Thin Film PZT for Semiconductor Application Trends & Technology 2013 Report by Yole Developpement

Like this? Share it with your network

Share

Thin Film PZT for Semiconductor Application Trends & Technology 2013 Report by Yole Developpement

  • 1,041 views
Uploaded on

From FeRAM to Integrated Passive Devices (IPDs): will MEMS applications be the driver for future growth of thin film PZT? ...

From FeRAM to Integrated Passive Devices (IPDs): will MEMS applications be the driver for future growth of thin film PZT?




The most promising effect of thin film PZT for future aplications would certainly be its piezoelectric effect

In September 2013, EPSON has announced its next generation inkjet technology, PrecisionCore, introducing for the first time MEMS inkjet heads manufactured with thin film PZT technology. This announcement has been highly publicized: First, thin film PZT MEMS applications are now on the market, proving the reliability and maturity of this technology! Second, more inkjet head players will soon follow.

Thin film piezoelectric materials are gaining increasingly more importance within the MEMS industry. Although semiconductor manufacturing companies are historically reluctant to introduce such exotic materials into their production lines, every major MEMS foundry nowadays is working on the implementation and qualification
of piezoelectric thin film in their MEMS manufacturing processes.

Lead zirconium titanate or PZT (Pb[ZrxTi1-x]O3 with 0≤x≤1)) is a very interesting ferroelectric material. Depending on its composition, it has the advantage of combining 3 different material properties: high dielectric constant, pyroelectric effect and piezoelectric effect.

Its high dielectric constant property is still extensively being used with the integration of thin film PZT in Integrated Passives Devices (IPDs) and to a lesser extent in Ferroelectric memories (FeRAM). These have been the 2 leading applications for thin film PZT for many years. NXP Semiconductors and STMicroelectronics dominate this IPD market.

The pyroelectric effect of PZT is today being used by Pyreos for thin film PZT based uncooled Infrared detectors, although this thin film PZT based technology remains quite marginal in this field.

The most promising effect of PZT for future applications would certainly be its piezoelectric effect.

Companies like Wavelens and PoLight are extensively working on the introduction of their autofocus based products to the market using thin film PZT technology. This profusion of new MEMS applications using thin film PZT technology is just beginning.



The roadmap for high volume production is still to be built

The main difficulty for thin film PZT technology is the integration of this exotic material into a robust and reproducible process flow. There are major technological challenges associated with thin film PZT integration into a product :

Deposition
Etching
Process monitoring
Test
Reliability

These are complex topics and although many R&D efforts have been made so far by labs, equipment and material suppliers, and device manufacturers, some work remains to be done to achieve robust products for high volume production.
More information on that report at http://www.i-micronews.com/reports/Thin-Film-PZT-Semiconductor-Trends-Update/1/404/

More in: Technology , Business
  • Full Name Full Name Comment goes here.
    Are you sure you want to
    Your message goes here
    Be the first to comment
    Be the first to like this
No Downloads

Views

Total Views
1,041
On Slideshare
894
From Embeds
147
Number of Embeds
4

Actions

Shares
Downloads
35
Comments
0
Likes
0

Embeds 147

http://www.i-micronews.com 117
http://cluster013.ovh.net 26
http://axtorm-develo.fr 3
http://www.axtorm-develo.fr 1

Report content

Flagged as inappropriate Flag as inappropriate
Flag as inappropriate

Select your reason for flagging this presentation as inappropriate.

Cancel
    No notes for slide

Transcript

  • 1. Thin film PZT for Semiconductor Application trends &Technology update (FeRAM, IPDs and MEMS) © 2013
  • 2. Table of contents (1/2) • • • • • • Glossary Motivations and objectives of the report Who should be interested in this report ? Companies cited in this report Definitions, limitations and methodology Executive summary – Key facts & trends – 2013-2018 market forecast in wafers (6’’ eq) – 2013-2018 market forecast by deposition techniques in wafers (6’’ eq) – Key thin film PZT market players – Main R&D Labs active in thin film PZT • Focus on Ferroelectric definitions and effect – – – – Ferroelectric definition Piezoelectric and ferroelectric materials definition Piezoelectric effect definition PZT characteristics • Lattice properties • Piezoelectric and Dielectric properties • Figures of merit, coefficients – Piezoelectric technologies : thin film, bulk or gauge – PZT applications domains © 2013• 2 Copyrights © Yole Developpement SA. All rights reserved. • Thin film PZT applications – FeRAM • Technology and Market description • Players • Research – Integrated Passives Devices (IPDs) • Comparison between thin film/thick film IPD technology • Trends for thin film Ferroelectric IPDs – MEMS • • • • • • • • Inkjet heads Inertial MEMS (acceleros, gyros) Uncooled IR detectors Autofocus RF-MEMS Ultrasound sensors & transducers Energy harvesting – energy scavengers Micromirrors
  • 3. Table of contents (2/2) • Market analysis for thin film PZT applications – – – – – – – Thin film PZT applications Thin film Ferroelectric functions & materials Players roadmap – expected year for market entry 2013-2018 market forecast in wafers (6’’ eq) 2013-2018 market forecast in units 2013-2018 market forecast in US$ 2013-2018 market forecast by deposition techniques in wafers (6’’ eq) • Thin film PZT market players – – – – Key industrial market players per application Thin film PZT thickness per application Key industrial market players positioning MEMS Foundries positioning • Thin film piezoelectric deposition techniques & materials – – – – – – © 2013• 3 Processes Equipment manufacturers examples CSD techniques Focus on Sol-Gel process Thin film PZT deposition techniques comparison Thin film Ferroelectric functions & materials Copyrights © Yole Developpement SA. All rights reserved. • Thin film PZT manufacturing challenges : – – – – – Which technology for which application ? Advantages & drawbacks Material challenges Lifetime – reliability Regulations related to Lead • R&D European projects on thin film PZT – PiezoVolume – Lab4MEMS – EPAMO • Other Piezoelectric materials • General Conclusions
  • 4. Motivations and objectives of the report • We have decided to make a technology and market report on thin film PZT applications for the following reasons: – – – • Thin film PZT is used for FeRAM and IPDs Growing interest for thin film PZT observed in the industry, due to its very promising piezoelectric properties EPSON has released its 2nd generation Ink Jet head based on thin film PZT technology this year, proving the maturity of thin film PZT technology and thus opening the path to new MEMS products shortly The objectives of the reports are : – Provide an overview of thin film PZT applications • • – Provide market data and forecasts on thin film PZT applications • • • – 4 Production forecast 2013-2018 in number of wafers (6’’ eq) Production forecast 2013-2018 by deposition techniques in number of wafers (6’’ eq) Players roadmap, expected year for market entry Analyze the deposition techniques (Sputtering, Sol-Gel) trends • • • © 2013• Description of the key thin film PZT applications Who are the current and future industrial thin film PZT users in each application Global deposition techniques and materials trends Deposition techniques used in each application and for each manufacturer Manufacturing challenges related to each deposition technique Copyrights © Yole Developpement SA. All rights reserved.
  • 5. PZT : application domains PZT EFFECTS High K Piezoelectric Strain gauge Bulk ceramic & Thick film TECHNOLOGIES Thin film Thin film Sensors & Actuators IPDs Thin film Ink jet heads FeRAM (+ hysteresis effect) HDD actuators … - Autofocus - Energy harvesting - Micromirrors - MEMS speakers - Drones - Microphones - MEMS speakers - Inertiel MEMS (gyros,…) - Ultrasound sensors & transducers © 2013• 5 Copyrights © Yole Developpement SA. All rights reserved. Bulk ceramic APPLICATIONS - Ink jet heads - Deformable Mirrors for adaptive optics Pressure sensors … Pyroelectric IR detectors IR detectors Thin film PZT applications
  • 6. Year of introduction of thin film PZT devices MEMS FeRAM IPDs FeRAM … Timeline 1980 © 2013• 6 … 2010 Copyrights © Yole Developpement SA. All rights reserved. 2015 2020
  • 7. Key thin film PZT market players Fabless & Devices manufacturers Equipment and materials R&D labs and IP provider Foundries © 2013• 7 Copyrights © Yole Developpement SA. All rights reserved.
  • 8. Key Thin film PZT Market players FeRAM IPDs MEMS Fabless & IDMs Others detailed in the report… Foundries © 2013• 8 Copyrights © Yole Developpement SA. All rights reserved.
  • 9. Main R&D Labs Active in thin film PZT IPDs MEMS Others (FeRAM, optical, Photovoltaic..) © 2013• 9 Copyrights © Yole Developpement SA. All rights reserved.
  • 10. Thin film PZT Deposition Techniques Equipment & Material manufacturer examples Sol-Gel Sputtering Europe North America Asia Primaxx CSD - LSMCD © 2013• 10 Copyrights © Yole Developpement SA. All rights reserved. Ulvac PVD
  • 11. Our latest market reports… MEMS Packaging Market & Technology Trends 6 & 6 mm © 2010 Copyrights © Yole Développement SA. All rights reserved. ~100 sq mm ~25 sq mm ~125 sq mm 3D Glass & Silicon interposers - 2012 Report N o k i a ~100 sq mm Flip-chip 2013 Report ~25 sq mm 6 & 6 mm 1999 - today 2006 1995 1996-2002 1999 - today 2006 SMT SOIC & Die Down Stacked Die QFN Sidebraze DIP Plastic PDIP SMT SOIC & Die Down Stacked Die QFN MEMS Front End Manufacturing Thin Wafer Handling Deep RIE Flexible & Printed Electronics © 2013• 11 Copyrights © Yole Developpement SA. All rights reserved. Ferro-Electric Thin Films
  • 12. Yole Activities MEDIA REPORTS CONSULTING News portal/Technology magazines/ Webcasts/Communication services Market & technology/Patent Investigation/Reverse costing Market research/Technology & Strategy/Patent Investigation/ Reverse costing www.yole.fr YOLE FINANCE M&A/ Due Diligence/ Fundraising/ Technology brokerage www.yolefinance.fr SISTER COMPANY Reverse engineering & costing/ Cost simulation tools © 2013• 12 Copyrights © Yole Developpement SA. All rights reserved.
  • 13. For More Information… Please take a look at our websites: www.yole.fr Yole Développement corporate website www.i-micronews.com News Portal - free online registration to our publications www.systemplus.fr Sister company; expert in teardown & reverse costing analysis www.yolefinance.com Separate Yole business unit dedicated to financial services Follow us on © 2013• 13 Copyrights © Yole Developpement SA. All rights reserved.
  • 14. Our Offices & Contact Information Europe Office • Yves Devigne, Europe Business Development Manager, Cell: 33 6 75 80 08 25 - Email: devigne@yole.fr • David Jourdan, Headquarter Sales Coordination & Customer Service, Tel: 33 472 83 01 90, Email: jourdan@yole.fr USA Office • Michael McLaughlin, Business Development Manager, Phone: (650) 931 2552 - Cell: (408) 839 7178 - Email: mclaughlin@yole.fr • Jeff Edwards, Sales Associate, Yole Inc., Cell: (972) 333 0986- Email: edwards@yole.fr Japan Office • For custom research: Yutaka Katano, General Manager, Yole Japan & President, Yole K.K. Phone: (81) 362 693 457 - Cell: (81) 80 3440 6466 - Fax: (81) 362 693 448 - Email: katano@yole.fr • For reports business: Takashi Onozawa, Sales Asia & General Manager, Yole K.K. Email: onozawa@yole.fr Korea Office • Hailey Yang, Business Development Manager Phone : (82) 2 2010 883 - Cell: (82) 10 4097 5810 - Fax: (82) 2 2010 8899 - Email: yang@yole.fr © 2013• 14 Copyrights © Yole Developpement SA. All rights reserved.