K. Bharath Kanna, B.E Mech
(MEMS) are small integrated devices or
systems that combine electrical and
They range in size from the sub
micrometer level to the millimetres level.
The legs of a spider mite standing on
gears from a micro-engine.
A MEMS silicon motor together with a
strand of human hair.
Different names for MEMS
USA: Micro- Electro Mechanical
Europe: Micro system Technology.
Japan: Micro machines.
Micro fabrication Technology.
The electronics are fabricated using
integrated circuit (IC) process
The micromechanical components are
fabricated using compatible
Metals (gold, nickel, aluminum,
chromium, titanium, tungsten, platinum
There are three basic building blocks in MEMS
Deposition: The ability to deposit thin
film of material on substrate.
Lithography: To apply a patterned mask on
top of the films by photolithographic imaging.
Etching: To etch the films selectively to the
Deposition technology can be classified
into two groups:
Deposition by Chemical Reaction:
Chemical Vapor Deposition.
Lithography can be classified into two
There are two classifications for etching process:
Wet Etching: The material is dissolved in chemical
Dry Etching: the material is sputtered or dissolved
using reactive ions or vapour phase etchants.
Airbag Inflation system
Tire Pressure Sensor
Disposal Blood Pressure Sensor
Dynamic Stability Control in Cars
DMD chip in DLP Projectors
Minimize energy and materials use in
Improved accuracy and reliability
Increased selectivity and sensitivity
Farm establishment requires huge
Micro-components are Costly compare
Design includes very much complex
Prior knowledge is needed to integrate