Ferry Postma - LioniX

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Ferry Postma - LioniX

  1. 1. LioniX BV PO Box 456 7500 AH Enschede the Netherlands Phone: +31 (0)53 489 3827 Fax: +31 (0)53 489 3601 Mail: info@lionixbv.com Website: www.lionixbv.com Our chips enable your products Create innovative solutions based onemerging micro- and nano technologies Our chips enable your products 1
  2. 2. Who we are ?LioniX is a leading provider in co-developmentof products and manufacturing of componentsbased on cutting-edge micro/nano technologyfor its (OEM) customers Our chips enable your products 2
  3. 3. OverviewFounded in 2001Located at the Businessand Science Park(Enschede)> 50% PhD Our chips enable your products 3
  4. 4. Panthera GroupInfrastructure– LioniX Design to manufacturing– iX-factory (Small) volume production– PhoeniX Software Software (simulation and infrastructure)– OctroliX IP– SurfiX Surface functionalizationProduct Market Combinations– XiO Photonics Visible light TriPleXTM applications– Chemtrix Chemical microreactors– Satrax Phased array antenna systems– Capilix CE sensor technology– PLC diagnostics Bio Sensing– SmartTip Smart Probing Our chips enable your products
  5. 5. Global presenceEstablished worldwidecustomer baseRepresentatives in UK,Scandinavia, Israel,USA, Asia A1 Our chips enable your products 5
  6. 6. Slide 5A1 specify locations in Asia Arne Leinse; 28-10-2011
  7. 7. What we do?LioniX provides ‘design to manufacturing’ and‘horizontal integration’ by partnering withfoundries, suppliers of complementary technologiesand R&D institutesLioniX specializes in applications of integratedoptics, microfluidics and optofluidics includingsurface functionalizationLioniX offers small + medium volumemanufacturing, second sourcing as well as transferto medium + high volume manufacturingLioniX focuses on Life Sciences, Telecom, Datacom,Industrial Process Control and Space Our chips enable your products 6
  8. 8. Design to manufacturingKnow-how Demonstration Optimization Stabilization Realization Production phase phase phase phase phase phase* Idea * Feasibility * Product design * Process flow * Yield analysis * Fabrication* Market Study * Preliminary * Fabrication * Manufacturable monitoring* Preliminary design plan design product specs * Preliminary * Product * Technical* Proof of process specs specifications principle * Shortloops * Quality criteria * Testruns PRODUCT PRODUCT FABRICATION MASS DEVELOPMENT DEVELOPMENT FABRICATION RUNS RUNS concept prototype A ‘0 series demonstrator prototype B product Our chips enable your products 7
  9. 9. Slide 7A2 update photos Arne Leinse; 28-10-2011
  10. 10. Foundry servicesMEMS foundry services (micro/nanobased films, structures andcomponents) Our chips enable your products
  11. 11. ManufacturingPrototyping and small-medium volume production at: Professional state-of-the-art micro/nano facilities of the MESA+ NanoLab Private facilities for our core technologies iX-factory GmbH (Dortmund, Germany) Our chips enable your products 9
  12. 12. What we do?LioniX provides ‘design to manufacturing’ and‘horizontal integration’ by partnering withfoundries, suppliers of complementary technologiesand R&D institutesLioniX specializes in applications of integratedoptics, microfluidics and optofluidics includingsurface functionalizationLioniX offers small + medium volumemanufacturing, second sourcing as well as transferto high volume manufacturingLioniX focuses on Life Sciences, Telecom, Datacom,Industrial Process Control and Space Our chips enable your products 10
  13. 13. Core competences Our chips enable your products
  14. 14. Integrated Optics Si3N4 waveguides between SiO2 Cladding layers.- Nanometer Thickness accuracy,- Å Roughness – Low Pressure Chemical Vapor Deposition – Photolithography – Reactive Ion Etching Our chips enable your products
  15. 15. LPCVD: Low Pressure Chemical Vapour DepositionSilicon: Silane (SiH4)Silicon Oxide: Silane+O2 Or TEOSSi(OC2H5)4Silicon Nitride: Silane+ NH3 Our chips enable your products
  16. 16. RIE Etching Our chips enable your products
  17. 17. Optical connectionsWet etching with crystalline anisotropy Our chips enable your products
  18. 18. Xio PhotonicsTriplex-Waveguide based Beam Combiner Our chips enable your products
  19. 19. Our chips enable your products 17
  20. 20. 10 Micron accuracy Micro-FluidicsSub 10nmRoughness Our chips enable your products
  21. 21. On-line water analysis byCapillary Electrophoresis capacitive conductivity sensor Our chips enable your products
  22. 22. Micro reactor technology• Total solutions for the in the field of micro reactor technology• Pharmaceutical and fine chemical industry• Systems based on microfluidic glass chips Our chips enable your products 20
  23. 23. Opto-FluidicsLight-Fluid interactions (Sensing / Excitation) Our chips enable your products
  24. 24. Surface Modification Our chips enable your products
  25. 25. Connecting Micro-Fluidics to Micro- Optics to realize Opto-FluidicsBonding of Micro-Optic chip to MicroFluidic chip.Si/Si Glass/Glass or Si/Glass Bonding.Direct / Anodic / EutecticBonding requires nm roughness. Our chips enable your products
  26. 26. CMP (Chemical Mechanical Polishing) prior to bonding10 Nm sized particles andFluor polish the surface tonm roughness Our chips enable your products
  27. 27. Opto-Fluidic Life Marker Chip Our chips enable your products
  28. 28. Thank you for your attention. Questions? Our chips enable your products

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