The 2012 transition from dfm to pdfd leor nevo-intel

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  • 1. The 2012 transition from DFM to PDFDDESIGN FOR (PHYSICAL) DEBUG FOR SILICON MICROSURGERYAND PROBING OF FLIP-CHIP PACKAGED INTEGRATED CIRCUITS Leor Nevo – Intel PE Courtesy of Intel mates: John Giacobbe Rick Livengood, Donna Medeiros Rev 07 May 2,2, 2012 May 2012
  • 2. Outline• ACRONYMS (alphabetically)• From DFM to PDFD - Transition motivation• PDFD capabilities overview• PDFD scope & flow• Flip-chip mechanical preparation and navigation• Bonus combinational and sequential cells• PDFD in Clock Elements• Insertion, placement and automation• Summary Conclusions PDFD - Leor Nevo, Intel May 2, 2012
  • 3. ACRONYMS (alphabetically)Al Aluminums HVM High Volume ManufacturingCl Cupper HW HardWareCAD Computer Aided Design IC Integrated CircuitsCNC Computer Numerical Control IR Infra Red.DFD Design For Debug PDFD Physical Design For DebugDFM Design for Manufacture PE Principal EngineerDFT Design For Test TPT Through Put TimeDRC Design Rule Checker RC Resistance & Capacitance ECO’s Engineering Change Order SW SoftWareEDA Electronic Design Automation VLSI Very Large Scale IntegratedFAB FABrication PlantFIB Focused Iron BeamLVP Laser Voltage Probe May 2, 2012
  • 4. Transition Motivation• DFM – we all got used to talking about DFM.. For years.. (taking care for high Yield, reduced variation by optimized density.)• While DFM mostly moved to become a hard DRC (~> 1000) – HVM Fabs can’t count on designers “good will”.. – They have moved most of the DFM guidelines into strict rules !!• We assume that the VLSI design timeline is quite predictable – But the silicon debug for sub-micron becomes a big challenge.. – The Micro-surgery HW has difficulty in following Moore’s law – The relevant HW can not keep scaling every 2 years !• SO – PDFD provides hooks in the design to enable analysis of the deep sub-micron IC beyond DFT & system debug. PDFD - Leor Nevo, Intel May 2, 2012
  • 5. Overview• What is PDFD? Design hooks placed in layout to enable optimized access to nodes during silicon debug: FIB probe access, backside circuit edit, probing. PDFD Feature types include:  Bonus/happy devices,  probe points,  debug tool navigation features,  FIB cut / Connect cells.• PDFD provides critical bug research during the debug phase of a VLSI product for faster time-to-market.  Features designed to add capability or to improve productivity.  Bugs can be root caused and validated in a few days compared to weeks or months required for a new mask set.  Reduces the number of steppings/masks required to certify for HVM. May 2, 2012
  • 6. PDFD Scope• PDFD provides hooks into the design to enhance and enable analysis of Integrated Circuits in a more reasonable time frame.• This paper will cover design automation/cad solutions and real life technical proposal to enable:  Smooth & accurate Backside Navigation (flip-chip)  Pre-placed Enhanced Probe-ability (cut/connect)  Enhanced Silicon Microsurgery (able to Trim, Cut, connect by- pass using external low-res wires).  Fibable and Spare Logic Gate for FIB or design ECO’s to be tested on silicon before reproducing on next design step/retrofit. May 2, 2012
  • 7. Global thinning of Silicon Substrate:Caps Chip A Chip B Caps Flip-Chip Substrate Lands May 2, 2012
  • 8. Global thinning of Silicon Substrate Reminder : If we will go too deep – we will start impact the devices functionality too …Caps Chip A Chip B Caps Flip-Chip Substrate LandsChip B first thinned down from 720m to < 200m using Mechanical Polishing or CNC Mill May 2, 2012
  • 9. Physical Debug Overview: example only Laser Chemical Etcher Trench Etch StepScanning Fine Mirrors Argon Ion Trench Etch Step Laser Cl2 Cl2 SiCl4 SiCl4 Silicon Substrate Silicon Substrate Trenching Process Trench (Top View) 5/29/2012 May 2, 2012
  • 10. Design For Debug (Flip-Chip Navigation Fiducial) The big Fiducials provide navigation points for FIB IR (for circuit edits) The more spreading- the more accurate hit point. Dont forget – we are drilling from the Die back with eyes like blind folded.High density of Fiducials improve beam placement accuracy < 100nm May 2, 2012
  • 11. Navigation Features• The fiducial alignment points are the most utilized PDFD features as they are used on every edit. – The larger cell referred to as a global fiducial is placed with a 5-10mm pitch and provides the 1st level of navigation.. – The smaller local fiducial has a much higher pitch typically around 70u and is used to achieve sub 100nm accuracy.• Both have an array of contacts and diffusion that are exposed in the FIB and locked to CAD database of the chip M1 Contact Diffusion EDIT AREA Local Global May 2, 2012
  • 12. PDFD flow overview Discover bug Generate Isolate bug through or using DFT toSilicon production, customize functional debug or specific area or clkarrived system level pattern to region test highlight bug Navigate Implement Fix Confirm fix by Accurately & in layout and performing FIB Root cause bug generate new edit or rely on using probe and mask set re-simulation design data/tools May 2, 2012
  • 13. Circuit Edit Geometry and RC Challenges• The device scaling and layout efficiency improvements have reduced the physical debug tools ability to access transistors and metal signals: – 65nm to 32nm and below= meaningful reduction in white space. – This drives the FIB which has not been able to support the Nano. – Probe tools have been able to scale but at reduced productivity. – This limit in technology scaling has resulted in a greater need for features to be placed in silicon to enable access (i.e., PDFD). Gate 32nm FIB Box 45nm S/D 65nm 90nm M1 Poly Diffusion M1 130nm May 2, 2012
  • 14. Circuit Edit Geometry and RC Challenges• PDFD features provide guaranteed access to critical signals on the 2-3 lowest metals. Demo – Excellent correlation of FIB wire resistance: same ballpark. – Shown here on the left is a metal 1 PDFD connection point and on the right is an opportunistic metal 1. FIB Line FIB SiO2 FIB Via Diff STR Si ContactsGate M1 V1 M2 May 2, 2012
  • 15. PDFD Building Blocks• Basic building block features are designed to meet FIB rules  The features are created as cells that can get auto spread by CAD.• The Metal 1 connection pad provides safe access to signals  Optimized to keep the FIB via resistance close to real via resistance.  Cell area driven to min required – mostly meet projects cells.  [A] - Metal 1 area maximized to decrease contact resistance.• Cut cells provide guaranteed access to target signals.  [B] Metal 1 version typically used for active signals (not impact timing)  [C] Poly cut cell introduced when metal signals migrated from Al to Cu M1 Probe point Poly B C A M1 Cut option 2, 2012 May Poly cut option
  • 16. Design For Debug (Node Access Points)Auto placement tool canfirst place FIB (edit) nodeaccess points.Consider auto route inupper metal??Auto placement tool followup with placement of LVPaccess points.Layout showing Metal lineswithout PDFD coverage May 2, 2012 16
  • 17. Design For Debug (Spare Logic Gates) FIB-able Bonus Logic Diffo Designed in FIB Connection Pointso Designed in FIB Cut Points Diff Spare Logic Gate (3 input device) May 2, 2012
  • 18. Bonus Combinational and• Bonus logic and sequential Sequential Cells elements are added to a design to validate functions Input Inv Output and speed path bugs. – Typical cells include NAND, NOR, Buffer, latch, and Flop. – They can be used in dash. Cut• Chose cell from a standard library that has the ability to Ground Buf Output drive FIB metal ~100-200um. 1st Stage 2nd Stage – The cell is enlarged so that building block cut & connect cells can be inserted. – Input tied to ground. – output left floating. May 2, 2012
  • 19. Bonus Combinational and Sequential Cells• In the below example Signal-B is driving a buffer but now should get the NAND of Signal-A and Signal-B.• The FIB connects Signal-A and Signal-B which are then routed using FIB metal to the inputs of a bonus NAND. – The output of the NAND is connected back to Signal-B before the input to the next stage.• Once the routing and connecting are done the FIB will cut Signal-B as shown by the “X” and the FIB CUT cells at the NAND’s input. SignalA Bonus NAND SignalB May 2, 2012
  • 20. PDFD In Clock Elements• The ability to alter the timing of clocks is one of the main activities performed during speed path debug.  On current generation processes it has become essential to design PDFD features and accessibility into the clock elements themselves.• To provide FIB access in such small geometries clock elements are designed with increased spacings.  In this case a multi legged clock inverter can be trimmed successfully without damaging the unrelated adjacent device (Trim= ability to reduce device/driver size (strength) ).  For optical probe accessing the separation helps minimize cross talk. Insert Extra spacing inside the Clock cell to ensure FIB success. M1 Minimum spaced devices. Poly Diffusion v May 2, 2012 Unrelated Device Clock Inverter Unrelated Device Clock Inverter
  • 21. PDFD In Clock Elements• A second type of PDFD feature designed into clocks are mechanical probe points/FIB access cells. o A building block with connect cells is placed in free space. o The connection point allows for a FIB load capacitor to be connected thus delaying the signal. o It allows the output to be routed to another circuit using FIB. o Since design requires fills in empty areas for DFM – why not use it for PDFD? Large Clock inverter with Offset Diffusion M1 FIB Connect M1 Poly Diffusion May 2, 2012
  • 22. Insertion and Placement Methodologies • Historically each functional block owner has had to manually insert PDFD features resulting in wasted effort and inconsistent implementation. Some alternate options would be:  integrate features directly into cells from the common lib.  Another method : use of automated scripts and customized flows. – Can be developed by central CAD team into design flows – An insertion example is shown here where a script pre-placed bonus combinational and sequential cells as well as navigation cells into a block prior to the synthesis flow. – Flow customized to meet individual product’s needs for cell types, strength and pitches. For example: A product that utilizes proven design may decide to have larger pitches then a design with untested logic and verified circuits.• The bonus cell pitch is also determined by FIB routing technology and RC impact. SET D Q L CLR Q• The pitch for the fiducial [+] is based on FIB labs & navigation equipment accuracy. D SET Q L CLR Q May 2, 2012
  • 23. PDFD Utilization for Product Steppings• The production of a VLSI DIE might require multiple loops – So while DFM helps long term and HVM yield – current business need is for development and implementation of PDFD so that some of the below scenarios can be avoided.For e.g.$ A full stepping requires a complete set of masks- IMPACTs TTM, TPT & Cost.$ Products use dash or sub steppings which requires only few new backend masks = potential saving months/weeks of time – IMPACTs TTM, TPT & Cost.$ This reduces time to market as product can be held in the FAB at a specific layer until the new backend masks are generated – IMPACTS TTM.$ DFM : For simplistic timing or electrical issues a dash stepping typically can be performed at metal layers only since they do not require additional transistors. IMPACTS TTM, TPT & Cost.• The implementation of strategically placed PDFD cells allow these type of logic or complex bugs to be fixed in a dash. May 2, 2012
  • 24. Wait.. Did we miss something ?• With future Deep sub-micron design < 32nm – – How can one navigate to the exact location? – Is the ability to navigate to +/- 1 u good enough? – While metals width is less than 100nm: 1u means I will get to few signals but not to the specific one … not good.• So we: – innovated Global fiducials to get to the 1u Local Fiducials so as to facilitate reaching the exact signal.. – Even if it is deep inside the silicon. We have lots of challenges to get to the upper metals… across M1-M2 to M3-M4 .. Deeper? – Assuming design will budget the area for the Global fiducials.. (~10*10u) and for the local fiducials 1-2x basic cells size, CAD/SW automation will be needed to place the fiducials. • After all – it require 3 notable spots to find a new location PDFD - Leor Nevo, Intel Corporation May 2, 2012
  • 25. First Conclusion The transition from DFM to PDFD is due: While DFM ensures HVM a clean design is of equal importance. PDFD implementation in next generations VLSI products is a critical part of the overall DFD concept that must be employed by VLSI Product teams. Placing design access hooks into the silicon and mainly on critical nodes and cell types results in higher productivity and capability for physical debug tools which further enables faster TPT from 1st silicon to product. The utilization of PDFD results in fewer steppings or partials layers retrofits which translates to faster TTM. Having each new step already validated on silicon has a big upside potential to save millions of $$$ Caps Chip A Chip B Caps Flip-Chip Substrate May 2, 2012
  • 26. Second Conclusion Optimal coverage of PDFD will become even more critical as the semiconductor industry moves into the 45nm,32nm and below or else “no bug” guarantee is questionable.  It is clear that improvements are needed in scaling circuit edit equipments and material properties! Is that enough? A comprehensive PDFD strategy is required on future technologies if the industry is to continue to realize the benefits of performing in-silicon validation of speed, yield & logic bugs.  SO while old traditional DFM guides have became strict rules - a better use of the white space would be to add DFM fillers for DFD – Right ? This is true for front-side design as the same as Flip-chips. May 2, 2012
  • 27. Q&ALeor Nevo - Intel DFM-PDFD PE Thanks. Leor Nevo, Intel Corporation May 2, 2012
  • 28. References (Back-up)• There is a very small set of literature outside and projects are trying to do their best using DFT features to debug by the flip- chip pins - but it requires more and more area.• The Design Automation Conference, EDA, test and silicon debug companies announced the creation of the Design-for-Debug Consortium to address silicon debug challenges and collaboratively define the tools needed. PDFD - Leor Nevo, Intel Corporation May 2, 2012
  • 29. PDFD In Clock Elements• The ability to alter the timing of clocks is one of the main activities performed during speed path debug. – On current generation processes it has become essential to design PDFD features and accessibility into the clock elements themselves.• To provide FIB access in such small geometries clk cells must be designed with extra spacing between transistor’s. – In this case a multi legged clock inverter can be trimmed successfully without damaging the unrelated adjacent device.• For optical probe access the separation helps minimize cross talk. Insert Extra spacing inside the Clock cell to ensure FIB success. M1 Minimum spaced devices. Poly Diffusion v Unrelated Device May 2, 2012 Clock Inverter Unrelated Device Clock Inverter