Micro Electro Mechanical Systems Neww 222

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Micro Electro Mechanical Systems Neww 222

  1. 1. MICRO-ELECTRO-MECHANICAL SYSTEMS<br />Shashank Uttarwar Atul Jethmalani<br />S.E Electronics T.E Mechanical<br />
  2. 2. Aim of the presentation<br />Introduction to MEM’S<br />Introduction to MEM’S Technology<br />Study its advantages, disadvantages and applications<br />
  3. 3. What MEM’S Means ?<br />Micro- Small size, micro fabricated structures.<br />Electro- Electrical control signal (in/op)<br />Mechanical- Mechanical functionality (op/in)<br />Systems- Structures and devices.<br />
  4. 4. MEM’S<br />MEM’S is integration of mechanical and electronic elements.<br />Fabrication of <br />Electronic components.<br />Mechanical components.<br />
  5. 5. MEM’S Technology<br />It is based on tools and methodologies that are used to form small devices.<br />It comprises of three<br /> basic tools.<br />
  6. 6. Building Blocks <br />Ability to deposit thin film on substrate.<br />Apply patterned mask on top of film.<br />Etch film selective to mask.<br />
  7. 7. EXAMPLE OF MEM’S<br />
  8. 8. Advantages And Disadvantages<br />
  9. 9. Applications<br />Biotechnology -<br /> PCR, STM are some examples.<br />Communication -<br /> Improvising the electronic components.<br />Accelerometers - <br /> Low cost accelerometers can be <br /> manufactured.<br />
  10. 10. Conclusion<br />MEM’S promises to revolutionize<br /> each and every product. <br />Few fields will benefit greatly from MEM’s.<br />So MEM’S is future of modern era.<br />
  11. 11. References<br />IEEE Explore:<br />http://ieee.org/Xplore/DynWel.jsp<br />PDF files:<br />http://www.scribd.com/mems<br />Introduction to micro engineering:<br />http://www.dbanks.demon.co.uk/ueng<br />Mems clearing house:<br />http://www.memsnet.org/<br />
  12. 12. THANK YOU<br />

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