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Piezo electric MEMS energy harvester-Creativeask
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Piezo electric MEMS energy harvester-Creativeask

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Let me describe fabrication and characterization of a significantly improved version of a MEMS-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. The …

Let me describe fabrication and characterization of a significantly improved version of a MEMS-based PZT/PZT thick film bimorph vibration energy harvester with an integrated silicon proof mass. The main advantage of bimorph vibration energy harvesters is that strain energy is not lost in mechanical support materials since only PZT is strained, and thus it has a potential for significantly higher output power. An improved process scheme for the energy harvester resulted in a robust fabrication process with a record high fabrication yield of 98.6%. Moreover, the robust fabrication process allowed a high pressure treatment of the screen printed PZT thick films prior to sintering, improving the PZT thick film performance and harvester power output reaches 37.1 μW at 1 g.r description goes here

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  • 1. Piezoelectric MEMS Energy Harvesters Integrating MEMS piezoelectric energy harvestingIntegrating MEMS piezoelectric energy harvesting ASHIK.S.R ashikask@live.com ELECTRONICS CENTRAL POLYECHNIC COLLEGE. THIRUVANANTHAPURAM In association with MCEAIn association with MCEA ©ask creative’s™
  • 2. IntroductionIntroduction 03/17/14 tangibility by ask™ 2
  • 3. Wireless sensor node anatomyWireless sensor node anatomy 03/17/14 tangibility by ask™ 3
  • 4. MEMS piezoelectric energyMEMS piezoelectric energy harvestersharvesters Silicon Chip is 1.3 cm square. Resonance Frequencies Of Devices Ranged From 31–232Hz 03/17/14 tangibility by ask™ 4
  • 5. Printed energy storage materialsPrinted energy storage materials Used for printng Capacitors, baXeries, magnets, masses, & Thermoelectric materials Polymer Resin Add Active Particles Ink 03/17/14 tangibility by ask™ 5
  • 6. Printed energy storage materialsPrinted energy storage materials 03/17/14 tangibility by ask™ 6
  • 7. Printing capacitor onto harvesterPrinting capacitor onto harvester Piezoelectric beam Printed capacitor Electron leads & Bond pads 03/17/14 tangibility by ask™ 7
  • 8. Optimization: harvester resistive loadOptimization: harvester resistive load Voltageofharvester P = Voltage2 /Resistance, 03/17/14 tangibility by ask™ 8
  • 9. Power conditioning circuitsPower conditioning circuits Energy harvesterEnergy harvester Power Conditioning Power Conditioning LoadLoad VOLTAGE & CURRENT ARE OUT OF PHASE  LOSS OF POWER Voltage and Current are out of phaseVoltage and Current are out of phase Voltage and Current are in phaseVoltage and Current are in phase 03/17/14 tangibility by ask™ 9
  • 10. Optimization: harvester+power conditioningOptimization: harvester+power conditioning THIS IS THE FULL COUPLED ELECTROMECHANICAL SYSTEM INPUTS: Frequency Acceleration Available volume Material properties OUTPUTS: Efficiency Power output Optimal harvester Geometry Optimal Circuit component values 03/17/14 tangibility by ask™ 10
  • 11. Power supply module optimization resultsPower supply module optimization results 03/17/14 tangibility by ask™ 11
  • 12. Power supply module optimization resultsPower supply module optimization results 03/17/14 tangibility by ask™ 12
  • 13. Why print mass? 1.Decrease freq. 2.Increase power 3.Customize freq. 4.Integration Successfully printed mass on 6 released beams with no ‘causalities' 2.5mm 1.5mm 1.5mm 1.5mm 03/17/14 tangibility by ask™ 13
  • 14. SummarySummary Initial proof of integration concept: could not electrically connectInitial proof of integration concept: could not electrically connect Optimized harvester to improve power outputOptimized harvester to improve power output Optimized harvester + power conditioning: full coupled system Optimized harvester + power conditioning: full coupled system Optimization results tell us how to build full integrated power supply systemOptimization results tell us how to build full integrated power supply system Energy storage can be printed onto harvester or package in novel ways Energy storage can be printed onto harvester or package in novel ways 03/17/14 tangibility by ask™ 14
  • 15. Thank YouThank You 03/17/14 tangibility by ask™ 15 ©ask creative’s™