PRINCIPLES OF PLASMA
DISCHARGES AND MATERIALS
PROCESSING
PRINCIPLES OF PLASMA
DISCHARGES AND
MATERIALS
PROCESSING
Second Edition
MICHAEL A. LIEBERMAN
ALLAN J. LICHTENBERG
A JOHN W...
Copyright # 2005 by John Wiley & Sons, Inc. All rights reserved.
Published by John Wiley & Sons, Inc., Hoboken, New Jersey...
CONTENTS
PREFACE xvii
PREFACE TO THE FIRST EDITION xxi
SYMBOLS AND ABBREVIATIONS xxv
PHYSICAL CONSTANTS AND CONVERSION FAC...
2.2 Field Equations, Current, and Voltage / 24
Maxwell’s Equations / 24
2.3 The Conservation Equations / 28
Boltzmann’s Eq...
4 PLASMA DYNAMICS 87
4.1 Basic Motions / 87
Motion in Constant Fields / 87
E Â B Drifts / 90
Energy Conservation / 91
4.2 ...
Time-Dependent Solution / 138
Steady-State Plane-Parallel Solutions / 139
Steady-State Cylindrical Solutions / 142
5.3 Low...
Probes in Time-Varying Fields / 201
Problems / 203
7 CHEMICAL REACTIONS AND EQUILIBRIUM 207
7.1 Introduction / 207
7.2 Ene...
Ion–Neutral Elastic Scattering / 263
Three-Body Processes / 264
8.5 Reaction Rates and Detailed Balancing / 265
Temperatur...
10 PARTICLE AND ENERGY BALANCE IN DISCHARGES 327
10.1 Introduction / 327
10.2 Electropositive Plasma Equilibrium / 330
Bas...
Scaling / 410
Collisional Sheaths / 411
Low and Moderate Voltages / 413
Ohmic Heating in the Sheath / 413
Self-Consistent ...
13 WAVE-HEATED DISCHARGES 491
13.1 Electron Cyclotron Resonance Discharges / 492
Characteristics and Configurations / 492
E...
14.5 Planar Magnetron Discharges / 559
Limitations of Glow Discharge
Sputtering Source / 559
Magnetron Configuration / 560
...
16 DEPOSITION AND IMPLANTATION 619
16.1 Introduction / 619
16.2 Plasma-Enhanced Chemical Vapor Deposition / 621
Amorphous ...
Effective Electrical Conductivity / 687
18.2 Local Kinetics / 689
18.3 Nonlocal Kinetics / 693
18.4 Quasi-Linear Diffusion...
PREFACE
While the state-of-the-art has advanced dramatically in the ten years since
publication of our first edition, the f...
of these discharges for processing. Section 13.2 on helicon discharges has been
expanded to incorporate new understanding ...
and D. Maric´, who provided assistance in updating the field-intensified ionization
coefficient and the breakdown voltages gi...
PREFACE TO THE FIRST EDITION
This book discusses the fundamental principles of partially ionized, chemically
reactive plas...
commonly taught in courses on electromagnetics or fluid dynamics at the junior or
senior undergraduate level is also assume...
Our colleagues C.K. Birdsall and V. Vahedi and the plasma simulation group at
Berkeley have developed user-friendly progra...
SYMBOLS AND ABBREVIATIONS
SYMBOLS
a radius (m); atomic radius; a0, Bohr radius; aj, chemical activity of species j;
av, et...
fc collisional force per unit volume (N/m3
)
F force (N)
g degeneracy; g, statistical weight; energy distribution function...
q electric charge (C)
q heat flow vector (W/m2
)
Q heat (J); electric charge (C)
Q resonant circuit or cavity quality facto...
d Dirac delta function; layer thickness (m); dp, collisionless skin depth (m);
dc, collisional skin depth (m); de, anomalo...
A0
areal density (m22
); variable of integration
jAj absolute magnitude
SUBSCRIPT ABBREVIATIONS
a activation; adsorption
a...
iz ionization
l left-hand circularly polarized
L Langevin (capture)
loss loss
m electron momentum transfer; metal; Hm, Sm,...
a denotes presence of negative ions
0 denotes initial value, uniform value, or central value; zero order quantity
1 first o...
PHYSICAL CONSTANTS AND
CONVERSION FACTORS
Quantity Symbol Value
Boltzmann constant k 1.3807 Â 10223
J/K
Elementary charge ...
Quantity Symbol Value
Standard temperature (258C) T0 298.15 K
Standard pressure
(760 Torr ¼ 1 atm)
p
1.0133 Â 105
Pa
Losch...
PRACTICAL FORMULAE
In the following practical formulae, ne is in units of cm23
, Te is in volts, and B is in
gauss (1 tesl...
CHAPTER 1
INTRODUCTION
1.1 MATERIALS PROCESSING
Chemically reactive plasma discharges are widely used to modify the surfac...
respectively; BF3 discharges can be used to implant dopant (B) atoms into silicon;
CF4=Cl2=O2 discharges are used to selec...
that exposing the masked film (d) to a liquid (or vapor phase) etchant will lead to the
undercut isotropic profile shown in ...
wet etches have been developed having essentially infinite selectivity, highly selec-
tive plasma etch processes are not ea...
The etchant F atoms react with the silicon substrate, yielding the volatile etch product
SiF4:
Si(s) þ 4F(g) À! SiF4(g)
He...
processes. One can also control dust formation in useful ways, for example, to
produce powders of various sizes or to inco...
ionized plasma discharges, which are plasmas having the following features:
(1) they are driven electrically; (2) charged ...
then the atoms decompose into freely moving charged particles (electrons and
positive ions), and the substance enters the ...
the same temperature, which does not exceed a few times room temperature
(0.026 V). The etchant F and product SiF4 densiti...
across a thin sheath region where the plasma and substrate meet is central to all pro-
cessing discharges. We describe thi...
for the bulk electrons lower than Th for the energetic electron tail. Non-Maxwellian
distributions can only be described u...
s
E E
V
F
F
(a)
(b)
FIGURE 1.10. The formation of plasma sheaths: (a) initial ion and electron densities and
potential; (b...
that move in one dimension (along x) under the action of the time-varying fields pro-
duced by all the other sheets, the fix...
described by diffusive ion loss at high pressures and by free-fall ion loss at low
pressures. In the positive space charge...
net positive charge when averaged over an oscillation period; that is, the positive
charge exceeds the negative charge in ...
TABLE 1.1. Range of Parameters for rf Diode and High-Density Discharges
Parameter rf Diode High-Density Source
Pressure p ...
We note that the positive ions continuously bombard the electrode over an rf
cycle. In contrast, electrons are lost to the...
wafer sits. The magnetic field increases the efficiency of power transfer from the
source to the plasma and also enhances pl...
with phase velocity much less than the velocity of light. Efficient coupling of the rf
power to the plasma is achieved by e...
wafer. Sometimes, the source and process chambers are more integral, for example,
the wafer is placed very near to the sou...
field in plasma physics. This also occurs within a given field; for example, k is stan-
dard for Boltzmann’s constant but al...
temperature in kelvins (K). The energy equivalent temperature in joules is kT, where
k % 1:381 Â 10À23
J/K is Boltzmann’s ...
CHAPTER 2
BASIC PLASMA EQUATIONS
AND EQUILIBRIUM
2.1 INTRODUCTION
The plasma medium is complicated in that the charged par...
equations, from fundamental principles, is beyond the scope of the text. We shall
make the equations plausible and, in the...
where the conduction current density Jcond is due to the motion of the free charges,
the polarization current density Jpol...
Integrating (2.2.9) around any closed loop C gives
þ
C
E Á d‘ ¼ À
þ
C
rF Á d‘ ¼ À
þ
C
dF ¼ 0 (2:2:10)
Hence, we obtain Kir...
using the boundary conditions that F ¼ 0 at x ¼ +l=2 and that dF=dx ¼ 0 at x ¼ 0
(by symmetry), we obtain
F ¼
1
2
eni
e0
l...
where v is the particle velocity and B ¼ m0H is the magnetic induction vector. The
charged particles move under the action...
time dt,
f(x, vx, t) dx ax(x, vx, t) dt particles flow into dx dvx across face 1
f(x, vx þ dvx, t) dx ax(x, vx þ dvx, t) dt...
The collision term in integral form will be derived in Appendix B. The preceding
heuristic derivation of the Boltzmann equ...
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Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
Principles of plasma discharges and materials processing , 2nd edition
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