Feldman Engineering                                                    2.5D? 3D? What?                          Overview o...
Outline                                   Silicon Valley Test Workshop 2011}    Why 2.5D & 3D ICs?}    Building stacks  ...
Silicon Valley Test Workshop 2011   Disclaimer – This is the “newfrontier” and things will change…            3
Package Proliferation                                                                 Silicon Valley Test Workshop 2011“Ba...
Very low power & high density (small volume)                                             Silicon Valley Test Workshop 2011...
Silicon Valley Test Workshop 2011   15x performance    90% less space70% less power per bit*                              ...
Outline                                       Silicon Valley Test Workshop 2011}    Why 2.5D & 3D ICs?}    Building stac...
“Stacking 1.0”                                                     Silicon Valley Test Workshop 2011             Toshiba’s...
TSV Processing                          3D TSV via integration MAIN scenarios                                             ...
3D integration process options using TSV TSV process flow                                                                ...
Silicon Valley Test Workshop 2011“Wafer Probing on Fine-Pitch Micro-Bumps for 2.5D- and 3D-SICs”, Erik Jan Marinissen (IME...
Hybrid Memory Cube - Micron                                                Silicon Valley Test Workshop 2011Justin Rattner...
Process Flow & Test Coverage                                             TODAY                                            ...
Known Good Die - Flow & Test Coverage                                                        TODAY                        ...
Stacked Die – KGD (singulated)                                                                                       Silic...
Stacked Die – NKBD (wafers)   Wafers or reconstituted wafers of Not Known Bad Die:   •  Thinned                           ...
Stacked Die – Sub Stacks (wafers)                                                  Silicon Valley Test Workshop 2011      ...
Silicon Valley Test Workshop 2011“3D TSV Program Overview – Presented to GSA Oct 20, 2011” Sitaram Arkalgud, SEMATECH     ...
Scan Testing}    Provide access and control to cores at all test steps                                                   ...
Outline                                       Silicon Valley Test Workshop 2011}    Why 2.5D & 3D ICs?}    Building stac...
ISSCC 2011 PAP    Mobile DRAM predecessor to Wide I/O                                                                     ...
Electroplated Micro-Bump Bonding                                        Silicon Valley Test Workshop 2011•  Cylindrical bu...
FormFactor: NanoPierce™ Contact Solution     FormFactor NanoPierce Contact                                                ...
Touchdown Technologies: Metal MEMS Probes                                                                             Sili...
Cascade Microtech: Lithographically Printed100 µm pitch                                                      35 µm pitch  ...
Outline                                       Silicon Valley Test Workshop 2011}    Why 2.5D & 3D ICs?}    Building stac...
Silicon Valley Test Workshop 2011                                                                                         ...
Organizations & Programs                                                                        Silicon Valley Test Worksh...
Recent Conferences                                                                    Silicon Valley Test Workshop 2011} ...
Outline                                       Silicon Valley Test Workshop 2011}    Why 2.5D & 3D ICs?}    Building stac...
TBD - To Be Determined                                     Silicon Valley Test Workshop 2011}  Yield}  Preferred Via Pro...
Future                                                         Silicon Valley Test Workshop 2011                       } ...
Thank You!                             Silicon Valley Test Workshop 2011        Ira Feldmanira@feldmanengineering.com     ...
Other References & Resources                                                                   Silicon Valley Test Worksho...
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Silicon Valley Test Workshop - 2.5D-3D What - Ira Feldman 111111

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2.5D? 3D? What? Overview of 3D Integrated Circuit Packaging and Test Challenges presented at Silicon Valley Test Workshop (November 11, 2011) by Ira Feldman (www.hightechbizdev.com)

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Silicon Valley Test Workshop - 2.5D-3D What - Ira Feldman 111111

  1. 1. Feldman Engineering 2.5D? 3D? What? Overview of 3D Integrated Circuit Packaging and Test Challenges Ira Feldman November 11, 2011© 2011 Feldman Engineering Corp. www.feldmanengineering.com Silicon Valley Test Workshop 2011
  2. 2. Outline Silicon Valley Test Workshop 2011}  Why 2.5D & 3D ICs?}  Building stacks }  TSV Processes }  2.5D & 3D stacks }  Process & Test Flows}  Wafer Probe Solutions}  Key Organizations & Activities}  Future? 2
  3. 3. Silicon Valley Test Workshop 2011 Disclaimer – This is the “newfrontier” and things will change… 3
  4. 4. Package Proliferation Silicon Valley Test Workshop 2011“Backend to the Front Line” William Chen, ASE Group, SWTW 2011 4
  5. 5. Very low power & high density (small volume) Silicon Valley Test Workshop 2011 5Flickr - blakespot
  6. 6. Silicon Valley Test Workshop 2011 15x performance 90% less space70% less power per bit* 6* Micron – Hybrid Memory Cube
  7. 7. Outline Silicon Valley Test Workshop 2011}  Why 2.5D & 3D ICs?}  Building stacks }  TSV Processes }  2.5D & 3D stacks }  Process & Test Flows}  Wafer Probe Solutions}  Key Organizations & Activities}  Future? 7
  8. 8. “Stacking 1.0” Silicon Valley Test Workshop 2011 Toshiba’s 64 GB Embedded NAND Flash Module December 2009 8
  9. 9. TSV Processing 3D TSV via integration MAIN scenarios Silicon Valley Test Workshop 2011 Step #1 Step #2 Step #3 Step #4 Step #5 Step #6 BEOL 450°C Thinning + De-Bonding Via TSV Etch TSV Fill FEOL 1000°C Backside prep First Vias aremade before CMOS Handling carrier Thinning + Via FEOL 1000°C TSV Etch TSV Fill BEOL 450°C Backside prep De-Bonding Middle  Vias aremade between CMOS and Handling carrier BEOL TSV Fill + Via BEOL 450°C Thinning De-Bonding FEOL 1000°C TSV Etch Backside prep Last  Vias are made after BEOL Handling carrier Handling carrier Handling carrier TSV Etch TSV Fill + FEOL 1000°C Bonding ThinningVia After + Backside prepBonding BEOL 450°C Vias are made after Bonding(C2W or W2W) Courtesy of Yole Developpement 9© 2009 • 21 Copyrights © Yole Développement SARL. All rights reserved.
  10. 10. 3D integration process options using TSV TSV process flow Silicon Valley Test Workshop 2011 Siウェハ FEOL BEOL Assembly / Packaging (transistors) (metal layers) TSV process (1) Via-first (2) Via-middle (3) Via-last TSV interconnect methods KGD: known good die (1) C2C: chip-to-chip (2) C2W: chip-to-wafer (3) W2W: wafer-to-wafer Pros Flexible Flexible High throughput Use of KGD Use of KGD Cons Handling, Bonding Handling, Bonding Same chip size, Yield “Panel Discussion: Advanced Packaging and 3D Technologies”, Kenichi Osada, Hitachi, 10 16th Asia and South Pacific Design Automation Conference (ASP-DAC) 2011
  11. 11. Silicon Valley Test Workshop 2011“Wafer Probing on Fine-Pitch Micro-Bumps for 2.5D- and 3D-SICs”, Erik Jan Marinissen (IMEC), Peter Hanaway (Cascade Microtech), et. al. 11
  12. 12. Hybrid Memory Cube - Micron Silicon Valley Test Workshop 2011Justin Rattner (Intel CTO) Keynote @ IDF 2011 12
  13. 13. Process Flow & Test Coverage TODAY Silicon Valley Test Workshop 2011Wafer Test Final Test Board Test System TestParametric Thin Die Place Singulate Packaged Board/ Fabricate (on Part Solder / Module Integrate System wafer) Bond / Flip Chip Attach Seal Fab Process Fab & Post Process PCA Process Integration Process Functionality Functionality Functionality Functionality Partial to full speed At full speed 13
  14. 14. Known Good Die - Flow & Test Coverage TODAY Silicon Valley Test Workshop 2011 Wafer Test* Board Test System Test Parametric Burn-In Die Place Thin Board/ Fabricate (on KGD Solder / Module Integrate System wafer) Singulate Attach Additional QA Fab Process PCA Process Integration Process Functionality Functionality Functionality At full speed* Predominant path to KGD is via wafer based testing. There are some solutions for die based socket testing such as Aehr Test’s DiePak. 14
  15. 15. Stacked Die – KGD (singulated) Silicon Valley Test Workshop 2011 Stack Test ??? Board Test System Test KGD 1… Place Die Board/ Stack Solder / Integrate System Stack Module Attach KGD n Stack Process PCA Process Integration Process Functionality ??? Functionality Functionality At full speed??? 15
  16. 16. Stacked Die – NKBD (wafers) Wafers or reconstituted wafers of Not Known Bad Die: •  Thinned Silicon Valley Test Workshop 2011 •  Partial to full speed tested Wafer Test ??? Stack Test ??? Board Test System TestWafer 1… Place Stack Wafer Singulate Die Board/ Integrate System Solder / Module Stack Stack AttachWafer n Stack Process Dice Process PCA Process Integration Process Functionality Functionality ??? Functionality ??? Functionality At full speed??? At full speed??? 16
  17. 17. Stacked Die – Sub Stacks (wafers) Silicon Valley Test Workshop 2011 Memory Stack Test Wafer @ Memory Vendor … 1 Stack Memory Stack Full Stack Test @ Integrator ??? Wafer n Stack Memory Stack CPU CPU Wafer 17
  18. 18. Silicon Valley Test Workshop 2011“3D TSV Program Overview – Presented to GSA Oct 20, 2011” Sitaram Arkalgud, SEMATECH 18
  19. 19. Scan Testing}  Provide access and control to cores at all test steps Silicon Valley Test Workshop 2011 }  If proper infrastructure (P1838) & connectivity is present}  Does not replace full access to all “pads” for KGD. 19
  20. 20. Outline Silicon Valley Test Workshop 2011}  Why 2.5D & 3D ICs?}  Building stacks }  TSV Processes }  2.5D & 3D stacks }  Process & Test Flows}  Wafer Probe Solutions}  Key Organizations & Activities}  Future? 20
  21. 21. ISSCC 2011 PAP Mobile DRAM predecessor to Wide I/O Silicon Valley Test Workshop 2011 28.5.1: Chip architecture of 1Gb > 1000 micro-bumps image ofFigureAl pads (muxed) to Wide-I/O DRAM and SEMmicrobumps. test with existing 50 µm pitch array Figure 28.5.2: Block and timing diagr probe technology Figure 28.5.7: Photograph of “A 1.2V 12.8GB/s 2Gb Mobile Wide-I/O DRAM with 4×128 I/Os Using TSV- Based Stacking” Jung-Sik Kim, et.al., Samsung Electronics, ISSCC 2011 fabricated chip with microbumps and vertical section 21 2-stacked Wide-I/O DRAMs.
  22. 22. Electroplated Micro-Bump Bonding Silicon Valley Test Workshop 2011•  Cylindrical bumps Side1: Cu (5 µm ) Side2: CuSn (5 µm + 3.5 µm)•  Size (today) Diameter : 25 µm Pitch : 40 µm Scaling down… Courtesy of Cascade Microtech & IMEC 22
  23. 23. FormFactor: NanoPierce™ Contact Solution FormFactor NanoPierce Contact Silicon Valley Test Workshop 2011 Contact Surface for NanoPierce™ Contact40umx50um Array FormFactor Proprietary NanoPierce™ Contacts are Highly Scalable Metal “NanoFiber” contact element Thousands Easily Fabricated at Very Dense Pitch 15um 11 23“Challenges and Solutions for Testing of TSV and MicroBump Devices by Direct Connection”, Ben Eldridge, 3D Test Workshop 2011 Metal NanoFiber Contacts With Many Contact Points in 15 Micron Square
  24. 24. Touchdown Technologies: Metal MEMS Probes Silicon Valley Test Workshop 2011“A Low-Force MEMS Probe Solution For Fine-Pitch 3D-SIC Wafer Test”, Matthew W. Losey, Probe beam: ~10 µm W x 80 µm L 24et. al., 3D Test Workshop 2011 100 µm
  25. 25. Cascade Microtech: Lithographically Printed100 µm pitch 35 µm pitch ~1 gF/tip Silicon Valley Test Workshop 2011~10 gF/tip Scale by K XYZ/K Force/K2Fully-routed 6 x 50 array at 40 x 50 µm pitch New space transformer technology“Probing Strategies for Through-Silicon Stacking”, Eric Strid, et. al, 3D Test Workshop 2011 25
  26. 26. Outline Silicon Valley Test Workshop 2011}  Why 2.5D & 3D ICs?}  Building stacks }  TSV Processes }  2.5D & 3D stacks }  Process & Test Flows}  Wafer Probe Solutions}  Key Organizations & Activities}  Future? 26
  27. 27. Silicon Valley Test Workshop 2011 27“3D IC Technology’s Promise for Communications and Storage ICs”, Brian D. Gerson, PMC-Sierra, GSA 4/28/11
  28. 28. Organizations & Programs Silicon Valley Test Workshop 2011}  IEEE P1838 - Standard for Test Access Architecture for Three- Dimensional Stacked Integrated Circuits standards.ieee.org/develop/project/1838.html}  Semi wiki.sematech.org/3D-Standards}  Sematech – 3D Program www.sematech.org/research/3D }  Unit Process, Module Development, Enablement Center}  Global Semiconductor Alliance – 3D-IC Working Group www.gsaglobal.org/3dic}  JEDEC – Wide I/O www.jedec.org}  IMEC www2.imec.be}  Industrial Technology Research Institute (ITRI) www.itri.org.tw}  A*Star Institute of Microelectronics www.ime.a-star.edu.sg 28
  29. 29. Recent Conferences Silicon Valley Test Workshop 2011}  GSA Memory Conference (Mar ‘11) www.gsaglobal.org/events/2011/0331/program.aspx}  IEEE Semiconductor Wafer Test Workshop (June ‘11 & ‘12) www.swtest.org}  ATE Vision 2020 (w/Semicon West – Jul ‘11) www.atevision.com}  Semicon Taiwan – SiP Global Summit 2011(Sep ‘11) }  3D IC Test Forum semicontaiwan.org/en/node/1566 }  3D IC Technology Forum semicontaiwan.org/en/node/1571}  IEEE International Workshop on Testing Three-Dimensional Stacked Integrated Circuits (w/ITC – Sep ’11 / Nov ‘12) 3dtest.tttc-events.org}  MEPTEC 2.5D, 3D and Beyond – Bringing 3D Integration to the Packaging Mainstream (Nov 9, 11) www.meptec.org}  MEPTEC-Semi KGD in an Era of Multi-Die Packaging and 3D Integration (Nov 10, 11) www.meptec.org 29
  30. 30. Outline Silicon Valley Test Workshop 2011}  Why 2.5D & 3D ICs?}  Building stacks }  TSV Processes }  2.5D & 3D stacks }  Process & Test Flows}  Wafer Probe Solutions}  Key Organizations & Activities}  Future? 30
  31. 31. TBD - To Be Determined Silicon Valley Test Workshop 2011}  Yield}  Preferred Via Process}  Singulate dies before or after stacking}  Wafer probe and handling of die stacks on wafer or singulated stacks}  Business models – who is responsible for what 31
  32. 32. Future Silicon Valley Test Workshop 2011 }  Hard work – getting it to work! }  Increased test complexity earlier in process }  Shrinks – especially micro- bumps and pitch Profits or Costs? 32
  33. 33. Thank You! Silicon Valley Test Workshop 2011 Ira Feldmanira@feldmanengineering.com Visit my blog www.hightechbizdev.com for additional resources. 33
  34. 34. Other References & Resources Silicon Valley Test Workshop 2011}  Hybrid Memory Cube Consortium www.hybridmemorycube.org}  3D-IC Alliance www.3d-ic.org (event & blogs/paper listing)}  Discussion groups / 3D news: }  www.3dincites.com }  www.3d-ics.com }  3D-IC group on www.linkedin.com 34

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