BDISCOM RF Generators, Matching Networks

1. BDS.HF300 13.56MHz BDS.AM600
plasma RF generators family automatic matching network
NEW Your PLASMA supplier
BDS.HF300.BB
300W Black Box
PLASMA MATRIX
Features and benefit :
 Reliable design, high quality
Small and light RF Generators, Matching Network
 L=60 H=154 D=255 mm. Because of the size the unit is  Great flexibility and wide tuning range
 Compact size L=185mm, H=170mm, D=325mm,
particularly suited for bench top systems
weight 5Kg RF Accessories
 High efficiency class E RF power amplifier
 Full power 300 W, reflected power limit 75 W  All internal RF signal connection made by silver plated
 Conversion efficiency DC to RF >85% copper High Voltage Generators
 D15 type user connector  Fast tuning operation, typically <2s
 Standard analog 10V control signals suitable for  Flexible detector. Can be set to work with any type of
interfacing to any industrial PLC matching circuit topology
 Direct connection to BDS-HF300 or HF600 generator BDISCOM Srl
 Fully protected from excessive reflected power, PA over Via Mattei 8 - Giovenzano
voltage, over current, over temperature  Easy to interface with PLC
27010 Vellezzo Bellini (PV)
 Forced air cooling  Forced air cooling ITALY
 Ambient temperature at full power up to 40°C
Tel. +39(0)382.926987 Fax +39(0)382.923070
www.bdiscom.it - info@bdiscom.it
BDS-MI
Ultra compact custom designed matching unit
 Small footprint 110 x 138 x 60mm
BDS.HF300.AFP  Withstand up to 3000V
300W Active Front Pannel  Max load current 6A
 Forced air cooling. 24 Vdc fan
 Standard Rack 19” 3U=132.5 mm High  Dc bias readback
 Front panel user interface with LCD Display 4 lines 40  Input connector BNC F
chararacters  Output connector N type F
 RS 232 for remote control
 World Wide mains supply 95 to 250Vac 42-400Hz
 Full interfacing capability with matching units series
BDS-AMXXX
 Optional external module giving the possibility to
control 2 mass flow controllers and 1 vacuum gauge
RF Accessories
RF Switch RF/DC Filter RF Cables
 600W & 1000W coming soon

2. PLASMA MATRIX BDISCOM, after long experience in many fields of vacuum,
BDS.GLOW
x plasma and thin-film technology have decided to
RF 13.56 MHz treatment system High Voltage Glow Power Generator
introduce a new low pressure plasma treatment system.
PLASMA MATRIX is fully designed and manufactured by
BDISCOM with a completely new approach to deliver state
of the art equipment at a fraction of the competitor's
price. No technical compromise: modern RF (13.56MHz)
generator and matching unit, precision vacuum
measurement, micro mass flow controllers, complete and
flexible software. A unique feature for this class of
instruments is graphic display and touchscreen operation. Highlights and benefits
The system includes a 2 stage rotary pump.  Output Voltage: 150-2000 V or 300-4000 V
 Output Current: 1.6 A or 0.8 A
 Output Polarity: Negative or Positive
 High Efficiency, IGBT Inverter Design
 LCD display
 A/D Interface, RS232 Optional
LCD Touchscreen  Adjustable ARC Handling
Highlights and benefits User Interface  Dimensions = Standard 4U=177 mm High 19” Rack
 Easy to use
 304 SS Vacuum Chamber, L=120 D=220 H=87 (mm)
 Sample Tray 110 x 210 (mm) The BDS.GLOW is a DC High Voltage Power Supply,
 Built in robust 13.56 MHz RF Generator 200 Watt specifically designed for plasma Glow Discharge and
 Matching Network unit integrated in the process plasma Ion Source applications.
chamber It is available in 2000 or 4000V versions with 3kW
 Microprocessor control User Recipe power capacity full scale with positive or negative
 Up to 10 storable recipes output. Several protection and limiting circuits have
 User friendly LCD touch screen display been implemented to satisfy the most critical
 2 precision micro MFC (Mass Flow Controllers) for applications. The arc detection circuit senses plasma
gas delivery. Precise gas mixtures can be obtained arcing and immediately shuts down and restarts after a
 Built in Pirani gauge for precision pressure level user–defined dead time.
monitoring Over current, over voltage and over temperature
 Case Dimension L=410 D=450 H=200 (mm) circuits are included.
 Weight = 15 kg The high frequency inverter is equipped with the latest
 World Wide power supply 95 to 250 V, 42-60 Hz generation IGBT transistor obtaining a mains to output
single phase efficiency greater than 90%.
Interfacing with user application can be by analogue
user port or optional RS232.
The front panel is equipped with a LCD display and an
active front panel option is available for local manual
control.