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  • 1.
    • Jörg Westermann, Georg Schäfer, Dietmar Funnemann
    • Omicron NanoTechnology GmbH
    • Fred Henn
    • Omicron NanoTechnology USA
    Advances in Chemical Imaging: NanoESCA
  • 2.
      • NanoESCA
      • Motivation and Theory
      • Experimental Setup
      • Initial Characterization: Synchrotron and Laboratory Measurements
      • - Spectroscopy (UPS/XPS)
      • - Imaging (UPS/XPS)
      • Conclusions/Further Work
  • 3. NanoESCA – Working Partners Part of the work was funded by the BMBF, Germany AG Prof. Schönhense Dr. Ziethen Dipl. Phys. Bernhard AG Prof. Hüfner Dr. Reinert Dr. Schmidt Dr. Merkel Dipl. Phys. Escher Dr. Berghaus Dr. Funnemann Dipl. Phys. Krömker
  • 4. NanoESCA – System Concept Lens Analyzer Detector Excitation source PEEM High lateral resolution High collection efficiency IDEA (Imaging Double Energy Analyzer) High energy resolution High transmission Low aberrations MCP/Screen, Slow Scan CCD High sensitivity Ease-of-use Synchrotron! (X-ray monochromator) High brightness High photon energy
  • 5. NanoESCA – Entrance Lens
    • Based on FOCUS PEEM lens
    • Advantages:
      • lateral resolution < 20 nm
      • in-situ selectable Contrast
      • Aperture
      • integrated deflector/stigmator
      • reliable mechanics
      • integrated sample stage
    Objective Lens Sample position Lens- elements
  • 6. NanoESCA – IDEA Analyzer
    • Question: Energy filter with smallest aberration+high transmission?
    • At Start & End :
    • position and angle
    • identical!
    • After full 360°
    • Independent of :
      • energy
      • start angle
      • start point
     Theory: Elliptical orbits in central potential (Kepler 1609)
  • 7. NanoESCA – IDEA Analyzer Exit Entrance
    • practically useable
    • compensated aberrations!
    • Side effect:
    • Excellent time resolution!
  • 8. NanoESCA – IDEA Analyzer
  • 9. NanoESCA – IDEA Analyzer 3 modes: 1. PEEM direct SE-Imaging without energy filter 2. Imaging XPS Imaging with energy filter 3. Spectroscopy with channeltron Channeltron
  • 10. NanoESCA – IDEA Analyzer 2 nd EA 1 st EA Image detector for PEEM mode Image detector for XPS mode Projective exit optics PEEM lens Sample position
  • 11. NanoESCA – Entrance Lens and Analyzer Complete mu-metal shielding Sample position (insertion hole) Piezo-driven sample stage Mounting flange (DN 150CF, 8” OD) Analyzer base flange Holes for excitation light
  • 12. NanoESCA - Instrument View XM 1000 Monochromator (or synchrotron) HIS 13 VUV source Fast entry system ISE 10 sputter source
  • 13. NanoESCA - Instrument View Sample stage with piezo motors Imaging detector for PEEM mode Imaging detector for XPS mode