Beelee Chua MEMS Portfolio

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Portfolio of Beelee Chua\'s MEMS Projects

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Beelee Chua MEMS Portfolio

  1. 1. Beelee Chua MEMS Portfolio
  2. 2. Surface Micromachined Circular Resonator Circa 1998 Beelee Chua MEMS Portfiolio
  3. 3. Surface Micromachined Folded Springs Resonator with Enhanced Electrostatic Comb Drives (aka W. Tang Resonator) Circa 1998 Beelee Chua MEMS Portfolio
  4. 4. SCREAM Actuator with coarse and fine displacement adjustment equipped with Tunneling Tip Circa 2000 Beelee Chua MEMS Portfolio
  5. 5. Close up of Tunneling Tip Circa 2000 Beelee Chua MEMS Portfolio
  6. 6. SCREAM Actuator with coarse and fine displacement adjustment (alternate design) Circa 2000 Beelee Chua MEMS Portfolio
  7. 7. 40um SOI Folded Spring Electrostatic Comb Drive Resonator Circa 1999 Beelee Chua MEMS Portfolio
  8. 8. Backside Released SOI Capacitive Sensing Accelerometer Circa 2000 Beelee Chua MEMS Portfolio
  9. 9. Backside Released SOI Capacitive Sensing Gyroscope Circa 2000 Beelee Chua MEMS Portfolio
  10. 10. Packaged Backside Released SOI Capacitive Sensing Accelerometer Circa 2001 Beelee Chua MEMS Portfolio
  11. 11. Micro corona ionizer in operation Circa 2002 Beelee Chua MEMS Portfolio
  12. 12. Micro corona ionizer and separator electrodes Circa 2003 Beelee Chua MEMS Porfolio Cathode Pin Anode Planes Separator Electrodes 1 mm
  13. 13. Micro corona ionizer and separator electrodes Circa 2003 Beelee Chua MEMS Portfolio Corona Ionizer 1 cm Separator Electrodes Glass Substrate Bond Pads
  14. 14. System Prototype of Micro Airborne Particulate Analyzer using Micro Corona Ionizer and Separator Electrodes Circa 2006 Beelee Chua MEMS Portfolio

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