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Vlsi design notes(1st unit) according to vtu syllabus.(BE)

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vtu notes for vlsi(BE). …

vtu notes for vlsi(BE).
electronics and communication,instrumentation,telecommunication engineering

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  • 1. 1 VLSI Design UNIT -1 Introduction to MOS technology  Moore’s law  Speed- power performance  nMos fabrication  CMOS fabrication  n-well process  p-well process  BiCMOS  Comparison of bipolar and CMOS
  • 2. 2 1 INTRODUCTION  Integrated circuit (IC):- an IC is a combination of interconnection circuit elements on a continuous substrate.  Substrate:- substrate is a supporting material upon which an IC is fabricated.  Wafer:- a wafer is a basic physical unit used in processing. It usually contains large number of identical IC’s.  Transistor was invented in 1947.  The very first IC emerged at the beginning of 1960. Chip Wafer Generation of IC’s Year generation number of transistors typical products 1961 SSI 10-100 logic gates, flip-flop 1966 MSI 100-1000 counters, mux, adders 1971 LSI 1000-20,000 8bit μps, RAM, ROM 1980 VLSI 20,000-106(1 million) 16-32 bit μps, DRAM 1990 ULSI 1-10 million DSPs, smart sensor 2000 GSI >10million ASIC 2 Moore’s first law: Predicted Actual 1961 1964 1967 1970 1973 1994 1997 It states that the number of transistors per chip doubles every 18months
  • 3. 3 3 Speed/power performance of available technologies:  In order to improve the through put rate it will be necessary to improve the technology both in term of scaling and processing, and through the incorporation of other enhancements such as BICMOS to CMOS.  Above 100million instruction/sec, one must look to other technology like gallium Arsenide (GaAs) based technology.  GaAs in combination with silicon will provide designer some exciting possibilities. 4 Basic MOS transistor symbol E-MOSFET DE-MOSFET  DE-MOSFET conducts when Vgs=0, Vgs=+ve and Vgs=-ve as a channel exist between source(S) and drain (D).  E-MOSFET does not conduct when Vgs=0.
  • 4. 4 For E-MOSFET For DE-MOSFET There are 2 types of nMOS 1. Enhancement mode transistor (E-MOSFET) 2. Depletion mode transistor(DE-MOSFET) In depletion mode channel is established between S and D during manufacturing process itself by implanting suitable impurities. Therefore DE-MOSFET conducts when Vgs=0. In E-MOSFET there is no channel between S and D. therefore device is not conducting when Vgs=0. a. nMOS Enhancement mode transistor
  • 5. 5 b. nMOS Depletion mode transistor c. pMOS Enhancement mode transistor d. pMOS Depletion mode transistor Enhancement mode transistor action:  In nMOS enhancement mode transistor, there exist no physical layer between source(S) and drain (D).  A minimum voltage level of threshold voltage (Vt) must be provided between source(S) and gate (G) to establish channel between S and D.  Enhancement mode device operates under 3 set of conditions.
  • 6. 6 1. When Vgs > Vt and drain to source voltage Vds=0. There is a channel between S and D, but no current is flowing in channel. Transistor is in cut-off region. 2. When Vgs>Vt and Vds<Vgs-Vt, current flows from D to S. it operates in non-saturation region. As Vds increase current flow increases the current increases the voltage drop increases in the channel. As a results between gate and channel varies with distance along the channel and is maximum at source end (as Vds is +ve) 3. When Vds>Vgs-Vt, the transistor operates ib saturates region Here depletion region increases as voltage drops in maximum at drain end and cause pinch off at channel. Now constant current flows from D to S as channel exhibits high resistance. For enhancement mode device Vt=0.2Vdd If VDD=5v then Vt=1v. Depletion mode transistor action: Here channel is established between S and D during the construction of transistor so when Vgs=0, the current flows between S and D. 1. When Vgs=0 and Vds=0, there exists a channel between S and D but not current flows from D to S.
  • 7. 7 2. When Vgs>=0 and Vds<Vgs-Vt, current will flow from D toS.as the current flows, there will voltage drop. 3. When Vgs>=0 and Vds>Vgs-Vt, the voltage drop in channel near drain is maximum and equal to pinch off voltage. The transistor here operates in saturation region, constant flow from D to S. Vtd is typically <-0.8Vdd. 5 nMOS fabrication  Processing is carried out on a thin wafer cut from a single crustal of silicon of high purity into which the required p-impurities are introducer. The wafer is typically 75-150mm in diameter and 0.4mm thick. The substrate is doped with boron to give impurity concentration of 1015 /cm3 to 1016 /cm3 , giving the resistivity of 25Ωcm to 2Ωcm.
  • 8. 8  A silicon dioxide (Sio2) layer of typically 1µm thick is grown all over the surface of the wafer, this protective layer act as barrier to dopants during processing.  Photo resist is deposited on the wafer to get even distribution required thickness.  The photo resist layer is exposed to UV light by means of required mask. The exposed areas UV are polymerized (hardened) and unexposed areas remain unaffected.  These areas (hardened areas) are etched away along underlying Sio2 so that the wafer surface is exposed in the window defined by mask.
  • 9. 9  The photo resist is removed and thin layer of Sio2 is grown over the entire surface. Then polysilicon is deposition on top of this to form the gate structure. The polysilicon layer consists of heavily doped polysilicon deposition by chemical vapour deposition (CVD).  Thin oxide is removed to expose areas into which n-type of impurities are to be diffused to form S and D. diffusion is achieved by heating the wafer to high temperature and passing a gas containing the desire n- impurity over the surface. Polysilicon and thin oxide act as masks during diffusion called as “self aligning”.  Sio2 is grown over all and is masked with photoresist and etched to exposed selected areas of gate, drain and source areas where connections are to be made.
  • 10. 10 .  Metal of 1µm thickness is deposited overall the chip’s surface. this metal layer is then masked and etched to form the required interconnected pattern 6 CMOS fabrication: CMOS can be fabricated by P-well, n-well and twin tub process. 6.1 P-well process
  • 11. 11  On n-type substrate, p-well is diffused by suitable masking. The depth of p-well is 4-5 µm.  p-well doping concentration will affect the threshold voltage and breakdown voltage of n-transistor, hence p-well diffusion must be out with care.  To achieve low threshold voltage, we need either deep-well diffusion or high well resistivity. But limitation is that chip area becomes large due to lateral diffusion.  Within the parent n-substrate, the p-well act as a substrate for the n device. As there are two substrate, these devices are to be electrically isolated.  Due to two substrate, it require two substrate connections VDD and Vss that are connection by means of n+ and p+ diffusion. In all other respects-masking, patterning and diffusion process are similar to that of nMOS fabrication. Processing steps are: Mask 1: p-well diffusion in n-substrate. Mask 2: defines thin oxide region, namely those areas where the thick oxide is stripped and thin oxide is grown to accommodate p- and n- transistor and wires. Mask 3: polysilicon layer is deposited on thin oxide and then patterned. Mask 4: P+ mask is used to define the area where p-diffusion is to take place.
  • 12. 12 Mask 5: p+ mask is used for n-diffusion. Mask 6: contact cut are defined. Mask 7: metal layer pattern is defined. Mask 8: passivation (over glass) layer is applied. Fig:-CMOS p-well inverter showing VDD and VSS substrate connection. 6.2 n-well process: n-well is superior to p-well because of the low substrate biase effects on transistor threshold and lower capacitance associated with source and drain region Fig: cross sectional view of n-well CMOS inverter.  N-well is diffusion into the p-substrate.  Within the parental p-substrate, n-well act as a substrate to diffuse p- device.  Two substrates two separate substrate connection i.e VDD and Vss for n+ and p+ respectively.
  • 13. 13 Main steps in n-well process: Fig: main steps in typical n-well process. Note: refer figure 1.13, 1.14, 1.15 and1.16 from textbook. 7 BiCMOS technology  The load driving capabilities of MOS transistor is less, due to the limited current sourcing and current sinking abilities of both p and n transistors.  Bipolar transistor provide higher gain, better noise and high frequency characteristics than MOS transistors.  Bipolar can be combined with the CMOS technology to construct higher speed devices i.e (BiCMOS devices). Formation of n-well region Define nMOS and pMOS active areas Field and gate oxidations (thin oxide) Form and pattern polysilicon P+ diffusion Deposit and pattern metallization n+ diffusion Contact cuts Over glass with cuts and bonding pads
  • 14. 14  Application of BiCMOS in subsystems like ALU,ROM, barrel shifter etc is not always a way of improving speed because most gate in such structures do not have to drive large capacitive loads, so here BiCMOS arrangements give no speed advantages.  BiCMOS devices speed up VLSI circuits Example: Pentium, Pentium pro, super SPARC, RF oscillator. 7.1 Comparison between bipolar and CMOS technology CMOS technology bipolar technology Low static power dissipation high static power dissipation High input impedance low input impedance High packing density low packing density Bidirectional capability unidirectional capability Low output driver current high output driver current Low trans conductance high trans conductance High delay sensitivity to load low delay sensitivity to load Scalable threshold voltage

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