Slight changes in power, as a plasma input parameter, can affect the quality of a substrate. Monitoring the voltage, current, phase and harmonic information can result in better process stability. The Octiv range provides a set of diagnostic tools that give highly accurate insights to RF parameters.

1. OCTIV | RANGE
“The Octiv Range of inline RF power
delivery and plasma diagnostic systems
provide versatility along with micro-second
resolution”

2. Real
Power
Forward
Power
Reflected
Power
OCTIV | RANGE
Impedance Voltage Current
Phase
Angle
Harmonics
Simultaneous
Measurements
Ion Flux
Waveform
Reconstruction
Mono • • • •
VI • • • • • • • •
Poly • • • • • • • • •
Suite • • • • • • • • • • •

3. OCTIV | RANGE
Hardware
Electronics and Software
Standalone intelligent RF power delivery and plasma
diagnostic system.
Optional benchtop RF power meter display unit.
Operating Parameters
Power Range: 0 – 12 kW
Standard Calibration Frequencies: 2MHz | 13.56MHz |
27.12MHz | 40.68MHz | 60MHz
Hardware Specifications
Connector Types: N-Type, 7/16 or custom
Connectivity
USB
Serial RS232

4. OCTIV | MONO
The Octiv Mono is an in-line RF power
meter and RF power sensor
measurement system. It measures a
single fundamental frequency and has
an accuracy rating of 1% and a time
resolution of 1μs.
Plasma Diagnostics Measured
Real Power
Forward Power
Reflected Power
Impedance
Measurement Functionality
Time Averaged
Time Resolved
Time Trend
Smith Chart Measurements

5. OCTIV | MONO
Installation Setup
Computer
Generator Octiv Mono
Match Plasma Reactor

6. OCTIV | VI
The Octiv VI probe system is an in-line
RF measurement system. It can
measure a single fundamental
frequency and its harmonics at 1%
accuracy and 1μs time resolution.
Plasma Diagnostics Measured
Voltage
Current
Phase
Harmonics
Impedance
Measurement Functionality
Time Averaged
Time Resolved
Time Trend
Smith Chart Measurements

7. OCTIV | VI
Installation Setup
Computer
Generator Match Octiv VI Probe
Plasma Reactor

8. OCTIV | POLY
The Octiv Poly is a multi-frequency in-line
RF measurement system. It can
measure multiple fundamental
frequencies and harmonics
simultaneously and has an accuracy of
1% with 1μs time resolution.
Plasma Diagnostics Measured
Voltage
Current
Phase
Harmonics
Impedance
Measurement Functionality
Time Averaged
Time Resolved
Time Trend
Smith Chart Measurements

9. OCTIV | SUITE
The Octiv Suite is an in-line multi-frequency
RF system with plasma
diagnostic and complex waveform
analysis with an accuracy of 1% and
1μs time resolution.
Plasma Diagnostics Measured
Voltage
Current
Phase
Harmonics
Impedance
Ion Flux
Measurement Functionality
Time Averaged • Time Resolved
Time Trend • Smith Chart Measurements
Waveform Reconstruction

10. OCTIV | RANGE
Applications
As effective tools for plasma measurement, Octiv systems excel at
extracting power delivery information and plasma parameters for better
process stability.
The Octiv Systems can be used in the following applications:
Atmospheric
Dusty Plasma
Plasma Etching
PECVD
Space Plasma
Plasma Sputtering

11. OCTIV | RANGE
For further infromation on the Octiv Range visit
www.impedans.com/octiv_range
As effective tools for plasma measurement, Octiv systems excel at
extracting power delivery information for better process stability.
To request a quote visit
www.impedans.com/contact

12. Chase House
City Junction Business Park
Northern Cross
Malahide Road
Dublin 17
Ireland
Ph: +353 1 842 8826
Fax: +353 1 891 6519
Web: www.impedans.com
Email: info@impedans.com