Nano scholar february08_presentation
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Nano scholar february08_presentation

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Presentation made at the end of the year long Nanoscholar program at Sematech Austin.

Presentation made at the end of the year long Nanoscholar program at Sematech Austin.

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    Nano scholar february08_presentation Nano scholar february08_presentation Presentation Transcript

    • Process Integration Asad Mohammed Process Integration Intern – Photolithography Rich Berger - ATDF
    • Outline
      • Process Integration
      • 3 mask capacitor reticle
      • Layout
      • Fabrication Cycle
      • E-Testing
      • 3D Reticle
      • Typical Work Day
    • Process Integration Layout Mask(Reticle) Preparation Recipe Wafer Fabrication Testing Specifications
    • 3 mask Capacitor Reticle– 871AZ Dielectric constant  PolyGate SiO 2 Si Substrate Area A -Q E Separation d Area A +Q V
    • 861  871 Changes oxide Floating gate Control gate N-Si Substrate
      • Circle  Square
      • Backside contact  Top side contact
      More structures Dummy Fill Novel structures
      • 1E-7 ~ 5E-4
    • 871AZ Layout and Fabrication Underlap Structures Overlap Structures MultiDot Structures Transistors CV structures Dummy Fill Transistors CV structures FG Caps with sub FG Caps w/o sub Underlap Structures Overlap Structures MultiDot Structures Transistors CV structures Overlap Structures MultiDot Structures Transistors CV structures Large Caps UHFs Exposure Etch Deposition
    • Test Wafers 7082901-7082904 7082902-02; Scratch probably due to wanding Close up without flash 7082904-01; Backside scratch
    • Electrical Testing Results
    • 3D Reticle Multiple Wafer to Wafer Direct Copper Bonding Donor wafer aligned to substrate wafer
    • 3D Die Layout
      • Via Density Structures
      • Combs W and W/O Vias
      • Vias on metal
      • All levels perfectly mirrored
      • Dummy fill
    • 3D Reticle Fab
    • Other Reticles Worked on
      • Multilevel Flash
      • – extra metal layer
      • E-Beam
      • – Serps and Combs
    • Acknowledgements
      • ACC
      • ATDF
      • Rich Berger
      • Romelia Distasio Kenneth Matthews
      • Bruce Wilks
      • Gregory Smith