemsMicro-Electro-Mechanical Systems is the integration of elements, sensors, actuators, andis the integration of elements, sensors, actuators, andelectronics on a common silicon substrate through micro-electronics on a common silicon substrate through micro-fabrication technology, a manufacturing technology for makingfabrication technology, a manufacturing technology for makingmicroscopic devicesmicroscopic devicesOther Materials used in MEMSOther Materials used in MEMS Gallium ArsinideGallium Arsinide Titanium NickelTitanium Nickel Piezoelectric MaterialsPiezoelectric Materials
  • 3. How MEMS are made!How MEMS are made! There are three main building blocks in MEMSThere are three main building blocks in MEMS Deposition processDeposition process The ability to deposit thin films ofThe ability to deposit thin films ofmaterialmaterial LithographyLithography is typically the transfer of a pattern to ais typically the transfer of a pattern to aphotosensitive material by selectivephotosensitive material by selectiveexposure to a radiation source such asexposure to a radiation source such aslightlight Etching ProcessEtching Process Wet etching where the material isWet etching where the material isdissolved when immersed in a chemicaldissolved when immersed in a chemicalsolutionsolution Dry etching where the material isDry etching where the material issputtered or dissolved using reactivesputtered or dissolved using reactiveions or a vapor phase etchantions or a vapor phase etchant
  • 4. Pictures of MEMSPictures of MEMS
  • 5. ExpectedExpectedCharacteristics of MEMSCharacteristics of MEMS In the future, MEMSIn the future, MEMSTechnology compared toTechnology compared toConventional TechnologyConventional Technologyshould have theseshould have theseeffects:effects: Cost reductionCost reduction Increase functionalityIncrease functionality Improve reliabilityImprove reliability Decrease sizeDecrease size Decrease massDecrease mass
  • 6. ExpectedExpectedCharacteristics of MEMSCharacteristics of MEMS In the future, MEMSIn the future, MEMSTechnology compared toTechnology compared toConventional TechnologyConventional Technologyshould have theseshould have theseeffects:effects: Cost reductionCost reduction Increase functionalityIncrease functionality Improve reliabilityImprove reliability Decrease sizeDecrease size Decrease massDecrease mass