Micro electro-mechanical-systems

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  • 1. Micro Electro MechanicalSystems
  • 2. Materials and Fabrication Silicon is the dominatematerial used Excellent electrical andmechanical properties For High Temp. applications,SiC is ideal Other alternatives includeTiNi (shape memory alloys)
  • 3. Applications Both Military andcommercial use Automobiles Airplanes Home Appliances
  • 4. World Market Overwhelmingcommercial demand Drastic Increase inWorld-wide Sales