Sem

1,124 views

Published on

Published in: Business, Technology
0 Comments
0 Likes
Statistics
Notes
  • Be the first to comment

  • Be the first to like this

No Downloads
Views
Total views
1,124
On SlideShare
0
From Embeds
0
Number of Embeds
27
Actions
Shares
0
Downloads
123
Comments
0
Likes
0
Embeds 0
No embeds

No notes for slide

Sem

  1. 1. Materials Characterization Lab www.mri.psu.edu/mcl Scanning Electron Microscopy Mark S. Angelone John Cantolina MCL MCL msa3@psu.edu jjc16@psu.edu JUNE 22, 2005
  2. 2. Materials Characterization Lab www.mri.psu.edu/mcl Summer Characterization Open Houses Technique Time Date Location Thermal analysis (TGA, DTA, DSC) 9:45 AM June 8 250 MRL Bldg. Transmission Electron Microscopy (TEM/STEM) 9:45 AM June 15 114 MRI Bldg Scanning electron microscopy (SEM) 9:45 AM June 22 541 Deike Bldg. Analytical SEM 11:00 AM June 22 541 Deike Bldg. X-ray Diffraction (XRD) 9:45 AM June 29 250 MRL Bldg. Dielectric Characterization (25 min lecture only) 9:45 AM July 6 250 MRL bldg. High temperature sintering lab (20 min lecture only) 10:15 AM July 6 250 MRL Bldg. Focused Ion Beam (FIB) 9:45 AM July 13 114 MRI Bldg TEM sample preparation 11:00 AM July 13 114 MRI Bldg Orientation imaging microscopy (OIM/EBSD) 9:45 AM July 20 250 MRL Bldg. Chemical analysis (ICP, ICP-MS) 9:45 AM July 27 541 Deike Bldg. Atomic Force Microscopy (AFM) 9:45 AM August 3 114 MRI Bldg Small angle x-ray scattering (SAXS) 9:45 AM August 10 541 Deike Bldg. Particle Characterization 9:45 AM August 17 250 MRL X-ray photoelectron spectroscopy (XPS/ESCA) 9:45 AM August 24 114 MRI Bldg Auger Electron Spectroscopy (AES) 11:00 AM August 24 114 MRI Bldg NOTE LOCATIONS: The MRI Bldg is in the Innovation Park near the Penn Stater Hotel; MRL Bldg. is on Hastings Road. More information: www.mri.psu.edu/mcl
  3. 3. Materials Characterization Lab www.mri.psu.edu/mcl Materials Characterization Lab Locations MRI Bldg: XPS/ESCA, FIB SIMS, TEM, HR- TEM, FE-Auger, MRL Bldg: Hosler Bldg: AFM, XRD SEM, XRD, OIM, DTA, SEM,AFM,ESEM, DSC, TGA, FTIR, Penn Stater FE-SEM, EPMA, ICP, Hotel Raman, AFM, Powder, E&ES Bldg: ICP-MS,BET, SAXS dielectric, prep, shop, SEM IC, UV-Vis Route 322 Steidle Bldg: Atherton Street Nanoindenter (322 Business) I-99 Park Ave. 0 0 0 0 0 0 0 Ave. 0 0 0 0 0 Park 0 Beaver 0 0 Stadium 0 0 0 Centre 0 0 Porter Road Community Univ Shortlidg Hospital 0 0 Burrowes Road ersi ty D e Pollock Road Road rive North Hastin Deike Bldg: gs Ro ad College Ave.
  4. 4. Materials Characterization Lab www.mri.psu.edu/mcl MCL SERVICES • Facilities/Instruments • User Training • Operators/Analyst for hire • 24/7 • Online bookings • User fees • website/contacts to get started
  5. 5. Materials Characterization Lab www.mri.psu.edu/mcl Things To Do Today ― Overview of SEM Techniques ― specific applications from Penn State materials ― discussion of MCL capabilities ― how to get started ― campus resources ― a brief lab tour
  6. 6. Materials Characterization Lab www.mri.psu.edu/mcl
  7. 7. Materials Characterization Lab www.mri.psu.edu/mcl
  8. 8. Materials Characterization Lab www.mri.psu.edu/mcl • MCL SEM CAPABILITY • CSEM • VARIATIONS • MICROANALYSIS Later this morning
  9. 9. Materials Characterization Lab www.mri.psu.edu/mcl SEM VARIANTS • IMPROVE RESOLVING POWER •Theoretical Limits ˜ 5 – 7 Å •LaB6 •Field Emitter • EXPAND SAMPLE RANGE •Insulating •Out gassing •WET •Beam sensitive • EXTEND INFORMATION •SE type/BSE type discriminating detectors •XRAY: EDS, WDS •CL •BSED/OIM •Dynamic Experiments (Temp, Humidity, Atmosphere…..)
  10. 10. Materials Characterization Lab www.mri.psu.edu/mcl CSEM (Conventional Scanning Electron Microscopy) • W – Hairpin Emitter •M H V •SE via ETD •3-4 nm P-P Resolution •50X – 30,000X Typical •Up to 200mm sample size typical •MHV compatible electrically conducting samples
  11. 11. Materials Characterization Lab www.mri.psu.edu/mcl
  12. 12. Materials Characterization Lab www.mri.psu.edu/mcl
  13. 13. Materials Characterization Lab www.mri.psu.edu/mcl
  14. 14. Materials Characterization Lab www.mri.psu.edu/mcl
  15. 15. Materials Characterization Lab www.mri.psu.edu/mcl Beam B B + 12 kV B F B PM LG S B SE Specimen B -50 V to + 250 V
  16. 16. Materials Characterization Lab www.mri.psu.edu/mcl CSEM (Conventional Scanning Electron Microscopy) • W – Hairpin Emitter •M H V •SE via ETD •3-4 nm P-P Resolution •50X – 30,000X Typical •Up to 200mm sample size typical •MHV compatible electrically conducting samples
  17. 17. Materials Characterization Lab www.mri.psu.edu/mcl CSEM (Conventional Scanning Electron Microscopy) • FEI/PHILIPS XL20, XL30 • HITACHI 3500N • HITACHI 3000 • ADDITIONAL INFORMATION: • BSE (H 3500N) • EDS • XL20 Z > 11, spectra only • H3500N Z > 5, spectra, maps, etc • BSED/OIM (H3500N) • USER FEATURES: • Digital Images (All) • Print Images (XL20) • Motorized Stage (H3500N) • APPLICATIONS: • Aggregate microstructures • Semi conductor device structures • Corrosion/weathering • Materials defects
  18. 18. Materials Characterization Lab www.mri.psu.edu/mcl
  19. 19. Materials Characterization Lab www.mri.psu.edu/mcl
  20. 20. Materials Characterization Lab www.mri.psu.edu/mcl CSEM (Conventional Scanning Electron Microscopy) • FEI/PHILIPS XL20, XL30 • HITACHI 3500N • HITACHI 3000 • ADDITIONAL INFORMATION: • BSE (H 3500N) • EDS • XL20 Z > 11, spectra only • H3500N Z > 5, spectra, maps, etc • BSED/OIM (H3500N) • USER FEATURES: • Digital Images (All) • Print Images (XL20) • Motorized Stage (H3500N) • APPLICATIONS: • Aggregate microstructures • Semi conductor device structures • Corrosion/weathering • Materials defects
  21. 21. Materials Characterization Lab www.mri.psu.edu/mcl
  22. 22. Materials Characterization Lab www.mri.psu.edu/mcl
  23. 23. Materials Characterization Lab www.mri.psu.edu/mcl
  24. 24. Materials Characterization Lab www.mri.psu.edu/mcl
  25. 25. Materials Characterization Lab www.mri.psu.edu/mcl
  26. 26. Materials Characterization Lab www.mri.psu.edu/mcl
  27. 27. Materials Characterization Lab www.mri.psu.edu/mcl
  28. 28. Materials Characterization Lab www.mri.psu.edu/mcl
  29. 29. Materials Characterization Lab www.mri.psu.edu/mcl
  30. 30. Materials Characterization Lab www.mri.psu.edu/mcl
  31. 31. Materials Characterization Lab www.mri.psu.edu/mcl
  32. 32. Materials Characterization Lab www.mri.psu.edu/mcl
  33. 33. Materials Characterization Lab www.mri.psu.edu/mcl FESEM (Field Emission SEM) • Field Emission Tips • Cold • 80mm motorized stage • Schotky • Thermal • Small samples typical (< 15mm) • UHV • LV-SEM (2-3nm @ 1kV • Beam sensitive samples • Short W.D. SE Detectors • Insulators • Surface contrast • 1nm P-P Resolution • Applications • 500X – 450,000X + • JEOL 6700F •SE only
  34. 34. Materials Characterization Lab www.mri.psu.edu/mcl
  35. 35. Materials Characterization Lab www.mri.psu.edu/mcl FESEM (Field Emission SEM) • Field Emission Tips • Cold • 80mm motorized stage • Schotky • Thermal • Small samples typical (< 15mm) • UHV • LV-SEM (2-3nm @ 1kV • Beam sensitive samples • Short W.D. SE Detectors • Insulators • Surface contrast • 1nm P-P Resolution • Applications • 500X – 450,000X + • JEOL 6700F •SE only
  36. 36. Materials Characterization Lab www.mri.psu.edu/mcl
  37. 37. Materials Characterization Lab www.mri.psu.edu/mcl
  38. 38. Materials Characterization Lab www.mri.psu.edu/mcl
  39. 39. Materials Characterization Lab www.mri.psu.edu/mcl
  40. 40. Materials Characterization Lab www.mri.psu.edu/mcl Carbon 1s
  41. 41. Materials Characterization Lab www.mri.psu.edu/mcl
  42. 42. Materials Characterization Lab www.mri.psu.edu/mcl
  43. 43. Materials Characterization Lab www.mri.psu.edu/mcl
  44. 44. Materials Characterization Lab www.mri.psu.edu/mcl
  45. 45. Materials Characterization Lab www.mri.psu.edu/mcl ESEM (ENVIRONMENTAL SEM) • W-Hairpin • 3-4 nm P-P Same as • 25X – 30,000X Typical CSEM • 100 mm Stage
  46. 46. Materials Characterization Lab www.mri.psu.edu/mcl ESEM (ENVIRONMENTAL SEM) • W-Hairpin • USER FEATURES • 3-4 nm P-P Same as • Great GUI • 25X – 30,000X Typical CSEM • Digital Images/Spectra • 100 mm Stage • Image Analysis • IR Chamber View • 3 VAC MODES • Heating (1000°C) • HIGH (CSEM) • LOW (LVSEM) • APPLICATIONS • WET (ESEM) • All CSEM • Insulators • FEI QUANTA 200 • Out Gassing •Wet Mode • Information Sources • Dynamic Heat/Cool/Wet •SE/BSE All modes • EDS Z> 5 spectra, maps, quant • Charge contrast (?)
  47. 47. Materials Characterization Lab www.mri.psu.edu/mcl Insulators
  48. 48. Materials Characterization Lab www.mri.psu.edu/mcl
  49. 49. Materials Characterization Lab www.mri.psu.edu/mcl
  50. 50. Materials Characterization Lab www.mri.psu.edu/mcl
  51. 51. Materials Characterization Lab www.mri.psu.edu/mcl
  52. 52. Materials Characterization Lab www.mri.psu.edu/mcl Out Gassing
  53. 53. Materials Characterization Lab www.mri.psu.edu/mcl
  54. 54. Materials Characterization Lab www.mri.psu.edu/mcl
  55. 55. Materials Characterization Lab www.mri.psu.edu/mcl Wetting
  56. 56. Materials Characterization Lab www.mri.psu.edu/mcl
  57. 57. Materials Characterization Lab www.mri.psu.edu/mcl
  58. 58. Materials Characterization Lab www.mri.psu.edu/mcl
  59. 59. Materials Characterization Lab www.mri.psu.edu/mcl
  60. 60. Materials Characterization Lab www.mri.psu.edu/mcl
  61. 61. Materials Characterization Lab www.mri.psu.edu/mcl Dynamic Heat/Cool/Wet
  62. 62. Materials Characterization Lab www.mri.psu.edu/mcl
  63. 63. Materials Characterization Lab www.mri.psu.edu/mcl
  64. 64. Materials Characterization Lab www.mri.psu.edu/mcl
  65. 65. Materials Characterization Lab www.mri.psu.edu/mcl
  66. 66. Materials Characterization Lab www.mri.psu.edu/mcl
  67. 67. Materials Characterization Lab www.mri.psu.edu/mcl
  68. 68. Materials Characterization Lab www.mri.psu.edu/mcl
  69. 69. Materials Characterization Lab www.mri.psu.edu/mcl
  70. 70. Materials Characterization Lab www.mri.psu.edu/mcl
  71. 71. Materials Characterization Lab www.mri.psu.edu/mcl
  72. 72. Materials Characterization Lab www.mri.psu.edu/mcl
  73. 73. Materials Characterization Lab www.mri.psu.edu/mcl
  74. 74. Materials Characterization Lab www.mri.psu.edu/mcl
  75. 75. Materials Characterization Lab www.mri.psu.edu/mcl
  76. 76. Materials Characterization Lab www.mri.psu.edu/mcl
  77. 77. Materials Characterization Lab www.mri.psu.edu/mcl
  78. 78. Materials Characterization Lab www.mri.psu.edu/mcl
  79. 79. Materials Characterization Lab www.mri.psu.edu/mcl
  80. 80. Materials Characterization Lab www.mri.psu.edu/mcl
  81. 81. Materials Characterization Lab www.mri.psu.edu/mcl www.mri.psu.edu/mcl Mark Angelone 310 Hosler Bldg 883-9350 msa3@psu.edu

×